DE102018210850A8 - Micromechanical pressure sensor device - Google Patents

Micromechanical pressure sensor device Download PDF

Info

Publication number
DE102018210850A8
DE102018210850A8 DE102018210850.1A DE102018210850A DE102018210850A8 DE 102018210850 A8 DE102018210850 A8 DE 102018210850A8 DE 102018210850 A DE102018210850 A DE 102018210850A DE 102018210850 A8 DE102018210850 A8 DE 102018210850A8
Authority
DE
Germany
Prior art keywords
pressure sensor
sensor device
micromechanical pressure
micromechanical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102018210850.1A
Other languages
German (de)
Other versions
DE102018210850A1 (en
Inventor
Stefan Pinter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102018210850.1A priority Critical patent/DE102018210850A1/en
Publication of DE102018210850A1 publication Critical patent/DE102018210850A1/en
Publication of DE102018210850A8 publication Critical patent/DE102018210850A8/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/04—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges in the form of flexible, deformable tubes, e.g. Bourdon gauges
    • G01L7/041—Construction or mounting of deformable tubes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE102018210850.1A 2018-07-02 2018-07-02 Micromechanical pressure sensor device Pending DE102018210850A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE102018210850.1A DE102018210850A1 (en) 2018-07-02 2018-07-02 Micromechanical pressure sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102018210850.1A DE102018210850A1 (en) 2018-07-02 2018-07-02 Micromechanical pressure sensor device

Publications (2)

Publication Number Publication Date
DE102018210850A1 DE102018210850A1 (en) 2020-01-02
DE102018210850A8 true DE102018210850A8 (en) 2021-07-22

Family

ID=68886399

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102018210850.1A Pending DE102018210850A1 (en) 2018-07-02 2018-07-02 Micromechanical pressure sensor device

Country Status (1)

Country Link
DE (1) DE102018210850A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022208695A1 (en) 2022-08-23 2024-02-29 Robert Bosch Gesellschaft mit beschränkter Haftung Micromechanical device with a rotor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005121735A2 (en) 2004-06-07 2005-12-22 California Institute Of Technology Implantable mechanical pressure sensor and method of manufacturing the same

Also Published As

Publication number Publication date
DE102018210850A1 (en) 2020-01-02

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