DE3472143D1 - A gas pumping device - Google Patents

A gas pumping device

Info

Publication number
DE3472143D1
DE3472143D1 DE8484850285T DE3472143T DE3472143D1 DE 3472143 D1 DE3472143 D1 DE 3472143D1 DE 8484850285 T DE8484850285 T DE 8484850285T DE 3472143 T DE3472143 T DE 3472143T DE 3472143 D1 DE3472143 D1 DE 3472143D1
Authority
DE
Germany
Prior art keywords
pumping device
gas pumping
gas
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484850285T
Other languages
German (de)
Inventor
Albin Viertler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atlas Copco AB
Original Assignee
Atlas Copco AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atlas Copco AB filed Critical Atlas Copco AB
Application granted granted Critical
Publication of DE3472143D1 publication Critical patent/DE3472143D1/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE8484850285T 1983-10-20 1984-09-26 A gas pumping device Expired DE3472143D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8305775A SE457365B (en) 1983-10-20 1983-10-20 DEVICE FOR PUMPING OF GAS

Publications (1)

Publication Number Publication Date
DE3472143D1 true DE3472143D1 (en) 1988-07-21

Family

ID=20352976

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484850285T Expired DE3472143D1 (en) 1983-10-20 1984-09-26 A gas pumping device

Country Status (3)

Country Link
EP (1) EP0138793B1 (en)
DE (1) DE3472143D1 (en)
SE (1) SE457365B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7048814B2 (en) * 2002-02-08 2006-05-23 Applied Materials, Inc. Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR490059A (en) * 1917-05-05 1919-04-01 Alexandre Cabrier Hermetic vacuum compressor for gas
US2391512A (en) * 1943-10-21 1945-12-25 Westinghouse Electric Corp Blower apparatus
CH340106A (en) * 1956-03-10 1959-07-31 Sulzer Ag Turbomachine with a sealed shaft
US2973136A (en) * 1957-06-13 1961-02-28 Garrett Corp Compressor
CH400438A (en) * 1963-05-31 1965-10-15 Sulzer Ag Shaft seal of a blower
CH480543A (en) * 1967-08-18 1969-10-31 Sulzer Ag System for conveying, compressing or circulating gases with a conveying fan driven by an electric motor
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method

Also Published As

Publication number Publication date
EP0138793A1 (en) 1985-04-24
EP0138793B1 (en) 1988-06-15
SE8305775D0 (en) 1983-10-20
SE8305775L (en) 1985-04-21
SE457365B (en) 1988-12-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee