DE19882793T1 - Reinigungselement - Google Patents

Reinigungselement

Info

Publication number
DE19882793T1
DE19882793T1 DE19882793T DE19882793T DE19882793T1 DE 19882793 T1 DE19882793 T1 DE 19882793T1 DE 19882793 T DE19882793 T DE 19882793T DE 19882793 T DE19882793 T DE 19882793T DE 19882793 T1 DE19882793 T1 DE 19882793T1
Authority
DE
Germany
Prior art keywords
cleaning element
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19882793T
Other languages
English (en)
Inventor
Eric Shurtliff
Thomas Waddle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam IPEC Corp
Original Assignee
Speedfam IPEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam IPEC Corp filed Critical Speedfam IPEC Corp
Publication of DE19882793T1 publication Critical patent/DE19882793T1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning In General (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DE19882793T 1997-11-10 1998-10-27 Reinigungselement Ceased DE19882793T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/967,162 US6006391A (en) 1997-11-10 1997-11-10 Workpiece cleaning element with improved rib configuration
PCT/US1998/022622 WO1999024176A1 (en) 1997-11-10 1998-10-27 Workpiece cleaning element with improved rib configuration

Publications (1)

Publication Number Publication Date
DE19882793T1 true DE19882793T1 (de) 2001-03-08

Family

ID=25512382

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19882793T Ceased DE19882793T1 (de) 1997-11-10 1998-10-27 Reinigungselement

Country Status (7)

Country Link
US (1) US6006391A (de)
JP (1) JP2001522718A (de)
KR (1) KR20010031927A (de)
DE (1) DE19882793T1 (de)
GB (1) GB2348121B (de)
MY (1) MY133179A (de)
WO (1) WO1999024176A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW353784B (en) * 1996-11-19 1999-03-01 Tokyo Electron Ltd Apparatus and method for washing substrate
DE19860190A1 (de) * 1998-02-04 1999-08-05 Heidelberger Druckmasch Ag Vorrichtung zur Reinigung eines Zylinders in einer Druckmaschine
JP3200036B2 (ja) * 1998-05-22 2001-08-20 アイオン株式会社 洗浄用回転ブラシ
US6273100B1 (en) * 1998-08-27 2001-08-14 Micron Technology, Inc. Surface cleaning apparatus and method
US6620257B1 (en) * 1999-06-30 2003-09-16 Hoya Corporation Scrub cleaning method for substrate and manufacturing method for information recording medium
US6818604B2 (en) 2001-10-04 2004-11-16 Speedfam-Ipec Corporation System and method for cleaning workpieces
CN1863645B (zh) 2003-08-08 2011-11-30 安格斯公司 用于制作浇注在可旋转基体上的整体式多孔垫的方法和材料
US7814613B1 (en) 2003-10-23 2010-10-19 R.E. Whittaker Company, Inc. Rollers and disks for carpet cleaning
USD622920S1 (en) 2007-05-02 2010-08-31 Entegris Corporation Cleaning sponge roller
US20100186180A1 (en) * 2009-01-23 2010-07-29 Xyratex Corporation Support structure for multiple workpiece support rollers
US20110182653A1 (en) * 2010-01-26 2011-07-28 Miller Kenneth C Variable Pressure Brush/Pad
US9333046B2 (en) * 2012-10-22 2016-05-10 Steven Scott Rauch Surgical instrument tip cleaner

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1775186A (en) * 1925-12-16 1930-09-09 Sewall Paint & Varnish Company Rubbing machine
BE347609A (de) * 1927-12-29
US1809907A (en) * 1930-01-31 1931-06-16 Frank E Newcomb Rubbing or sanding pad
FR798265A (fr) * 1935-10-22 1936-05-13 Appareil de nettoyage des habitations
FR856480A (fr) * 1939-02-28 1940-06-14 Paulstra Sa Disque élastique pour touret à polir
US2289545A (en) * 1940-04-06 1942-07-14 Trico Products Corp Windshield wiper
US2677142A (en) * 1952-03-27 1954-05-04 Louis J Mundo Rotary scrub brush head
US2757491A (en) * 1953-01-16 1956-08-07 Pittsburgh Plate Glass Co Plastic polishing runner
US2880432A (en) * 1956-02-02 1959-04-07 Louis M Schnider Egg cleaning machine
US2880443A (en) * 1956-09-04 1959-04-07 Stanley Home Products Inc Mop having interior means for a handle or the like
CH374154A (de) * 1958-06-13 1963-12-31 Minnesota Mining & Mfg Umlaufmitnehmerkissen für Umlaufschleifkörper
US3418675A (en) * 1967-10-17 1968-12-31 Mirror Bright Polish Co Buffing wheel
JPS598352Y2 (ja) * 1979-05-28 1984-03-15 富士通株式会社 ガラスマスクの洗浄装置
NL191018C (nl) * 1985-09-17 1994-12-16 Gerrit Broersz Werktuig voor het verwijderen van aangroeiingen op constructies beneden de zeespiegel.
JP2701862B2 (ja) * 1988-04-04 1998-01-21 鐘紡株式会社 スクラブ洗浄用回転ブラシ
US5144711A (en) * 1991-03-25 1992-09-08 Westech Systems, Inc. Cleaning brush for semiconductor wafer
US5311634A (en) * 1993-02-03 1994-05-17 Nicholas Andros Sponge cleaning pad
FR2728183B1 (fr) * 1994-12-15 1997-03-21 Rollando Didier Francisque Outil de nettoyage et recurage des surfaces sensibles en matiere plastique
US5461750A (en) * 1995-02-02 1995-10-31 Kaiser; Richard A. Double curved backing plate with cushioned support for rotary buffing pads
US5778481A (en) * 1996-02-15 1998-07-14 International Business Machines Corporation Silicon wafer cleaning and polishing pads

Also Published As

Publication number Publication date
GB2348121B (en) 2001-08-08
KR20010031927A (ko) 2001-04-16
JP2001522718A (ja) 2001-11-20
US6006391A (en) 1999-12-28
WO1999024176A1 (en) 1999-05-20
MY133179A (en) 2007-10-31
GB2348121A (en) 2000-09-27
GB0010453D0 (en) 2000-06-14

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
8131 Rejection