DE3579059D1 - Apparat zur beschichtung von kernbrennstoffpartikeln mit einem brennbaren absorber. - Google Patents
Apparat zur beschichtung von kernbrennstoffpartikeln mit einem brennbaren absorber.Info
- Publication number
- DE3579059D1 DE3579059D1 DE8585106630T DE3579059T DE3579059D1 DE 3579059 D1 DE3579059 D1 DE 3579059D1 DE 8585106630 T DE8585106630 T DE 8585106630T DE 3579059 T DE3579059 T DE 3579059T DE 3579059 D1 DE3579059 D1 DE 3579059D1
- Authority
- DE
- Germany
- Prior art keywords
- nuclear fuel
- fuel particles
- combustible absorber
- coating nuclear
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21C—NUCLEAR REACTORS
- G21C3/00—Reactor fuel elements and their assemblies; Selection of substances for use as reactor fuel elements
- G21C3/42—Selection of substances for use as reactor fuel
- G21C3/58—Solid reactor fuel Pellets made of fissile material
- G21C3/62—Ceramic fuel
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/223—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21C—NUCLEAR REACTORS
- G21C3/00—Reactor fuel elements and their assemblies; Selection of substances for use as reactor fuel elements
- G21C3/42—Selection of substances for use as reactor fuel
- G21C3/58—Solid reactor fuel Pellets made of fissile material
- G21C3/62—Ceramic fuel
- G21C3/626—Coated fuel particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Physical Vapour Deposition (AREA)
- Monitoring And Testing Of Nuclear Reactors (AREA)
- Paints Or Removers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/623,747 US4560462A (en) | 1984-06-22 | 1984-06-22 | Apparatus for coating nuclear fuel pellets with a burnable absorber |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3579059D1 true DE3579059D1 (de) | 1990-09-13 |
Family
ID=24499254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585106630T Expired - Fee Related DE3579059D1 (de) | 1984-06-22 | 1985-05-30 | Apparat zur beschichtung von kernbrennstoffpartikeln mit einem brennbaren absorber. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4560462A (de) |
EP (1) | EP0166256B1 (de) |
JP (1) | JPS6114593A (de) |
KR (1) | KR930005575B1 (de) |
CA (1) | CA1245182A (de) |
DE (1) | DE3579059D1 (de) |
ES (1) | ES8703039A1 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3520924A1 (de) * | 1984-06-12 | 1985-12-12 | Toyoda Gosei Co., Ltd., Haruhi, Aichi | Plasmaverfahrensanlage |
US4661233A (en) * | 1985-07-05 | 1987-04-28 | Westinghouse Electric Corp. | Cathode/ground shield arrangement in a sputter coating apparatus |
US4610775A (en) * | 1985-07-26 | 1986-09-09 | Westinghouse Electric Corp. | Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber |
US6103055A (en) * | 1986-04-18 | 2000-08-15 | Applied Materials, Inc. | System for processing substrates |
US4717461A (en) * | 1986-09-15 | 1988-01-05 | Machine Technology, Inc. | System and method for processing workpieces |
WO1990002216A1 (en) * | 1988-08-25 | 1990-03-08 | Vac-Tec Systems, Inc. | Physical vapor deposition dual coating apparatus and process |
US5234561A (en) * | 1988-08-25 | 1993-08-10 | Hauzer Industries Bv | Physical vapor deposition dual coating process |
US4960559A (en) * | 1989-05-17 | 1990-10-02 | Westinghouse Electric Corp. | Capture row storage tray for holding collated rows of nuclear fuel pellets |
EP0707663A4 (de) * | 1993-06-17 | 1998-01-14 | Deposition Sciences Inc | Sputtervorrichtung |
DE4413655A1 (de) * | 1994-04-20 | 1995-10-26 | Leybold Ag | Beschichtungsanlage |
US6355146B1 (en) * | 1996-04-03 | 2002-03-12 | The Regents Of The University Of California | Sputtering process and apparatus for coating powders |
DE29616846U1 (de) * | 1996-09-27 | 1996-11-07 | METAPLAS IONON Oberflächenveredelungstechnik GmbH, 51427 Bergisch Gladbach | Anlage zur Beschichtung von Schraubenköpfen |
US5755937A (en) * | 1996-11-13 | 1998-05-26 | Patterson; James A. | Apparatus for applying layers of metal onto a surface |
EP0992605A3 (de) * | 1998-10-02 | 2002-11-13 | Sumitomo Special Metals Co., Ltd. | Tragelement, Haltevorrichtung, Prozess und Apparat im Anwendungsbereich der Oberflächenbehandlung |
KR20010087664A (ko) * | 2000-03-08 | 2001-09-21 | 손명호 | 전자파 차폐막 코팅방법 및 그 장치 |
KR101480971B1 (ko) * | 2006-10-10 | 2015-01-09 | 에이에스엠 아메리카, 인코포레이티드 | 전구체 전달 시스템 |
US8671872B2 (en) * | 2009-02-16 | 2014-03-18 | Thomas Engineering Inc. | Production coater with exchangeable drums |
EP2593051A2 (de) | 2010-05-24 | 2013-05-22 | Akyüz, Safa | Stützfläche für hohe schuhe |
RU2472709C1 (ru) * | 2011-08-11 | 2013-01-20 | Открытое акционерное общество "Сибирский химический комбинат" | Способ приготовления порошка диоксида урана |
KR101141394B1 (ko) | 2011-11-25 | 2012-07-12 | 김용철 | 드럼형 멀티코팅층 및 오염방지코팅층 형성장치 |
DE102013112861B4 (de) * | 2013-01-15 | 2018-11-15 | VON ARDENNE Asset GmbH & Co. KG | Magnetronanordnung und Target für eine Magnetronanordnung |
US9328410B2 (en) | 2013-10-25 | 2016-05-03 | First Solar, Inc. | Physical vapor deposition tile arrangement and physical vapor deposition arrangement |
US10876205B2 (en) | 2016-09-30 | 2020-12-29 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
US11926894B2 (en) | 2016-09-30 | 2024-03-12 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
JP7376278B2 (ja) | 2018-08-16 | 2023-11-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | 固体原料昇華器 |
CN110438459B (zh) * | 2019-08-14 | 2023-08-22 | 湖南众源科技有限公司 | 一种卧式真空镀膜机 |
US11624113B2 (en) | 2019-09-13 | 2023-04-11 | Asm Ip Holding B.V. | Heating zone separation for reactant evaporation system |
CN113249694B (zh) * | 2021-05-12 | 2022-03-15 | 中国工程物理研究院激光聚变研究中心 | 溅射内镀黑腔及其制备方法 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB813251A (en) * | 1956-06-11 | 1959-05-13 | Standard Telephones Cables Ltd | Improvements in or relating to vacuum deposition equipment |
CH311230A (de) * | 1953-01-13 | 1955-11-30 | Ackermann Adolf | Hochvakuumapparat zur Aufbringung von Überzügen auf Gegenstände. |
US3427222A (en) * | 1965-10-15 | 1969-02-11 | Westinghouse Electric Corp | Nuclear fuel elements |
US3562140A (en) * | 1967-10-23 | 1971-02-09 | Eversharp Inc | Sequential sputtering apparatus |
US3635811A (en) * | 1967-11-06 | 1972-01-18 | Warner Lambert Co | Method of applying a coating |
US3583899A (en) * | 1968-12-18 | 1971-06-08 | Norton Co | Sputtering apparatus |
US3905887A (en) * | 1973-01-12 | 1975-09-16 | Coulter Information Systems | Thin film deposition method using segmented plasma |
US3829373A (en) * | 1973-01-12 | 1974-08-13 | Coulter Information Systems | Thin film deposition apparatus using segmented target means |
US4026787A (en) * | 1974-01-25 | 1977-05-31 | Coulter Information Systems, Inc. | Thin film deposition apparatus using segmented target means |
DE2434652A1 (de) * | 1974-07-18 | 1976-01-29 | Siemens Ag | Verfahren und vorrichtung zum belegen von traegerkoerpern als schuettgut innerhalb einer vakuumbedampfungsapparatur |
US4014779A (en) * | 1974-11-01 | 1977-03-29 | Coulter Information Systems, Inc. | Sputtering apparatus |
GB1497782A (en) * | 1975-02-13 | 1978-01-12 | Atomic Energy Authority Uk | Apparatus for depositing material |
US4080281A (en) * | 1976-04-09 | 1978-03-21 | Tsunehiko Endo | Apparatus for making metal films |
US4046666A (en) * | 1976-05-07 | 1977-09-06 | The United States Of America As Represented By The United States Energy Research And Development Administration | Device for providing high-intensity ion or electron beam |
JPS5399762A (en) * | 1977-02-12 | 1978-08-31 | Futaba Denshi Kogyo Kk | Device for producing compound semiconductor film |
US4325776A (en) * | 1977-06-20 | 1982-04-20 | Siemens Aktiengesellschaft | Method for preparing coarse-crystal or single-crystal metal films |
US4137142A (en) * | 1977-12-27 | 1979-01-30 | Stork Brabant B.V. | Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders |
US4151064A (en) * | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Apparatus for sputtering cylinders |
FR2423065A1 (fr) * | 1978-04-12 | 1979-11-09 | Battelle Memorial Institute | Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede |
DE2919191A1 (de) * | 1978-05-17 | 1979-11-22 | Rotring Werke Riepe Kg | Verfahren zum aufbringen einer beschichtung aus abriebfestem material auf rohre, insbesondere schreibroehrchen fuer roehrchenschreiber |
US4198283A (en) * | 1978-11-06 | 1980-04-15 | Materials Research Corporation | Magnetron sputtering target and cathode assembly |
US4204936A (en) * | 1979-03-29 | 1980-05-27 | The Perkin-Elmer Corporation | Method and apparatus for attaching a target to the cathode of a sputtering system |
US4268374A (en) * | 1979-08-09 | 1981-05-19 | Bell Telephone Laboratories, Incorporated | High capacity sputter-etching apparatus |
US4331526A (en) * | 1979-09-24 | 1982-05-25 | Coulter Systems Corporation | Continuous sputtering apparatus and method |
US4252626A (en) * | 1980-03-10 | 1981-02-24 | United Technologies Corporation | Cathode sputtering with multiple targets |
US4304983A (en) * | 1980-06-26 | 1981-12-08 | Rca Corporation | Plasma etching device and process |
JPS5754269A (en) * | 1980-09-17 | 1982-03-31 | Matsushita Electric Ind Co Ltd | Apparatus for forming film in vacuum |
US4308126A (en) * | 1980-09-18 | 1981-12-29 | United Technologies Corporation | Cathode sputtering apparatus |
-
1984
- 1984-06-22 US US06/623,747 patent/US4560462A/en not_active Expired - Lifetime
-
1985
- 1985-05-30 EP EP85106630A patent/EP0166256B1/de not_active Expired - Lifetime
- 1985-05-30 DE DE8585106630T patent/DE3579059D1/de not_active Expired - Fee Related
- 1985-06-04 CA CA000483149A patent/CA1245182A/en not_active Expired
- 1985-06-18 ES ES544324A patent/ES8703039A1/es not_active Expired
- 1985-06-21 JP JP60134473A patent/JPS6114593A/ja active Granted
- 1985-06-22 KR KR1019850004458A patent/KR930005575B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0166256A3 (en) | 1986-10-01 |
US4560462A (en) | 1985-12-24 |
KR860000662A (ko) | 1986-01-30 |
EP0166256B1 (de) | 1990-08-08 |
CA1245182A (en) | 1988-11-22 |
JPS647356B2 (de) | 1989-02-08 |
KR930005575B1 (ko) | 1993-06-23 |
ES8703039A1 (es) | 1987-01-16 |
ES544324A0 (es) | 1987-01-16 |
JPS6114593A (ja) | 1986-01-22 |
EP0166256A2 (de) | 1986-01-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |