DE3029104A1 - Focussing of laser beam on work-piece during laser beam machining - where angular movement of beam deflection mirror automatically alters position of focussing lens - Google Patents

Focussing of laser beam on work-piece during laser beam machining - where angular movement of beam deflection mirror automatically alters position of focussing lens

Info

Publication number
DE3029104A1
DE3029104A1 DE19803029104 DE3029104A DE3029104A1 DE 3029104 A1 DE3029104 A1 DE 3029104A1 DE 19803029104 DE19803029104 DE 19803029104 DE 3029104 A DE3029104 A DE 3029104A DE 3029104 A1 DE3029104 A1 DE 3029104A1
Authority
DE
Germany
Prior art keywords
laser beam
focussing
lens
angular movement
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19803029104
Other languages
German (de)
Inventor
Michael 8164 Hausham Höcherl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19803029104 priority Critical patent/DE3029104A1/en
Publication of DE3029104A1 publication Critical patent/DE3029104A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam

Abstract

When a laser beam is deflected by a mirror onto the surface of a workpiece, the angular movement of the mirror alters its distance from the piece, and therefore the beam is not always correctly focussed. In the invention, a focusing lens is located between a laser and the mirror; and the lens is moved towards or away from the mirror in accordance with the X-Y deflection of the latter. A suitable motor, e.g. a linear motor is pref. employed to move the lens towards or away from the mirror. The laser beam is always exactly focussed on the surface of the workpiece.

Description

Verfahren und Vorrichtung zur Fokuskorrektur bei 3e-Method and device for focus correction at 3e-

arbeitungslasern.working lasers.

Die Erfindung betrifft ein Verfahren und eine Vorrichtung zur F'okuskorrektur bei Bearbeitungsiasern.The invention relates to a method and a device for focus correction for processing aliases.

Bei den bekannten Bearbeitungslasern mit Spiegelablenksystem wird zur Fokuseinstellung nur zu Beginn das zu bearbeitende Werkstück oder das Lasersystem fokusgerecht eingestellt. Eine Fokuskorrektur während des 3earbeitungsvorganges findet nicht statt. Da sich der Fokus aber auf einer gekrümmten Fläche (Figur 1) bewegt, stellt dieses Verfahren immer nur einen Kompromiß dar.In the known processing lasers with a mirror deflection system for focus adjustment only at the beginning the workpiece to be machined or the laser system adjusted for focus. A focus correction during the machining process does not take place. Since the focus is on a curved surface (Figure 1) moves, this procedure is always only a compromise.

Auch ein diesbezüglich berechnetes Objekt. aus mehreren Linsen kann je nach Aufwand ebenfalls nur einen Kompromiß darstellen. In der Figur 1 ist mit α die Auslenkung eines Laserstrahls gegenüber der Senkrechten und mit x der Abstand des Fokus F' über einer Planfläche in der ausgelenkten Stellung bezeichnet.Also an object calculated in this regard. from multiple lenses can also only represent a compromise, depending on the effort involved. In the figure 1 is with α the deflection of a laser beam relative to the vertical and with x the The distance of the focus F 'over a plane surface in the deflected position is referred to.

Der Erfindung liegt die Aufgabe zugrunde, ein System zu schaffen, das es erlaubt, den Fokus während des Bearbeitungsvorganges laufend nachzustellen und damit den Fokus exakt auf der Oberfläche eines Werkstückes zu halten. Das wird nach der Erfindung dadurch erreicht, daß das fokussierende System (Linse) um den Korrekturwert abhängig von der X- und Y-Auslenkung verstellt wird.The invention is based on the object of creating a system which allows the focus to be continuously readjusted during the machining process and thus to keep the focus exactly on the surface of a workpiece. That will achieved according to the invention in that the focusing system (lens) around the Correction value is adjusted depending on the X and Y deflection.

Damit wird dann erreicht, daß der Fokus exakt auf der Werkstückoberfläche gehalten werden kann.This then ensures that the focus is exactly on the workpiece surface can be held.

Nach einer .,eiterbildung der Erfindung wird das fokussierende System vor das Ablenlzsystem gesetzt und ein geeigneter Antrieb (Tauchspul-, Linearmotor oder dergleichen) in Abhängigkeit von der 2 und Y-Ablenkung das fokussierende System auf optimale Fokussierung nachgeführt. Auf diese Weise ist es möglich, Linsen zu verwenden, die nur einen minimalen Durchmesser aufweisen und eine sehr geringe träge Masse darstellen. Das Korrektur-System ist somit sehr schnell. Aufgrund des geringen erforderlichen Durchmessers für die Linse und des Ausscheidens von optischen Korrekturen können einfache und billige Obäektive Verwendung finden.According to one embodiment of the invention, the focusing system placed in front of the payment system and a suitable drive (moving coil, Linear motor or the like) depending on the 2 and Y deflection the focusing System tracked for optimal focus. In this way it is possible to use lenses to use which have only a minimal diameter and a very small one represent inert mass. The correction system is therefore very quick. Because of the small diameter required for the lens and the dropping out of optical Corrections can be used easily and cheaply.

Im Rahmen der Erfindung ist es möglich, zusätzlich zur X- und Y-Korrektur auch die Oberflachengeometrie des zu bearbeitenden Werkstücks bei der Fokuskorrektur mit einzubeziehen.In the context of the invention it is possible in addition to the X and Y correction also the surface geometry of the workpiece to be machined during focus correction to be included.

Die Erfindung wird anhand der Figur 2 erläutert.The invention is explained with reference to FIG.

In dieser Figur ist eine Linse 1 dargestellt, die auf einem nicht gezeichneten Objektivträger befestigt ist.In this figure, a lens 1 is shown, which is not on a Drawn lens carrier is attached.

Der Objektifträger oder Linsenträger kann durch einen geeigneten Antrieb (z. B. Taushspul-, Linearmotor usw.) in Abhängigkeit von der ermittelten X- und Y-Auslenkung (Analog oder durch Digitalrechner) an das Ablenksystem 3 heran oder von diesem entfernt werden. Von einer Laserstrahlenquelle 4 wird ein Laserstrahl 5 emittiert, der auf die Linse 1 auftrifft. Von der Linse gelangt der Laserstrahl auf das Ablenksystem 3, das den Strahl auf eine Werkstückoberfläche 6 fokussiert F. Durch die Annäherung bzw. Entfernung der Linse 1 von dem Ablenksystem 3 ist es möglich, den Fokus F' immer auf der Werkstückoberfläche 6 zu halten.The slide or lens carrier can be driven by a suitable drive (e.g. swap coil, linear motor, etc.) depending on the determined X and Y deflection (analog or by digital computer) to the deflection system 3 or be removed from this. A laser beam is emitted from a laser beam source 4 5 emitted which impinges on the lens 1. The laser beam comes from the lens on the deflection system 3, which focuses the beam on a workpiece surface 6 F. By approaching or removing lens 1 from deflection system 3, it is possible to keep the focus F 'always on the workpiece surface 6.

2 Patentansprüche 2 Figuren Leerseite2 claims 2 figures Blank page

Claims (2)

P a t e n t a n s p r ü c h e 1. Verfahren zur Fokuskorrektur bei der Bearbeitung m Lasern, d a d u r c h g e k e n n z e i c h n e t daß das lokussierende System (Linse) (1) um den Korrekturwert aNängig uon den Positionswerten X und Y verstellt wird.P a t e n t a n s p r ü c h e 1. Procedure for focus correction in the Machining with lasers, which does not show that the locus System (lens) (1) by the correction value depending on the position values X and Y is adjusted. 2. Vorrichtung zur Durchführung des Verfahrens nach ,Qnspruch 1, d a d u r c h g e k e n n z e c h n e t daß das fokussierende System (1) vor das Ablenksystem (j) gesetzt ist und ein geeigneter Antrieb (Tauchspul-, Linearmotor oder dergleichen)~ in Abhängigkeit von der X- und Y-Ablenkung das fokussierende System auf optimale Fokussierung nachführt.2. Device for carrying out the method according to, Qnspruch 1, d it is not stated that the focusing system (1) is in front of the deflection system (j) is set and a suitable drive (moving coil motor, linear motor or the like) ~ depending on the X and Y deflection, the focusing system to optimal Tracking.
DE19803029104 1980-07-31 1980-07-31 Focussing of laser beam on work-piece during laser beam machining - where angular movement of beam deflection mirror automatically alters position of focussing lens Withdrawn DE3029104A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19803029104 DE3029104A1 (en) 1980-07-31 1980-07-31 Focussing of laser beam on work-piece during laser beam machining - where angular movement of beam deflection mirror automatically alters position of focussing lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803029104 DE3029104A1 (en) 1980-07-31 1980-07-31 Focussing of laser beam on work-piece during laser beam machining - where angular movement of beam deflection mirror automatically alters position of focussing lens

Publications (1)

Publication Number Publication Date
DE3029104A1 true DE3029104A1 (en) 1982-02-18

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Country Status (1)

Country Link
DE (1) DE3029104A1 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3317022A1 (en) * 1983-05-10 1984-11-15 W.C. Heraeus Gmbh, 6450 Hanau MATERIAL MACHINING SYSTEM
FR2598339A1 (en) * 1986-05-06 1987-11-13 Europ Agence Spatiale PARABOLIC REFLECTOR ANTENNAS AND METHOD FOR OBTAINING THE SAME
WO1996038257A2 (en) * 1995-05-30 1996-12-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Laser beam apparatus and workpiece machining process
US5611949A (en) * 1994-05-04 1997-03-18 Norfin International, Inc. Method and apparatus for laser cutting separate items carried on a continuously moving web
US6140602A (en) * 1997-04-29 2000-10-31 Technolines Llc Marking of fabrics and other materials using a laser
DE10137006A1 (en) * 2001-07-25 2003-02-20 Dirk Schekulin Laser cutter for moving band of material, includes beam deflector which can be rotated about axis inclined with respect to line of cutting and band advance
EP1228835B1 (en) * 2001-02-05 2004-03-17 PRIMA INDUSTRIE S.p.A. System and method for remote laser welding
US20110259862A1 (en) * 2008-09-05 2011-10-27 Mtt Technologies Limited Additive Manufacturing Apparatus with a Chamber and a Removably-Mountable Optical Module; Method of Preparing a Laser Processing Apparatus with such Removably-Mountable Optical Module
CN101041205B (en) * 2002-08-30 2011-11-30 住友重机械工业株式会社 laser processing method and processing device
US20170028509A1 (en) * 2014-04-04 2017-02-02 Borgwarner Inc. Method and laser device for forming grooves in bearing surfaces, and bearings including such grooves
US11446774B2 (en) 2015-10-30 2022-09-20 Seurat Technologies, Inc. Dynamic optical assembly for laser-based additive manufacturing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2034341B2 (en) * 1970-06-11 1973-09-13 Mitsubishi Electric Corp., Tokio Device for material processing by means of laser beams
DE2713904B2 (en) * 1977-03-29 1979-02-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Device for processing work stacks by means of a laser beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2034341B2 (en) * 1970-06-11 1973-09-13 Mitsubishi Electric Corp., Tokio Device for material processing by means of laser beams
DE2713904B2 (en) * 1977-03-29 1979-02-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Device for processing work stacks by means of a laser beam

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DE-Z.: Laser und angewandte Strahlentechnik, Nr. 1, 1970, S. 17-22 *
US-Z.: IBM Technical Disclosure Bulletin, Bd. 10, Nr. 9, Febr. 1968, S. 1359-1360 *

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3317022A1 (en) * 1983-05-10 1984-11-15 W.C. Heraeus Gmbh, 6450 Hanau MATERIAL MACHINING SYSTEM
FR2598339A1 (en) * 1986-05-06 1987-11-13 Europ Agence Spatiale PARABOLIC REFLECTOR ANTENNAS AND METHOD FOR OBTAINING THE SAME
US4860023A (en) * 1986-05-06 1989-08-22 European Space Agency/Agence Spatiale Europeenne Parabolic reflector antennas and method of making same
US5611949A (en) * 1994-05-04 1997-03-18 Norfin International, Inc. Method and apparatus for laser cutting separate items carried on a continuously moving web
WO1996038257A2 (en) * 1995-05-30 1996-12-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Laser beam apparatus and workpiece machining process
WO1996038257A3 (en) * 1995-05-30 1997-02-20 Fraunhofer Ges Forschung Laser beam apparatus and workpiece machining process
US6114651A (en) * 1995-05-30 2000-09-05 Frauenhofer Society For The Promotion Of Applied Research Laser beam apparatus and workpiece machining process
US6140602A (en) * 1997-04-29 2000-10-31 Technolines Llc Marking of fabrics and other materials using a laser
EP1228835B1 (en) * 2001-02-05 2004-03-17 PRIMA INDUSTRIE S.p.A. System and method for remote laser welding
DE10137006A1 (en) * 2001-07-25 2003-02-20 Dirk Schekulin Laser cutter for moving band of material, includes beam deflector which can be rotated about axis inclined with respect to line of cutting and band advance
CN101041205B (en) * 2002-08-30 2011-11-30 住友重机械工业株式会社 laser processing method and processing device
US20110259862A1 (en) * 2008-09-05 2011-10-27 Mtt Technologies Limited Additive Manufacturing Apparatus with a Chamber and a Removably-Mountable Optical Module; Method of Preparing a Laser Processing Apparatus with such Removably-Mountable Optical Module
US9114478B2 (en) * 2008-09-05 2015-08-25 Mtt Technologies Limited Additive manufacturing apparatus with a chamber and a removably-mountable optical module; method of preparing a laser processing apparatus with such removably-mountable optical module
US20170028509A1 (en) * 2014-04-04 2017-02-02 Borgwarner Inc. Method and laser device for forming grooves in bearing surfaces, and bearings including such grooves
US10654128B2 (en) * 2014-04-04 2020-05-19 Borgwarner, Inc. Method and laser device for forming grooves in bearing surfaces, and bearings including such grooves
US11446774B2 (en) 2015-10-30 2022-09-20 Seurat Technologies, Inc. Dynamic optical assembly for laser-based additive manufacturing

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