DE19681500T1 - Interferometer mit Compound-Optik - Google Patents
Interferometer mit Compound-OptikInfo
- Publication number
- DE19681500T1 DE19681500T1 DE19681500T DE19681500T DE19681500T1 DE 19681500 T1 DE19681500 T1 DE 19681500T1 DE 19681500 T DE19681500 T DE 19681500T DE 19681500 T DE19681500 T DE 19681500T DE 19681500 T1 DE19681500 T1 DE 19681500T1
- Authority
- DE
- Germany
- Prior art keywords
- interferometer
- compound optics
- optics
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
- G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/509,161 US5793488A (en) | 1995-07-31 | 1995-07-31 | Interferometer with compound optics for measuring cylindrical objects at oblique incidence |
PCT/US1996/012145 WO1997005448A1 (en) | 1995-07-31 | 1996-07-24 | Interferometer with compound optics |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19681500T1 true DE19681500T1 (de) | 1999-03-25 |
DE19681500C2 DE19681500C2 (de) | 2000-04-20 |
Family
ID=24025546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19681500T Expired - Fee Related DE19681500C2 (de) | 1995-07-31 | 1996-07-24 | Interferometer mit Compound-Optik und Messverfahren mit diesem |
Country Status (5)
Country | Link |
---|---|
US (1) | US5793488A (de) |
JP (1) | JP3784415B2 (de) |
DE (1) | DE19681500C2 (de) |
GB (2) | GB2318425B (de) |
WO (1) | WO1997005448A1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19602445A1 (de) * | 1996-01-24 | 1997-07-31 | Nanopro Luftlager Produktions | Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers |
US5719676A (en) * | 1996-04-12 | 1998-02-17 | Tropel Corporation | Diffraction management for grazing incidence interferometer |
US5889591A (en) * | 1996-10-17 | 1999-03-30 | Tropel Corporation | Interferometric measurement of toric surfaces at grazing incidence |
US5777738A (en) * | 1997-03-17 | 1998-07-07 | Tropel Corporation | Interferometric measurement of absolute dimensions of cylindrical surfaces at grazing incidence |
EP1103785A1 (de) * | 1999-11-26 | 2001-05-30 | Nova C.O.R.D. Ag | Verfahren und Vorrichtung zur Ermittlung von Formveränderungen an torusförmigen Prüfobjekten |
DE10195052B3 (de) * | 2000-01-25 | 2015-06-18 | Zygo Corp. | Verfahren und Einrichtungen zur Bestimmung einer geometrischen Eigenschaft eines Versuchsgegenstands sowie optisches Profilmesssystem |
DE10039239A1 (de) * | 2000-08-11 | 2002-03-07 | Bosch Gmbh Robert | Optische Messvorrichtung |
DE10303364A1 (de) * | 2003-01-29 | 2004-08-05 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg | Vorrichtung zur Bestimmung des Höhenprofils eines Objekts |
US7027145B2 (en) * | 2003-06-24 | 2006-04-11 | The Regents Of The University Of Michigan | Reconfigurable surface finish inspection apparatus for cylinder bores and other surfaces |
US7433058B2 (en) * | 2004-07-12 | 2008-10-07 | Solvision Inc. | System and method for simultaneous 3D height measurements on multiple sides of an object |
WO2008110239A1 (en) * | 2007-03-15 | 2008-09-18 | Carl Zeiss Smt Ag | Diffractive component, interferometer arrangement, method for qualifying a dual diffraction grating, method of manufacturing an optical element, and interferometric method |
US8174695B2 (en) * | 2008-08-15 | 2012-05-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Arrayed micro-ring spectrometer system and method of use |
US8094306B2 (en) * | 2008-08-15 | 2012-01-10 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Micro ring grating spectrometer with adjustable aperture |
US8018815B2 (en) * | 2008-08-15 | 2011-09-13 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Micro-Fresnel zone plate optical devices using densely accumulated ray points |
US8307528B2 (en) | 2009-10-05 | 2012-11-13 | Sonnax Industries, Inc. | Low clearance machined part mating system |
DE102013203211A1 (de) * | 2012-06-15 | 2013-12-19 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur interferentiellen Abstandsmessung |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE106769C (de) * | ||||
DE215388C (de) * | ||||
DE233644C (de) * | ||||
GB1142702A (en) * | 1965-06-15 | 1969-02-12 | Nat Res Dev | Interferometric examination of objects and materials |
DD106769A3 (de) * | 1972-01-04 | 1974-07-05 | Verfahren und anordnung zur pr]fung beliebiger mantelfl[chen rotationssymmetrischer festk\rper mittels synthetischer hologramme | |
US3907438A (en) * | 1973-06-22 | 1975-09-23 | Gen Electric | Contour measuring system for cylinders |
US4436424A (en) * | 1981-07-27 | 1984-03-13 | Gca Corporation | Interferometer using transverse deviation of test beam |
US4391526A (en) * | 1981-08-24 | 1983-07-05 | Itek Corporation | Interferometric surface contour measuring arrangement |
US4606640A (en) * | 1984-04-02 | 1986-08-19 | The Perkin-Elmer Corporation | Method and apparatus for optically testing cylindrical surfaces |
US4678333A (en) * | 1985-05-10 | 1987-07-07 | Nicolet Instrument Corporation | Double-pass optical interferometer |
JPS62177421A (ja) * | 1986-01-31 | 1987-08-04 | Fuji Photo Optical Co Ltd | 斜入射干渉計装置 |
US4653522A (en) * | 1986-07-07 | 1987-03-31 | Woodford Manufacturing Company | Ground hydrant and method for operating same |
US4791584A (en) * | 1986-10-15 | 1988-12-13 | Eastman Kodak Company | Sub-nyquist interferometry |
US4898470A (en) * | 1988-07-12 | 1990-02-06 | Eastman Kodak Company | Apparatus and method for testing circular cylindrical or conical surfaces |
US5041726A (en) * | 1990-06-11 | 1991-08-20 | Hughes Aircraft Company | Infrared holographic defect detector |
JP2619566B2 (ja) * | 1990-11-20 | 1997-06-11 | オ−クマ株式会社 | 光学式位置検出器 |
JPH04221704A (ja) * | 1990-12-25 | 1992-08-12 | Matsushita Electric Works Ltd | 位相シフト斜入射干渉計 |
US5220403A (en) * | 1991-03-11 | 1993-06-15 | International Business Machines Corporation | Apparatus and a method for high numerical aperture microscopic examination of materials |
US5210591A (en) * | 1991-08-02 | 1993-05-11 | Hughes Aircraft Company | Interferometric ball bearing test station |
US5218423A (en) * | 1991-09-27 | 1993-06-08 | Hughes Aircraft Company | Method and apparatus for generating a plurality of radiation beams from incident radiation in a multiple wavelength interferometer |
US5268742A (en) * | 1992-06-15 | 1993-12-07 | Hughes Aircraft Company | Full aperture interferometry for grazing incidence optics |
JPH0611323A (ja) * | 1992-06-26 | 1994-01-21 | Minolta Camera Co Ltd | 形状測定装置 |
US5526116A (en) * | 1994-11-07 | 1996-06-11 | Zygo Corporation | Method and apparatus for profiling surfaces using diffractive optics which impinges the beams at two different incident angles |
US5654798A (en) * | 1995-01-19 | 1997-08-05 | Tropel Corporation | Interferometric measurement of surfaces with diffractive optics at grazing incidence |
-
1995
- 1995-07-31 US US08/509,161 patent/US5793488A/en not_active Expired - Fee Related
-
1996
- 1996-07-24 WO PCT/US1996/012145 patent/WO1997005448A1/en active Application Filing
- 1996-07-24 GB GB9800874A patent/GB2318425B/en not_active Expired - Fee Related
- 1996-07-24 JP JP50769897A patent/JP3784415B2/ja not_active Expired - Fee Related
- 1996-07-24 GB GB9909487A patent/GB2334345B/en not_active Expired - Fee Related
- 1996-07-24 DE DE19681500T patent/DE19681500C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3784415B2 (ja) | 2006-06-14 |
JPH11510251A (ja) | 1999-09-07 |
GB2334345B (en) | 2000-01-19 |
GB9909487D0 (en) | 1999-06-23 |
GB9800874D0 (en) | 1998-03-11 |
US5793488A (en) | 1998-08-11 |
GB2318425B (en) | 1999-07-14 |
WO1997005448A1 (en) | 1997-02-13 |
GB2318425A (en) | 1998-04-22 |
DE19681500C2 (de) | 2000-04-20 |
GB2334345A (en) | 1999-08-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8607 | Notification of search results after publication | ||
8607 | Notification of search results after publication | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |