DE3664264D1 - Unit intended to restore the initial cleanness conditions in a quartz tube used as reaction chamber for fabricating integrated circuits - Google Patents

Unit intended to restore the initial cleanness conditions in a quartz tube used as reaction chamber for fabricating integrated circuits

Info

Publication number
DE3664264D1
DE3664264D1 DE8686901424T DE3664264T DE3664264D1 DE 3664264 D1 DE3664264 D1 DE 3664264D1 DE 8686901424 T DE8686901424 T DE 8686901424T DE 3664264 T DE3664264 T DE 3664264T DE 3664264 D1 DE3664264 D1 DE 3664264D1
Authority
DE
Germany
Prior art keywords
restore
reaction chamber
integrated circuits
quartz tube
tube used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8686901424T
Other languages
English (en)
Inventor
Philippe Lami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE3664264D1 publication Critical patent/DE3664264D1/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DE8686901424T 1985-03-08 1986-03-04 Unit intended to restore the initial cleanness conditions in a quartz tube used as reaction chamber for fabricating integrated circuits Expired DE3664264D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8503433A FR2578455B1 (fr) 1985-03-08 1985-03-08 Ensemble destine a redonner les conditions initiales de proprete dans un tube de quartz utilise comme chambre de reaction pour la fabrication des circuits integres
PCT/FR1986/000069 WO1986005129A1 (fr) 1985-03-08 1986-03-04 Ensemble destine a redonner les conditions initiales de proprete dans un tube de quartz utilise comme chambre de reaction pour la fabrication des circuits integres

Publications (1)

Publication Number Publication Date
DE3664264D1 true DE3664264D1 (en) 1989-08-17

Family

ID=9317008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686901424T Expired DE3664264D1 (en) 1985-03-08 1986-03-04 Unit intended to restore the initial cleanness conditions in a quartz tube used as reaction chamber for fabricating integrated circuits

Country Status (6)

Country Link
US (1) US4756322A (de)
EP (1) EP0222777B1 (de)
JP (1) JPS62502107A (de)
DE (1) DE3664264D1 (de)
FR (1) FR2578455B1 (de)
WO (1) WO1986005129A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6902628B2 (en) * 2002-11-25 2005-06-07 Applied Materials, Inc. Method of cleaning a coated process chamber component
US7964085B1 (en) 2002-11-25 2011-06-21 Applied Materials, Inc. Electrochemical removal of tantalum-containing materials
US20060105182A1 (en) * 2004-11-16 2006-05-18 Applied Materials, Inc. Erosion resistant textured chamber surface
US7910218B2 (en) * 2003-10-22 2011-03-22 Applied Materials, Inc. Cleaning and refurbishing chamber components having metal coatings
US7579067B2 (en) * 2004-11-24 2009-08-25 Applied Materials, Inc. Process chamber component with layered coating and method
US8617672B2 (en) 2005-07-13 2013-12-31 Applied Materials, Inc. Localized surface annealing of components for substrate processing chambers
US7762114B2 (en) 2005-09-09 2010-07-27 Applied Materials, Inc. Flow-formed chamber component having a textured surface
US7981262B2 (en) 2007-01-29 2011-07-19 Applied Materials, Inc. Process kit for substrate processing chamber
US7942969B2 (en) 2007-05-30 2011-05-17 Applied Materials, Inc. Substrate cleaning chamber and components
CN112695508B (zh) * 2021-01-24 2022-04-15 扬州苏油油成商贸实业有限公司 一种棉织物服装表面绒毛除杂工艺

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3893869A (en) * 1974-05-31 1975-07-08 Rca Corp Megasonic cleaning system
FR2418034A1 (fr) * 1978-02-28 1979-09-21 Sagem Perfectionnements apportes aux appareils pour le traitement de surfaces impliquant l'utilisation d'au moins un solvant
DE2818895C3 (de) * 1978-04-28 1981-01-22 Metall + Plastic Gmbh, 7760 Radolfzell Vorrichtung zum Überführen von Gegenständen zwischen Räumen unterschiedlichen Keimgehaltes
US4294271A (en) * 1979-11-30 1981-10-13 Dexon, Inc. Apparatus for removing deposited matter from a diffusion tube
JPS58127035A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置
US4561268A (en) * 1984-07-02 1985-12-31 G. A. Braun Inc. Wall adapter for tilt type washer-extractor machine

Also Published As

Publication number Publication date
EP0222777B1 (de) 1989-07-12
FR2578455B1 (fr) 1987-05-07
JPS62502107A (ja) 1987-08-20
FR2578455A1 (fr) 1986-09-12
WO1986005129A1 (fr) 1986-09-12
US4756322A (en) 1988-07-12
EP0222777A1 (de) 1987-05-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee