DE3132028A1 - Verbesserte polierteller zum polieren von kunststoffoberflaechen - Google Patents
Verbesserte polierteller zum polieren von kunststoffoberflaechenInfo
- Publication number
- DE3132028A1 DE3132028A1 DE19813132028 DE3132028A DE3132028A1 DE 3132028 A1 DE3132028 A1 DE 3132028A1 DE 19813132028 DE19813132028 DE 19813132028 DE 3132028 A DE3132028 A DE 3132028A DE 3132028 A1 DE3132028 A1 DE 3132028A1
- Authority
- DE
- Germany
- Prior art keywords
- polishing
- plastic surfaces
- plates
- improved
- polishing plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title 2
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
- B24D13/18—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor with cooling provisions
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813132028 DE3132028A1 (de) | 1981-08-13 | 1981-08-13 | Verbesserte polierteller zum polieren von kunststoffoberflaechen |
FR8210648A FR2511287B1 (fr) | 1981-08-13 | 1982-06-18 | Plateau a polir et son utilisation dans le polissage de surfaces de resines synthetiques |
US06/395,096 US4490948A (en) | 1981-08-13 | 1982-07-06 | Polishing plate and method for polishing surfaces |
IT67925/82A IT1155562B (it) | 1981-08-13 | 1982-07-19 | Utensile a disco per la levigatura di superfici di materia plastica |
JP57138072A JPS5851079A (ja) | 1981-08-13 | 1982-08-10 | プラスチツク表面を研磨するための研磨盤 |
GB08223099A GB2103970B (en) | 1981-08-13 | 1982-08-11 | Polishing element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813132028 DE3132028A1 (de) | 1981-08-13 | 1981-08-13 | Verbesserte polierteller zum polieren von kunststoffoberflaechen |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3132028A1 true DE3132028A1 (de) | 1983-03-03 |
DE3132028C2 DE3132028C2 (de) | 1991-04-04 |
Family
ID=6139258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19813132028 Granted DE3132028A1 (de) | 1981-08-13 | 1981-08-13 | Verbesserte polierteller zum polieren von kunststoffoberflaechen |
Country Status (6)
Country | Link |
---|---|
US (1) | US4490948A (de) |
JP (1) | JPS5851079A (de) |
DE (1) | DE3132028A1 (de) |
FR (1) | FR2511287B1 (de) |
GB (1) | GB2103970B (de) |
IT (1) | IT1155562B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110788699A (zh) * | 2019-12-11 | 2020-02-14 | 中国工程物理研究院激光聚变研究中心 | 抛光盘及抛光*** |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2633860A1 (fr) * | 1988-07-08 | 1990-01-12 | Premines Sa | Plateau support tournant pour abrasif a l'eau |
US5022190A (en) * | 1989-01-06 | 1991-06-11 | Hutchins Manufacturing Company | Wet sanding tool |
DE4222766A1 (de) * | 1992-07-10 | 1994-01-13 | Walter Fuchs | Reinigungs-Poliervorrichtung mit einem Handgerät und Reinigungs-Polierverfahren |
US5938504A (en) * | 1993-11-16 | 1999-08-17 | Applied Materials, Inc. | Substrate polishing apparatus |
US5445558A (en) * | 1994-07-20 | 1995-08-29 | Hutchins Manufacturing Company | Wet sander |
JP3264589B2 (ja) * | 1994-09-07 | 2002-03-11 | 東芝機械株式会社 | 研磨装置 |
US5597348A (en) * | 1994-11-29 | 1997-01-28 | Hutchins Manufacturing Company | Water feed for sanding tool |
US5582541A (en) * | 1995-08-24 | 1996-12-10 | Hutchins Manufacturing Company | Abrading tool with water feed and removal system |
US5658185A (en) * | 1995-10-25 | 1997-08-19 | International Business Machines Corporation | Chemical-mechanical polishing apparatus with slurry removal system and method |
US5582540A (en) * | 1996-01-22 | 1996-12-10 | National Science Council Of R.O.C | Hydrostatic and hydrodynamic polishing tool |
US5681216A (en) * | 1996-02-06 | 1997-10-28 | Elantec, Inc. | High precision polishing tool |
US5800248A (en) * | 1996-04-26 | 1998-09-01 | Ontrak Systems Inc. | Control of chemical-mechanical polishing rate across a substrate surface |
JP2865061B2 (ja) * | 1996-06-27 | 1999-03-08 | 日本電気株式会社 | 研磨パッドおよび研磨装置ならびに半導体装置の製造方法 |
US5921849A (en) * | 1997-06-04 | 1999-07-13 | Speedfam Corporation | Method and apparatus for distributing a polishing agent onto a polishing element |
US6030487A (en) * | 1997-06-19 | 2000-02-29 | International Business Machines Corporation | Wafer carrier assembly |
US5816900A (en) * | 1997-07-17 | 1998-10-06 | Lsi Logic Corporation | Apparatus for polishing a substrate at radially varying polish rates |
US6004193A (en) * | 1997-07-17 | 1999-12-21 | Lsi Logic Corporation | Dual purpose retaining ring and polishing pad conditioner |
US6692338B1 (en) * | 1997-07-23 | 2004-02-17 | Lsi Logic Corporation | Through-pad drainage of slurry during chemical mechanical polishing |
US6439977B1 (en) * | 1998-12-07 | 2002-08-27 | Chartered Semiconductor Manufacturing Ltd. | Rotational slurry distribution system for rotary CMP system |
DE29912249U1 (de) * | 1999-07-14 | 2000-08-24 | Vorwerk & Co. Interholding GmbH, 42275 Wuppertal | Polierscheibe |
US6062964A (en) * | 1999-09-10 | 2000-05-16 | United Microelectronics Corp. | Chemical mechanical polishing apparatus for controlling slurry distribution |
US6196907B1 (en) * | 1999-10-01 | 2001-03-06 | U.S. Dynamics Corporation | Slurry delivery system for a metal polisher |
US6602121B1 (en) * | 1999-10-28 | 2003-08-05 | Strasbaugh | Pad support apparatus for chemical mechanical planarization |
DE10032992A1 (de) * | 2000-07-06 | 2002-01-17 | Hilti Ag | Handschleifmaschine mit Schleifschuh |
JP2002028846A (ja) * | 2000-07-13 | 2002-01-29 | Kamigaki Takeo | 研磨具 |
US6623331B2 (en) | 2001-02-16 | 2003-09-23 | Cabot Microelectronics Corporation | Polishing disk with end-point detection port |
WO2002102552A1 (fr) * | 2001-06-13 | 2002-12-27 | Keitech Co., Ltd. | Polisseuse |
US6599175B2 (en) * | 2001-08-06 | 2003-07-29 | Speedfam-Ipeca Corporation | Apparatus for distributing a fluid through a polishing pad |
DE20217188U1 (de) | 2002-11-07 | 2003-02-27 | Ewald Schaumstoffe GmbH & Co. KG, 48683 Ahaus | Polierscheibe |
US20040102136A1 (en) * | 2002-11-21 | 2004-05-27 | Wood Jeffrey H. | Spring-loaded contour following end effectors for lapping/polishing |
US20040102140A1 (en) * | 2002-11-21 | 2004-05-27 | Wood Jeffrey H. | Contour following end effectors for lapping/polishing |
DE20305995U1 (de) | 2003-04-15 | 2003-07-10 | Ewald Schaumstoffe GmbH & Co. KG, 48683 Ahaus | Polierscheibe |
JP2005144298A (ja) * | 2003-11-13 | 2005-06-09 | Seiko Epson Corp | 表面洗浄改質方法及び表面洗浄改質装置 |
US7118452B2 (en) * | 2004-02-12 | 2006-10-10 | The Boeing Company | Pneumatically actuated flexible coupling end effectors for lapping/polishing |
WO2010077826A2 (en) * | 2008-12-30 | 2010-07-08 | Saint-Gobain Abrasives, Inc. | Multi-air aqua reservoir moist sanding system |
USD785339S1 (en) * | 2014-10-23 | 2017-05-02 | Griot's Garage, Inc. | Hand applicator buffing pad |
CN108284365A (zh) * | 2018-01-16 | 2018-07-17 | 成都精密光学工程研究中心 | 一种数控抛光工具 |
JP2019123053A (ja) * | 2018-01-18 | 2019-07-25 | 三菱重工コンプレッサ株式会社 | 狭隘部の研磨用治具、研磨用治具の製造方法、研磨方法、およびインペラの製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE106862C (de) * | ||||
US2089040A (en) * | 1935-07-05 | 1937-08-03 | Gardner Machine Co | Grinding machine and method of grinding |
DE1203151B (de) * | 1962-01-30 | 1965-10-14 | Adolf Zoeller Fa | Handpoliergeraet |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1599091A (en) * | 1924-07-09 | 1926-09-07 | Laurent Juricinec | Polishing machine chiefly for sandpapering or varnishing with a. pad the surface of materials such as wood, marble, stone |
US2119738A (en) * | 1937-03-08 | 1938-06-07 | Harry W Dempsey | Abrading apparatus |
US2309819A (en) * | 1941-04-18 | 1943-02-02 | Carborundum Co | Art of grinding and polishing glass and apparatus therefor |
US2496033A (en) * | 1948-11-22 | 1950-01-31 | James D Berry | Washing device |
US2567782A (en) * | 1949-09-19 | 1951-09-11 | Carm P Rhees | Grinding, polishing, and featheredging tool |
US2644280A (en) * | 1950-09-13 | 1953-07-07 | Carborundum Co | Sanding disk accessory |
US3107456A (en) * | 1961-09-14 | 1963-10-22 | Libbey Owens Ford Glass Co | Apparatus for surfacing glass |
US3201904A (en) * | 1961-11-09 | 1965-08-24 | Corning Glass Works | Apparatus for finishing glass surfaces |
US3345281A (en) * | 1963-09-03 | 1967-10-03 | Setco Ind Inc | Electrolytic shaping apparatus |
US3283451A (en) * | 1964-05-13 | 1966-11-08 | Bacon Felt Company | Polishing felt |
JPS4218718Y1 (de) * | 1964-11-19 | 1967-10-28 | ||
US3754359A (en) * | 1970-09-16 | 1973-08-28 | Spam D Avray | Abrasion tools |
DE7116851U (de) * | 1971-04-30 | 1972-10-05 | Lindgren B | Vorrichtung zum auftragen von fluessigkeiten auf die oberflaeche von koerpern |
US3875703A (en) * | 1973-12-26 | 1975-04-08 | Joseph V Clemente | Flexible sanding disc unit |
DE2409732A1 (de) * | 1974-03-01 | 1975-09-04 | Schuetze Karl Heinz | Geraet zum reinigen von oberflaechen |
US4102084A (en) * | 1977-08-12 | 1978-07-25 | Bloomquist Thomas N | Wet sanding device |
JPS6049548B2 (ja) * | 1978-03-15 | 1985-11-02 | 旭硝子株式会社 | 彎曲面を有する物品の研磨具 |
GB2003770B (en) * | 1978-09-12 | 1982-01-20 | Marton Miksa | Pad assembly for vacuum rotary sander |
-
1981
- 1981-08-13 DE DE19813132028 patent/DE3132028A1/de active Granted
-
1982
- 1982-06-18 FR FR8210648A patent/FR2511287B1/fr not_active Expired
- 1982-07-06 US US06/395,096 patent/US4490948A/en not_active Expired - Fee Related
- 1982-07-19 IT IT67925/82A patent/IT1155562B/it active
- 1982-08-10 JP JP57138072A patent/JPS5851079A/ja active Pending
- 1982-08-11 GB GB08223099A patent/GB2103970B/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE106862C (de) * | ||||
US2089040A (en) * | 1935-07-05 | 1937-08-03 | Gardner Machine Co | Grinding machine and method of grinding |
DE1203151B (de) * | 1962-01-30 | 1965-10-14 | Adolf Zoeller Fa | Handpoliergeraet |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110788699A (zh) * | 2019-12-11 | 2020-02-14 | 中国工程物理研究院激光聚变研究中心 | 抛光盘及抛光*** |
Also Published As
Publication number | Publication date |
---|---|
GB2103970B (en) | 1985-04-17 |
FR2511287B1 (fr) | 1986-04-04 |
IT8267925A0 (it) | 1982-07-19 |
IT1155562B (it) | 1987-01-28 |
FR2511287A1 (fr) | 1983-02-18 |
GB2103970A (en) | 1983-03-02 |
US4490948A (en) | 1985-01-01 |
JPS5851079A (ja) | 1983-03-25 |
DE3132028C2 (de) | 1991-04-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8125 | Change of the main classification |
Ipc: B24D 9/08 |
|
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |