DE3582404D1 - Positionierungssystem. - Google Patents

Positionierungssystem.

Info

Publication number
DE3582404D1
DE3582404D1 DE8585114350T DE3582404T DE3582404D1 DE 3582404 D1 DE3582404 D1 DE 3582404D1 DE 8585114350 T DE8585114350 T DE 8585114350T DE 3582404 T DE3582404 T DE 3582404T DE 3582404 D1 DE3582404 D1 DE 3582404D1
Authority
DE
Germany
Prior art keywords
positioning system
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585114350T
Other languages
English (en)
Inventor
Karl Willi Beumer
Charles Arden Gaston
Alfred Mack
Brian Collins O'neill
Warren John Pinckney
Charles Henry Locke
Alan Dickson Wilson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3582404D1 publication Critical patent/DE3582404D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE8585114350T 1984-11-19 1985-11-12 Positionierungssystem. Expired - Fee Related DE3582404D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/672,724 US4642438A (en) 1984-11-19 1984-11-19 Workpiece mounting and clamping system having submicron positioning repeatability

Publications (1)

Publication Number Publication Date
DE3582404D1 true DE3582404D1 (de) 1991-05-08

Family

ID=24699738

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585114350T Expired - Fee Related DE3582404D1 (de) 1984-11-19 1985-11-12 Positionierungssystem.

Country Status (5)

Country Link
US (1) US4642438A (de)
EP (1) EP0183125B1 (de)
JP (1) JPH0722104B2 (de)
CA (1) CA1229429A (de)
DE (1) DE3582404D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986372A (en) * 1990-06-04 1999-11-16 Joffe; Benjamin Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives
CZ280093A3 (en) * 1992-04-28 1995-04-12 Turchan Manuel C Ing Process of adiabetic milling without cooling and a milling cutter for making the same
JP3026530B2 (ja) * 1993-03-04 2000-03-27 アルプス電気株式会社 電子部品
NL1000815C2 (nl) * 1995-07-14 1997-01-15 Univ Delft Tech XY-verplaatsingsinrichting.
US5788453A (en) * 1996-05-30 1998-08-04 Applied Materials, Inc. Piezoelectric wafer gripping system for robot blades
US5843623A (en) * 1996-09-10 1998-12-01 International Business Machines Corporation Low profile substrate ground probe
JP3678533B2 (ja) * 1997-04-10 2005-08-03 富士通株式会社 荷電粒子ビーム露光装置
US6260285B1 (en) 1998-08-24 2001-07-17 Nutec Components, Inc. Precision workpiece positioning device
DE29907533U1 (de) * 1999-04-28 2000-09-21 Belyakov, Vladimir K., Balaschicha Gerät, insbesondere Arbeitstisch für einen Projektor
GB2392309B (en) 2002-08-22 2004-10-27 Leica Microsys Lithography Ltd Substrate loading and unloading apparatus
DE502007001070D1 (de) * 2006-04-27 2009-08-27 Sms Siemag Ag Vorrichtung und verfahren zum verbinden von bändern
JP2008016510A (ja) * 2006-07-03 2008-01-24 Nuflare Technology Inc 半導体回路パターン形成装置
US7722059B1 (en) 2007-09-28 2010-05-25 Marino Paul W Complete wheel bracket assembly for a modular base assembly for vehicle model making
DE102007052801B4 (de) * 2007-11-06 2010-10-07 Bruker Daltonik Gmbh Ionenmobilitätsspektrometer mit Substanzsammler
US20090140111A1 (en) * 2007-11-30 2009-06-04 Marino Paul W Actuator bracket for a modular base assembly for vehicle model making
CN111977014B (zh) * 2020-07-16 2023-09-19 芜湖天航装备技术有限公司 一种航空弹射装置的辅助挂弹装置及其悬挂方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3648048A (en) * 1969-10-15 1972-03-07 Thomson Houston Comp Francaise System and method for positioning a wafer coated with photoresist and for controlling the displacements of said wafer in a scanning electron apparatus
CA968439A (en) * 1971-05-26 1975-05-27 Western Electric Company, Incorporated Video controlled positioning method and apparatus
US3874525A (en) * 1973-06-29 1975-04-01 Ibm Method and apparatus for handling workpieces
DE2504127A1 (de) * 1974-02-01 1975-09-04 Hitachi Ltd Geraet fuer automatische montage
NL7901956A (nl) * 1979-03-12 1980-09-16 Leuven Res & Dev Vzw Verplaatsingsbesturingsinrichting.
EP0017044B1 (de) * 1979-04-02 1985-07-03 Eaton-Optimetrix Inc. System zur Einstellung eines Gerätes
US4383757A (en) * 1979-04-02 1983-05-17 Optimetrix Corporation Optical focusing system
JPS57102016A (en) * 1980-12-17 1982-06-24 Hitachi Ltd Pattern generator
US4439926A (en) * 1982-04-06 1984-04-03 The Charles Stark Draper Laboratory, Inc. Transferrable-center compliance system
US4532402A (en) * 1983-09-02 1985-07-30 Xrl, Inc. Method and apparatus for positioning a focused beam on an integrated circuit

Also Published As

Publication number Publication date
CA1229429A (en) 1987-11-17
JPS61125128A (ja) 1986-06-12
EP0183125A2 (de) 1986-06-04
EP0183125B1 (de) 1991-04-03
JPH0722104B2 (ja) 1995-03-08
EP0183125A3 (en) 1988-08-10
US4642438A (en) 1987-02-10

Similar Documents

Publication Publication Date Title
FI864213A0 (fi) Datastyrt system foer vaetskebehandlings- och reaktionskarakterisering.
FI865007A0 (fi) Industriellt system foer avloppsluft.
FI853313L (fi) Speciallins foer glasoegon.
NL192637B (nl) Stelselprocessor.
DE3650198D1 (de) Mehrplattenspielersystem.
FI850865L (fi) Branddetektor.
NO160222C (no) Hurtigkobling for verktoey.
FI862387A (fi) Karbonfritt system innefattande enbart loesningsmedel innehaollande mikrokapslar.
DE3582404D1 (de) Positionierungssystem.
NO851292L (no) Stablesystem.
DE3586406D1 (de) Tabelliersystem.
FI860739A (fi) Undervattensopererande system.
FI842516A0 (fi) System foer automatisk tryckreglering av luftkuddeelement.
FI843846A0 (fi) System foer luftfuktning.
FI861567A0 (fi) System foer asymmetrisk signaltransmission.
FI860392A (fi) Foerbaettrat system foer filmfoerevisning.
IT8523063A0 (it) Mezzi fungicidi-selettivi.
FI854369A (fi) Styranordning foer plasmagenerator.
ATE47325T1 (de) Spielbausteinsystem.
NO844372L (no) Stroemskinne-system.
NO842812L (no) Forskalingssystem.
IT8444203A0 (it) W.c.b. system
IT8433307V0 (it) W.c.b. system
NO872714D0 (no) Masse-loddesystem.
FI851962A0 (fi) Solstraolning centrerande system.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee