DE3674150D1 - Koaxialer messfuehler. - Google Patents

Koaxialer messfuehler.

Info

Publication number
DE3674150D1
DE3674150D1 DE8686113230T DE3674150T DE3674150D1 DE 3674150 D1 DE3674150 D1 DE 3674150D1 DE 8686113230 T DE8686113230 T DE 8686113230T DE 3674150 T DE3674150 T DE 3674150T DE 3674150 D1 DE3674150 D1 DE 3674150D1
Authority
DE
Germany
Prior art keywords
coaxial probe
coaxial
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686113230T
Other languages
English (en)
Inventor
Robert H Cadwallader
Robert J Celestino
Charles P Coughlin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3674150D1 publication Critical patent/DE3674150D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
DE8686113230T 1985-10-28 1986-09-26 Koaxialer messfuehler. Expired - Fee Related DE3674150D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/792,335 US4764722A (en) 1985-10-28 1985-10-28 Coaxial probe

Publications (1)

Publication Number Publication Date
DE3674150D1 true DE3674150D1 (de) 1990-10-18

Family

ID=25156543

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686113230T Expired - Fee Related DE3674150D1 (de) 1985-10-28 1986-09-26 Koaxialer messfuehler.

Country Status (4)

Country Link
US (1) US4764722A (de)
EP (1) EP0222119B1 (de)
JP (1) JPS6337261A (de)
DE (1) DE3674150D1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5917707A (en) * 1993-11-16 1999-06-29 Formfactor, Inc. Flexible contact structure with an electrically conductive shell
JPH01171367U (de) * 1988-05-24 1989-12-05
JPH0527811Y2 (de) * 1989-04-26 1993-07-15
US5517124A (en) * 1989-07-26 1996-05-14 Extrude Hone Corporation Stylus probe for measuring workpiece surface characteristics
US5189377A (en) * 1990-09-04 1993-02-23 Extrude Hone Corporation Method and apparatus for co-ordinate measuring using a capacitance probe
US5136237A (en) * 1991-01-29 1992-08-04 Tektronix, Inc. Double insulated floating high voltage test probe
US5175493A (en) * 1991-10-11 1992-12-29 Interconnect Devices, Inc. Shielded electrical contact spring probe assembly
US5512838A (en) * 1992-09-03 1996-04-30 Hewlett-Packard Company Probe with reduced input capacitance
US5367254A (en) * 1993-02-01 1994-11-22 International Business Machines Corporation Test probe assembly using buckling wire probes within tubes having opposed overlapping slots
US7200930B2 (en) * 1994-11-15 2007-04-10 Formfactor, Inc. Probe for semiconductor devices
US7084656B1 (en) * 1993-11-16 2006-08-01 Formfactor, Inc. Probe for semiconductor devices
EP0685742B1 (de) * 1994-06-01 2001-01-03 International Business Machines Corporation Schnelles Koaxialkontakt- und Signalübertragungselement
US6414504B2 (en) * 1999-05-20 2002-07-02 Delaware Capital Formation, Inc. Coaxial tilt pin fixture for testing high frequency circuit boards
US6384614B1 (en) * 2000-02-05 2002-05-07 Fluke Corporation Single tip Kelvin probe
US20050162177A1 (en) * 2004-01-28 2005-07-28 Chou Arlen L. Multi-signal single beam probe
FR2885446B1 (fr) * 2005-05-09 2007-07-20 St Microelectronics Sa Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique
US8174276B2 (en) * 2008-05-22 2012-05-08 Texas Instruments Incorporated Coaxial four-point probe for low resistance measurements
EP2144338A1 (de) 2008-07-11 2010-01-13 Tyco Electronics Nederland B.V. Koaxialsonde
EP2180326B1 (de) 2008-10-24 2017-05-03 Tyco Electronics Services GmbH Testsonde
TW201038953A (en) * 2009-04-21 2010-11-01 Inventec Appliances Corp Portable system with measuring function and measuring method thereof
CN102004173B (zh) * 2009-09-01 2014-02-19 鸿富锦精密工业（深圳）有限公司 探针
JP2012083234A (ja) * 2010-10-13 2012-04-26 Hioki Ee Corp プローブおよび測定装置
USRE46958E1 (en) 2011-10-24 2018-07-17 Ardent Concepts, Inc. Controlled-impedance cable termination using compliant interconnect elements
USRE46936E1 (en) 2011-10-24 2018-07-03 Ardent Concepts, Inc. Controlled-impedance cable termination using compliant interconnect elements
USRE47459E1 (en) 2011-10-24 2019-06-25 Ardent Concepts, Inc. Controlled-impedance cable termination using compliant interconnect elements
JP6118710B2 (ja) * 2013-10-30 2017-04-19 日本電子材料株式会社 プローブカード
TWI577993B (zh) * 2015-08-27 2017-04-11 旺矽科技股份有限公司 探針裝置及其同軸探針
CN113039442A (zh) 2018-11-19 2021-06-25 株式会社村田制作所 探头

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2617853A (en) * 1949-01-07 1952-11-11 Bell Telephone Labor Inc Method of and system for measuring impedance mismatch
US3562643A (en) * 1969-01-21 1971-02-09 Ostby & Barton Co Spring loaded test probe assembly
US3731191A (en) * 1969-12-22 1973-05-01 Ibm Micro-miniature probe assembly
SU481546A1 (ru) * 1972-09-04 1975-08-25 Предприятие П/Я Х-5737 Зондовое устройство
US3806801A (en) * 1972-12-26 1974-04-23 Ibm Probe contactor having buckling beam probes
JPS5363582A (en) * 1976-11-18 1978-06-07 Mitsubishi Electric Corp Proximity detector
US4133715A (en) * 1977-03-29 1979-01-09 Beloit Corporation Headbox and holders for floating slice chamber dividers
FR2477324A1 (fr) * 1980-02-28 1981-09-04 Dassault Electronique Dispositif de contact electrique pour appareil de traitement de cartes electroniques
JPS57101769A (en) * 1980-10-30 1982-06-24 Everett Charles Inc Translation apparatus and test mount apparatus and manufacture of translation apparatus
US4423373A (en) * 1981-03-16 1983-12-27 Lecroy Research Systems Corporation Test probe

Also Published As

Publication number Publication date
US4764722A (en) 1988-08-16
EP0222119B1 (de) 1990-09-12
EP0222119A1 (de) 1987-05-20
JPS6337261A (ja) 1988-02-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee