DE1939667B2 - Verfahren zur kontinuierlichen messung der dicke einer duennschicht - Google Patents
Verfahren zur kontinuierlichen messung der dicke einer duennschichtInfo
- Publication number
- DE1939667B2 DE1939667B2 DE19691939667 DE1939667A DE1939667B2 DE 1939667 B2 DE1939667 B2 DE 1939667B2 DE 19691939667 DE19691939667 DE 19691939667 DE 1939667 A DE1939667 A DE 1939667A DE 1939667 B2 DE1939667 B2 DE 1939667B2
- Authority
- DE
- Germany
- Prior art keywords
- thickness
- thin film
- continuous measurement
- measurement
- continuous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US75159768A | 1968-08-09 | 1968-08-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE1939667A1 DE1939667A1 (de) | 1970-02-26 |
DE1939667B2 true DE1939667B2 (de) | 1971-03-04 |
Family
ID=25022717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19691939667 Withdrawn DE1939667B2 (de) | 1968-08-09 | 1969-08-05 | Verfahren zur kontinuierlichen messung der dicke einer duennschicht |
Country Status (7)
Country | Link |
---|---|
US (1) | US3620814A (de) |
BE (1) | BE737138A (de) |
DE (1) | DE1939667B2 (de) |
FR (1) | FR2015389A1 (de) |
GB (1) | GB1283111A (de) |
NL (1) | NL6911919A (de) |
SE (1) | SE352955B (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3804532A (en) * | 1972-08-03 | 1974-04-16 | Us Navy | Transparent film uniformity gauge |
US4203799A (en) * | 1975-05-30 | 1980-05-20 | Hitachi, Ltd. | Method for monitoring thickness of epitaxial growth layer on substrate |
US3987214A (en) * | 1975-09-19 | 1976-10-19 | Rca Corporation | Method of forming conductive coatings of predetermined thickness by vacuum depositing conductive coating on a measuring body |
NL7605234A (nl) * | 1976-05-17 | 1977-11-21 | Philips Nv | Werkwijze voor het vervaardigen van een halfge- leiderinrichting en halfgeleiderinrichting ver- vaardigd met behulp van de werkwijze. |
NL7710164A (nl) * | 1977-09-16 | 1979-03-20 | Philips Nv | Werkwijze ter behandeling van een eenkristal- lijn lichaam. |
US4340617A (en) * | 1980-05-19 | 1982-07-20 | Massachusetts Institute Of Technology | Method and apparatus for depositing a material on a surface |
JPS58115306A (ja) * | 1981-12-29 | 1983-07-09 | Chugai Ro Kogyo Kaisha Ltd | 塗膜厚連続測定装置 |
WO1983004269A1 (en) * | 1982-06-01 | 1983-12-08 | Massachusetts Institute Of Technology | Maskless growth of patterned films |
US4615904A (en) * | 1982-06-01 | 1986-10-07 | Massachusetts Institute Of Technology | Maskless growth of patterned films |
US4542580A (en) * | 1983-02-14 | 1985-09-24 | Prime Computer, Inc. | Method of fabricating n-type silicon regions and associated contacts |
GB8510355D0 (en) * | 1985-04-23 | 1985-05-30 | Bicc Plc | Testing of electrical cable |
DE3805068A1 (de) * | 1988-02-18 | 1989-08-31 | Gebhard Birkle | Verfahren und vorrichtung zum optischen abtasten einer objektebene zwecks erkennung sich aendernder ueberhoehungen auf dieser ebene |
DE4017440C2 (de) * | 1990-05-30 | 1994-02-10 | Fraunhofer Ges Forschung | Verfahren zur Messung der Schichtdicke und des Brechungsindex einer dünnen Schicht auf einem Substrat und Vorrichtung zur Durchführung des Verfahrens |
DE4030801C2 (de) * | 1990-09-28 | 1998-02-05 | Siemens Ag | Meßanordnung zur berührungslosen Bestimmung der Dicke und/oder thermischen Eigenschaften von Folien und dünnen Oberflächenbeschichtungen |
EP0555544B1 (de) * | 1991-12-13 | 1996-03-20 | Kawasaki Steel Corporation | Verfahren und Vorrichtung zur Prozesssteuerung eines Strahlung aussendenden Materials |
US5843232A (en) * | 1995-11-02 | 1998-12-01 | General Electric Company | Measuring deposit thickness in composite materials production |
US6319732B1 (en) * | 1997-01-21 | 2001-11-20 | Sekidenko, Inc. | Method for controlling the temperature of a layer growing on a wafer |
US6731386B2 (en) * | 2001-01-04 | 2004-05-04 | Agere Systems Inc. | Measurement technique for ultra-thin oxides |
DE102011077567B4 (de) * | 2011-06-15 | 2013-05-29 | Leibniz-Institut Für Polymerforschung Dresden E.V. | Verfahren und vorrichtung zur ermittlung der oberflächentopografie von beschichteten, reflektierenden oberflächen |
CN115491663B (zh) * | 2022-11-21 | 2023-03-24 | 常州翊迈新材料科技有限公司 | 燃料电池金属极板涂层厚度在线监控装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL268241A (de) * | 1960-09-09 |
-
1968
- 1968-08-09 US US751597A patent/US3620814A/en not_active Expired - Lifetime
-
1969
- 1969-07-30 SE SE10707/69*A patent/SE352955B/xx unknown
- 1969-08-05 NL NL6911919A patent/NL6911919A/xx unknown
- 1969-08-05 GB GB39053/69A patent/GB1283111A/en not_active Expired
- 1969-08-05 DE DE19691939667 patent/DE1939667B2/de not_active Withdrawn
- 1969-08-06 BE BE737138D patent/BE737138A/xx not_active IP Right Cessation
- 1969-08-08 FR FR6927418A patent/FR2015389A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
SE352955B (de) | 1973-01-15 |
FR2015389A1 (de) | 1970-04-24 |
BE737138A (de) | 1970-01-16 |
DE1939667A1 (de) | 1970-02-26 |
NL6911919A (de) | 1970-02-11 |
US3620814A (en) | 1971-11-16 |
GB1283111A (en) | 1972-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
E77 | Valid patent as to the heymanns-index 1977 | ||
8339 | Ceased/non-payment of the annual fee |