DE102009037684A1 - Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness - Google Patents
Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness Download PDFInfo
- Publication number
- DE102009037684A1 DE102009037684A1 DE200910037684 DE102009037684A DE102009037684A1 DE 102009037684 A1 DE102009037684 A1 DE 102009037684A1 DE 200910037684 DE200910037684 DE 200910037684 DE 102009037684 A DE102009037684 A DE 102009037684A DE 102009037684 A1 DE102009037684 A1 DE 102009037684A1
- Authority
- DE
- Germany
- Prior art keywords
- transport roller
- ring
- plastic
- transport
- medium hardness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
Abstract
Description
Die Erfindung betrifft eine Transportrolle zum Befördern von Carriern durch Vakuumbeschichtungsanlagen, die entlang den Transportbahnen durch die Prozesskammer oder auch außerhalb dieser angeordnet sind und ein Transportsystem bilden. Auf den Carriern befinden sich die Substrate. Da diese Substrate sehr dünn und empfindlich gegen Erschütterungen sind, werden an einen substratschonenden Transport hohe Anforderungen gestellt. Das hauptsächliche Anwendungsgebiet ist die Beschichtung von Silizium-Wafern, oder von dünnen Glasscheiben.The invention relates to a transport roller for conveying carriers by vacuum coating equipment, which are arranged along the transport paths through the process chamber or outside of this and form a transport system. On the carriers are the substrates. Since these substrates are very thin and sensitive to vibration, high demands are made on a substrate-friendly transport. The main field of application is the coating of silicon wafers, or of thin glass panes.
Es sind die verschiedensten Ausführungen von Transportsystemen, sowohl für die Beförderung von zu bearbeitenden Teilen durch Einrichtungen an Luft, als auch von Substraten verschiedenster Ausführung und aus beliebigem Material durch Vakuumanlagen bekannt. Bei all diesen Ausführungen werden die Werkstücke oder Substrate auf fahrbaren Transportmitteln, Carrier genannt, durch die einzelnen Stationen der Bearbeitungsanlage kontinuierlich oder diskontinuierlich bewegt. Die Werkstücke oder Substrat sind mit Klemmvorrichtungen oder auch anderen Mitteln auf dem Carrier befestigt.There are a variety of designs of transport systems, both for the transport of parts to be processed by facilities in air, as well as substrates of various designs and of any material by vacuum systems known. In all these embodiments, the workpieces or substrates on mobile means of transport, called carriers, moved continuously or discontinuously through the individual stations of the processing plant. The workpieces or substrate are fastened to the carrier by means of clamping devices or other means.
Die Transportsysteme zum Bewegen von Carriern, die mit sehr dünnen und zerbrechlichen Substraten, vorzugsweise Silizium-Wafer, bestückt sind, lassen derartige Befestigungsmittel nicht zu. Es werden an den Transport bezüglich Erschütterung außerordentlich hohe Anforderungen gestellt. Die Wafer liegen in Aussparungen des Carriers ohne irgendwelche Befestigungsmittel und müssen ganzflächig dem Beschichtungsprozess zugängig sein. Sie werden daher nur durch ihr Eigengewicht in einer Aussparung des Carriers gehalten und fixiert.The transport systems for moving carriers, which are equipped with very thin and fragile substrates, preferably silicon wafers, do not allow such fastening means. There are extremely high demands on the transport in terms of vibration. The wafers lie in recesses of the carrier without any fastening means and must be accessible to the coating process over the entire surface. They are therefore held and fixed only by their own weight in a recess of the carrier.
In den bekannten Transportsystemen sind entlang der Transportbahn mehrere Transportrollen angeordnet, auf denen die an den Carrier angebrachten Schienen entlang laufen. Das Profil der Transportrollen ist so gewählt, dass diese beiderseitig einen Bund besitzen (auch Bund- rollen genannt) wobei die Schiene zwischen dem Bund geführt ist. Die Rollen sind wie auch die Schiene aus Metall.In the known transport systems, several transport rollers are arranged along the transport path, on which run along the rails attached to the carrier. The profile of the transport rollers is chosen so that they have a collar on both sides (also called covenant rollers) with the rail being guided between the collar. The rollers are like the rail of metal.
Diese Ausführung der Transportrolle hat den Nachteil, dass der Lauf des Carriers nicht erschütterungsfrei ist, denn beim Übergang von einer Transportrolle zur nächsten entsteht bedingt durch geringste Positionierungsungenauigkeiten der Rollen zueinander ein geringer Schlag.This embodiment of the transport roller has the disadvantage that the run of the carrier is not vibration-free, because the transition from one transport roller to the next caused due to the slightest positioning inaccuracies of the rollers to each other a small impact.
