DE3266507D1 - Method of etching chromium, and etchant compositions for carrying it out - Google Patents

Method of etching chromium, and etchant compositions for carrying it out

Info

Publication number
DE3266507D1
DE3266507D1 DE8282104812T DE3266507T DE3266507D1 DE 3266507 D1 DE3266507 D1 DE 3266507D1 DE 8282104812 T DE8282104812 T DE 8282104812T DE 3266507 T DE3266507 T DE 3266507T DE 3266507 D1 DE3266507 D1 DE 3266507D1
Authority
DE
Germany
Prior art keywords
carrying
etchant compositions
etching chromium
chromium
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282104812T
Other languages
English (en)
Inventor
Oscar Robert Abolafia
Joseph George Ameen
Glenn Vanness Elmore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3266507D1 publication Critical patent/DE3266507D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • ing And Chemical Polishing (AREA)
DE8282104812T 1981-06-24 1982-06-02 Method of etching chromium, and etchant compositions for carrying it out Expired DE3266507D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/276,723 US4370197A (en) 1981-06-24 1981-06-24 Process for etching chrome

Publications (1)

Publication Number Publication Date
DE3266507D1 true DE3266507D1 (en) 1985-10-31

Family

ID=23057835

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282104812T Expired DE3266507D1 (en) 1981-06-24 1982-06-02 Method of etching chromium, and etchant compositions for carrying it out

Country Status (5)

Country Link
US (1) US4370197A (de)
EP (1) EP0067984B1 (de)
JP (1) JPS6059303B2 (de)
CA (1) CA1163540A (de)
DE (1) DE3266507D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062836B2 (ja) * 1986-08-06 1994-01-12 ポリプラスチックス株式会社 ポリアセタ−ル樹脂成形品の表面処理法
JPH062837B2 (ja) * 1987-01-16 1994-01-12 ポリプラスチックス株式会社 ポリアセタ−ル樹脂成形品の表面処理法
JPH04185693A (ja) * 1990-11-21 1992-07-02 Hitachi Ltd 抵抗膜のエッチング液組成物及びそれを使用したエッチング方法
US6843929B1 (en) * 2000-02-28 2005-01-18 International Business Machines Corporation Accelerated etching of chromium
US6841084B2 (en) * 2002-02-11 2005-01-11 Nikko Materials Usa, Inc. Etching solution for forming an embedded resistor
US7285229B2 (en) * 2003-11-07 2007-10-23 Mec Company, Ltd. Etchant and replenishment solution therefor, and etching method and method for producing wiring board using the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2746848A (en) * 1955-01-19 1956-05-22 Photo Engravers Res Inc Etching
US2959555A (en) * 1956-09-28 1960-11-08 Dow Chemical Co Copper and iron containing scale removal from ferrous metal
US3181984A (en) * 1962-05-04 1965-05-04 Fmc Corp Cleaning and brightening of solder
US3353995A (en) * 1964-03-26 1967-11-21 Dow Chemical Co Removal of ferrous sulfide deposits
US3539408A (en) * 1967-08-11 1970-11-10 Western Electric Co Methods of etching chromium patterns and photolithographic masks so produced
US3668131A (en) * 1968-08-09 1972-06-06 Allied Chem Dissolution of metal with acidified hydrogen peroxide solutions
US3701698A (en) * 1971-01-04 1972-10-31 Clarence W Forestek Method for producing fissures in metallic surfaces of chromium
US3636123A (en) * 1971-01-28 1972-01-18 Sun Oil Co Oxydehydrogenation process
US3778309A (en) * 1971-06-25 1973-12-11 Int Nickel Co Descaling process for alloys containing chromium
US4160691A (en) * 1977-12-09 1979-07-10 International Business Machines Corporation Etch process for chromium
GB1599537A (en) * 1978-04-06 1981-10-07 Ibm Method for brightening an electroplated chromium deposit

Also Published As

Publication number Publication date
CA1163540A (en) 1984-03-13
EP0067984B1 (de) 1985-09-25
US4370197A (en) 1983-01-25
EP0067984A1 (de) 1982-12-29
JPS6059303B2 (ja) 1985-12-24
JPS583984A (ja) 1983-01-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee