DE1909728B2 - Interferometrische einrichtung - Google Patents

Interferometrische einrichtung

Info

Publication number
DE1909728B2
DE1909728B2 DE19691909728 DE1909728A DE1909728B2 DE 1909728 B2 DE1909728 B2 DE 1909728B2 DE 19691909728 DE19691909728 DE 19691909728 DE 1909728 A DE1909728 A DE 1909728A DE 1909728 B2 DE1909728 B2 DE 1909728B2
Authority
DE
Germany
Prior art keywords
interferometric device
interferometric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691909728
Other languages
English (en)
Other versions
DE1909728A1 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DE19691909728 priority Critical patent/DE1909728B2/de
Publication of DE1909728A1 publication Critical patent/DE1909728A1/de
Publication of DE1909728B2 publication Critical patent/DE1909728B2/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE19691909728 1969-02-26 1969-02-26 Interferometrische einrichtung Pending DE1909728B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19691909728 DE1909728B2 (de) 1969-02-26 1969-02-26 Interferometrische einrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691909728 DE1909728B2 (de) 1969-02-26 1969-02-26 Interferometrische einrichtung

Publications (2)

Publication Number Publication Date
DE1909728A1 DE1909728A1 (de) 1970-09-10
DE1909728B2 true DE1909728B2 (de) 1971-02-18

Family

ID=5726418

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691909728 Pending DE1909728B2 (de) 1969-02-26 1969-02-26 Interferometrische einrichtung

Country Status (1)

Country Link
DE (1) DE1909728B2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4215938A (en) * 1978-09-28 1980-08-05 Farrand Industries, Inc. Method and apparatus for correcting the error of a position measuring interferometer

Also Published As

Publication number Publication date
DE1909728A1 (de) 1970-09-10

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Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977