DE3472143D1 - A gas pumping device - Google Patents
A gas pumping deviceInfo
- Publication number
- DE3472143D1 DE3472143D1 DE8484850285T DE3472143T DE3472143D1 DE 3472143 D1 DE3472143 D1 DE 3472143D1 DE 8484850285 T DE8484850285 T DE 8484850285T DE 3472143 T DE3472143 T DE 3472143T DE 3472143 D1 DE3472143 D1 DE 3472143D1
- Authority
- DE
- Germany
- Prior art keywords
- pumping device
- gas pumping
- gas
- pumping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/10—Shaft sealings
- F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8305775A SE457365B (en) | 1983-10-20 | 1983-10-20 | DEVICE FOR PUMPING OF GAS |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3472143D1 true DE3472143D1 (en) | 1988-07-21 |
Family
ID=20352976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484850285T Expired DE3472143D1 (en) | 1983-10-20 | 1984-09-26 | A gas pumping device |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0138793B1 (en) |
DE (1) | DE3472143D1 (en) |
SE (1) | SE457365B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7048814B2 (en) * | 2002-02-08 | 2006-05-23 | Applied Materials, Inc. | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR490059A (en) * | 1917-05-05 | 1919-04-01 | Alexandre Cabrier | Hermetic vacuum compressor for gas |
US2391512A (en) * | 1943-10-21 | 1945-12-25 | Westinghouse Electric Corp | Blower apparatus |
CH340106A (en) * | 1956-03-10 | 1959-07-31 | Sulzer Ag | Turbomachine with a sealed shaft |
US2973136A (en) * | 1957-06-13 | 1961-02-28 | Garrett Corp | Compressor |
CH400438A (en) * | 1963-05-31 | 1965-10-15 | Sulzer Ag | Shaft seal of a blower |
CH480543A (en) * | 1967-08-18 | 1969-10-31 | Sulzer Ag | System for conveying, compressing or circulating gases with a conveying fan driven by an electric motor |
US4311004A (en) * | 1979-10-26 | 1982-01-19 | Rotoflow Corporation | Gas compression system and method |
-
1983
- 1983-10-20 SE SE8305775A patent/SE457365B/en not_active IP Right Cessation
-
1984
- 1984-09-26 DE DE8484850285T patent/DE3472143D1/en not_active Expired
- 1984-09-26 EP EP19840850285 patent/EP0138793B1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0138793A1 (en) | 1985-04-24 |
EP0138793B1 (en) | 1988-06-15 |
SE8305775D0 (en) | 1983-10-20 |
SE8305775L (en) | 1985-04-21 |
SE457365B (en) | 1988-12-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |