DE2605670A1 - Out of phase electrical signal generator - has photoelectric scanning system comprising two gratings displaced relative to each other - Google Patents
Out of phase electrical signal generator - has photoelectric scanning system comprising two gratings displaced relative to each otherInfo
- Publication number
- DE2605670A1 DE2605670A1 DE19762605670 DE2605670A DE2605670A1 DE 2605670 A1 DE2605670 A1 DE 2605670A1 DE 19762605670 DE19762605670 DE 19762605670 DE 2605670 A DE2605670 A DE 2605670A DE 2605670 A1 DE2605670 A1 DE 2605670A1
- Authority
- DE
- Germany
- Prior art keywords
- pupil
- phase
- phase plate
- gratings
- scanning system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000001747 pupil Anatomy 0.000 claims abstract description 13
- 238000003384 imaging method Methods 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 8
- 241001416181 Axis axis Species 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 abstract 1
- 230000010363 phase shift Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Abstract
Description
Einrichtung zur Erzeugung phasen- Device for generating phase
verschobener elektrischer Signale Die Erfindung betrifft eine Einrichtung zur Erzeugung phasenverschobener elektrischer Signale mit einem photoelektrischen Abtastsystem mit zwei relativ zueinander verschiebbaren Gittern, welche aufeinander abgebildet werden. Shifted Electrical Signals The invention relates to a device for generating phase-shifted electrical signals with a photoelectric Scanning system with two grids which can be moved relative to one another and which are on top of one another can be mapped.
Es ist bekannt, daß bei einem endlichen Abstand zwischen Maßstabgitter und Abtastgitter durch eine geeignete Anordnung von Photoempfängern mehrere phasenverschobene Signale erzeugt werden können. Vgl. hierzu z.B. deutsche Patentschrift Nr. 1 921 507.It is known that with a finite distance between the scale grids and scanning grids several out of phase with a suitable arrangement of photoreceivers Signals can be generated. See, for example, German Patent No. 1 921 507
Bei Verwendung einer optischen Abbildung der Gitter, insbesondere wie sie in der deutschen Offenlegungsschrift 1 625 545 dargelegt ist, kann die Schrägdurchstrahlung in einer Ebene, die parallel zur Meßrichtung liegt, stören.When using an optical image of the grating, in particular As set out in German Offenlegungsschrift 1 625 545, the oblique transmission can interfere in a plane that is parallel to the direction of measurement.
Dieser Nachteil wird nach der Erfindung dadurch vermieden, daß bei einer Einrichtung der eingangs genannten Art die Pupille eines für die Abbildung der Gitter benutzten Abbildungssysteme unterteilt ist und in jeder Teilpupille eine, eine unterschiedliche Phasenbeeinflussung der einzelnen Beugungsordnungen bewirkende Phasenplatte angeordnet ist und~in einem Bil-d der Pupille jeder Teilpupille ein photoelektrischer Empfänger zugeordnet ist.This disadvantage is avoided according to the invention in that at a device of the type mentioned at the outset, the pupil for imaging the imaging system used is subdivided and in each partial pupil one, causing a different phase influence of the individual diffraction orders Phase plate is arranged and ~ in a picture of the pupil of each partial pupil Photoelectric receiver is assigned.
Durch die Phasenverschiebung der einzelnen Beugungsordnungen wird eine gewünschte Phasenverschiebung im Signalverlauf erreicht.Due to the phase shift of the individual diffraction orders, a desired phase shift is achieved in the signal curve.
Die Phasenplatten können stufen- oder keilförmig ausgebildet sein.The phase plates can be step-shaped or wedge-shaped.
Eine weitere Möglichkeit besteht darin, daß in der Pupille eine Phasenplatte angeordnet ist, deren eine Oberfläche der Flächengleichung z = k . x . y genügt, wobei x und y die Koordinaten senkrecht zur optischen Achse des Abtastsystemes und z-der Koordinatenwert parallel zur optischen Achse und k eine Konstante bedeuten.Another possibility is that a Phase plate is arranged whose one surface of the area equation z = k. x. y is enough, where x and y are the coordinates perpendicular to the optical axis of the scanning system and z-denotes the coordinate value parallel to the optical axis and k denotes a constant.
