DE3668051D1 - Sammelleitungsventil. - Google Patents
Sammelleitungsventil.Info
- Publication number
- DE3668051D1 DE3668051D1 DE8686906399T DE3668051T DE3668051D1 DE 3668051 D1 DE3668051 D1 DE 3668051D1 DE 8686906399 T DE8686906399 T DE 8686906399T DE 3668051 T DE3668051 T DE 3668051T DE 3668051 D1 DE3668051 D1 DE 3668051D1
- Authority
- DE
- Germany
- Prior art keywords
- manifold valve
- manifold
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/04—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves
- F16K11/044—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves with movable valve members positioned between valve seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0263—Construction of housing; Use of materials therefor of lift valves multiple way valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/2514—Self-proportioning flow systems
- Y10T137/2521—Flow comparison or differential response
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87153—Plural noncommunicating flow paths
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87676—With flow control
- Y10T137/87684—Valve in each inlet
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB858526566A GB8526566D0 (en) | 1985-10-29 | 1985-10-29 | Manifold assembly |
PCT/GB1986/000668 WO1987002750A1 (en) | 1985-10-29 | 1986-10-29 | A manifold assembly |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3668051D1 true DE3668051D1 (de) | 1990-02-08 |
Family
ID=10587373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686906399T Expired - Lifetime DE3668051D1 (de) | 1985-10-29 | 1986-10-29 | Sammelleitungsventil. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4869284A (de) |
EP (1) | EP0246266B1 (de) |
JP (1) | JPS63501587A (de) |
DE (1) | DE3668051D1 (de) |
GB (2) | GB8526566D0 (de) |
WO (1) | WO1987002750A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6000933A (en) * | 1997-04-04 | 1999-12-14 | Frederick, Sr.; Charles B | Variable burner orifice furnace manifold |
US9574268B1 (en) | 2011-10-28 | 2017-02-21 | Asm America, Inc. | Pulsed valve manifold for atomic layer deposition |
US10256075B2 (en) * | 2016-01-22 | 2019-04-09 | Applied Materials, Inc. | Gas splitting by time average injection into different zones by fast gas valves |
US10662527B2 (en) | 2016-06-01 | 2020-05-26 | Asm Ip Holding B.V. | Manifolds for uniform vapor deposition |
WO2020131214A1 (en) * | 2018-12-20 | 2020-06-25 | Applied Materials, Inc. | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber |
US11492701B2 (en) | 2019-03-19 | 2022-11-08 | Asm Ip Holding B.V. | Reactor manifolds |
KR20210048408A (ko) | 2019-10-22 | 2021-05-03 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 증착 반응기 매니폴드 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US681690A (en) * | 1901-01-19 | 1901-09-03 | Charles E Esterly | Blowpipe. |
US945143A (en) * | 1909-07-28 | 1910-01-04 | Iacques Szamek | Apparatus for mixing liquids. |
US2092579A (en) * | 1934-06-16 | 1937-09-07 | Union Carbide & Carbon Corp | Oxygen-air acetylene injector and mixer for welding blowpipes |
US3324872A (en) * | 1964-04-27 | 1967-06-13 | Honeywell Inc | Shower control valve |
US3628566A (en) * | 1970-02-02 | 1971-12-21 | Clifford C Carse | Multiple fluid control device |
US4094333A (en) * | 1976-04-14 | 1978-06-13 | Petursson Sigurdur G | Regulating valve system |
JPS5347765A (en) * | 1976-10-13 | 1978-04-28 | Matsushita Electric Ind Co Ltd | Semiconductor crystal growth method |
DE2725410C2 (de) * | 1977-06-04 | 1983-09-01 | Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen | Vorrichtung zur Steuerung einer Druckmittelströmung |
US4257438A (en) * | 1978-11-16 | 1981-03-24 | Miller Donald V | Bulk catalyst proportioner |
JPS6055478B2 (ja) * | 1982-10-19 | 1985-12-05 | 松下電器産業株式会社 | 気相成長方法 |
DE8425137U1 (de) * | 1984-08-24 | 1985-12-19 | Siemens AG, 1000 Berlin und 8000 München | 4-Wege-Ventil |
-
1985
- 1985-10-29 GB GB858526566A patent/GB8526566D0/en active Pending
-
1986
- 1986-10-29 GB GB08714952A patent/GB2191106B/en not_active Expired
- 1986-10-29 DE DE8686906399T patent/DE3668051D1/de not_active Expired - Lifetime
- 1986-10-29 US US07/076,567 patent/US4869284A/en not_active Expired - Fee Related
- 1986-10-29 EP EP86906399A patent/EP0246266B1/de not_active Expired - Lifetime
- 1986-10-29 WO PCT/GB1986/000668 patent/WO1987002750A1/en active IP Right Grant
- 1986-10-29 JP JP61505777A patent/JPS63501587A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
GB8714952D0 (en) | 1987-07-29 |
GB2191106A (en) | 1987-12-09 |
JPS63501587A (ja) | 1988-06-16 |
WO1987002750A1 (en) | 1987-05-07 |
EP0246266A1 (de) | 1987-11-25 |
GB2191106B (en) | 1989-01-18 |
EP0246266B1 (de) | 1990-01-03 |
US4869284A (en) | 1989-09-26 |
GB8526566D0 (en) | 1985-12-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |