DE102013203532A1 - component cooling - Google Patents
component cooling Download PDFInfo
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- DE102013203532A1 DE102013203532A1 DE201310203532 DE102013203532A DE102013203532A1 DE 102013203532 A1 DE102013203532 A1 DE 102013203532A1 DE 201310203532 DE201310203532 DE 201310203532 DE 102013203532 A DE102013203532 A DE 102013203532A DE 102013203532 A1 DE102013203532 A1 DE 102013203532A1
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- Prior art keywords
- component
- base plate
- chip
- component cooling
- heat
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/481—Disposition
- H01L2224/4813—Connecting within a semiconductor or solid-state body, i.e. fly wire, bridge wire
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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- H01L2224/73251—Location after the connecting process on different surfaces
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Beschrieben wird eine Bauteilekühlung eines auf einer Grundplatte sitzenden elektrischen Bauteils, insbesondere eines Leistungsbauteiles in Form eines Chip (C), wobei das Bau-teil (C) über auf der der abgewandten Seite der Grundplatte (GP) verlaufende Leitungen (BD) elektrisch kontaktiert ist, wobei eine der elektrischen Leitungen (BD) mit einer Kühleinrichtung verbunden ist.A component cooling of an electrical component sitting on a base plate, in particular a power component in the form of a chip (C), is described, the component (C) being electrically contacted via lines (BD) running on the opposite side of the base plate (GP) , wherein one of the electrical lines (BD) is connected to a cooling device.
Description
Die Erfindung betrifft eine Bauteilekühlung der Art von Anspruch 1.The invention relates to a component cooling of the type of claim 1.
Elektronische Bauteile entwickeln während des Betriebs Wärme, die zur Erhaltung der Funktionssicherheit abgeführt werden muss. Im Bereich KFZ-Elektronik werden insbesondere IGBT-Module (insulated-gate bipolar transistor), MOSFETs für Schaltvorgänge benutzt. Durch die z.T. beträchtlichen Ströme entsteht Abwärme, die abgeleitet werden muss, um bauteilschädigende Erwärmungen zu verhindern. Üblich ist die Anordnung der Abwärme entwickelnden Bauteile in Kontakt mit Kühlkörpern.Electronic components develop heat during operation, which must be dissipated to maintain functional safety. In the field of automotive electronics in particular IGBT modules (insulated-gate bipolar transistor), MOSFETs are used for switching operations. By the z.T. considerable flows generate waste heat, which must be dissipated to prevent component-damaging warming. Common is the arrangement of the waste heat developing components in contact with heat sinks.
Die
Die
Aus der
Bei der
Die Stromschiene der
Die Aufgabe der vorliegenden Erfindung besteht darin, Bauteilekühlung in gegenüber den bekannten Lösungen verbesserter Ausführung vorzuschlagen.The object of the present invention is to propose component cooling in relation to the known solutions of improved design.
Diese Aufgabe wird gelöst durch die Merkmale von Anspruch 1. Weiterbildungen ergeben sich aus den Unteransprüchen.This object is achieved by the features of claim 1. Further developments will become apparent from the dependent claims.
Die Erfindung sieht eine Bauteilekühlung eines auf einer Grundplatte sitzenden elektrischen Bauteils vor, wobei das Bauteil über auf der der abgewandten Seite der Grundplatte verlaufende Leitungen elektrisch kontaktiert ist, wobei eine der elektrischen Leitungen eine Kühleinrichtung aufweist bzw. mit einer solchen verbunden ist.The invention provides a component cooling of an electrical component seated on a base plate, wherein the component is electrically contacted via lines running on the opposite side of the base plate, one of the electrical lines having or being connected to a cooling device.
Bevorzugt erfolgt die Kühlung über eine Stromschiene, welche oberhalb der das Bauteil tragenden Anordnung sitzt und in ihrer Dimensionierung zur Ableitung eines vorgesehenen Wärmestromes ausgeführt ist. Die Bonddrähte des Chip sind zu einer, mehreren Stromschienen geführt. Die Kontakte der Bonddrähte zum Chip sind zwar kleinflächig, durch das gut wärmeleitende Material (Kupfer) erfolgt auf diesem Weg eine Entwärmung, das thermische Niveau des Chip wird spürbar gesenkt.Preferably, the cooling takes place via a busbar, which sits above the device carrying the assembly and is designed in its dimensions for the derivation of a proposed heat flow. The bonding wires of the chip are led to one, several busbars. Although the contacts of the bonding wires to the chip are small in area, heat dissipation through the good heat-conducting material (copper) in this way, the thermal level of the chip is noticeably reduced.
Eine weitere bevorzugte Ausführung der Erfindung sieht eine Ergänzung der Stromschienen mit Kühlkanälen vor. Diese Erweiterung erhöht den Bauraum der Stromschienen, jedoch kann so eine Kühlung, eine Entwärmung sehr nahe am Chip realisiert werden, wobei ein vorhandener Kühlkreislauf genutzt wird.A further preferred embodiment of the invention provides for a supplement of the busbars with cooling channels. This extension increases the space of the busbars, but so can a cooling, a cooling very close to the chip can be realized, with an existing cooling circuit is used.
Bei üblicher Anordnung von elektronischen Leistungsbauelementen erfolgt die Entwärmung über eine Grundplatte, die das Bauelement trägt. Zusätzlich kann an der Rückseite der Grundplatte, auf der dem Bauteil abgewandten Seite ein Kühlkörper angeordnet sein. In conventional arrangement of electronic power devices, the heat dissipation via a base plate, which carries the device. In addition, a heat sink can be arranged on the rear side of the base plate, on the side facing away from the component.
Die Erfindung sieht eine zusätzliche Entwärmung, eine Wärmeabfuhr oberhalb der Grundplatte vor. Vorzugsweise werden die Bonddrähte des Chip genutzt, wozu diese in Wärmekontakt mit einer Stromschiene gebracht werden. The invention provides additional heat dissipation, heat dissipation above the base plate. Preferably, the bonding wires of the chip are used, for which purpose they are brought into thermal contact with a busbar.
Des Weiteren wird ein Ausführungsbeispiel der Erfindung an Hand der Zeichnungen beschrieben.Furthermore, an embodiment of the invention will be described with reference to the drawings.
Der Chip C ist über eine Anzahl Bonddrähte BD kontaktiert. Über in Form von Stromschienenkörpern SK gestalteter Anschlüsse A erfolgt die elektrische Verbindung zu mit dem Chip C zusammenwirkenden Komponenten. Die Anschlüsse A sind in der Dimensionierung für einen Wärmetransport ausgelegt, d.h. in Querschnitt und Material entsprechend gestaltet. Die Anschlüsse A sehen mit einer nicht dargestellten Temperatursenke in Verbindung, so dass die vom Chip C über dessen Bonddrähte abgegebene Wärme abgeführt wird. Dieser Wärmestrom ist durch die in der
Die
Die von einem Kühlmittelfluid durchflossenen Kühlmittelkanäle KK1, KK2, KK3 stehen mit einem vorhandenen Kühlsystem der Elektronik in Kontakt und geben ihre im Bereich des Chip C aufgenommene Wärme an diese Wärmesenke ab. The coolant channels KK1, KK2, KK3 through which a coolant fluid is in contact with an existing cooling system of the electronics and deliver their heat absorbed in the region of the chip C to this heat sink.
Bezugszeichenreference numeral
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- CC
- Chipchip
- BDBD
- Bonddrahtbonding wire
- GPGP
- Grundplattebaseplate
- DBCDBC
- Directed Bonded CopperDirected Bonded Copper
- LSLS
- Lotschichtsolder layer
- KKKK
- Kühlkörperheatsink
- WLPWLP
- WärmeleitpasteThermal Compounds
- AA
- Anschlussconnection
- SKSK
- StromschienenkörperBusbar body
- LB1, LB2LB1, LB2
- Leiterbahn elektrischTrack electrically
- KK1, KK2, KK3KK1, KK2, KK3
- KühlmittelkanalCoolant channel
ZITATE ENTHALTEN IN DER BESCHREIBUNG QUOTES INCLUDE IN THE DESCRIPTION
Diese Liste der vom Anmelder aufgeführten Dokumente wurde automatisiert erzeugt und ist ausschließlich zur besseren Information des Lesers aufgenommen. Die Liste ist nicht Bestandteil der deutschen Patent- bzw. Gebrauchsmusteranmeldung. Das DPMA übernimmt keinerlei Haftung für etwaige Fehler oder Auslassungen.This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.
Zitierte PatentliteraturCited patent literature
- DE 102004018469 B3 [0003] DE 102004018469 B3 [0003]
- DE 9307464 U1 [0004] DE 9307464 U1 [0004]
- DE 4338277 A1 [0005] DE 4338277 A1 [0005]
- DE 102008063724 A1 [0006] DE 102008063724 A1 [0006]
- DE 102008061489 A1 [0006] DE 102008061489 A1 [0006]
- DE 19715178 A1 [0007] DE 19715178 A1 [0007]
Claims (7)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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DE201310203532 DE102013203532A1 (en) | 2013-03-01 | 2013-03-01 | component cooling |
PCT/EP2014/053823 WO2014131829A1 (en) | 2013-03-01 | 2014-02-27 | Component cooling system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201310203532 DE102013203532A1 (en) | 2013-03-01 | 2013-03-01 | component cooling |
Publications (1)
Publication Number | Publication Date |
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DE102013203532A1 true DE102013203532A1 (en) | 2014-09-04 |
Family
ID=50184924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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DE201310203532 Withdrawn DE102013203532A1 (en) | 2013-03-01 | 2013-03-01 | component cooling |
Country Status (2)
Country | Link |
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DE (1) | DE102013203532A1 (en) |
WO (1) | WO2014131829A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016200724A1 (en) | 2016-01-20 | 2017-07-20 | Robert Bosch Gmbh | Device for cooling at least one bus bar and corresponding power circuit |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE9307464U1 (en) | 1993-05-17 | 1993-07-15 | Siemens Ag, 8000 Muenchen, De | |
DE4338277A1 (en) | 1993-07-17 | 1995-01-19 | Abb Patent Gmbh | Liquid-cooled convertor module having circuitry components for power semiconductors which can be turned off |
DE19715178A1 (en) | 1997-04-11 | 1998-10-22 | Loh Kg Rittal Werk | Busbar with adjustable bolt=on finned plate(s), improving cooling |
JP2005123265A (en) * | 2003-10-14 | 2005-05-12 | Sumitomo Electric Ind Ltd | Power device cooling apparatus and inverter unit for motor driving |
DE102004018469B3 (en) | 2004-04-16 | 2005-10-06 | eupec Europäische Gesellschaft für Leistungshalbleiter mbH | Power semiconductor circuit |
JP2007215396A (en) * | 2006-01-16 | 2007-08-23 | Nissan Motor Co Ltd | Semiconductor power converter |
DE102008063724A1 (en) | 2007-12-19 | 2009-07-23 | GM Global Technology Operations, Inc., Detroit | Busbar assembly for use with vehicular inverter module, has several continuous channels through which dielectric coolant liquid flows for absorbing and dissipating heat generated by power semiconductor modules mounted on busbar |
DE102008061489A1 (en) | 2008-12-10 | 2010-06-17 | Siemens Aktiengesellschaft | Power converter module with cooled busbar |
DE102009005915A1 (en) * | 2009-01-23 | 2010-08-19 | Semikron Elektronik Gmbh & Co. Kg | Power semiconductor module in pressure contact design |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4044265B2 (en) * | 2000-05-16 | 2008-02-06 | 三菱電機株式会社 | Power module |
CN102460695A (en) * | 2009-06-19 | 2012-05-16 | 株式会社安川电机 | Wiring board and power conversion device |
JP2011114307A (en) * | 2009-11-30 | 2011-06-09 | Toyota Motor Corp | Power semiconductor unit |
JP2011115020A (en) * | 2009-11-30 | 2011-06-09 | Toyota Motor Corp | Power unit |
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2013
- 2013-03-01 DE DE201310203532 patent/DE102013203532A1/en not_active Withdrawn
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2014
- 2014-02-27 WO PCT/EP2014/053823 patent/WO2014131829A1/en active Application Filing
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE9307464U1 (en) | 1993-05-17 | 1993-07-15 | Siemens Ag, 8000 Muenchen, De | |
DE4338277A1 (en) | 1993-07-17 | 1995-01-19 | Abb Patent Gmbh | Liquid-cooled convertor module having circuitry components for power semiconductors which can be turned off |
DE19715178A1 (en) | 1997-04-11 | 1998-10-22 | Loh Kg Rittal Werk | Busbar with adjustable bolt=on finned plate(s), improving cooling |
JP2005123265A (en) * | 2003-10-14 | 2005-05-12 | Sumitomo Electric Ind Ltd | Power device cooling apparatus and inverter unit for motor driving |
DE102004018469B3 (en) | 2004-04-16 | 2005-10-06 | eupec Europäische Gesellschaft für Leistungshalbleiter mbH | Power semiconductor circuit |
JP2007215396A (en) * | 2006-01-16 | 2007-08-23 | Nissan Motor Co Ltd | Semiconductor power converter |
DE102008063724A1 (en) | 2007-12-19 | 2009-07-23 | GM Global Technology Operations, Inc., Detroit | Busbar assembly for use with vehicular inverter module, has several continuous channels through which dielectric coolant liquid flows for absorbing and dissipating heat generated by power semiconductor modules mounted on busbar |
DE102008061489A1 (en) | 2008-12-10 | 2010-06-17 | Siemens Aktiengesellschaft | Power converter module with cooled busbar |
DE102009005915A1 (en) * | 2009-01-23 | 2010-08-19 | Semikron Elektronik Gmbh & Co. Kg | Power semiconductor module in pressure contact design |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016200724A1 (en) | 2016-01-20 | 2017-07-20 | Robert Bosch Gmbh | Device for cooling at least one bus bar and corresponding power circuit |
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WO2014131829A1 (en) | 2014-09-04 |
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