DE3578437D1 - Vorrichtung zur bedampfung. - Google Patents

Vorrichtung zur bedampfung.

Info

Publication number
DE3578437D1
DE3578437D1 DE8585102965T DE3578437T DE3578437D1 DE 3578437 D1 DE3578437 D1 DE 3578437D1 DE 8585102965 T DE8585102965 T DE 8585102965T DE 3578437 T DE3578437 T DE 3578437T DE 3578437 D1 DE3578437 D1 DE 3578437D1
Authority
DE
Germany
Prior art keywords
vaporization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585102965T
Other languages
English (en)
Inventor
Heisaburo Hiroshima S Furukawa
Kanji Hiroshima Shipyard Wake
Yoshio Hiroshima Tec Shimozato
Kenichi Hiroshima Techn Yanagi
Mitsuo Hiroshima Technica Kato
Tetsuyoshi Hiroshima Tech Wada
Norio C O Hanshin R D Tsukiji
Takuya C O Hanshin R D La Aiko
Toshiharu C O Hanshin Kittaka
Yasuji C O Hanshin R Nakanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5114184A external-priority patent/JPS60197876A/ja
Priority claimed from JP59086169A external-priority patent/JPS60234964A/ja
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Application granted granted Critical
Publication of DE3578437D1 publication Critical patent/DE3578437D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE8585102965T 1984-03-19 1985-03-14 Vorrichtung zur bedampfung. Expired - Lifetime DE3578437D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5114184A JPS60197876A (ja) 1984-03-19 1984-03-19 真空蒸着装置
JP59086169A JPS60234964A (ja) 1984-05-01 1984-05-01 真空シ−ル装置

Publications (1)

Publication Number Publication Date
DE3578437D1 true DE3578437D1 (de) 1990-08-02

Family

ID=26391672

Family Applications (2)

Application Number Title Priority Date Filing Date
DE198585102965T Pending DE155643T1 (de) 1984-03-19 1985-03-14 Vorrichtung zur bedampfung.
DE8585102965T Expired - Lifetime DE3578437D1 (de) 1984-03-19 1985-03-14 Vorrichtung zur bedampfung.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE198585102965T Pending DE155643T1 (de) 1984-03-19 1985-03-14 Vorrichtung zur bedampfung.

Country Status (6)

Country Link
US (1) US4649860A (de)
EP (1) EP0155643B1 (de)
KR (1) KR890004043B1 (de)
AU (1) AU553239B2 (de)
CA (1) CA1233016A (de)
DE (2) DE155643T1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829189A (en) * 1986-07-18 1989-05-09 Sando Iron Works Co., Ltd. Apparatus for low-temperature plasma treatment of sheet material
SE465321B (sv) * 1988-02-09 1991-08-26 Nisshin Steel Co Ltd Foerfarande foer framstaellning av zink-legeringsplaeterad titantaetad staalplaat samt anvaendning av densamma
ATE262052T1 (de) * 1998-03-27 2004-04-15 Empa Vakuumbandbeschichtungsanlage
US9017480B2 (en) * 2006-04-06 2015-04-28 First Solar, Inc. System and method for transport
US20100282167A1 (en) * 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
US20100285218A1 (en) * 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
JP5597722B2 (ja) 2009-12-24 2014-10-01 ポスコ 鋼板通板装置とこれを含む鋼板表面処理装置及び鋼板の表面処理方法
FR2992978B1 (fr) * 2012-07-06 2014-07-11 Commissariat Energie Atomique Dispositif de generation de cibles a base d'hydrogene et/ou de deuterium solide
UA117592C2 (uk) 2013-08-01 2018-08-27 Арселорміттал Пофарбований оцинкований сталевий лист та спосіб його виготовлення
JP6801887B2 (ja) * 2018-10-18 2020-12-16 株式会社クリエイティブコーティングス 成膜装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH288438A (de) * 1950-10-23 1953-01-31 Alois Dr Vogt Verfahren zum Aufbringen von Metallüberzügen auf langgestrecktes Arbeitsgut, sowie Einrichtung zur Durchführung des Verfahrens.
US3278331A (en) * 1965-07-26 1966-10-11 Pennsalt Chemicals Corp Process for coating steel with zinc
GB1355798A (en) * 1970-05-28 1974-06-05 Bekaert Sa Nv Process for the deposition of metal coatings on to metal elements and on apparatus therefor
US3989862A (en) * 1970-10-13 1976-11-02 Jones & Laughlin Steel Corporation Method and apparatus for vapor-depositing coatings on substrates
US3788877A (en) * 1972-07-20 1974-01-29 Steel Corp Method for producing adherent,ductile zinc coating on ferrous substrates by vacuum deposition
JPS54110143A (en) * 1978-02-17 1979-08-29 Mitsubishi Heavy Ind Ltd Zinc vacuum plating method and equipment
JPS57152465A (en) * 1981-03-17 1982-09-20 Mitsubishi Heavy Ind Ltd Vacuum depositing method for zinc

Also Published As

Publication number Publication date
US4649860A (en) 1987-03-17
AU4001285A (en) 1985-09-26
EP0155643B1 (de) 1990-06-27
EP0155643A2 (de) 1985-09-25
CA1233016A (en) 1988-02-23
DE155643T1 (de) 1986-01-30
AU553239B2 (en) 1986-07-10
EP0155643A3 (en) 1987-11-25
KR890004043B1 (ko) 1989-10-18
KR850006551A (ko) 1985-10-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee