DE3482349D1 - System zur zufuehrung von gas regelbaren drucks. - Google Patents

System zur zufuehrung von gas regelbaren drucks.

Info

Publication number
DE3482349D1
DE3482349D1 DE8484301357T DE3482349T DE3482349D1 DE 3482349 D1 DE3482349 D1 DE 3482349D1 DE 8484301357 T DE8484301357 T DE 8484301357T DE 3482349 T DE3482349 T DE 3482349T DE 3482349 D1 DE3482349 D1 DE 3482349D1
Authority
DE
Germany
Prior art keywords
supplying gas
gas controllable
controllable pressures
pressures
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8484301357T
Other languages
English (en)
Inventor
Kuo-Chin Lin
Frederick P Pickett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UTI INSTR CO
Original Assignee
UTI INSTR CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UTI INSTR CO filed Critical UTI INSTR CO
Application granted granted Critical
Publication of DE3482349D1 publication Critical patent/DE3482349D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0009—Calibration of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/72—Mass spectrometers
    • G01N30/7206—Mass spectrometers interfaced to gas chromatograph
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
DE8484301357T 1983-03-04 1984-03-01 System zur zufuehrung von gas regelbaren drucks. Expired - Fee Related DE3482349D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/472,257 US4579144A (en) 1983-03-04 1983-03-04 Electron impact ion source for trace analysis

Publications (1)

Publication Number Publication Date
DE3482349D1 true DE3482349D1 (de) 1990-06-28

Family

ID=23874762

Family Applications (3)

Application Number Title Priority Date Filing Date
DE8888202520T Expired - Fee Related DE3484602D1 (de) 1983-03-04 1984-03-01 Messung von komponenten in einem gas.
DE8484301357T Expired - Fee Related DE3482349D1 (de) 1983-03-04 1984-03-01 System zur zufuehrung von gas regelbaren drucks.
DE8888202519T Expired - Fee Related DE3485376D1 (de) 1983-03-04 1984-03-01 Elektroneneinschlag-ionenquelle zur analysierung von komponenten.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE8888202520T Expired - Fee Related DE3484602D1 (de) 1983-03-04 1984-03-01 Messung von komponenten in einem gas.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8888202519T Expired - Fee Related DE3485376D1 (de) 1983-03-04 1984-03-01 Elektroneneinschlag-ionenquelle zur analysierung von komponenten.

Country Status (3)

Country Link
US (1) US4579144A (de)
EP (3) EP0311224B1 (de)
DE (3) DE3484602D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3631862A1 (de) * 1986-09-19 1988-03-31 Strahlen Umweltforsch Gmbh Einrichtung zur analytischen bestimmung von organischen stoffen
GB8816499D0 (en) * 1988-07-12 1988-08-17 C J S Sciences Ltd Valve
US4960991A (en) * 1989-10-17 1990-10-02 Hewlett-Packard Company Multimode ionization source
FR2661501B1 (fr) * 1990-04-27 1994-02-18 Rhone Poulenc Films Appareil d'analyse du gaz contenu dans une enceinte par spectrometrie de masse, procede d'analyse mettant en óoeuvre ledit appareil et applications dudit procede.
DE4113695A1 (de) * 1991-04-26 1992-10-29 Bayer Ag Kontinuierlich betriebener gasanalysator
US5237175A (en) * 1992-02-26 1993-08-17 Varian Associates, Inc. Reagent gas control for an ion trap mass spectrometer used in the chemical ionization mode
US5302827A (en) * 1993-05-11 1994-04-12 Mks Instruments, Inc. Quadrupole mass spectrometer
GB9409953D0 (en) * 1994-05-17 1994-07-06 Fisons Plc Mass spectrometer and electron impact ion source therefor
DE19949978A1 (de) * 1999-10-08 2001-05-10 Univ Dresden Tech Elektronenstoßionenquelle
US7838842B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. Dual mode ion source for ion implantation
JP2019204708A (ja) * 2018-05-24 2019-11-28 株式会社島津製作所 質量分析用検出装置及び質量分析装置
CN116321655B (zh) * 2023-03-15 2024-01-30 瑞莱谱(杭州)医疗科技有限公司 一种封闭式离子源及其调试方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2653620A (en) * 1949-01-04 1953-09-29 Phillips Petroleum Co Process and means for regulating the gas pressure in containers
NL269671A (de) * 1960-10-03 1900-01-01
US3638401A (en) * 1969-03-24 1972-02-01 Varian Associates Vacuum connector for connecting replaceable evacuated devices to an evacuated system
GB1237028A (en) * 1969-04-28 1971-06-30 Mullard Ltd Ion source
US3648047A (en) * 1970-07-13 1972-03-07 Perkin Elmer Corp Sensitivity control for mass spectrometer
US3942546A (en) * 1972-10-27 1976-03-09 Continental Oil Company Corrosion monitoring and composition-analytical apparatus
DE2361955A1 (de) * 1973-12-13 1975-06-19 Uranit Gmbh Quadrupol-massenspektrometer
US4023398A (en) * 1975-03-03 1977-05-17 John Barry French Apparatus for analyzing trace components
GB1571799A (en) * 1975-12-15 1980-07-16 Secr Defence Detection of polar vapours
DE2620391A1 (de) * 1976-05-08 1977-11-10 Berghaus Ionit Anstalt Regeln des gasdrucks bei stromstarken glimmentladungen
US4156814A (en) * 1977-06-24 1979-05-29 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
DK234378A (da) * 1978-05-26 1979-11-27 Risoe Forsoegsanlaeg Totrins separator til adskillelse af gas og eller dampformige stoffer med forskellige molekylevaegte
US4241750A (en) * 1978-11-27 1980-12-30 Kabushiki Kaisha Cosmo Keiki Pressure setting device
US4213326A (en) * 1979-02-14 1980-07-22 The Upjohn Company Sample supply device
US4261698A (en) * 1980-01-23 1981-04-14 International Business Machines Corporation Trace oxygen detector
US4383171A (en) * 1980-11-17 1983-05-10 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Particle analyzing method and apparatus

Also Published As

Publication number Publication date
EP0122006A3 (en) 1987-01-21
US4579144A (en) 1986-04-01
DE3485376D1 (de) 1992-01-30
EP0310210B1 (de) 1991-05-15
EP0311224B1 (de) 1991-12-18
EP0310210A1 (de) 1989-04-05
DE3484602D1 (de) 1991-06-20
EP0122006A2 (de) 1984-10-17
EP0311224A1 (de) 1989-04-12
EP0122006B1 (de) 1990-05-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN

8339 Ceased/non-payment of the annual fee