DE3576364D1 - Herstellung einer legierung durch aufdampfen. - Google Patents

Herstellung einer legierung durch aufdampfen.

Info

Publication number
DE3576364D1
DE3576364D1 DE8585308155T DE3576364T DE3576364D1 DE 3576364 D1 DE3576364 D1 DE 3576364D1 DE 8585308155 T DE8585308155 T DE 8585308155T DE 3576364 T DE3576364 T DE 3576364T DE 3576364 D1 DE3576364 D1 DE 3576364D1
Authority
DE
Germany
Prior art keywords
evaporation
alloy
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585308155T
Other languages
English (en)
Inventor
Robert William Gardiner
Brian William Viney
Garyth Hughes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Application granted granted Critical
Publication of DE3576364D1 publication Critical patent/DE3576364D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Physical Vapour Deposition (AREA)
DE8585308155T 1984-12-04 1985-11-08 Herstellung einer legierung durch aufdampfen. Expired - Lifetime DE3576364D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB848430509A GB8430509D0 (en) 1984-12-04 1984-12-04 Alloy production

Publications (1)

Publication Number Publication Date
DE3576364D1 true DE3576364D1 (de) 1990-04-12

Family

ID=10570637

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585308155T Expired - Lifetime DE3576364D1 (de) 1984-12-04 1985-11-08 Herstellung einer legierung durch aufdampfen.

Country Status (6)

Country Link
US (1) US4707333A (de)
EP (1) EP0184338B1 (de)
JP (1) JPH07110967B2 (de)
CA (1) CA1264560A (de)
DE (1) DE3576364D1 (de)
GB (1) GB8430509D0 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2704914B2 (ja) * 1990-08-30 1998-01-26 住友重機械工業株式会社 金属蒸気凝縮器
KR100833014B1 (ko) 2006-12-27 2008-05-27 주식회사 포스코 합금 증착용 증발 장치
EP1972699A1 (de) * 2007-03-20 2008-09-24 ArcelorMittal France Verfahren zur Beschichtung eines Substrats unter Vakuum
AU2013242397B2 (en) * 2012-03-30 2017-06-15 Posco Method and apparatus for feeding liquid metal to an evaporator device
CN104762600B (zh) * 2015-04-20 2017-05-10 京东方科技集团股份有限公司 蒸镀坩埚和蒸镀装置
TWI781929B (zh) * 2016-04-25 2022-11-01 美商創新先進材料股份有限公司 瀉流單元和含有瀉流單元的沉積系統以及相關方法
WO2021247382A1 (en) * 2020-06-04 2021-12-09 Applied Materials, Inc. Vapor deposition apparatus and method for coating a substrate in a vacuum chamber

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1043010B (de) * 1956-03-12 1958-11-06 Licentia Gmbh Einrichtung zum Verdampfen fluessiger Substanzen, insbesondere zum Verdampfen von Selen zur Herstellung von Trockengleichrichtern
GB1206586A (en) * 1966-09-07 1970-09-23 Mini Of Technology Vacuum deposition process of forming alloys
US3836387A (en) * 1966-10-31 1974-09-17 Republic Steel Corp Method of vaporizing metal
GB1265965A (de) * 1968-07-26 1972-03-08
GB1440921A (en) * 1972-07-14 1976-06-30 Secr Defence Evaporation of metals
US3935003A (en) * 1974-02-25 1976-01-27 Kaiser Aluminum & Chemical Corporation Process for melting metal
JPS5573866A (en) * 1978-11-21 1980-06-03 Mitsubishi Heavy Ind Ltd Continuous vacuum deposition apparatus
JPS59177370A (ja) * 1983-03-29 1984-10-08 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JPS59190361A (ja) * 1983-04-11 1984-10-29 Mitsubishi Heavy Ind Ltd 真空蒸着装置

Also Published As

Publication number Publication date
JPH07110967B2 (ja) 1995-11-29
CA1264560A (en) 1990-01-23
US4707333A (en) 1987-11-17
JPS61136607A (ja) 1986-06-24
GB8430509D0 (en) 1985-01-09
EP0184338B1 (de) 1990-03-07
EP0184338A2 (de) 1986-06-11
EP0184338A3 (en) 1988-05-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee