DE112007000303A5 - Mikromechanischer Drehratensensor - Google Patents

Mikromechanischer Drehratensensor Download PDF

Info

Publication number
DE112007000303A5
DE112007000303A5 DE112007000303T DE112007000303T DE112007000303A5 DE 112007000303 A5 DE112007000303 A5 DE 112007000303A5 DE 112007000303 T DE112007000303 T DE 112007000303T DE 112007000303 T DE112007000303 T DE 112007000303T DE 112007000303 A5 DE112007000303 A5 DE 112007000303A5
Authority
DE
Germany
Prior art keywords
rate sensor
rotation rate
micromechanical rotation
micromechanical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112007000303T
Other languages
English (en)
Inventor
Bernhard Hartmann
Stefan Dr. Günthner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Conti Temic Microelectronic GmbH
Original Assignee
Conti Temic Microelectronic GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Conti Temic Microelectronic GmbH filed Critical Conti Temic Microelectronic GmbH
Priority to DE112007000303T priority Critical patent/DE112007000303A5/de
Publication of DE112007000303A5 publication Critical patent/DE112007000303A5/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G01C19/5762—Structural details or topology the devices having a single sensing mass the sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
DE112007000303T 2006-03-10 2007-03-12 Mikromechanischer Drehratensensor Pending DE112007000303A5 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112007000303T DE112007000303A5 (de) 2006-03-10 2007-03-12 Mikromechanischer Drehratensensor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102006012610.6 2006-03-10
DE102006012610 2006-03-10
PCT/DE2007/000445 WO2007104289A1 (de) 2006-03-10 2007-03-12 Mikromechanischer drehratensensor
DE112007000303T DE112007000303A5 (de) 2006-03-10 2007-03-12 Mikromechanischer Drehratensensor

Publications (1)

Publication Number Publication Date
DE112007000303A5 true DE112007000303A5 (de) 2008-10-30

Family

ID=38222131

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112007000303T Pending DE112007000303A5 (de) 2006-03-10 2007-03-12 Mikromechanischer Drehratensensor

Country Status (7)

Country Link
US (1) US8342022B2 (de)
EP (1) EP1994363A1 (de)
JP (1) JP2009529697A (de)
KR (1) KR20080113048A (de)
CN (1) CN101400969A (de)
DE (1) DE112007000303A5 (de)
WO (1) WO2007104289A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8683864B2 (en) 2008-08-18 2014-04-01 Hitachi, Ltd. Micro electro mechanical system
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102009002701B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
FR2945621B1 (fr) * 2009-05-15 2011-08-26 Commissariat Energie Atomique Structure de couplage pour gyrometre resonnant
JP5790915B2 (ja) * 2011-01-13 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
ITUA20162172A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
WO2018183400A1 (en) * 2017-03-27 2018-10-04 Hutchinson Aerospace & Industry, Inc. A continuous framework for shock, vibration and thermal isolation and motion accommodation

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* Cited by examiner, † Cited by third party
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US4598585A (en) 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4699006A (en) 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
DE3611360A1 (de) 1986-04-04 1987-10-08 Bosch Gmbh Robert Sensor zur selbsttaetigen ausloesung von insassenschutzvorrichtungen
FI81915C (fi) 1987-11-09 1990-12-10 Vaisala Oy Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
DE3741036A1 (de) 1987-12-03 1989-06-15 Fraunhofer Ges Forschung Mikromechanischer beschleunigungsmesser
US5421213A (en) 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
JP2938989B2 (ja) 1991-01-29 1999-08-25 キヤノン株式会社 角加速度センサ
DE4106288C2 (de) 1991-02-28 2001-05-31 Bosch Gmbh Robert Sensor zur Messung von Drücken oder Beschleunigungen
DE4126100A1 (de) 1991-08-07 1993-02-18 Univ Chemnitz Tech Mikromechanischer drehbeschleunigungssensor
US5707077A (en) 1991-11-18 1998-01-13 Hitachi, Ltd. Airbag system using three-dimensional acceleration sensor
US5313835A (en) 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
JP3307130B2 (ja) * 1994-12-28 2002-07-24 株式会社村田製作所 角速度センサ
JP3433401B2 (ja) 1995-05-18 2003-08-04 アイシン精機株式会社 静電容量型加速度センサ
JP3114570B2 (ja) 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
DE19541388A1 (de) 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
JP3090024B2 (ja) * 1996-01-22 2000-09-18 株式会社村田製作所 角速度センサ
JPH09318649A (ja) 1996-05-30 1997-12-12 Texas Instr Japan Ltd 複合センサ
JPH1090299A (ja) 1996-09-12 1998-04-10 Mitsubishi Electric Corp 静電容量式加速度センサ
DE19637265A1 (de) 1996-09-13 1998-03-26 Bosch Gmbh Robert Sensor zur kapazitiven Aufnahme einer Beschleunigung
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
DE19649715C2 (de) 1996-11-30 2001-07-12 Telefunken Microelectron Anordnung zur Messung von Beschleunigungen
DE19709520B4 (de) 1997-03-10 2007-05-31 GEMAC-Gesellschaft für Mikroelektronikanwendung Chemnitz mbH Kapazitives Beschleunigungssensor-Element
JP4178192B2 (ja) 1998-04-22 2008-11-12 ミツミ電機株式会社 物理量検出センサ
JP2000009470A (ja) * 1998-06-18 2000-01-14 Aisin Seiki Co Ltd 角速度センサ
JP2000088878A (ja) 1998-09-09 2000-03-31 Tokai Rika Co Ltd 加速度スイッチ及びその製造方法
US6469909B2 (en) 2001-01-09 2002-10-22 3M Innovative Properties Company MEMS package with flexible circuit interconnect
EP1243930A1 (de) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10225714A1 (de) 2002-06-11 2004-01-08 Eads Deutschland Gmbh Mehrachsiger monolithischer Beschleunigungssensor
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
US6841992B2 (en) 2003-02-18 2005-01-11 Honeywell International, Inc. MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement
US6843127B1 (en) * 2003-07-30 2005-01-18 Motorola, Inc. Flexible vibratory micro-electromechanical device
US7036373B2 (en) * 2004-06-29 2006-05-02 Honeywell International, Inc. MEMS gyroscope with horizontally oriented drive electrodes
JP2008514968A (ja) * 2004-09-27 2008-05-08 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 回転速度センサ

Also Published As

Publication number Publication date
US8342022B2 (en) 2013-01-01
KR20080113048A (ko) 2008-12-26
JP2009529697A (ja) 2009-08-20
US20090031806A1 (en) 2009-02-05
EP1994363A1 (de) 2008-11-26
WO2007104289A1 (de) 2007-09-20
CN101400969A (zh) 2009-04-01

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Legal Events

Date Code Title Description
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01C0019560000

Ipc: G01C0019571900

Effective date: 20111215

R073 Re-establishment requested
R005 Application deemed withdrawn due to failure to request examination

Effective date: 20140313

R124 Re-establishment decision now final