DE10292357D2 - Process for automated detection, spectroscopic analysis and identification of particles - Google Patents

Process for automated detection, spectroscopic analysis and identification of particles

Info

Publication number
DE10292357D2
DE10292357D2 DE10292357T DE10292357T DE10292357D2 DE 10292357 D2 DE10292357 D2 DE 10292357D2 DE 10292357 T DE10292357 T DE 10292357T DE 10292357 T DE10292357 T DE 10292357T DE 10292357 D2 DE10292357 D2 DE 10292357D2
Authority
DE
Germany
Prior art keywords
identification
particles
spectroscopic analysis
automated detection
automated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10292357T
Other languages
German (de)
Inventor
Heiko Leonhardt
Ludwig Pohlmann
Lothar Holz
Markus Lankers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
rap ID Particle Systems GmbH
Original Assignee
rap ID Particle Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by rap ID Particle Systems GmbH filed Critical rap ID Particle Systems GmbH
Priority to DE10292357T priority Critical patent/DE10292357D2/en
Application granted granted Critical
Publication of DE10292357D2 publication Critical patent/DE10292357D2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211—Investigating a scatter or diffraction pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4412—Scattering spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N15/1468—Electro-optical investigation, e.g. flow cytometers with spatial resolution of the texture or inner structure of the particle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • G01N2015/1452—Adjustment of focus; Alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N2021/646—Detecting fluorescent inhomogeneities at a position, e.g. for detecting defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G01N2021/656—Raman microprobe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/103—Scanning by mechanical motion of stage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/108—Miscellaneous
    • G01N2201/1087—Focussed scan beam, e.g. laser
DE10292357T 2001-05-31 2002-05-24 Process for automated detection, spectroscopic analysis and identification of particles Ceased DE10292357D2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10292357T DE10292357D2 (en) 2001-05-31 2002-05-24 Process for automated detection, spectroscopic analysis and identification of particles

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10127538 2001-05-31
DE10292357T DE10292357D2 (en) 2001-05-31 2002-05-24 Process for automated detection, spectroscopic analysis and identification of particles
PCT/EP2002/005779 WO2002097409A1 (en) 2001-05-31 2002-05-24 Method for the automated recognition, spectroscopic analysis and identification of particles

Publications (1)

Publication Number Publication Date
DE10292357D2 true DE10292357D2 (en) 2004-07-01

Family

ID=7687430

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10292357T Ceased DE10292357D2 (en) 2001-05-31 2002-05-24 Process for automated detection, spectroscopic analysis and identification of particles

Country Status (2)

Country Link
DE (1) DE10292357D2 (en)
WO (1) WO2002097409A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008762B4 (en) * 2004-02-23 2006-10-12 Erwin Kayser-Threde Gmbh Method and device for detecting and identifying bioparticles
US7993585B2 (en) * 2005-07-14 2011-08-09 Battelle Memorial Institute Biological and chemical monitoring
ZA200901160B (en) * 2006-08-18 2010-05-26 Primus Special Projects Pty Ltd A sorter
NL1039263C2 (en) * 2011-12-23 2013-06-26 Zevenaar Elektronica & Sensoren B V DEVICE AND METHOD FOR COUNTING AND MEASURING PARTICLES.
CN110346042B (en) * 2019-08-01 2022-03-08 南京邮电大学 Multi-sensor stray light elimination spectrometer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3037983C2 (en) * 1980-10-08 1983-03-31 Fa. Carl Zeiss, 7920 Heidenheim Method and device for the light-induced scanning microscopic representation of sample parameters in their spatial distribution
US4766324A (en) * 1987-08-07 1988-08-23 Tencor Instruments Particle detection method including comparison between sequential scans
DE4111903A1 (en) * 1991-04-12 1992-10-15 Bayer Ag SPECTROSCOPY-CORRECTED LIGHT-SCREEN MICROSCOPY
JP3258821B2 (en) * 1994-06-02 2002-02-18 三菱電機株式会社 Method for positioning and analyzing minute foreign matter, analyzer used for the method, and method for manufacturing semiconductor element or liquid crystal display element using the same
DE19946110C1 (en) * 1999-09-17 2001-02-01 Apsys Advanced Particle System Optical particle characterisation method for clean room for electronics industry has sampled air fed to light dispersion measuring device triggering particle identification unit using monochromatic light

Also Published As

Publication number Publication date
WO2002097409A1 (en) 2002-12-05

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