DE3760173D1 - Process for the plasma purification of divided silicon - Google Patents

Process for the plasma purification of divided silicon

Info

Publication number
DE3760173D1
DE3760173D1 DE8787400022T DE3760173T DE3760173D1 DE 3760173 D1 DE3760173 D1 DE 3760173D1 DE 8787400022 T DE8787400022 T DE 8787400022T DE 3760173 T DE3760173 T DE 3760173T DE 3760173 D1 DE3760173 D1 DE 3760173D1
Authority
DE
Germany
Prior art keywords
divided silicon
plasma purification
purification
plasma
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8787400022T
Other languages
English (en)
Inventor
Jacques Amouroux
Daniel Morvan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PHOTOWATT INTERNATIONAL S.A., RUEIL MALMAISON, FR
Original Assignee
Rhone Poulenc Chimie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rhone Poulenc Chimie SA filed Critical Rhone Poulenc Chimie SA
Application granted granted Critical
Publication of DE3760173D1 publication Critical patent/DE3760173D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
DE8787400022T 1987-01-08 1987-01-08 Process for the plasma purification of divided silicon Expired DE3760173D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19870400022 EP0274283B1 (de) 1987-01-08 1987-01-08 Verfahren zur Plasmareinigung von zerkleinertem Silizium

Publications (1)

Publication Number Publication Date
DE3760173D1 true DE3760173D1 (en) 1989-06-29

Family

ID=8198176

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787400022T Expired DE3760173D1 (en) 1987-01-08 1987-01-08 Process for the plasma purification of divided silicon

Country Status (2)

Country Link
EP (1) EP0274283B1 (de)
DE (1) DE3760173D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3205352B2 (ja) * 1990-05-30 2001-09-04 川崎製鉄株式会社 シリコン精製方法及び装置
US5753567A (en) * 1995-08-28 1998-05-19 Memc Electronic Materials, Inc. Cleaning of metallic contaminants from the surface of polycrystalline silicon with a halogen gas or plasma
FR2772741B1 (fr) * 1997-12-19 2000-03-10 Centre Nat Rech Scient Procede et installation d'affinage du silicium
RU2159213C2 (ru) * 1999-02-25 2000-11-20 Абдюханов Мансур Абдрахманович Способ очистки кремния и устройство для его осуществления
WO2006059632A1 (ja) * 2004-11-30 2006-06-08 Space Energy Corporation 多結晶シリコンインゴットの製造方法
FR2963337B1 (fr) * 2010-07-30 2013-03-01 Commissariat Energie Atomique Recyclage de boues de sciage de silicium pour la preparation de lingots ou de plaques par plasma thermique

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1374335A (fr) * 1962-12-13 1964-10-09 Electronique & Physique Dispositif pour fabriquer une lame en matériau à grande pureté
FR2438499A1 (fr) * 1978-10-13 1980-05-09 Anvar Procede de purification et d'elaboration de cristaux par fusion de zone utilisant un jet de plasma et installation correspondante
DE2924584A1 (de) * 1979-06-19 1981-01-15 Straemke Siegfried Verfahren zur herstellung von silicium fuer solarzellen
FR2487808A1 (fr) * 1980-08-01 1982-02-05 Electricite De France Procede et dispositif d'elimination du bore dans le silicium par fusion de zone sous plasma reactif
CA1147698A (en) * 1980-10-15 1983-06-07 Maher I. Boulos Purification of metallurgical grade silicon

Also Published As

Publication number Publication date
EP0274283B1 (de) 1989-05-24
EP0274283A1 (de) 1988-07-13

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PHOTOWATT INTERNATIONAL S.A., RUEIL MALMAISON, FR

8328 Change in the person/name/address of the agent

Free format text: WEINMILLER, J., DIPL.-ING., PAT.-ANW., 8133 FELDAFING