DE3560913D1 - A liquid-phase epitaxial growth method of a iiib-vb group compound - Google Patents
A liquid-phase epitaxial growth method of a iiib-vb group compoundInfo
- Publication number
- DE3560913D1 DE3560913D1 DE8585300510T DE3560913T DE3560913D1 DE 3560913 D1 DE3560913 D1 DE 3560913D1 DE 8585300510 T DE8585300510 T DE 8585300510T DE 3560913 T DE3560913 T DE 3560913T DE 3560913 D1 DE3560913 D1 DE 3560913D1
- Authority
- DE
- Germany
- Prior art keywords
- iiib
- liquid
- epitaxial growth
- growth method
- group compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
- C30B19/04—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux the solvent being a component of the crystal composition
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/10—Controlling or regulating
- C30B19/106—Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/42—Gallium arsenide
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/44—Gallium phosphide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/925—Fluid growth doping control, e.g. delta doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Led Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59013080A JPS60161397A (ja) | 1984-01-27 | 1984-01-27 | 液相エピタキシヤル成長方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3560913D1 true DE3560913D1 (en) | 1987-12-10 |
Family
ID=11823184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585300510T Expired DE3560913D1 (en) | 1984-01-27 | 1985-01-25 | A liquid-phase epitaxial growth method of a iiib-vb group compound |
Country Status (4)
Country | Link |
---|---|
US (1) | US4609411A (de) |
EP (1) | EP0151000B1 (de) |
JP (1) | JPS60161397A (de) |
DE (1) | DE3560913D1 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5326716A (en) * | 1986-02-11 | 1994-07-05 | Max Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. | Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy |
US6955858B2 (en) * | 2001-12-07 | 2005-10-18 | North Carolina State University | Transition metal doped ferromagnetic III-V nitride material films and methods of fabricating the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE795005A (fr) * | 1972-02-09 | 1973-05-29 | Rca Corp | Procede et appareil de croissance epitaxiale d'une matiere semi-conductrice a partir de la phase liquide et produit ainsi obtenu |
US4088514A (en) * | 1975-04-17 | 1978-05-09 | Matsushita Electric Industrial Co., Ltd. | Method for epitaxial growth of thin semiconductor layer from solution |
JPS55138230A (en) * | 1979-04-13 | 1980-10-28 | Sanyo Electric Co Ltd | Method for gaas liquid-phase epitaxial growth |
JPS6026080B2 (ja) * | 1979-11-21 | 1985-06-21 | シャープ株式会社 | 液相エピタキシャル成長方法 |
JPS57123897A (en) * | 1981-01-17 | 1982-08-02 | Omron Tateisi Electronics Co | Forming method of compound semiconductor crystal |
US4342148A (en) * | 1981-02-04 | 1982-08-03 | Northern Telecom Limited | Contemporaneous fabrication of double heterostructure light emitting diodes and laser diodes using liquid phase epitaxy |
US4507157A (en) * | 1981-05-07 | 1985-03-26 | General Electric Company | Simultaneously doped light-emitting diode formed by liquid phase epitaxy |
JPS58130199A (ja) * | 1982-01-25 | 1983-08-03 | Nippon Telegr & Teleph Corp <Ntt> | GaSb単結晶の育成方法 |
US4540450A (en) * | 1982-06-02 | 1985-09-10 | The United States Of America As Represented By The Secretary Of The Air Force | InP:Te Protective layer process for reducing substrate dissociation |
-
1984
- 1984-01-27 JP JP59013080A patent/JPS60161397A/ja active Granted
-
1985
- 1985-01-25 EP EP85300510A patent/EP0151000B1/de not_active Expired
- 1985-01-25 DE DE8585300510T patent/DE3560913D1/de not_active Expired
- 1985-01-25 US US06/694,683 patent/US4609411A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0151000A3 (en) | 1985-08-21 |
JPH0351674B2 (de) | 1991-08-07 |
EP0151000B1 (de) | 1987-11-04 |
EP0151000A2 (de) | 1985-08-07 |
US4609411A (en) | 1986-09-02 |
JPS60161397A (ja) | 1985-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: MITSUBISHI MONSANTO CHEMICAL CO., LTD. MITSUBISHI |
|
8328 | Change in the person/name/address of the agent |
Free format text: WEY, H., DIPL.-ING., PAT.-ANW., 8000 MUENCHEN |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: MITSUBISHI KASEI POLYTEC CO. MITSUBISHI KASEI CORP |
|
8331 | Complete revocation |