DE1843392U - DEVICE FOR MEASURING THE DISPLACEMENT OF A MOVABLE MEMBER IN RELATION TO AN INMOVABLE MEMBER. - Google Patents
DEVICE FOR MEASURING THE DISPLACEMENT OF A MOVABLE MEMBER IN RELATION TO AN INMOVABLE MEMBER.Info
- Publication number
- DE1843392U DE1843392U DEN7813U DEN0007813U DE1843392U DE 1843392 U DE1843392 U DE 1843392U DE N7813 U DEN7813 U DE N7813U DE N0007813 U DEN0007813 U DE N0007813U DE 1843392 U DE1843392 U DE 1843392U
- Authority
- DE
- Germany
- Prior art keywords
- relation
- grid
- movement
- grids
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 title description 2
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 2
- 238000005553 drilling Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Description
Bei der Einstellung von Vorrichtungen, bei denen geradlinige Bewegungen ausgeführt werden, z. B. bei Werkzeugmaschinen wie z. B. Bohrmaschinen, Fräsmaschinen o. dgl., kommt es vor, daß geringfügige, von Hand oder selbsttätig bewirkte Verstellungen eines beweglichen Gliedes in Bezug auf ein ortsfestes Glied, z. B. eines Schlittens in Bezug auf ein Gestell, mit großer Genauigkeit selbsttätig gemessen werden müssen. Es ist bekannt, zu diesem Zweck optisch-elektronische Mittel zu verwenden, z. B. optische Gitter, die mit den Gliedern mechanisch gekuppelt sind, und eine Lichtquelle, die ein Lichtbündel durch die Gitter fallen läßt, wodurch bei gegenseitiger Verschiebung der Glieder Lichtimpulse erzeugt werden, die von einer Photozelle o. dgl. in elektrische Impulse umgesetzt werden. When setting devices that require linear movements be carried out, e.g. B. in machine tools such. B. drilling machines, milling machines o. The like. It happens that minor, manually or automatically effected adjustments a movable member with respect to a stationary member, e.g. B. a slide in relation to a frame, must be measured automatically with great accuracy. It is known to use opto-electronic means for this purpose, e.g. B. optical gratings mechanically coupled to the links and a light source, which lets a beam of light fall through the grating, causing mutual displacement the limbs light pulses are generated, which by a photocell o. The like. In electrical Impulses are implemented.
Diese Impulse werden auf elektronischem Wege gezählt und ihre Anzahl ist maßgebend für die Verstellung.These impulses are counted electronically and their number is decisive for the adjustment.
Bei bekannten Vorrichtungen dieser Art werden zwei Linienraster mit z. B. 2000 Linien je cm Länge verwendet, die auf einem durchsichtigen Untergrund angebracht sind, wobei einer der Raster sich z. B. mit dem Schlitten einer Werkzeugmaschine in einer Richtung etwa senkrecht zu den Rasterlinien mitbewegt, während das andere Raster stillsteht. Ein Lichtbündel fällt durch die Raster auf eine Photozelle und wird periodisch vom sich bewegenden Raster unterbrochen oder geschwächt. Die in der Photozelle erzeugten elektrischen Impulse werden nach Verstärkung vom elektronischen Zähler gezählt. bei Bewegung in einer Richtung, z. B. in Vorwärtsrichtung, positiv, und in der anderen Richtung, in Rückwärtsrichtung, negativ gezählt werden. Zu diesem Zweck sind verschiedene Lösungen bekannt, bei denen mindestens zwei Photozellen zur Verwendung kommen.In known devices of this type, two line grids with z. B. 2000 lines per cm length are used, which are attached to a transparent surface, with one of the grids z. B. moved with the carriage of a machine tool in one direction approximately perpendicular to the grid lines, while the other grid stands still. A light beam falls through the grid onto a photocell and is periodically interrupted or weakened by the moving grid. The electrical impulses generated in the photocell are counted by the electronic counter after being amplified. when moving in one direction, e.g. B. in the forward direction, positive, and in the other direction, in the reverse direction, are counted negatively. Various solutions are known for this purpose, in which at least two photocells are used.
Vorgeschlagen worden ist, ein Lichtbündel durch ein sich mit dem Schlitten der Werkzeugmaschine bewegendes erstes Gitter fallen zu lassen und hinter diesem Gitter drei unbewegliche Gitter anzuordnen, hinter denen sich je eine Photozelle befindet. Die drei unbeweglichen Gitter sind derart in Bezug aufeinander in Richtung der Bewegung versetzt, daß bei Bewegung drei um 1200 gegenseitig verschobene elektrische Impulsreihen entstehen. Mittels an sich bekannter Schaltungsanordnungen mit Elektronenröhren (Flip-Flop-Schaltungsanordnungen) kann die Zählung von der Reihenfolge abhängig gemacht werden, in der die Impulse der verschiedenen Reihen auftreten, derart, daß bei einer bestimmten Reihenfolge positiv und bei umgekehrter Reihenfolge negativ gezählt wird. It has been suggested to pass a light beam through one with the Dropping slide of the machine tool moving first grid and behind to arrange three immovable grids behind this grid, behind each of which there is a photocell is located. The three immovable grids are so in direction with respect to each other offset to the movement that when there is movement three electrical ones mutually displaced by 1200 Pulse series arise. By means of known circuit arrangements with electron tubes (Flip-flop circuits) the count can depend on the order are made in which the pulses of the various series occur, such that positive in a certain order and negative in the reverse order is counted.
Dieser Vorrichtung haftet der Nachteil an, daß eine richtige Einstellung der fest angeordneten Gitter in Bezug aufeinander schwierig durchführbar ist, weil der Abstand zwischen den Gitterlinien äußerst gering ist und man bei diesem Verfahren praktisch dazu gezwungen ist, ein System zu wählen, bei dem das eine Gitter auf ein in einem verhältnismäßig großen Abstand liegendes Gitter (meist stark vergrößert) projiziert wird. This device has the disadvantage that a correct setting the fixed grid with respect to each other is difficult to implement because the distance between the grid lines is extremely small and one with this method is practically forced to choose a system in which the one grid on a grid located at a relatively large distance (usually greatly enlarged) is projected.
Statt dreier unbeweglicher Gitter ist es natürlich möglich, eine andere Anzahl, z. B. zwei, zu wählen. Diese sollen derart angeordnet werden, daß die auftretenden Impulsreihen z. B. um 900 in der Phase gegenseitig verschoben sind. Instead of three fixed grids, it is of course possible to use one other number, e.g. B. two to choose. These should be arranged in such a way that the occurring pulse series z. B. are mutually shifted by 900 in phase.
Weiter ist es bekannt, das Interferenzmuster zweier ein wenig in Bezug aufeinander verdrehter Gitter zu benutzen. Fällt hierdurch ein Lichtbündel, so entstehen hinter den Gittern helle und dunkle Zonen, die sich verstellen, wenn die Gitter in Bezug aufeinander verschoben werden. Die Verschiebungsrichtung dieser Zonen ist von dem Sinne abhängig, in dem die Gitter in Bezug aufeinander verstellt werden. Es werden wieder gegenseitig phasenverschobene Impulsreihen in mindestens zwei Photozellen erzeugt, die nun in Richtung der Gitterlinien einen bestimmten Abstand voneinander haben müssen. Dies hat den Nachteil, daß die Richtung der hellen und dunklen Zonen des Interferenzmusters bei einem kleinen Verdrehungswinkel der Gitter in Bezug aufeinander sich bei minimalen Gitterfehlern stark ändert, was Schwierigkeiten bei der Einstellung bereitet. It is also known that the interference pattern of two is a little in To use rotated grids in relation to each other. If a bundle of light falls through this, this creates light and dark zones behind the grilles, which disguise each other when the grids are shifted with respect to each other. The direction of movement of this Zones depends on the sense in which the grids are adjusted in relation to each other will. There are again mutually phase-shifted pulse series in at least two photocells are generated, which are now a certain in the direction of the grid lines Must be at a distance from each other. This has the disadvantage that the direction of the bright and dark areas of the interference pattern at a small twist angle of the Lattices in relation to one another change greatly with minimal lattice errors, which creates difficulties when hiring prepares.
Die Neuerung schafft eine Verbesserung der bekannten Vorrichtungen, die darin besteht, daß von zwei Gittern, die in Bezug aufeinander verstellt werden und deren Linien parallel oder wenigstens im wesentlichen parallel verlaufen, die Teilungen ein wenig verschieden sind, wodurch ein Interferenzmuster entsteht, und daß hinter den Gittern wenigstens zwei Photozellen angeordnet sind, die in der Bewegungsrichtung über einen solchen Abstand in Bezug aufeinander verstellt sind, daß bei Bewegung Reihen periodischer Schwankungen von verschiedener Phase entstehen, die einem Zähler zugeführt werden, der die Schwankungen positiv oder negativ zählt, entsprechend dem Bewegungssinn der Gitter in Bezug aufeinander. The innovation creates an improvement of the known devices, which consists in that of two grids, those in relation to each other are adjusted and their lines parallel or at least substantially parallel run, the pitches are a little different, creating an interference pattern arises, and that at least two photocells are arranged behind the grilles, which are adjusted in the direction of movement over such a distance with respect to each other are that, when moving, series of periodic fluctuations of different phases arise that are fed to a counter that shows the fluctuations positive or counts negatively, according to the sense of movement of the grids in relation to each other.
Bei der Vorrichtung nach der Anmeldung entstehen parallel zu den Gitterlinien helle und dunkle Zonen in die Gitterteilung des einen und S2 die Gitterteilung des anderen Gitters darstellen.In the device according to the registration, light and dark zones arise parallel to the grid lines represent the grid division of one and S2 the grid division of the other grid.
Zweckmäßig werden die Gitter direkt aufeinander gelegt ; es ist aber auch möglich, das eine, beweglich angeordnete Gitter, vergrößert auf das andere zu projizieren. The grids are expediently placed directly on top of one another; but it is also possible, one, movably arranged grid, enlarged on the other to project.
Die Neuerung wird im folgenden an Hand einer Zeichnung beispielsweise näher erläutert. The innovation is shown in the following using a drawing, for example explained in more detail.
Die Fig. 1 und 2 zeigen schematisch Ausbildungen mit direkt aufeinander liegenden Gittern bzw. mit projiziertem Gitter. FIGS. 1 and 2 show diagrammatically designs with one on top of the other lying grids or with projected grids.
In Fig. 1 ist mit 1 das feinere, mit 2 das grobere Gitter in einem Schnitt senkrecht zu den Gitterdrähten dargestellt. Es wird vorausgesetzt, daß sich das Gitter 1 mit dem Schlitten einer Werkzeugmaschine mitbewegt und das andere Gitter stillsteht. Wie durch Pfeile angedeutet, fällt auf das Gitter 1 ein Lichtbündel, das teilweise durchgelassen wird, soweit die Öffnungen der Gitter dies gestatten. Das Licht kann hierbei auf zwei Photozellen 3 und 4 fallen, die an eine an sich bekannte elektronische Vergleichsvorrichtung 5 angeschlossen sind, deren Ausgang einen Zähler 6 speist. Bei der dargestellten Vorrichtung wird bei A viel, bei B wenig Licht durchgelassen. Bei Verwendung zweier Photozellen werden diese derart angeordnet, daß eine gegenseitige Verstellung in der Bewegungsrichtung des Gitters 1 ungefähr die Hälfte des Abstandes zwischen A und B beträgt. Wenn nun das Gitter 1 mit den Photozellen nach links oder nach rechts bewegt wird, entstehen in den Photozellen Reihen von elektrischen Impulsen, deren Phasenverschiebung 900 beträgt. Die Vorrichtung 5 ist derart, daß bei einer bestimmten Reihenfolge der von den zwei Zellen gelieferten Impulse in der Vorrichtung 6 eine posttive Zählung und bei umgekehrter Reihenfolge der Impulse eine negative Zählung folgt. In Fig. 1 with 1 the finer, with 2 the coarser grid in one Section shown perpendicular to the grid wires. It is assumed that the grid 1 moves with the carriage of a machine tool and the other grid stands still. As indicated by arrows, the grid 1 is incident Light beam that is partially allowed through, as far as the openings of the grating allow this allow. The light can fall on two photocells 3 and 4, which are connected to a known electronic comparison device 5 are connected, the Output feeds a counter 6. In the device shown, at A much, at B little light let through. When using two photocells, these arranged so that a mutual adjustment in the direction of movement of the Grid 1 is approximately half the distance between A and B. If now that Grid 1 is moved to the left or to the right with the photocells in the photocells series of electrical impulses whose phase shift is 900 amounts to. The device 5 is such that in a certain order of pulses delivered by the two cells in the device 6 a positive count and if the order of the pulses is reversed, a negative count follows.
Bei der Vorrichtung nach Fig. 2 wird vorausgesetzt, daß das Gitter 1', auf welches das von der Quelle 7 stammende Lichtbündel fällt, vergrößert durch die optische Vorrichtung 8 auf das grobere Gitter 21 projiziert wird. In the device of FIG. 2, it is assumed that the grid 1 ', on which the light beam coming from the source 7 falls, enlarged through the optical device 8 is projected onto the coarser grating 21.
Die an den Punkten A und B durchgelassenen Bündel werden durch ein Prisma oder ein Spiegelsystem 9 auf die Photozellen 3 und 4 geworfen. Der Abstand zwischen den beiden letztgenannten kann hierbei größer als bei der Vorrichtung nach Fig. 1 gewählt werden.The bundles let through at points A and B are passed through a Prism or a mirror system 9 thrown onto the photocells 3 and 4. The distance between the latter two can be greater than in the case of the device according to Fig. 1 can be selected.
Schutzansprüche : Protection claims:
Claims (3)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL209759 | 1956-08-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1843392U true DE1843392U (en) | 1961-12-14 |
Family
ID=33028945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DEN7813U Expired DE1843392U (en) | 1956-08-11 | 1957-08-07 | DEVICE FOR MEASURING THE DISPLACEMENT OF A MOVABLE MEMBER IN RELATION TO AN INMOVABLE MEMBER. |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE1843392U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2349944A1 (en) * | 1972-10-06 | 1974-04-11 | Bausch & Lomb | DEVICE FOR MEASURING THE DISPLACEMENT BETWEEN THE FIRST AND THE SECOND RELATIVELY MOVING BODIES |
-
1957
- 1957-08-07 DE DEN7813U patent/DE1843392U/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2349944A1 (en) * | 1972-10-06 | 1974-04-11 | Bausch & Lomb | DEVICE FOR MEASURING THE DISPLACEMENT BETWEEN THE FIRST AND THE SECOND RELATIVELY MOVING BODIES |
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