Die Erfindung wird im folgenden anhand der Figuren 1 bis 4 der beigefügten Zeichnungen näher erläutert. Im einzelnen zeigen: Fig. 1 ein Ausführungsbeispiel der Einrichtung nach der Erfindung in schematischer Darstellung; Fig. 2 ein Ausführungsbeispiel einer in der Einrichtung nach Fig. 1 verwendeten Phasenplatte; Fig. 5 ein weiteres Ausführungsbeispiel einer solchen Phasenplatte; Fig. 4 ein zusätzliches Ausführungsbeispiel einer Phasenplatte.The invention is illustrated below with reference to FIGS. 1 to 4 of the accompanying drawings Drawings explained in more detail. In detail: Fig. 1 shows an embodiment the device according to the invention in a schematic representation; Fig. 2 shows an embodiment a phase plate used in the device of Figure 1; Fig. 5 is another Embodiment of such a phase plate; 4 shows an additional embodiment a phase plate.
In Fig. 1 ist schematisch der GesamtauSbau einer Gitterabtasteinrichtung nach der Erfindung dargestellt. In der Ebene 1 befinden sich die Lichtpunkte L1. L2 und LD, L4, die für die Erzeugung von vier phasenverschobenen Signalen herangezogen werden.In Fig. 1 is a schematic of the overall structure of a grating scanner shown according to the invention. The light points L1 are on level 1. L2 and LD, L4, which are used to generate four phase-shifted signals will.
Diese Lichtpunkte werden mittels eines Lichtleitersystemes 1b und der Lichtquelle la erzeugt. Selbstverständlich können hierzu auch getrennte Lichtquellen benutzt werden.These points of light are by means of a light guide system 1b and the light source la generated. Of course, separate light sources can also be used for this purpose to be used.
Die Linse 2 dient dazu, die Lichtpunkte L1 bis L4 ins Unendliche abzubilden. Mit 5 ist ein Maßstabgitter bezeichnet, welches in bekannter Weise beispielsweise mit einem Maschinenteil (nicht dargestellt) verbunden ist, dessen Lageänderung gemessen werden soll. Das Maßstabgitter 5 wird durch das Abbildungssystem 4, 4' auf das feststehende (gerätefeste) Abtastgitter 6 abgebildet.The lens 2 is used to image the light points L1 to L4 into infinity. With a scale grid is referred to, which in a known manner, for example is connected to a machine part (not shown) whose change in position is measured shall be. The scale grid 5 is by the imaging system 4, 4 'on the fixed (device-fixed) scanning grids 6 shown.
Die Linse 7 dient schließlich dazu, die Lichtpunkte L1 bis L4 in die Ebene 8 abzubilden. In den Bildern L1' bis L41 der Lichtpunkte L1 bis L4 befinden sich photoelektrische Empfänger 9a bis 9d. Die optische Achse des Gesamtsystemes ist mit 0 bezeichnet. In der Pupillenebene 5 ist nun nach der Erfindung eine transparente Phasenplatte 10 angeordnet. In der Pupillenebene 5 werden die Lichtpunkte lil bis L4 abgebildet und durch die Beugung am Gitter 3 entstehen außerdem noch Beugungsbilder. Dargestellt sind lediglich die + und- 1. Beugungsordnung, bezeichnet mit Lnl und L-nl (n = 1,2,D,4). Diese Beugungsbilder erfahren durch die Phasenplatte- 10 Phasenverschiebungen, welche gewünschte Phasenverschiebungen im Signalverlauf verursachen.The lens 7 is finally used to the light points L1 to L4 in the Map level 8. In the pictures L1 'to L41 the light points L1 to L4 are located photoelectric receivers 9a to 9d. The optical axis of the overall system is denoted by 0. According to the invention, there is now a transparent one in the pupil plane 5 Phase plate 10 arranged. In the pupil plane 5, the light points are lil to L4 and the diffraction at the grating 3 also gives rise to diffraction images. Only the + and- 1st order of diffraction are shown, denoted by Lnl and L-nl (n = 1,2, D, 4). These diffraction patterns experience phase shifts due to the phase plate 10, which cause desired phase shifts in the signal curve.
Fig. 2 zeigt eine stufenförmig ausgebildete Phasenplatte, bei der jedem Bild bzw. Beugungsbild Lnm eine bestimmte Stufenhöhe der Phasenplatte zugeordnet ist, welche zu einer bestimmten Phasenverschiebung erforderlich ist.Fig. 2 shows a step-shaped phase plate in which a certain step height of the phase plate is assigned to each image or diffraction image Lnm is what is required for a specific phase shift.
Fig. 5 zeigt eine keilförmige Phasenplatte, wobei jedem Bildpunkt Lnms (L41> L40> L41 und L11, L10, L11) ein Keil anderer Keilwirkung zugeordnet ist.Fig. 5 shows a wedge-shaped phase plate, with each pixel Lnms (L41> L40> L41 and L11, L10, L11) are assigned a wedge with a different wedge effect is.
Fig. 4 zeigt eine Phasenplatte, deren empfängerseitige Oberfläche der Flächengleichung z = k . x . y genügt, bezogen auf eine ebene Grundfläche lOa. x und y sind, wie dargestellt die Koordinaten senkrecht zur optischen Achse 0, Z ist die Koordinate parallel zur optischen Achse und k eine Konstante.Fig. 4 shows a phase plate, the receiver-side surface the area equation z = k. x. y is sufficient, based on a flat base area lOa. As shown, x and y are the coordinates perpendicular to the optical axis 0, Z is the coordinate parallel to the optical axis and k is a constant.
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Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762605670 DE2605670A1 (en) | 1976-02-13 | 1976-02-13 | Out of phase electrical signal generator - has photoelectric scanning system comprising two gratings displaced relative to each other |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762605670 DE2605670A1 (en) | 1976-02-13 | 1976-02-13 | Out of phase electrical signal generator - has photoelectric scanning system comprising two gratings displaced relative to each other |
Publications (1)
Publication Number | Publication Date |
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DE2605670A1 true DE2605670A1 (en) | 1977-08-18 |
Family
ID=5969747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19762605670 Pending DE2605670A1 (en) | 1976-02-13 | 1976-02-13 | Out of phase electrical signal generator - has photoelectric scanning system comprising two gratings displaced relative to each other |
Country Status (1)
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DE (1) | DE2605670A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3905838A1 (en) * | 1988-02-26 | 1989-08-31 | Okuma Machinery Works Ltd | OPTICAL LINEAR ENCODER |
EP0357277A2 (en) * | 1988-09-02 | 1990-03-07 | Renishaw plc | Optical scale-reading apparatus |
WO1996018868A1 (en) * | 1994-12-10 | 1996-06-20 | Renishaw Plc | Opto-electronic scale reading apparatus |
-
1976
- 1976-02-13 DE DE19762605670 patent/DE2605670A1/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3905838A1 (en) * | 1988-02-26 | 1989-08-31 | Okuma Machinery Works Ltd | OPTICAL LINEAR ENCODER |
EP0357277A2 (en) * | 1988-09-02 | 1990-03-07 | Renishaw plc | Optical scale-reading apparatus |
EP0357277A3 (en) * | 1988-09-02 | 1990-12-19 | Renishaw plc | Optical scale-reading apparatus |
WO1996018868A1 (en) * | 1994-12-10 | 1996-06-20 | Renishaw Plc | Opto-electronic scale reading apparatus |
US5861953A (en) * | 1994-12-10 | 1999-01-19 | Renishaw Plc | Opto-electronic scale reading apparatus with differing optical path lengths |
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Legal Events
Date | Code | Title | Description |
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OHJ | Non-payment of the annual fee |