DE10291795D2 - Central incinerator for the treatment of exhaust air containing PFC - Google Patents

Central incinerator for the treatment of exhaust air containing PFC

Info

Publication number
DE10291795D2
DE10291795D2 DE10291795T DE10291795T DE10291795D2 DE 10291795 D2 DE10291795 D2 DE 10291795D2 DE 10291795 T DE10291795 T DE 10291795T DE 10291795 T DE10291795 T DE 10291795T DE 10291795 D2 DE10291795 D2 DE 10291795D2
Authority
DE
Germany
Prior art keywords
treatment
exhaust air
air containing
containing pfc
incinerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10291795T
Other languages
German (de)
Inventor
Hans-Peter Bipp
Ewald Hagenhoff
Paul Kaller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde Nippon Sanso GmbH and Co KG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Priority to DE10291795T priority Critical patent/DE10291795D2/en
Application granted granted Critical
Publication of DE10291795D2 publication Critical patent/DE10291795D2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chimneys And Flues (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
DE10291795T 2001-04-27 2002-04-25 Central incinerator for the treatment of exhaust air containing PFC Ceased DE10291795D2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10291795T DE10291795D2 (en) 2001-04-27 2002-04-25 Central incinerator for the treatment of exhaust air containing PFC

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10120820 2001-04-27
DE10291795T DE10291795D2 (en) 2001-04-27 2002-04-25 Central incinerator for the treatment of exhaust air containing PFC
PCT/DE2002/001513 WO2002087732A2 (en) 2001-04-27 2002-04-25 Central incinerating facility for the treatment of exhaust air containing pfc

Publications (1)

Publication Number Publication Date
DE10291795D2 true DE10291795D2 (en) 2004-08-05

Family

ID=7683031

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10291795T Ceased DE10291795D2 (en) 2001-04-27 2002-04-25 Central incinerator for the treatment of exhaust air containing PFC

Country Status (2)

Country Link
DE (1) DE10291795D2 (en)
WO (1) WO2002087732A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006052586B4 (en) * 2006-11-08 2008-07-03 Schott Solar Gmbh Method and device for cleaning the exhaust gases of a silicon thin-film production plant

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3517138A1 (en) * 1985-05-11 1986-11-20 Wilfred Antony GmbH, 7146 Tamm Process and apparatus for removing halogenated hydrocarbons from air
JP3486022B2 (en) * 1995-10-16 2004-01-13 ジャパン・エア・ガシズ株式会社 Exhaust gas treatment equipment
EP0885648B1 (en) * 1997-06-20 2004-01-07 Hitachi, Ltd. A treatment method for decomposing fluorine compounds, and apparatus and use of a catalyst therefor
JPH11218318A (en) * 1998-02-03 1999-08-10 Air Liquide Japan Ltd Exhaust gas treating facility
JP3994605B2 (en) * 1999-11-26 2007-10-24 株式会社日立製作所 PFC gas processing method and processing apparatus

Also Published As

Publication number Publication date
WO2002087732A3 (en) 2003-01-09
WO2002087732A2 (en) 2002-11-07

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