DE112008001216A5 - Magnetronplasmaanlage - Google Patents

Magnetronplasmaanlage Download PDF

Info

Publication number
DE112008001216A5
DE112008001216A5 DE112008001216T DE112008001216T DE112008001216A5 DE 112008001216 A5 DE112008001216 A5 DE 112008001216A5 DE 112008001216 T DE112008001216 T DE 112008001216T DE 112008001216 T DE112008001216 T DE 112008001216T DE 112008001216 A5 DE112008001216 A5 DE 112008001216A5
Authority
DE
Germany
Prior art keywords
magnetronplasmaanlage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112008001216T
Other languages
English (en)
Inventor
Ralf Bandorf
Michael Bergöhl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Melec GmbH
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Melec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV, Melec GmbH filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of DE112008001216A5 publication Critical patent/DE112008001216A5/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
    • H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
    • H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
    • H02M3/285—Single converters with a plurality of output stages connected in parallel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3444—Associated circuits
DE112008001216T 2007-03-06 2008-03-06 Magnetronplasmaanlage Withdrawn DE112008001216A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007011230.2 2007-03-06
DE102007011230A DE102007011230A1 (de) 2007-03-06 2007-03-06 Magnetronplasmaanlage
PCT/DE2008/000393 WO2008106956A2 (de) 2007-03-06 2008-03-06 Spannungsversorgung für eine sputteranlage

Publications (1)

Publication Number Publication Date
DE112008001216A5 true DE112008001216A5 (de) 2010-02-04

Family

ID=39677916

Family Applications (3)

Application Number Title Priority Date Filing Date
DE102007011230A Withdrawn DE102007011230A1 (de) 2007-03-06 2007-03-06 Magnetronplasmaanlage
DE202008018481.9U Expired - Lifetime DE202008018481U1 (de) 2007-03-06 2008-03-06 Magnetronplasmaanlage
DE112008001216T Withdrawn DE112008001216A5 (de) 2007-03-06 2008-03-06 Magnetronplasmaanlage

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE102007011230A Withdrawn DE102007011230A1 (de) 2007-03-06 2007-03-06 Magnetronplasmaanlage
DE202008018481.9U Expired - Lifetime DE202008018481U1 (de) 2007-03-06 2008-03-06 Magnetronplasmaanlage

Country Status (3)

Country Link
EP (1) EP2140543A2 (de)
DE (3) DE102007011230A1 (de)
WO (1) WO2008106956A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008021912C5 (de) * 2008-05-01 2018-01-11 Cemecon Ag Beschichtungsverfahren
US8040068B2 (en) * 2009-02-05 2011-10-18 Mks Instruments, Inc. Radio frequency power control system
DE102010002687C5 (de) * 2010-03-09 2015-09-10 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung zumindest der Innenfläche eines Kolbenrings sowie Kolbenring
DE102010038603B4 (de) * 2010-07-29 2016-06-02 Trumpf Huettinger Sp. Z O. O. DC-Plasmaanordnung
DE102010047963A1 (de) * 2010-10-08 2012-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Magnetron-Vorrichtung und Verfahren zum gepulsten Betreiben einer Magnetron-Vorrichtung
DE102012206553A1 (de) * 2012-04-20 2013-10-24 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zum Steuern der Schichtdickenverteilung in einer Vakuumbeschichtung
DE102012110040A1 (de) 2012-06-22 2013-12-24 Von Ardenne Anlagentechnik Gmbh Verfahren zur Abscheidung einer Schicht mittels Hochenergiesputtern
DE102014207877A1 (de) * 2014-04-25 2015-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur geregelten, gepulsten ionisierten Beschichtung von Substraten in einer Beschichtungskammer
CN109811324B (zh) * 2019-03-14 2021-02-09 哈尔滨工业大学 基于异质双靶高功率脉冲磁控溅射制备掺杂类薄膜的装置及方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006404A (en) * 1976-01-30 1977-02-01 The United States Of America As Represented By The Secretary Of The Navy Pulsed plasma probe
DE4014302A1 (de) 1990-05-04 1991-11-07 Boehringer Andreas Einrichtung zur versorgung eines verbraucherzweipols mit einem eingepraegten, jedoch in einer anzahl von stufen einstellbaren gleichstrom
DE4438463C1 (de) * 1994-10-27 1996-02-15 Fraunhofer Ges Forschung Verfahren und Schaltung zur bipolaren pulsförmigen Energieeinspeisung in Niederdruckplasmen
JP3060876B2 (ja) * 1995-02-15 2000-07-10 日新電機株式会社 金属イオン注入装置
CA2192891C (en) * 1996-01-16 2000-02-22 Jon O. Reynolds Plasma cutting or arc welding power supply with phase staggered secondary switchers
US5917286A (en) * 1996-05-08 1999-06-29 Advanced Energy Industries, Inc. Pulsed direct current power supply configurations for generating plasmas
ATE468420T1 (de) * 1997-02-20 2010-06-15 Shibaura Mechatronics Corp Stromversorgungseinheit für sputtervorrichtung
DE10018879B4 (de) 2000-04-17 2013-02-28 Melec Gmbh Stromversorgungsgerät zur bipolaren Stromversorgung
US7169255B2 (en) * 2002-02-15 2007-01-30 Hitachi High-Technologies Corporation Plasma processing apparatus
JP2004064817A (ja) * 2002-07-25 2004-02-26 Shibaura Mechatronics Corp 電源、スパッタ用電源及びスパッタ装置
DE10306347A1 (de) * 2003-02-15 2004-08-26 Hüttinger Elektronik GmbH & Co. KG Leistungszufuhrregeleinheit
DE10312549B3 (de) * 2003-03-21 2004-08-26 Hüttinger Elektronik Gmbh + Co. Kg Gasentladungsprozess-Spannungsversorgungseinheit
SE0302045D0 (sv) * 2003-07-10 2003-07-10 Chemfilt R & D Ab Work piece processing by pulsed electric discharges in solid-gas plasmas
EP1852959A1 (de) * 2006-05-05 2007-11-07 HÜTTINGER Elektronik GmbH + Co. KG Stromversorgung für einen Mittelfrequenz-Plasmagenerator

Also Published As

Publication number Publication date
WO2008106956A2 (de) 2008-09-12
DE102007011230A1 (de) 2008-09-11
DE202008018481U1 (de) 2014-06-10
WO2008106956A3 (de) 2009-10-22
EP2140543A2 (de) 2010-01-06

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee