DE3582404D1 - Positionierungssystem. - Google Patents
Positionierungssystem.Info
- Publication number
- DE3582404D1 DE3582404D1 DE8585114350T DE3582404T DE3582404D1 DE 3582404 D1 DE3582404 D1 DE 3582404D1 DE 8585114350 T DE8585114350 T DE 8585114350T DE 3582404 T DE3582404 T DE 3582404T DE 3582404 D1 DE3582404 D1 DE 3582404D1
- Authority
- DE
- Germany
- Prior art keywords
- positioning system
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/672,724 US4642438A (en) | 1984-11-19 | 1984-11-19 | Workpiece mounting and clamping system having submicron positioning repeatability |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3582404D1 true DE3582404D1 (de) | 1991-05-08 |
Family
ID=24699738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585114350T Expired - Fee Related DE3582404D1 (de) | 1984-11-19 | 1985-11-12 | Positionierungssystem. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4642438A (de) |
EP (1) | EP0183125B1 (de) |
JP (1) | JPH0722104B2 (de) |
CA (1) | CA1229429A (de) |
DE (1) | DE3582404D1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5986372A (en) * | 1990-06-04 | 1999-11-16 | Joffe; Benjamin | Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives |
CZ280093A3 (en) * | 1992-04-28 | 1995-04-12 | Turchan Manuel C Ing | Process of adiabetic milling without cooling and a milling cutter for making the same |
JP3026530B2 (ja) * | 1993-03-04 | 2000-03-27 | アルプス電気株式会社 | 電子部品 |
NL1000815C2 (nl) * | 1995-07-14 | 1997-01-15 | Univ Delft Tech | XY-verplaatsingsinrichting. |
US5788453A (en) * | 1996-05-30 | 1998-08-04 | Applied Materials, Inc. | Piezoelectric wafer gripping system for robot blades |
US5843623A (en) * | 1996-09-10 | 1998-12-01 | International Business Machines Corporation | Low profile substrate ground probe |
JP3678533B2 (ja) * | 1997-04-10 | 2005-08-03 | 富士通株式会社 | 荷電粒子ビーム露光装置 |
US6260285B1 (en) | 1998-08-24 | 2001-07-17 | Nutec Components, Inc. | Precision workpiece positioning device |
DE29907533U1 (de) * | 1999-04-28 | 2000-09-21 | Belyakov, Vladimir K., Balaschicha | Gerät, insbesondere Arbeitstisch für einen Projektor |
GB2392309B (en) | 2002-08-22 | 2004-10-27 | Leica Microsys Lithography Ltd | Substrate loading and unloading apparatus |
DE502007001070D1 (de) * | 2006-04-27 | 2009-08-27 | Sms Siemag Ag | Vorrichtung und verfahren zum verbinden von bändern |
JP2008016510A (ja) * | 2006-07-03 | 2008-01-24 | Nuflare Technology Inc | 半導体回路パターン形成装置 |
US7722059B1 (en) | 2007-09-28 | 2010-05-25 | Marino Paul W | Complete wheel bracket assembly for a modular base assembly for vehicle model making |
DE102007052801B4 (de) * | 2007-11-06 | 2010-10-07 | Bruker Daltonik Gmbh | Ionenmobilitätsspektrometer mit Substanzsammler |
US20090140111A1 (en) * | 2007-11-30 | 2009-06-04 | Marino Paul W | Actuator bracket for a modular base assembly for vehicle model making |
CN111977014B (zh) * | 2020-07-16 | 2023-09-19 | 芜湖天航装备技术有限公司 | 一种航空弹射装置的辅助挂弹装置及其悬挂方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3648048A (en) * | 1969-10-15 | 1972-03-07 | Thomson Houston Comp Francaise | System and method for positioning a wafer coated with photoresist and for controlling the displacements of said wafer in a scanning electron apparatus |
CA968439A (en) * | 1971-05-26 | 1975-05-27 | Western Electric Company, Incorporated | Video controlled positioning method and apparatus |
US3874525A (en) * | 1973-06-29 | 1975-04-01 | Ibm | Method and apparatus for handling workpieces |
DE2504127A1 (de) * | 1974-02-01 | 1975-09-04 | Hitachi Ltd | Geraet fuer automatische montage |
NL7901956A (nl) * | 1979-03-12 | 1980-09-16 | Leuven Res & Dev Vzw | Verplaatsingsbesturingsinrichting. |
EP0017044B1 (de) * | 1979-04-02 | 1985-07-03 | Eaton-Optimetrix Inc. | System zur Einstellung eines Gerätes |
US4383757A (en) * | 1979-04-02 | 1983-05-17 | Optimetrix Corporation | Optical focusing system |
JPS57102016A (en) * | 1980-12-17 | 1982-06-24 | Hitachi Ltd | Pattern generator |
US4439926A (en) * | 1982-04-06 | 1984-04-03 | The Charles Stark Draper Laboratory, Inc. | Transferrable-center compliance system |
US4532402A (en) * | 1983-09-02 | 1985-07-30 | Xrl, Inc. | Method and apparatus for positioning a focused beam on an integrated circuit |
-
1984
- 1984-11-19 US US06/672,724 patent/US4642438A/en not_active Expired - Lifetime
-
1985
- 1985-10-14 JP JP60227061A patent/JPH0722104B2/ja not_active Expired - Lifetime
- 1985-11-12 EP EP85114350A patent/EP0183125B1/de not_active Expired
- 1985-11-12 DE DE8585114350T patent/DE3582404D1/de not_active Expired - Fee Related
- 1985-11-12 CA CA000495092A patent/CA1229429A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CA1229429A (en) | 1987-11-17 |
JPS61125128A (ja) | 1986-06-12 |
EP0183125A2 (de) | 1986-06-04 |
EP0183125B1 (de) | 1991-04-03 |
JPH0722104B2 (ja) | 1995-03-08 |
EP0183125A3 (en) | 1988-08-10 |
US4642438A (en) | 1987-02-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |