DE10351230B3 - Verfahren zur Abscheidung eines Katalysators - Google Patents

Verfahren zur Abscheidung eines Katalysators Download PDF

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Publication number
DE10351230B3
DE10351230B3 DE10351230A DE10351230A DE10351230B3 DE 10351230 B3 DE10351230 B3 DE 10351230B3 DE 10351230 A DE10351230 A DE 10351230A DE 10351230 A DE10351230 A DE 10351230A DE 10351230 B3 DE10351230 B3 DE 10351230B3
Authority
DE
Germany
Prior art keywords
catalyst
conductor
selective
applying
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
DE10351230A
Other languages
English (en)
Inventor
Manfred Engelhardt
Gernot Steinlesberger
Eugen Unger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Priority to DE10351230A priority Critical patent/DE10351230B3/de
Priority to US10/980,011 priority patent/US20050118342A1/en
Application granted granted Critical
Publication of DE10351230B3 publication Critical patent/DE10351230B3/de
Anticipated expiration legal-status Critical
Withdrawn - After Issue legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74—Iron group metals
    • B01J23/745—Iron
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74—Iron group metals
    • B01J23/755—Nickel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/03—Precipitation; Co-precipitation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/161—Process or apparatus coating on selected surface areas by direct patterning from plating step, e.g. inkjet
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/54—Contact plating, i.e. electroless electrochemical plating

Abstract

Die vorliegende Erfindung betrifft ein Verfahren zur selektiven und flächigen Abscheidung eines zum Wachsen von Nanoröhren vorgesehenen Katalysators auf einer Leiterbahn in einem integrierten Schaltkreis, umfassend die Schritte: DOLLAR A a) Bereitstellen einer sauren oder alkalischen wässrigen Lösung des Katalysators, DOLLAR A b) Aufbringen der Lösung auf die Leiterbahn und DOLLAR A c) Entfernung der überschüssigen Lösung.
DE10351230A 2003-11-03 2003-11-03 Verfahren zur Abscheidung eines Katalysators Withdrawn - After Issue DE10351230B3 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE10351230A DE10351230B3 (de) 2003-11-03 2003-11-03 Verfahren zur Abscheidung eines Katalysators
US10/980,011 US20050118342A1 (en) 2003-11-03 2004-11-03 Process for depositing a catalyst

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10351230A DE10351230B3 (de) 2003-11-03 2003-11-03 Verfahren zur Abscheidung eines Katalysators

Publications (1)

Publication Number Publication Date
DE10351230B3 true DE10351230B3 (de) 2005-03-10

Family

ID=34178051

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10351230A Withdrawn - After Issue DE10351230B3 (de) 2003-11-03 2003-11-03 Verfahren zur Abscheidung eines Katalysators

Country Status (2)

Country Link
US (1) US20050118342A1 (de)
DE (1) DE10351230B3 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100803210B1 (ko) * 2006-04-07 2008-02-14 삼성전자주식회사 탄소나노튜브를 이용한 전계 방출 전극 및 그 제조방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146227A (en) * 1998-09-28 2000-11-14 Xidex Corporation Method for manufacturing carbon nanotubes as functional elements of MEMS devices
DE10103340A1 (de) * 2001-01-25 2002-08-22 Infineon Technologies Ag Verfahren zum Wachsen von Kohlenstoff-Nanoröhren oberhalb einer elektrisch zu kontaktierenden Unterlage sowie Bauelement
DE10113549C2 (de) * 2001-03-20 2003-02-06 Infineon Technologies Ag Verfahren zum Wachsen von Nanoröhren

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5824599A (en) * 1996-01-16 1998-10-20 Cornell Research Foundation, Inc. Protected encapsulation of catalytic layer for electroless copper interconnect
US6277765B1 (en) * 1999-08-17 2001-08-21 Intel Corporation Low-K Dielectric layer and method of making same
DE10006964C2 (de) * 2000-02-16 2002-01-31 Infineon Technologies Ag Elektronisches Bauelement mit einer leitenden Verbindung zwischen zwei leitenden Schichten und Verfahren zum Herstellen eines elektronischen Bauelements
US6595474B2 (en) * 2000-08-25 2003-07-22 Bridgette F. Nicholson Upper limb adaptive aid
WO2002092877A2 (en) * 2001-05-11 2002-11-21 Ebara Corporation Catalyst-imparting treatment solution and electroless plating method
US6838750B2 (en) * 2001-07-12 2005-01-04 Custom One Design, Inc. Interconnect circuitry, multichip module, and methods of manufacturing thereof
US6548313B1 (en) * 2002-05-31 2003-04-15 Intel Corporation Amorphous carbon insulation and carbon nanotube wires
US6984579B2 (en) * 2003-02-27 2006-01-10 Applied Materials, Inc. Ultra low k plasma CVD nanotube/spin-on dielectrics with improved properties for advanced nanoelectronic device fabrication

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146227A (en) * 1998-09-28 2000-11-14 Xidex Corporation Method for manufacturing carbon nanotubes as functional elements of MEMS devices
DE10103340A1 (de) * 2001-01-25 2002-08-22 Infineon Technologies Ag Verfahren zum Wachsen von Kohlenstoff-Nanoröhren oberhalb einer elektrisch zu kontaktierenden Unterlage sowie Bauelement
DE10113549C2 (de) * 2001-03-20 2003-02-06 Infineon Technologies Ag Verfahren zum Wachsen von Nanoröhren

Also Published As

Publication number Publication date
US20050118342A1 (en) 2005-06-02

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8330 Complete renunciation