DE19983825T1 - Präzisionslaminar-Strömungselement zur Verwendung in thermischen Massefluss-Sensoren und Fluss-Steuerungseinrichtungen - Google Patents

Präzisionslaminar-Strömungselement zur Verwendung in thermischen Massefluss-Sensoren und Fluss-Steuerungseinrichtungen

Info

Publication number
DE19983825T1
DE19983825T1 DE19983825T DE19983825T DE19983825T1 DE 19983825 T1 DE19983825 T1 DE 19983825T1 DE 19983825 T DE19983825 T DE 19983825T DE 19983825 T DE19983825 T DE 19983825T DE 19983825 T1 DE19983825 T1 DE 19983825T1
Authority
DE
Germany
Prior art keywords
flow
control devices
thermal mass
sensors
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19983825T
Other languages
English (en)
Other versions
DE19983825B4 (de
Inventor
Robert D Mcmillan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MCMILLAN Co GEORGETOWN
Original Assignee
MCMILLAN Co GEORGETOWN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MCMILLAN Co GEORGETOWN filed Critical MCMILLAN Co GEORGETOWN
Publication of DE19983825T1 publication Critical patent/DE19983825T1/de
Application granted granted Critical
Publication of DE19983825B4 publication Critical patent/DE19983825B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE19983825T 1998-12-21 1999-12-14 Vorrichtung zum thermischen Messen eines Massenflusses eines Gasstromes und Verwendung eines Laminar-Flusselements Expired - Fee Related DE19983825B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/217,782 US6119730A (en) 1998-12-21 1998-12-21 Precision laminar flow element for use in thermal mass flow sensors and flow controllers
US09/217,782 1998-12-21
PCT/US1999/029757 WO2000037806A1 (en) 1998-12-21 1999-12-14 Precision laminar flow element for use in thermal mass flow sensors and flow controllers

Publications (2)

Publication Number Publication Date
DE19983825T1 true DE19983825T1 (de) 2002-01-03
DE19983825B4 DE19983825B4 (de) 2005-06-30

Family

ID=22812491

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19983825T Expired - Fee Related DE19983825B4 (de) 1998-12-21 1999-12-14 Vorrichtung zum thermischen Messen eines Massenflusses eines Gasstromes und Verwendung eines Laminar-Flusselements

Country Status (4)

Country Link
US (1) US6119730A (de)
DE (1) DE19983825B4 (de)
GB (1) GB2358930B (de)
WO (1) WO2000037806A1 (de)

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US8979525B2 (en) 1997-11-10 2015-03-17 Brambel Trading Internacional LDS Streamlined body and combustion apparatus
DE10158295B4 (de) * 2001-11-23 2005-11-24 Bramble-Trading Internacional Lda, Funchal Strömungskörper
US6755079B1 (en) 2000-03-27 2004-06-29 Halliburton Energy Services, Inc. Method and apparatus for determining fluid viscosity
DE10035054C1 (de) * 2000-07-19 2001-10-25 Draeger Medical Ag Atemstromsensor
DE10205757B4 (de) * 2002-02-12 2005-04-21 Siemens Ag Messrohr für einen Luftmassensensor und Verfahren zu dessen Herstellung
US6826953B2 (en) * 2002-07-19 2004-12-07 Celerity Group, Inc. Flow sensor
CH696006A5 (de) * 2002-12-23 2006-11-15 Sensirion Ag Vorrichtung zur Messung des Flusses eines Gases oder einer Flüssigkeit in einem Nebenkanal.
US6843139B2 (en) * 2003-03-12 2005-01-18 Rosemount Inc. Flow instrument with multisensors
US7107834B2 (en) * 2004-11-12 2006-09-19 Mks Instruments, Inc. Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effects
US7121139B2 (en) * 2004-11-12 2006-10-17 Mks Instruments, Inc. Thermal mass flow rate sensor having fixed bypass ratio
US7343823B2 (en) * 2006-02-17 2008-03-18 Honeywell International Inc. Ultra low pressure drop flow sensor
JP2008026153A (ja) * 2006-07-21 2008-02-07 Nippon M K S Kk 質量流量計
US7654157B2 (en) * 2007-11-30 2010-02-02 Honeywell International Inc. Airflow sensor with pitot tube for pressure drop reduction
EP2107347B1 (de) * 2008-04-04 2016-08-31 Sensirion AG Flussdetektor mit Gehäuse
US8104340B2 (en) * 2008-12-19 2012-01-31 Honeywell International Inc. Flow sensing device including a tapered flow channel
DE202009009759U1 (de) * 2009-07-17 2009-09-24 Bürkert Werke GmbH & Co. KG Vorrichtung zur Bereitstellung von konditionierten Fluidströmungen
DE102009057418A1 (de) * 2009-11-11 2011-05-12 Dipl.-Ing. K. Dietzel Gmbh Anordnung zur hochdynamischen Volumenstrommessung unter Druck stehender fluider Medien
US8113046B2 (en) 2010-03-22 2012-02-14 Honeywell International Inc. Sensor assembly with hydrophobic filter
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8397586B2 (en) 2010-03-22 2013-03-19 Honeywell International Inc. Flow sensor assembly with porous insert
US8756990B2 (en) 2010-04-09 2014-06-24 Honeywell International Inc. Molded flow restrictor
US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
US8418549B2 (en) 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
DE102010025898A1 (de) * 2010-07-02 2012-01-05 Audi Ag Baukastensatz und Verfahren zum Herstellen eines Luftmassenmessers für Kraftwagen und Verfahren zum Herstellen eines Kraftwagens
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
EP3118468B1 (de) * 2015-07-14 2020-08-05 Institute of Science and Technology Austria Wiederherstellung einer laminaren strömung in einer leitung in der eine turbulente strömung herrscht
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
CN113168120A (zh) * 2018-12-06 2021-07-23 Asml荷兰有限公司 流量限制件、流量限制组件和光刻设备
EP3734233B1 (de) 2019-04-30 2023-12-13 Fas Medic S.A. Fluiderfassungsvorrichtung
CA3051376C (en) 2019-08-06 2020-04-28 Surface Solutions Inc. Methane monitoring and conversion apparatus and methods

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US1545209A (en) * 1921-03-14 1925-07-07 Abram P Steckel Flow tube and valve therefor
US2829490A (en) * 1954-08-16 1958-04-08 Thompson Prod Inc Automatic control means for varying the geometry of the air inlet of a jet engine
US3131534A (en) * 1955-10-19 1964-05-05 Thompson Ramo Wooldridge Inc Spike control for jet engines
US3204664A (en) * 1962-03-16 1965-09-07 Gorchev Dimiter Fluid flow regulating valve
US3626984A (en) * 1968-10-08 1971-12-14 British Petroleum Co Venting arrangement for storage tanks
US3626964A (en) * 1970-09-03 1971-12-14 Wheelabrator Corp Regulating valve for magnetic materials
US3995663A (en) * 1974-10-21 1976-12-07 The Boeing Company High solids brine distributor
DE2729458C3 (de) * 1977-06-30 1981-07-16 Arcu Armaturindustri AB, Alstermo Strömungsregulator, insbesondere zum Einbau zwischen einem Wasserkran und einem Wasserleitungsende
US4487062A (en) * 1983-03-30 1984-12-11 Sierra Instruments, Inc. Mass flowmeter
US4522058A (en) * 1983-06-15 1985-06-11 Mks Instruments, Inc. Laminar-flow channeling in thermal flowmeters and the like
US4571801A (en) * 1983-06-15 1986-02-25 Mks Instruments, Inc. Method of manufacturing a cartridge unit for establishing controlled laminar-flow conditions
CA1199854A (en) * 1983-08-31 1986-01-28 Majesty (Her) The Queen In Right Of Canada As Represented By The Minister Of National Defence Laminar flow element
US4800754A (en) * 1987-10-07 1989-01-31 Sierra Instruments, Inc. Wide-range, adjustable flowmeter
US5305638A (en) * 1992-03-20 1994-04-26 Dxl International, Inc. Mass flowmeter having non-adjustable flow splitter
US5332005A (en) * 1992-11-06 1994-07-26 Aalborg Instruments & Controls, Inc. Laminar flow element and method for metering fluid flow
US5511416A (en) * 1993-09-15 1996-04-30 Alicat Scientific, Inc. Wide range laminar flow element
US5763791A (en) * 1995-11-01 1998-06-09 The Rosaen Company Flowmeter
US5576498A (en) * 1995-11-01 1996-11-19 The Rosaen Company Laminar flow element for a flowmeter
US5750892A (en) * 1996-09-27 1998-05-12 Teledyne Industries, Inc. Laminar flow element with inboard sensor taps and coaxial laminar flow guides

Also Published As

Publication number Publication date
GB2358930B (en) 2002-04-17
GB0112254D0 (en) 2001-07-11
US6119730A (en) 2000-09-19
DE19983825B4 (de) 2005-06-30
GB2358930A (en) 2001-08-08
WO2000037806A1 (en) 2000-06-29

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee