DE102016200148A1 - Elektromechanischer Wandler und Verfahren zum Herstellen eines elektromechanischen Wandlers - Google Patents

Elektromechanischer Wandler und Verfahren zum Herstellen eines elektromechanischen Wandlers Download PDF

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Publication number
DE102016200148A1
DE102016200148A1 DE102016200148.5A DE102016200148A DE102016200148A1 DE 102016200148 A1 DE102016200148 A1 DE 102016200148A1 DE 102016200148 A DE102016200148 A DE 102016200148A DE 102016200148 A1 DE102016200148 A1 DE 102016200148A1
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Germany
Prior art keywords
layer
elastic material
electromechanical transducer
strips
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
DE102016200148.5A
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German (de)
English (en)
Inventor
Stefan Doerne
Andre Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102016200148.5A priority Critical patent/DE102016200148A1/de
Priority to IT102016000131977A priority patent/IT201600131977A1/it
Priority to FR1750096A priority patent/FR3046675B1/fr
Priority to CN201710010252.6A priority patent/CN107017335A/zh
Publication of DE102016200148A1 publication Critical patent/DE102016200148A1/de
Withdrawn legal-status Critical Current

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    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/02Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
    • B32B3/04Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions characterised by at least one layer folded at the edge, e.g. over another layer ; characterised by at least one layer enveloping or enclosing a material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B32B7/04Interconnection of layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00Devices without movable or flexible elements, e.g. microcapillary devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00103Structures having a predefined profile, e.g. sloped or rounded grooves
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/05Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/704Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
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    • B32B2255/00Coating on the layer surface
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    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2260/00Layered product comprising an impregnated, embedded, or bonded layer wherein the layer comprises an impregnation, embedding, or binder material
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    • B32B2457/00Electrical equipment

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Laminated Bodies (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE102016200148.5A 2016-01-08 2016-01-08 Elektromechanischer Wandler und Verfahren zum Herstellen eines elektromechanischen Wandlers Withdrawn DE102016200148A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102016200148.5A DE102016200148A1 (de) 2016-01-08 2016-01-08 Elektromechanischer Wandler und Verfahren zum Herstellen eines elektromechanischen Wandlers
IT102016000131977A IT201600131977A1 (it) 2016-01-08 2016-12-29 Trasduttore elettromeccanico e procedimento per fabbricare un trasduttore elettromeccanico
FR1750096A FR3046675B1 (fr) 2016-01-08 2017-01-05 Convertisseur electromecanique et son procede de fabrication
CN201710010252.6A CN107017335A (zh) 2016-01-08 2017-01-06 机电的转换器和用于制造机电的转换器的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102016200148.5A DE102016200148A1 (de) 2016-01-08 2016-01-08 Elektromechanischer Wandler und Verfahren zum Herstellen eines elektromechanischen Wandlers

Publications (1)

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DE102016200148A1 true DE102016200148A1 (de) 2017-07-13

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DE102016200148.5A Withdrawn DE102016200148A1 (de) 2016-01-08 2016-01-08 Elektromechanischer Wandler und Verfahren zum Herstellen eines elektromechanischen Wandlers

Country Status (4)

Country Link
CN (1) CN107017335A (fr)
DE (1) DE102016200148A1 (fr)
FR (1) FR3046675B1 (fr)
IT (1) IT201600131977A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160352259A1 (en) * 2015-05-27 2016-12-01 Snu R&Db Foundation High speed actuator including active stiffness controller and method of driving the same
DE102022126523B3 (de) 2022-10-12 2023-09-21 Tdk Electronics Ag Sensorelement und Verfahren zur Herstellung eines Sensorelements

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013120494A1 (fr) 2012-02-14 2013-08-22 Danfoss Polypower A/S Transducteur capacitif et procédé de production d'un transducteur

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2339869A1 (fr) * 2009-11-12 2011-06-29 Bayer MaterialScience AG Composite ferroélectrique à deux et plusieurs couches et son procédé de fabrication
JP5592192B2 (ja) * 2010-08-11 2014-09-17 富士フイルム株式会社 圧電体膜とその製造方法、圧電素子および液体吐出装置
DE102013208791B4 (de) * 2013-05-14 2022-02-10 Robert Bosch Gmbh Hybridfolie für einen Energietransformer mit Verfahren zur Herstellung
CN103985815B (zh) * 2014-05-30 2017-04-05 中南大学 一种制备压电纤维复合物的切割方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013120494A1 (fr) 2012-02-14 2013-08-22 Danfoss Polypower A/S Transducteur capacitif et procédé de production d'un transducteur

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160352259A1 (en) * 2015-05-27 2016-12-01 Snu R&Db Foundation High speed actuator including active stiffness controller and method of driving the same
US10250165B2 (en) * 2015-05-27 2019-04-02 Snu R&Db Foundation High speed actuator including active stiffness controller and method of driving the same
DE102022126523B3 (de) 2022-10-12 2023-09-21 Tdk Electronics Ag Sensorelement und Verfahren zur Herstellung eines Sensorelements

Also Published As

Publication number Publication date
FR3046675A1 (fr) 2017-07-14
FR3046675B1 (fr) 2020-01-17
IT201600131977A1 (it) 2018-06-29
CN107017335A (zh) 2017-08-04

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