DE3579358D1 - Lagemessanordnung. - Google Patents

Lagemessanordnung.

Info

Publication number
DE3579358D1
DE3579358D1 DE8585105739T DE3579358T DE3579358D1 DE 3579358 D1 DE3579358 D1 DE 3579358D1 DE 8585105739 T DE8585105739 T DE 8585105739T DE 3579358 T DE3579358 T DE 3579358T DE 3579358 D1 DE3579358 D1 DE 3579358D1
Authority
DE
Germany
Prior art keywords
position measurement
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585105739T
Other languages
English (en)
Inventor
Ichiro Hashimoto
Katsushige Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitaka Kohki Co Ltd
HP Inc
Original Assignee
Mitaka Kohki Co Ltd
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitaka Kohki Co Ltd, Hewlett Packard Co filed Critical Mitaka Kohki Co Ltd
Application granted granted Critical
Publication of DE3579358D1 publication Critical patent/DE3579358D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE8585105739T 1984-05-11 1985-05-10 Lagemessanordnung. Expired - Lifetime DE3579358D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59093929A JPS60237307A (ja) 1984-05-11 1984-05-11 レ−ザ測長器

Publications (1)

Publication Number Publication Date
DE3579358D1 true DE3579358D1 (de) 1990-10-04

Family

ID=14096118

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585105739T Expired - Lifetime DE3579358D1 (de) 1984-05-11 1985-05-10 Lagemessanordnung.

Country Status (4)

Country Link
US (1) US4707129A (de)
EP (1) EP0160999B1 (de)
JP (1) JPS60237307A (de)
DE (1) DE3579358D1 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2612628B1 (fr) * 1987-03-17 1993-09-10 Fondeur Bernard Dispositif de mesure par interferometrie laser
LU87003A1 (fr) * 1987-09-29 1989-04-06 Europ Communities Systeme de poursuite d'une cible
US4790651A (en) * 1987-09-30 1988-12-13 Chesapeake Laser Systems, Inc. Tracking laser interferometer
DE3833589C1 (en) * 1988-10-03 1990-03-15 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Multiple arrangement of simultaneously used laser interferometers for trilaterational determination of the position of a movable point
US5374991A (en) * 1991-03-29 1994-12-20 Gradient Lens Corporation Compact distance measuring interferometer
US5430537A (en) * 1993-09-03 1995-07-04 Dynamics Research Corporation Light beam distance encoder
JPH07110207A (ja) * 1993-10-08 1995-04-25 Agency Of Ind Science & Technol レーザ測定装置の回転支持機構
US5739907A (en) * 1996-11-22 1998-04-14 Chen; Jenq-Shyong Laser interference displacement measuring system capable of automatic laser path alignment
US6667798B1 (en) 1999-07-28 2003-12-23 Leica Geosystems Ag Method and device for determining spatial positions and orientations
US6547397B1 (en) 2000-04-19 2003-04-15 Laser Projection Technologies, Inc. Apparatus and method for projecting a 3D image
US6563569B2 (en) * 2000-09-25 2003-05-13 Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry Laser tracking interferometric length measuring instrument and method of measuring length and coordinates using the same
ATE519092T1 (de) 2002-01-16 2011-08-15 Faro Tech Inc Lasergestützte koordinatenmessapparatur und lasergestütztes koordinatenmessverfahren
CN1846148B (zh) * 2003-09-05 2010-12-15 Faro科技有限公司 自补偿激光***
US7583375B2 (en) * 2003-09-05 2009-09-01 Faro Technologies, Inc. Self-compensating laser tracker
JP5016245B2 (ja) * 2005-03-29 2012-09-05 ライカ・ゲオジステームス・アクチェンゲゼルシャフト 物体の六つの自由度を求めるための測定システム
JP2009229066A (ja) * 2008-03-19 2009-10-08 Mitsutoyo Corp 追尾式レーザ干渉計と標的間距離の推定方法及び追尾式レーザ干渉計
WO2009117161A2 (en) * 2008-03-21 2009-09-24 Variation Reduction Solutions, Inc. External system for robotic accuracy enhancement
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
US8223342B2 (en) * 2009-03-16 2012-07-17 Alliant Techsystems Inc. Methods and systems for measuring target movement with an interferometer
US8659749B2 (en) * 2009-08-07 2014-02-25 Faro Technologies, Inc. Absolute distance meter with optical switch
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US8619265B2 (en) 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
DE102010041330A1 (de) * 2010-09-24 2012-03-29 Dr. Johannes Heidenhain Gmbh Optische Positionsmessvorrichtung
US8902408B2 (en) 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
GB2518998A (en) 2011-03-03 2015-04-08 Faro Tech Inc Target apparatus and method
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
USD688577S1 (en) 2012-02-21 2013-08-27 Faro Technologies, Inc. Laser tracker
GB2504890A (en) 2011-04-15 2014-02-12 Faro Tech Inc Enhanced position detector in laser tracker
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
GB2515922A (en) 2012-01-27 2015-01-07 Faro Tech Inc Inspection method with barcode identification
US9041914B2 (en) 2013-03-15 2015-05-26 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
JP2015118076A (ja) * 2013-12-20 2015-06-25 株式会社ミツトヨ 光干渉測定装置、およびプログラム
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
TWI595252B (zh) * 2016-05-10 2017-08-11 財團法人工業技術研究院 測距裝置及其測距方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3458259A (en) * 1966-11-07 1969-07-29 Hewlett Packard Co Interferometric system
FR2088675A5 (de) * 1970-04-21 1972-01-07 Thomson Csf
US3788746A (en) * 1972-10-02 1974-01-29 Hewlett Packard Co Optical dilatometer
US4053231A (en) * 1975-12-18 1977-10-11 Nasa Interferometer mirror tilt correcting system
US4243877A (en) * 1979-03-05 1981-01-06 Cummins Engine Company, Inc. Electro-optical target for an optical alignment system
US4319839A (en) * 1980-03-27 1982-03-16 The United States Of America As Represented By The Secretary Of The Air Force Beam alignment system
JPS57172266A (en) * 1981-04-17 1982-10-23 Auto Process:Kk Distance measuring device
US4457625A (en) * 1981-07-13 1984-07-03 Itek Corporation Self calibrating contour measuring system using fringe counting interferometers
GB2117511A (en) * 1982-02-19 1983-10-12 Dr Paul Derek Cook Laser beam alignment detection

Also Published As

Publication number Publication date
JPS60237307A (ja) 1985-11-26
EP0160999A3 (en) 1987-05-27
EP0160999B1 (de) 1990-08-29
EP0160999A2 (de) 1985-11-13
JPH051882B2 (de) 1993-01-11
US4707129A (en) 1987-11-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee