DE102018202625B8 - Maschinenmessvorrichtung - Google Patents

Maschinenmessvorrichtung Download PDF

Info

Publication number
DE102018202625B8
DE102018202625B8 DE102018202625.4A DE102018202625A DE102018202625B8 DE 102018202625 B8 DE102018202625 B8 DE 102018202625B8 DE 102018202625 A DE102018202625 A DE 102018202625A DE 102018202625 B8 DE102018202625 B8 DE 102018202625B8
Authority
DE
Germany
Prior art keywords
measuring device
machine measuring
machine
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102018202625.4A
Other languages
English (en)
Other versions
DE102018202625B4 (de
DE102018202625A1 (de
Inventor
Kazunori Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of DE102018202625A1 publication Critical patent/DE102018202625A1/de
Publication of DE102018202625B4 publication Critical patent/DE102018202625B4/de
Application granted granted Critical
Publication of DE102018202625B8 publication Critical patent/DE102018202625B8/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
    • B23Q17/2471—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces of workpieces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/249—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using image analysis, e.g. for radar, infrared or array camera images
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE102018202625.4A 2017-03-15 2018-02-21 Maschinenmessvorrichtung Active DE102018202625B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017049604A JP6457574B2 (ja) 2017-03-15 2017-03-15 計測装置
JP2017-049604 2017-03-15

Publications (3)

Publication Number Publication Date
DE102018202625A1 DE102018202625A1 (de) 2018-09-20
DE102018202625B4 DE102018202625B4 (de) 2020-06-18
DE102018202625B8 true DE102018202625B8 (de) 2020-09-10

Family

ID=63371963

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102018202625.4A Active DE102018202625B8 (de) 2017-03-15 2018-02-21 Maschinenmessvorrichtung

Country Status (4)

Country Link
US (1) US10203201B2 (de)
JP (1) JP6457574B2 (de)
CN (1) CN108620954B (de)
DE (1) DE102018202625B8 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111707200A (zh) * 2020-05-26 2020-09-25 东风博泽汽车***有限公司 一种无刷电机连接单元的电极检测装置
CN112857270B (zh) * 2021-01-08 2022-12-09 上海科技大学 一种利用rheed原位实时定量探测薄膜粗糙度的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576479A (en) * 1982-05-17 1986-03-18 Downs Michael J Apparatus and method for investigation of a surface
JPH01193631A (ja) * 1988-01-28 1989-08-03 Nissan Motor Co Ltd 表面欠陥検査装置
DE4218382A1 (de) * 1992-06-04 1993-12-09 Leonhardt Klaus Prof Dr Ing Ha Optisches Profilometer zur Rauheitsmessung mit adaptiver Neigungsvoreinstellung und neuartigem Detektionssystem
JPH08166214A (ja) * 1991-08-07 1996-06-25 Naotake Mori レーザ測定方法及び装置
JP2013029350A (ja) * 2011-07-27 2013-02-07 Hitachi Ltd 外観検査方法及びその装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843681B2 (ja) * 1972-06-16 1983-09-28 三菱電機株式会社 ヒヨウメンジヨウタイカンソクソウチ
JPS6337205A (ja) * 1986-07-31 1988-02-17 Tokyo Seimitsu Co Ltd 表面粗さ測定方法
JPH01292202A (ja) * 1988-05-20 1989-11-24 Ricoh Co Ltd 溝形状測定方法
JPH0261511A (ja) * 1988-08-29 1990-03-01 Nippon Telegr & Teleph Corp <Ntt> 周期性表面構造の測定装置
US5189490A (en) * 1991-09-27 1993-02-23 University Of Hartford Method and apparatus for surface roughness measurement using laser diffraction pattern
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
JP3932180B2 (ja) * 2002-07-03 2007-06-20 松下電器産業株式会社 ティーチング方法、電子基板検査方法、および電子基板検査装置
JP3741672B2 (ja) * 2002-07-08 2006-02-01 株式会社アドイン研究所 画像特徴学習型欠陥検出方法、欠陥検出装置及び欠陥検出プログラム
JP4447970B2 (ja) * 2004-06-14 2010-04-07 キヤノン株式会社 物体情報生成装置および撮像装置
JP5892591B2 (ja) * 2010-12-09 2016-03-23 国立大学法人九州工業大学 三次元表面の計測装置及び方法
US20140152771A1 (en) * 2012-12-01 2014-06-05 Og Technologies, Inc. Method and apparatus of profile measurement
DE102013015932A1 (de) * 2013-09-19 2015-03-19 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576479A (en) * 1982-05-17 1986-03-18 Downs Michael J Apparatus and method for investigation of a surface
JPH01193631A (ja) * 1988-01-28 1989-08-03 Nissan Motor Co Ltd 表面欠陥検査装置
JPH08166214A (ja) * 1991-08-07 1996-06-25 Naotake Mori レーザ測定方法及び装置
DE4218382A1 (de) * 1992-06-04 1993-12-09 Leonhardt Klaus Prof Dr Ing Ha Optisches Profilometer zur Rauheitsmessung mit adaptiver Neigungsvoreinstellung und neuartigem Detektionssystem
JP2013029350A (ja) * 2011-07-27 2013-02-07 Hitachi Ltd 外観検査方法及びその装置

Also Published As

Publication number Publication date
CN108620954A (zh) 2018-10-09
JP6457574B2 (ja) 2019-01-23
DE102018202625B4 (de) 2020-06-18
CN108620954B (zh) 2020-01-17
JP2018151353A (ja) 2018-09-27
US20180266816A1 (en) 2018-09-20
US10203201B2 (en) 2019-02-12
DE102018202625A1 (de) 2018-09-20

Similar Documents

Publication Publication Date Title
DK3305266T3 (da) Stiftformig stimulationsindretning
DK3404169T3 (da) Gondolanordning
DK4011339T3 (da) Stomianordning
DE112018001949T8 (de) Objekterfassungsvorrichtung
DK3426850T3 (da) Kabellægnings-indretning
DK3585457T3 (da) Pakningsindretning
DK3484776T3 (da) Påfyldningsanordning
DK3329265T3 (da) Sensoranordning
IT201700032261A1 (it) Macchina ispezionatrice
DK3367886T3 (da) Sensoranordning
DK3564632T3 (da) Kombinationsvejeindretning
DE112017004618T8 (de) Objekterfassungsvorrichtung
DK3324182T3 (da) Fugtighedsmåleapparat
DK3391118T3 (da) Inspektionsanordning
DE102018202625B8 (de) Maschinenmessvorrichtung
DE112016001310A5 (de) Sensorvorrichtung
DK3598085T3 (da) Kombinationsvejeindretning
DK3316222T3 (da) Prævisualiseringsindretning
DK3196610T3 (da) Kombinationsmåleindretning
ES1147483Y (es) Dispositivo indicador
DK3645984T3 (da) Vejeindretning
ES1202511Y (es) Maquina satinadora-cepilladora
DK3270174T3 (da) Testanordning
IT201700082267A1 (it) Dispositivo faldatore
IT201600070208A1 (it) Apparecchio di misura

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final