DE10236491A1 - Alternative dry cleaning medium with diverse applications, contains carbon dioxide and nitrous oxide in fifty-fifty proportions - Google Patents
Alternative dry cleaning medium with diverse applications, contains carbon dioxide and nitrous oxide in fifty-fifty proportions Download PDFInfo
- Publication number
- DE10236491A1 DE10236491A1 DE10236491A DE10236491A DE10236491A1 DE 10236491 A1 DE10236491 A1 DE 10236491A1 DE 10236491 A DE10236491 A DE 10236491A DE 10236491 A DE10236491 A DE 10236491A DE 10236491 A1 DE10236491 A1 DE 10236491A1
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- Germany
- Prior art keywords
- carbon dioxide
- cleaning
- nitrous oxide
- fifty
- detergent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06F—LAUNDERING, DRYING, IRONING, PRESSING OR FOLDING TEXTILE ARTICLES
- D06F43/00—Dry-cleaning apparatus or methods using volatile solvents
- D06F43/007—Dry cleaning methods
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06L—DRY-CLEANING, WASHING OR BLEACHING FIBRES, FILAMENTS, THREADS, YARNS, FABRICS, FEATHERS OR MADE-UP FIBROUS GOODS; BLEACHING LEATHER OR FURS
- D06L1/00—Dry-cleaning or washing fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Textile Engineering (AREA)
- Extraction Or Liquid Replacement (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Carbon And Carbon Compounds (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
Description
Die Erfindung betrifft ein Verfahren zur Reinigung mit Kohlendioxid.The invention relates to a method for cleaning with carbon dioxide.
Bekannt ist die Trockenreinigung
mit überkritischem
Kohlendioxid (CO2). Solche Reinigungsverfahren
sind beispielsweise in
Dem verdichteten Kohlendioxid werden üblicherweise Zusätze wie Tenside, Lösemittel oder andere Hilfsstoffe beigefügt. Diese zum Teil nicht flüchtigen Zusätze müssen von dem Reinigungsgut wieder entfernt werden, was in der Regel einen zusätzlichen Aufwand bedeutet.The compressed carbon dioxide is usually additions such as surfactants, solvents or other auxiliary substances added. Some of these are not volatile additions have to be removed from the items to be cleaned, which is usually a additional Effort means.
Der Erfindung liegt die Aufgabe zugrunde, ein alternatives Reinigungsverfahren bereit zu stellen.The invention is based on the object to provide alternative cleaning methods.
Gelöst wurde die Aufgabe durch ein Verfahren mit den in Anspruch 1 beschriebenen Merkmalen.The task was solved by a method with the features described in claim 1.
Bei dem Reinigungsverfahren werden Kohlendioxid und Distickstoftmonoxid mit dem Reinigungsgut in Kontakt gebracht. Vorzugsweise wird ein Gemisch von Kohlendioxid und Distickstoftmonoxid zum Reinigen eingesetzt.In the cleaning process Carbon dioxide and nitrous oxide in contact with the items to be cleaned brought. Preferably a mixture of carbon dioxide and nitrous oxide is used Used cleaning.
Das Reinigungsverfahren dient beispielsweise zur Reinigung oder Behandlung von Textilien, textilartigen Stoffen (z.B. Non-wovens, Vlies, Filz), Folien, Kunststoffteilen, Metallteilen, Teilen aus Keramik, Verbundstoffen, Kunststofffaser, Naturfaser, Glasteilen oder Glasoberflächen, insbesondere zur Reinigung von strukturierten Oberflächen von Materialien wie Textilien oder ähnlichen Materialien und Formteilen.The cleaning process is used, for example for cleaning or treating textiles, textile-like substances (e.g. non-wovens, fleece, felt), foils, plastic parts, metal parts, Parts made of ceramics, composites, plastic fibers, natural fibers, Glass parts or glass surfaces, especially for cleaning structured surfaces of Materials such as textiles or the like Materials and molded parts.
Die Behandlung des Reinigungsgutes erfolgt vorzugsweise in geschlossenen Systemen unter Verwendung eines Gemisches von Kohlendioxid (CO2) und Distickstoffmonoxid (N2O) in flüssiger, gasförmiger oder überkritischer Phase.The items to be cleaned are preferably treated in closed systems using a mixture of carbon dioxide (CO 2 ) and nitrous oxide (N 2 O) in the liquid, gaseous or supercritical phase.
In dem Verfahren werden Kohlendioxid und Distickstoffmonoxid als Reinigungsmittel, insbesondere als Kombinationsreinigungsmittel zur gleichzeitigen, getrennten oder zeitlich abgestuften Anwendung eingesetzt.In the process, carbon dioxide and nitrous oxide as a cleaning agent, in particular as a combination cleaning agent for simultaneous, separate or graduated use used.
Das Reinigungsmittel enthält Kohlendioxid (CO2) und Distickstoffmonoxid (N2O), das auch als Lachgas bezeichnet wird. In der Regel besteht das Stoffgemisch aus Kohlendioxid (CO2) und Distickstoffmonoxid, vorzugsweise aus einem N2O-Anteil von 0,1 bis 20 Vol.-%, besonders bevorzugt aus einem einem N2O-Anteil von 5 bis 20 Vol.-%, Rest CO2 (zusammen 100 Vol.-%). Die Konzentrationsangaben (Vol.%) beziehen sich auf die Konzentrationen der Komponenten des Stoffgemisches bei Normalbedingungen (1 bar absolut, 0 °C).The cleaning agent contains carbon dioxide (CO 2 ) and nitrous oxide (N 2 O), which is also known as laughing gas. As a rule, the mixture of substances consists of carbon dioxide (CO 2 ) and nitrous oxide, preferably of an N 2 O content of 0.1 to 20 vol.%, Particularly preferably of an N 2 O content of 5 to 20 vol. -%, rest CO 2 (together 100 vol .-%). The concentration data (vol.%) Refer to the concentrations of the components of the substance mixture under normal conditions (1 bar absolute, 0 ° C).
Das Reinigungsmittel wird im allgemeinen als
Gasgemisch, als Flüssigkeit
oder in überkritischem
Zustand, vorzugsweise als verdichtetes Gasgemisch oder in überkritischem
Zustand, eingesetzt. Das Reinigungsmittel wird vorzugsweise wie übliche Kohlendioxid-Phasen
bei der Trockenreinigung eingesetzt. Der Einsatz des Reinigungsmittels
in überkritischem
Zustand erfolgt beispielsweise wie in der
Das Reinigungsmittel kann ein oder mehrere Zusatzstoffe enthalten. In diesen Fällen sind die Zusatzstoffe in der Regel in sehr geringer Konzentration enthalten. Zusatzstoffe sind z.B. Tenside, oberflächenaktive Stoffe. Auch der Zusatz von anorganischen Lösemitteln wie Wasser oder organischen Lösemitteln wie Alkohole (z.B. Methanol, Ethanol, Propanol, Isopropanol) oder lineare oder verzweigte Kohlenwasserstoffe (z.B. Methan, Ethan, Propan, Isopropan, Butan, Hexan, Heptan) kann je nach Anwendungsfall in größerer (z.B. Prozentbereich wie 1 bis 10 Gewichtsprozent) oder kleinerer Menge (z.B. Spurenbereich oder ppm-Bereich wie 10 bis 1000 ppm; 1 ppm = 10–6 g pro g) vorteilhaft sein.The cleaning agent can contain one or more additives. In these cases, the additives are usually contained in a very low concentration. Additives are, for example, surfactants, surface-active substances. The addition of inorganic solvents such as water or organic solvents such as alcohols (e.g. methanol, ethanol, propanol, isopropanol) or linear or branched hydrocarbons (e.g. methane, ethane, propane, isopropane, butane, hexane, heptane) can also be used in larger quantities, depending on the application (eg percentage range such as 1 to 10 percent by weight) or a smaller amount (eg trace range or ppm range such as 10 to 1000 ppm; 1 ppm = 10 -6 g per g) may be advantageous.
Bevorzugt werden Reinigungsmittel, die aus Kohlendioxid und Distickstoffmonoxid oder Kohlendioxid, Distickstoffmonoxid und einem oder mehreren Lösemitteln bestehen. Diese Reinigungsmittel hinterlassen keine Rückstände am Reinigungsgut. Die Zumischung von Distickstoffmonoxid zu Kohlendioxid verbessert die Reinigungsfähigkeit von Kohlendioxid, insbesondere überkritischem Kohlendioxid, außerordentlich.Cleaning agents are preferred, made of carbon dioxide and nitrous oxide or carbon dioxide, Nitrous oxide and one or more solvents exist. This detergent leave no residue on the items to be cleaned. The admixture of nitrous oxide to carbon dioxide improves the cleanability of carbon dioxide, especially supercritical Carbon dioxide, extraordinary.
Besonders vorteilhaft ist die Verwendung von Distickstoffmonoxid (N2O) bei der Trockenreinigung mit Kohlendioxid. Insbesondere wird die Trockenreinigung mit Kohlendioxid durch die Zudosierung von Distickstoffmonoxid verbessert.The use of nitrous oxide (N 2 O) is particularly advantageous for dry cleaning with carbon dioxide. In particular, dry cleaning with carbon dioxide is improved by the addition of nitrous oxide.
Das Stoffgemisch für das Reinigungsmittel wird in der Regel als druckverflüssigte Phase in einem Druckgasbehälter bereit gestellt. Druckgasbehälter sind beispielsweise Druckgasflaschen, Druckgaspatronen (Kleinpatronen) oder Druckdosen.The mixture of substances for the detergent is usually as pressurized Phase in a pressurized gas container provided. Compressed gas containers are, for example, compressed gas cylinders, compressed gas cartridges (small cartridges) or pressure cans.
Die Komponenten des Reinigungsmittels sind ungiftig, unbrennbar und physiologisch unbedenklich. Sie sind bereits im Medizin- und/oder Lebensmittelbereich etabliert.The components of the detergent are non-toxic, non-flammable and physiologically harmless. You are already established in the medical and / or food sector.
Vorteilhaft wird das Verfahren mit einer Verfahrensstufe zur Abtrennung von Verunreinigungen aus dem Reinigungsmittel während der Reinigung des Reinigungsgutes oder in einem vorangehenden oder nachfolgenden Verfahrensschritt kombiniert. Besonders vorteilhaft ist ein Kreislaufsystem, bei dem das Reinigungsmittel zwischen einer Reinigungseinrichtung für das Reinigungsgut und einer Reinigungseinrichtung für das Reinigungsmittel geführt wird. Beispielsweise wird das Reinigungsmittel zwischen den Einrichtungen kontinuierlich oder diskontinuierlich umgepumpt. Das Kreislaufsystem arbeitet z.B. mit flüssigem oder überkritischem Reinigungsmittel.The method with is advantageous a process step for the separation of impurities from the Detergent during the cleaning of the items to be cleaned or in a previous or subsequent process step combined. Particularly advantageous is a circulatory system, in which the detergent between one Cleaning device for the items to be cleaned and a cleaning device for the detergent guided becomes. For example, the detergent between the facilities pumped continuously or discontinuously. The circulatory system works e.g. with liquid or supercritical Cleaning supplies.
Die Reinigungseinrichtung für das Reinigungsmittel ist z.B. ein Filter, Adsorber oder Absorber, insbesondere eine oder mehrere Durchflußpatronen mit mindestens einem Reinigungsmaterial wie einem Filtermaterial, Adsorbermaterial oder Absorbermaterial. Das Reinigungsmaterial dient insbesondere zur Abtrennung von Verunreinigungen wie in dem Reinigungsmittel löslichen Stoffen, insbesondere Fett oder fettartigen Stoffen. Adsorbermaterial oder Absorbermaterial, auch Adsorptionsmittel oder Absorptionsmittel genannt, sind z.B. Aktivkohlen oder Polymerstoffe (Kunststoffe, z.B. makroretikuläre Styrol-Copolymere). Geeignete Adsorptionsmittel oder Absorptionsmittel zur Bindung von Verunreinigungen wie Fett sind dem Fachmann bekannt. Die Regenerierung des Reinigungsmittels durch Abtrennung von Verunreinigungen mittels einer Reinigungseinrichtung bietet sich insbesondere an bei dem Einsatz von Reinigungsmitteln, die keine Additive wie Tenside oder andere nichtflüchtige Additive enthalten. Die Regenerierung des Reinigungsmittels z.B. in einem Kreislaufsystem ist vorteilhaft insbesondere bei Reinigungsmitteln, die aus Kohlendioxid und Distickstoffmonoxid bestehen.The cleaning device for the cleaning agent is, for example, a filter, adsorber or absorber, in particular one or more flow pa tron with at least one cleaning material such as a filter material, adsorber material or absorber material. The cleaning material is used in particular to separate contaminants such as substances soluble in the cleaning agent, in particular grease or greasy substances. Adsorber material or absorber material, also called adsorbent or absorbent, are, for example, activated carbons or polymer materials (plastics, for example macroreticular styrene copolymers). Suitable adsorbents or absorbents for binding impurities such as fat are known to the person skilled in the art. The regeneration of the cleaning agent by removing contaminants by means of a cleaning device is particularly useful when using cleaning agents that do not contain any additives such as surfactants or other non-volatile additives. The regeneration of the cleaning agent, for example in a circulatory system, is advantageous in particular in the case of cleaning agents which consist of carbon dioxide and nitrous oxide.
Als Reinigungsmittel dienen z.B. vorgefertigte Gemische, insbesondere in Druckgasbehältern bereitgestellte Gasgemische, die z.B. aus Kohlendioxid und Distickstoffmonoxid bestehen, oder Gemische von Kohlendioxid und Distickstoffmonoxid, die vorort (in situ), in der Regel in dem Reinigungssystem (z.B. in oder an der Reinigungseinrichtung für das Reinigungsgut) erzeugt werden. Beispielsweise wird einem Kohlendioxidstrom kontinuierlich oder diskontinuierlich Distickstoffmonoxid zugemischt. Vorbestimmte Mengen von Distickstoffmonoxid werden z.B. über Steuereinrichtungen und Regeleinrichtungen und insbesondere steuerbare Ventile dem Kohlendioxid zudosiert. Die Dosierung von Distickstoffmonoxid erfolgt beispielsweise in einer oder mehreren Reinigungsphasen (Verfahrensschritten) des Reinigungsverfahrens.Serve as cleaning agents e.g. prefabricated mixtures, especially those provided in pressurized gas containers Gas mixtures, e.g. consist of carbon dioxide and nitrous oxide, or mixtures of carbon dioxide and nitrous oxide that are on site (in situ), usually in the cleaning system (e.g. in or on the cleaning device for the items to be cleaned) are generated. For example, a carbon dioxide stream Nitrogen monoxide is added continuously or discontinuously. Predetermined amounts of nitrous oxide are e.g. about control devices and regulating devices and in particular controllable valves to carbon dioxide added. Nitrogen monoxide is dosed, for example in one or more cleaning phases (process steps) of the cleaning process.
Überkritischem oder flüssigem Kohlendioxid wird z.B. mittels einer gesteuerten Dosiereinrichtung Distickstoffmonoxid zugeführt. Druck und Temperatur in dem System sind entsprechend zu wählen.supercritical or liquid Carbon dioxide is e.g. by means of a controlled dosing device nitrous oxide fed. The pressure and temperature in the system must be selected accordingly.
Claims (11)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10236491A DE10236491B4 (en) | 2002-08-09 | 2002-08-09 | Cleaning with CO2 and N2O |
EP03018106A EP1388376A3 (en) | 2002-08-09 | 2003-08-08 | Cleaning using CO2 and N2O |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10236491A DE10236491B4 (en) | 2002-08-09 | 2002-08-09 | Cleaning with CO2 and N2O |
Publications (2)
Publication Number | Publication Date |
---|---|
DE10236491A1 true DE10236491A1 (en) | 2004-02-19 |
DE10236491B4 DE10236491B4 (en) | 2012-05-03 |
Family
ID=30469620
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10236491A Expired - Fee Related DE10236491B4 (en) | 2002-08-09 | 2002-08-09 | Cleaning with CO2 and N2O |
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989004858A1 (en) * | 1987-11-27 | 1989-06-01 | Battelle Memorial Institute | Supercritical fluid reverse micelle separation |
WO1994001512A1 (en) * | 1992-07-10 | 1994-01-20 | E.I. Du Pont De Nemours And Company | Azeotropic compositions of perfluoroethane, and trifluoromethane, or oxide, or nitrous oxide, or carbon dioxide, or fluoromethane |
DE4309734A1 (en) * | 1993-03-25 | 1994-09-29 | Akzo Nobel Nv | Process for cleaning hollow fibers |
DE4333221A1 (en) * | 1993-09-30 | 1995-04-06 | Deutsches Textilforschzentrum | Process for decolouring substrates made from plastic, in particular synthetic fibres |
WO1997016264A1 (en) * | 1995-11-03 | 1997-05-09 | The University Of North Carolina At Chapel Hill | Novel cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants |
EP0828021A2 (en) * | 1996-09-09 | 1998-03-11 | Air Liquide America Corporation | Continuous cleaning apparatus and method |
EP0836895A2 (en) * | 1996-10-16 | 1998-04-22 | International Business Machines Corporation | Residue removal by supercritical fluids |
WO1999056892A1 (en) * | 1998-05-06 | 1999-11-11 | Steris Corporation | Sub-critical fluid cleaning and antimicrobial decontamination sysstem and process |
DE19903243A1 (en) * | 1999-01-28 | 2000-08-03 | Linde Tech Gase Gmbh | Process for the purification of materials and/or surfaces is carried out using a liquefied and/or super critical gas as cleaning agent |
WO2002032593A1 (en) * | 2000-10-20 | 2002-04-25 | Commissariat A L'energie Atomique | Method, device and installation for cleaning contaminated parts, with a dense pressurised fluid |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4306645A1 (en) * | 1993-03-03 | 1994-09-08 | David Jackson | Method for cleaning, sterilising and implanting substrates by means of a high-energy compressed fluid |
-
2002
- 2002-08-09 DE DE10236491A patent/DE10236491B4/en not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989004858A1 (en) * | 1987-11-27 | 1989-06-01 | Battelle Memorial Institute | Supercritical fluid reverse micelle separation |
WO1994001512A1 (en) * | 1992-07-10 | 1994-01-20 | E.I. Du Pont De Nemours And Company | Azeotropic compositions of perfluoroethane, and trifluoromethane, or oxide, or nitrous oxide, or carbon dioxide, or fluoromethane |
DE4309734A1 (en) * | 1993-03-25 | 1994-09-29 | Akzo Nobel Nv | Process for cleaning hollow fibers |
DE4333221A1 (en) * | 1993-09-30 | 1995-04-06 | Deutsches Textilforschzentrum | Process for decolouring substrates made from plastic, in particular synthetic fibres |
WO1997016264A1 (en) * | 1995-11-03 | 1997-05-09 | The University Of North Carolina At Chapel Hill | Novel cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants |
EP0828021A2 (en) * | 1996-09-09 | 1998-03-11 | Air Liquide America Corporation | Continuous cleaning apparatus and method |
EP0836895A2 (en) * | 1996-10-16 | 1998-04-22 | International Business Machines Corporation | Residue removal by supercritical fluids |
WO1999056892A1 (en) * | 1998-05-06 | 1999-11-11 | Steris Corporation | Sub-critical fluid cleaning and antimicrobial decontamination sysstem and process |
DE19903243A1 (en) * | 1999-01-28 | 2000-08-03 | Linde Tech Gase Gmbh | Process for the purification of materials and/or surfaces is carried out using a liquefied and/or super critical gas as cleaning agent |
WO2002032593A1 (en) * | 2000-10-20 | 2002-04-25 | Commissariat A L'energie Atomique | Method, device and installation for cleaning contaminated parts, with a dense pressurised fluid |
Also Published As
Publication number | Publication date |
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DE10236491B4 (en) | 2012-05-03 |
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