DE3588137D1 - Entladungsangeregtes Lasergerät - Google Patents
Entladungsangeregtes LasergerätInfo
- Publication number
- DE3588137D1 DE3588137D1 DE3588137T DE3588137T DE3588137D1 DE 3588137 D1 DE3588137 D1 DE 3588137D1 DE 3588137 T DE3588137 T DE 3588137T DE 3588137 T DE3588137 T DE 3588137T DE 3588137 D1 DE3588137 D1 DE 3588137D1
- Authority
- DE
- Germany
- Prior art keywords
- discharge
- laser device
- excited laser
- excited
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0385—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
- H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21284384A JPS6190486A (ja) | 1984-10-09 | 1984-10-09 | 放電励起型短パルスレ−ザ装置 |
JP21363384A JPS6191982A (ja) | 1984-10-11 | 1984-10-11 | 放電励起エキシマレ−ザ装置 |
JP24018184A JPS61116888A (ja) | 1984-11-12 | 1984-11-12 | 放電励起型短パルスレ−ザ装置 |
JP23926884A JPS61116889A (ja) | 1984-11-13 | 1984-11-13 | 放電励起型短パルスレ−ザ装置 |
JP2979185A JPS61188981A (ja) | 1985-02-18 | 1985-02-18 | 放電励起短パルスレ−ザ装置 |
JP6751685A JPS61224379A (ja) | 1985-03-28 | 1985-03-28 | 放電励起レ−ザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3588137D1 true DE3588137D1 (de) | 1997-01-30 |
DE3588137T2 DE3588137T2 (de) | 1997-07-10 |
Family
ID=27549479
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19853588118 Expired - Lifetime DE3588118T2 (de) | 1984-10-09 | 1985-10-02 | Entladungsangeregter Laser zur Erzeugung kurzer Pulse |
DE19853588137 Expired - Fee Related DE3588137T2 (de) | 1984-10-09 | 1985-10-02 | Entladungsangeregtes Lasergerät |
DE19853588088 Expired - Lifetime DE3588088T2 (de) | 1984-10-09 | 1985-10-02 | Entladungsangeregter Laser zur Erzeugung kurzer Pulse |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19853588118 Expired - Lifetime DE3588118T2 (de) | 1984-10-09 | 1985-10-02 | Entladungsangeregter Laser zur Erzeugung kurzer Pulse |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19853588088 Expired - Lifetime DE3588088T2 (de) | 1984-10-09 | 1985-10-02 | Entladungsangeregter Laser zur Erzeugung kurzer Pulse |
Country Status (2)
Country | Link |
---|---|
EP (3) | EP0542718B1 (de) |
DE (3) | DE3588118T2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5771258A (en) * | 1997-02-11 | 1998-06-23 | Cymer, Inc. | Aerodynamic chamber design for high pulse repetition rate excimer lasers |
US7693207B2 (en) | 2007-09-12 | 2010-04-06 | Coherent, Inc. | Pre-ionizer for pulsed gas-discharge laser |
US7545842B2 (en) | 2006-09-20 | 2009-06-09 | Coherent, Inc. | Pre-ionizer for pulsed gas-discharge laser |
WO2008036204A2 (en) * | 2006-09-20 | 2008-03-27 | Coherent, Inc. | Pre-ionizer for pulsed gas-discharge laser |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3486058A (en) * | 1967-09-12 | 1969-12-23 | Rca Corp | Sputter resistive cold cathode for low pressure gas discharge device |
CA897754A (en) * | 1969-08-29 | 1972-04-11 | Laflamme Albert | Molecular gas laser energized by double discharge |
FR2120191A5 (de) * | 1970-03-23 | 1972-08-18 | Comp Generale Electricite |
-
1985
- 1985-10-02 DE DE19853588118 patent/DE3588118T2/de not_active Expired - Lifetime
- 1985-10-02 EP EP93100578A patent/EP0542718B1/de not_active Expired - Lifetime
- 1985-10-02 DE DE19853588137 patent/DE3588137T2/de not_active Expired - Fee Related
- 1985-10-02 DE DE19853588088 patent/DE3588088T2/de not_active Expired - Lifetime
- 1985-10-02 EP EP94114362A patent/EP0637106B1/de not_active Expired - Lifetime
- 1985-10-02 EP EP93100550A patent/EP0543795B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0637106A1 (de) | 1995-02-01 |
EP0637106B1 (de) | 1996-12-18 |
DE3588118T2 (de) | 1997-03-27 |
DE3588118D1 (de) | 1996-09-26 |
EP0542718A1 (de) | 1993-05-19 |
DE3588137T2 (de) | 1997-07-10 |
EP0543795A1 (de) | 1993-05-26 |
EP0542718B1 (de) | 1996-02-28 |
DE3588088T2 (de) | 1996-11-14 |
EP0543795B1 (de) | 1996-08-21 |
DE3588088D1 (de) | 1996-04-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |