DE3676503D1 - Grobstellanordnung. - Google Patents

Grobstellanordnung.

Info

Publication number
DE3676503D1
DE3676503D1 DE8686109284T DE3676503T DE3676503D1 DE 3676503 D1 DE3676503 D1 DE 3676503D1 DE 8686109284 T DE8686109284 T DE 8686109284T DE 3676503 T DE3676503 T DE 3676503T DE 3676503 D1 DE3676503 D1 DE 3676503D1
Authority
DE
Germany
Prior art keywords
coarse
order
coarse order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686109284T
Other languages
English (en)
Inventor
Gerd Karl Dr Binnig
Christoph Emanuel Gerber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3676503D1 publication Critical patent/DE3676503D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Robotics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Optics & Photonics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
DE8686109284T 1986-07-08 1986-07-08 Grobstellanordnung. Expired - Lifetime DE3676503D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP86109284A EP0252174B1 (de) 1986-07-08 1986-07-08 Grobstellanordnung

Publications (1)

Publication Number Publication Date
DE3676503D1 true DE3676503D1 (de) 1991-02-07

Family

ID=8195252

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686109284T Expired - Lifetime DE3676503D1 (de) 1986-07-08 1986-07-08 Grobstellanordnung.

Country Status (5)

Country Link
EP (1) EP0252174B1 (de)
JP (1) JPS6319745A (de)
BR (1) BR8703091A (de)
CA (1) CA1270133A (de)
DE (1) DE3676503D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3822504A1 (de) * 1988-07-03 1990-01-04 Kernforschungsanlage Juelich Mikromanipulator
US4925139A (en) * 1989-04-28 1990-05-15 International Business Machines Corporation Mechanical stage support for a scanning tunneling microscope
JP3409298B2 (ja) * 1997-10-07 2003-05-26 日立建機株式会社 移動ステージ装置とこの移動ステージ装置を備えた走査型プローブ顕微鏡
AT520313B1 (de) * 2017-09-13 2019-03-15 Anton Paar Gmbh Handhabungsvorrichtung zum Handhaben einer Messsonde

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407018A (en) * 1964-01-30 1968-10-22 Electro Optical Systems Inc Two-axis angular positioning apparatus for adjusting the position of an optical element
DE2542354C2 (de) * 1975-09-19 1977-11-03 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlgerät mit einem Objekthalter
DE2800340C2 (de) * 1978-01-04 1984-10-31 MTA Központi Fizikai Kutato Intezete, Budapest Einstellvorrichtung, insbesondere für optische Messungen

Also Published As

Publication number Publication date
BR8703091A (pt) 1988-03-08
JPS6319745A (ja) 1988-01-27
JPH035021B2 (de) 1991-01-24
CA1270133A (en) 1990-06-12
EP0252174A1 (de) 1988-01-13
EP0252174B1 (de) 1991-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition