DE20219108U1 - Coordinate measuring machine has low thermal expansion probe support - Google Patents

Coordinate measuring machine has low thermal expansion probe support

Info

Publication number
DE20219108U1
DE20219108U1 DE20219108U DE20219108U DE20219108U1 DE 20219108 U1 DE20219108 U1 DE 20219108U1 DE 20219108 U DE20219108 U DE 20219108U DE 20219108 U DE20219108 U DE 20219108U DE 20219108 U1 DE20219108 U1 DE 20219108U1
Authority
DE
Germany
Prior art keywords
coordinate measuring
measuring machine
thermal expansion
low thermal
probe support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20219108U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hexagon Metrology GmbH
Original Assignee
Brown und Sharpe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brown und Sharpe GmbH filed Critical Brown und Sharpe GmbH
Priority to DE20219108U priority Critical patent/DE20219108U1/en
Publication of DE20219108U1 publication Critical patent/DE20219108U1/en
Priority to DE20305787U priority patent/DE20305787U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00—Measuring instruments characterised by the selection of material therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A coordinate measuring machine has a low thermal expansion coefficient aluminum oxide ceramic support for the probe head (12).

Description

B G 1094VB G 1094V

PatentanwältinPatent Attorney

Dipl.-Phys. Cordula KnefelDipl.-Phys. Cordula Knefel

Wertherstr. 16, 35578 WetzlarWertherstrasse 16, 35578 Wetzlar

Postfach 1924, 35529 WetzlarPO Box 1924, 35529 Wetzlar

Telefon 06441/46330 - Telefax 06441/48256Telephone 06441/46330 - Fax 06441/48256

Deutsche GebrauchsmusteranmeldungGerman utility model application

Bezeichnung: KoordinatenmessgerätDescription: Coordinate measuring machine

Anmelderin: Brown & Sharpe GmbHApplicant: Brown & Sharpe GmbH

Siegmund-Hiepe-Straße 2-12 35578 WetzlarSiegmund-Hiepe-Strasse 2-12 35578 Wetzlar

• ··

* t»* t»

• 1• 1

PATEiMTANWALTEPATENT LAWYERS

EFELEFEL

WertrisrstraSs 1© · 35578 Wetzlar Postfach 19 24 · 35529 Wetzlar Te!. 06441/46330 · Fax 06441/48253WertrisrstraSs 1© · 35578 Wetzlar PO Box 19 24 · 35529 Wetzlar Tel. 06441/46330 · Fax 06441/48253

B G 1094B G 1094

KoordinatenmeßgerätCoordinate measuring machine

Ein Koordinatenmeßgerät konventioneller Bauart besteht aus mehreren orthogonal aufeinanderfolgenden gegenseitig verschieblichen Bauteilen dergestalt, daß ein als Taster (12) bezeichnetes Bauelement in drei Raumkoordinaten so geführt werden kann, daß jeder beliebige Raumpunkt innerhalb eines als Meßvolumen bezeichneten Raumes von diesem Taster erreicht werden kann.A coordinate measuring machine of conventional design consists of several orthogonally successive, mutually displaceable components in such a way that a component referred to as a probe (12) can be guided in three spatial coordinates in such a way that any spatial point within a space referred to as the measuring volume can be reached by this probe.

In Fig. 1 ist eine mögliche Ausbildung eines Koordinatenmeßgerätes dargestellt, bei der ein Tisch (1) gegenüber einem Grundbett (2) verschieblich gelagert ist und damit die X — Achse repräsentiert. Die am Grundbett (2) fest angebrachten Stützen (4) sind durch eine Traverse (6) verbunden, die den auf ihr verschieblich gelagerten Schlitten (7) trägt. Dieser repräsentiert die Y - Achse. Im Schlitten (7) selbst ist eine Pinole (8) verschieblich gelagert, die die Z - Achse repräsentiert.Fig. 1 shows a possible design of a coordinate measuring machine in which a table (1) is mounted so that it can move relative to a base bed (2) and thus represents the X axis. The supports (4) firmly attached to the base bed (2) are connected by a cross member (6) which carries the slide (7) which is mounted so that it can move. This represents the Y axis. A sleeve (8) which represents the Z axis is mounted so that it can move in the slide (7).

Außer dieser nur beispielhaft gezeigten Ausbildung sind Konstruktionen bekannt, bei denen die X —Achse statt durch den beweglichen Tisch (1) durch bewegliche Stützen (4) dargestellt werden. Ebenso sind statt der in Fig. 1 gezeigten vertikalen Pinole (8) horizontale Pinolen bekannt, die vertikale Achse wird dann durch den sie tragenden Schlitten dargestellt.Apart from this design, which is shown only as an example, there are known constructions in which the X axis is represented by movable supports (4) instead of the movable table (1). Likewise, instead of the vertical spindle (8) shown in Fig. 1, horizontal spindles are known, the vertical axis is then represented by the carriage that supports it.

Es ist bekannt, einzelne Komponenten ernes solchen Koordinatenmeßgerätes aus unterschiedlichen Materialien herzustellen, um bestimmte Eigenschaften dieser Materialien auszunutzen. So ist beispielsweise in dem in Fig. 1 dargestellten Koordinatenmeßgerät das Grundbett (2) sowie die Traverse (6) aus Granit, während die Stützen (4), der Schlitten (7) und die Pinole (8) aus Stahl gefertigt werden. Der Tisch (1), der innerhalb des Grundbettes (2) mittels einer Schwalbenschwanzfuhrung beweglich gelagert ist, besteht ebenfalls aus Granit. AJs Materialien für einzelne Bauteile ist ebenfalls Aluminium, sowie Polymerbeton, Kohlefaserverbundwerkstoflfe und Aluminiumoxidkeramik bekannt geworden. Die Verwendung von Aluminiumoxidkeramik beschränkte sich in der Vergangenheit allerdings auf die Pinole (8). Der Grund dafür liegt in einer gewissen Sprödigkeit von Aluminiumoxid, sowie des thermischen Ausdehnungskoeffizienten von ca, (5 - 7) * 10"6ZK in Verbindung mit einer für elektrische Isolatoren charakteristischen sehr geringen Wärmeleitfähigkeit. Insbesondere der Schlitten (7), sowie die Traverse (6) und die Stutzen (4) sind bisher nicht als aus Keramik gefertigt bekannt geworden.It is known to manufacture individual components of such a coordinate measuring machine from different materials in order to exploit certain properties of these materials. For example, in the coordinate measuring machine shown in Fig. 1, the base bed (2) and the crossbeam (6) are made of granite, while the supports (4), the slide (7) and the sleeve (8) are made of steel. The table (1), which is movably mounted within the base bed (2) by means of a dovetail guide, is also made of granite. AJ's materials for individual components are also known to be aluminum, as well as polymer concrete, carbon fiber composite materials and aluminum oxide ceramics. In the past, however, the use of aluminum oxide ceramics was limited to the sleeve (8). The reason for this lies in a certain brittleness of aluminum oxide, as well as the thermal expansion coefficient of approx. (5 - 7) * 10" 6 ZK in conjunction with a very low thermal conductivity characteristic of electrical insulators. In particular, the slide (7), as well as the cross member (6) and the nozzles (4) have not previously been known to be made of ceramic.

Mittlerweile ist von der Firma Coorstek eine Aluminiumoxidkeramik; mit sehr geringem thermischen Ausdehnungskoeffizienten von 2 * 10"6ZK lieferbar, ein Material mit einem Ausdehnungskoeffizienten von 0.2 * 10"6ZK ist als Prototyp bereits vorhanden und wird in Kürze lieferbar sein. Die Fertigung der Elemente Stützen (4), Traverse (6), Schlitten (7) und Pinole (8) aus diesem Material bringt den Vorteil, daß die Koordinatenmeßmaschine auf die Veränderung äußerer Temperatureinflüsse nur noch äußerst geringfügig mit Strukturveränderungen reagiert, was den Einsatz dieser Maschine in rauhen Fertigungsumgebungen ohne weitere technische Kunstgriffe zur Kompensation dieser Strukturveränderungen ermöglicht.Coorstek now offers an aluminum oxide ceramic with a very low thermal expansion coefficient of 2 * 10" 6 ZK; a material with an expansion coefficient of 0.2 * 10" 6 ZK is already available as a prototype and will be available shortly. Manufacturing the supports (4), crossbeam (6), slide (7) and quill (8) from this material has the advantage that the coordinate measuring machine only reacts very slightly to changes in external temperature influences with structural changes, which enables the use of this machine in harsh production environments without any further technical tricks to compensate for these structural changes.

Claims (1)

Koordinatenmeßgerät mit einem Tastkopf der in drei Raumkoordinaten verschieblich gelagert ist, dadurch gekennzeichnet, daß mindestens ein, eine Raumkoordinate repräsentierendes, den Tastkopf direkt oder indirekt tragendes, Stukturelement aus einem keramischen Material gefertigt ist, das einen thermischen Ausdehnungskoeffizient von kleiner oder gleich 3.10-6/K aufweist. Coordinate measuring device with a probe head which is displaceably mounted in three spatial coordinates, characterized in that at least one structural element representing a spatial coordinate and directly or indirectly supporting the probe head is made of a ceramic material which has a thermal expansion coefficient of less than or equal to 3.10 -6 /K.
DE20219108U 2002-12-09 2002-12-09 Coordinate measuring machine has low thermal expansion probe support Expired - Lifetime DE20219108U1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE20219108U DE20219108U1 (en) 2002-12-09 2002-12-09 Coordinate measuring machine has low thermal expansion probe support
DE20305787U DE20305787U1 (en) 2002-12-09 2003-04-10 Coordinate measuring machine has supports, crosspiece, slider and/or spindle sleeve made of ceramic material such as aluminum oxide ceramic with given expansion coefficient

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20219108U DE20219108U1 (en) 2002-12-09 2002-12-09 Coordinate measuring machine has low thermal expansion probe support

Publications (1)

Publication Number Publication Date
DE20219108U1 true DE20219108U1 (en) 2003-02-27

Family

ID=7977817

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DE20219108U Expired - Lifetime DE20219108U1 (en) 2002-12-09 2002-12-09 Coordinate measuring machine has low thermal expansion probe support
DE20305787U Expired - Lifetime DE20305787U1 (en) 2002-12-09 2003-04-10 Coordinate measuring machine has supports, crosspiece, slider and/or spindle sleeve made of ceramic material such as aluminum oxide ceramic with given expansion coefficient

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE20305787U Expired - Lifetime DE20305787U1 (en) 2002-12-09 2003-04-10 Coordinate measuring machine has supports, crosspiece, slider and/or spindle sleeve made of ceramic material such as aluminum oxide ceramic with given expansion coefficient

Country Status (1)

Country Link
DE (2) DE20219108U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005043552A1 (en) * 2003-10-21 2005-05-12 Renishaw Plc A lightweight and thermally stable metrology instrument for a coordinate position apparatus and method of manufacture of said instrument

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006026386B3 (en) * 2006-06-07 2008-01-24 Hexagon Metrology Gmbh Coordinate measuring device and probe head connecting device, has plates firmly or detachably arranged at sleeve and formed from plate parts that are connected by solid joint, where solid joint is designed as film joint
EP3126776B1 (en) * 2014-04-04 2017-12-27 Hexagon Metrology, Inc Coordinate measuring machine with carbon fiber air bearings

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4238139C2 (en) 1992-11-12 2002-10-24 Zeiss Carl The coordinate
DE19821274A1 (en) 1998-05-13 1999-11-18 Zeiss Carl Fa Coordinate measuring device in bridge construction

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005043552A1 (en) * 2003-10-21 2005-05-12 Renishaw Plc A lightweight and thermally stable metrology instrument for a coordinate position apparatus and method of manufacture of said instrument
US7506455B2 (en) 2003-10-21 2009-03-24 Renishaw Plc Metrology instruments

Also Published As

Publication number Publication date
DE20305787U1 (en) 2003-06-26

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20030403

R081 Change of applicant/patentee

Owner name: HEXAGON METROLOGY GMBH, DE

Free format text: FORMER OWNER: BROWN & SHARPE GMBH, 35578 WETZLAR, DE

Effective date: 20030702

R081 Change of applicant/patentee

Owner name: HEXAGON METROLOGY GMBH, DE

Free format text: FORMER OWNER: LEITZ MESSTECHNIK GMBH, 35578 WETZLAR, DE

Effective date: 20050725

R150 Utility model maintained after payment of first maintenance fee after three years

Effective date: 20060627

R151 Utility model maintained after payment of second maintenance fee after six years

Effective date: 20090119

R158 Lapse of ip right after 8 years

Effective date: 20110701