Prozessbedingt muss der Carrier möglichst schnell beschleunigt werden. In Folge der Materialpaarung zwischen Metallrolle und Metallschiene am Carrier sind Beschleunigungen nur bis zu gewissen Grenzwerten möglich, um einen Bewegungsschlupf zwischen beiden Elementen zu vermeiden. Tritt ein Schlupf ein, entsteht sowohl an der Rolle als auch an der Schiene ein nicht zu vertretender Verschleiß.Due to the process, the carrier has to be accelerated as fast as possible. As a result of the material pairing between metal roller and metal rail on the carrier accelerations are possible only up to certain limits in order to avoid a movement slip between the two elements. If slippage occurs, wear is unacceptable both on the roller and on the rail.
Ein wesentlicher Nachteil besteht weiterhin darin, dass der Carrier elektrisch isoliert sein muss, was einen zusätzlichen apparativen Aufwand der Konstruktion des Transportsystems durch Trennung des Carriers vom Massepotential erfordert. Hinzu kommt auch, dass neben der elektrischen Isolierung des Carriers eine thermische Isolierung erforderlich ist.A major disadvantage continues to be that the carrier must be electrically isolated, which requires additional equipment expense of the construction of the transport system by separating the carrier from the ground potential. In addition, in addition to the electrical insulation of the carrier thermal insulation is required.
Alle diese Mängel führen dazu, dass die auf dem Carrier befindlichen Substrate zerstört werden können, was nicht nur den Ausschuss an Substraten negativ beeinflusst sondern auch zu Schäden in der Anlage führen kann, indem Bruchstücke des Substrats in die Anlage gelangen.All of these deficiencies cause the substrates on the carrier to be destroyed, which not only negatively impacts the rejection of substrates, but can also cause damage to the equipment by introducing fragments of the substrate into the equipment.
Somit liegt der Erfindung die Aufgabe zu Grunde, eine Transportrolle für ein Transportsystem zum Befördern von Carriern mit seinen darauf aufgelegten Substraten durch Stationen der Vakuumbeschichtungsanlagen zu schaffen, welche gewährleistet, dass während dem Transport keine Erschütterungen oder Stöße des Carriers hergerufen werden, und damit ein Zerbrechen der Substrate, vorzugsweise Silizium-Wafer ausschließt. Die Transportrolle soll auch keine Maßnahmen erfordern, um eine elektrische und thermische Trennung herzustellen. Die Herstellungskosten für die Transportrolle sollen sich vom Aufwand und den Kosten nicht wesentlich erhöhen.Thus, the invention is based on the object to provide a transport roller for a transport system for carrying carriers with its substrates placed thereon by stations of the vacuum coating equipment, which ensures that no vibrations or shocks of the carrier are caused during transport, and thus a break the substrates, preferably excludes silicon wafer. The transport roller should also require no measures to produce an electrical and thermal separation. The cost of manufacturing the transport roller should not increase significantly from the effort and costs.
Erfindungsgemäß wird die Aufgabe dadurch gelöst, dass die Transportrolle aus Kunststoff hergestellt ist. Die geometrische Form ist wie bekannt derart, dass die Ränder zu beiden Seiten so ausgebildet sind, dass sie nach dem Grund der enger werden und eine konische Vertiefung bilden. (Bundrolle) Als Material dient auf dem Grund der Vertiefung ein Ring aus einem Kunststoff mittlerer Härte, und für die Transportrolle selbst ein harter Kunststoff mit niedrigem Reibungskoeffizienten. Die Transportrolle selbst ist auf der Welle in bekannter Weise befestigt und wird durch die Welle angetrieben.According to the invention the object is achieved in that the transport roller is made of plastic. As is known, the geometric shape is such that the edges are formed on both sides so that they become narrower towards the bottom and form a conical depression. (Bundle roll) The material used at the bottom of the recess is a ring made of a medium-hard plastic, and for the transport roller itself a hard plastic with a low coefficient of friction. The transport roller itself is mounted on the shaft in a known manner and is driven by the shaft.
Es ist zweckmäßig, die Transportrolle aus zwei Teilen herzustellen, indem auf einem Hohlzylinder aus hartem Kunststoff ein Ring aus Kunststoff mittlerer Härte mittig aufgesetzt ist und zu beiden Seiten des Ringes mit diesem verbunden ein Bund aus hartem Kunststoff verbunden ist.It is expedient to produce the transport roller of two parts by a ring of plastic medium hardness is placed centrally on a hollow cylinder made of hard plastic and connected to both sides of the ring with this a collar made of hard plastic is connected.
Eine weitere mögliche Ausgestaltung der Transportrolle besteht darin, dass die Transportrolle aus zwei geometrisch gleichen Hälften gleichen Profils aus hartem Kunststoff besteht, und vor dem Verbinden der beiden Hälften ein Ring aus Kunststoff mittlerer Härte eingelegt ist.Another possible embodiment of the transport roller is that the transport roller consists of two geometrically identical halves of the same profile made of hard plastic, and prior to joining the two halves, a ring made of plastic medium hardness is inserted.
Bei der Herstellung der Transportrolle aus mehreren Teilen ist es zweckmäßig, alle Teile kraft- und/oder formschlüssig miteinander zu verbinden.In the production of the transport roller of several parts, it is expedient to connect all parts non-positively and / or positively with each other.
Eine weitere mögliche Ausgestaltung der Transportrolle besteht darin, bei der Herstellung der Transportrolle durch ein an sich bekannten Pressverfahren aus einem harten Kunststoff den Ring aus Kunststoff mittlerer Härte mit einzupressen.Another possible embodiment of the transport roller is to press in the manufacture of the transport roller by a known pressing method of a hard plastic, the ring of plastic medium hardness with.
Darüber hinausgehend ist auch jede andere geometrische Zusammensetzung und Gestaltung der Teile der Transportrolle möglich.In addition, any other geometric composition and design of the parts of the transport roller is possible.
Die erfindungsgemäße Lösung hat folgende Vorteile:
Die Ausführung aus Kunststoff erfordert keine zusätzlichen Maßnahmen zur elektrischen und thermischen Isolation des Transportsystems von der Anlage. Die Schnittstelle liegt bei der Transportrolle/Schiene des Carrier. Der Reibungskoeffizient liegt wesentlich höher als bei der Ausführung aus Metall, was ein Rutschen der Schiene auf der Transportrolle bei hohem prozessbedingten Beschleunigen verhindert. Weiterhin wirkt die Materialkombination dämpfend und bewirkt einen weniger störenden Abrieb.The solution according to the invention has the following advantages:
The plastic version requires no additional measures for the electrical and thermal insulation of the transport system from the system. The interface lies with the transport roller / rail of the carrier. The friction coefficient is much higher than in the metal version, which prevents slippage of the rail on the transport roller at high process-related acceleration. Furthermore, the combination of materials dampens and causes less disturbing abrasion.
An einem Ausführungsbeispiel wird die Erfindung beschrieben.An embodiment of the invention will be described.
Die zugehörige Zeichnung zeigt eine aus mehreren Teilen zusammengesetzte Transportrolle im Schnitt.The accompanying drawing shows a composite of several parts transport role in section.
Die Transportrolle
Die Teile
BezugszeichenlisteLIST OF REFERENCE NUMBERS
- 11
- Transportrolletransport roller
- 1.11.1
- Teil der TransportrollePart of the transport role
- 1.21.2
- Teil der TransportrollePart of the transport role
- 22
- Bohrungdrilling
- 33
- Vertiefungdeepening
- 44
- Ringring
- 55
- BundFederation
- 66
- Schienerail
- 77
- CarrierCarrier
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910037684 DE102009037684A1 (en) | 2009-08-18 | 2009-08-18 | Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910037684 DE102009037684A1 (en) | 2009-08-18 | 2009-08-18 | Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness |
Publications (2)
Publication Number | Publication Date |
---|---|
DE102009037684A1 true DE102009037684A1 (en) | 2011-03-03 |
DE102009037684A8 DE102009037684A8 (en) | 2011-06-01 |
Family
ID=43524918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200910037684 Ceased DE102009037684A1 (en) | 2009-08-18 | 2009-08-18 | Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE102009037684A1 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29924022U1 (en) * | 1999-12-28 | 2001-11-08 | Walther Flender Gmbh | Roller conveyor for conveying and positioning goods to be transported |
US20070240971A1 (en) * | 2006-04-18 | 2007-10-18 | Barry Kitazumi | Transport System Including Vertical Rollers |
DE102008026294A1 (en) * | 2007-06-01 | 2008-12-04 | Centrotherm Photovoltaics Technology Gmbh | Loading and unloading unit for plate support, has lifting device movable through receiving opening of plate support, plate transport device arranged on head of lifting device, which is provided for positioning plate |
-
2009
- 2009-08-18 DE DE200910037684 patent/DE102009037684A1/en not_active Ceased
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE29924022U1 (en) * | 1999-12-28 | 2001-11-08 | Walther Flender Gmbh | Roller conveyor for conveying and positioning goods to be transported |
US20070240971A1 (en) * | 2006-04-18 | 2007-10-18 | Barry Kitazumi | Transport System Including Vertical Rollers |
DE102008026294A1 (en) * | 2007-06-01 | 2008-12-04 | Centrotherm Photovoltaics Technology Gmbh | Loading and unloading unit for plate support, has lifting device movable through receiving opening of plate support, plate transport device arranged on head of lifting device, which is provided for positioning plate |
Also Published As
Publication number | Publication date |
---|---|
DE102009037684A8 (en) | 2011-06-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1354830B1 (en) | Conveyor roller, retainer device and conveying system for flat pieces | |
DE19827480A1 (en) | Cassette that can be loaded with glass substrates | |
DE102008022282A1 (en) | Device and method for treating silicon wafers or flat objects | |
DE4139549A1 (en) | DEVICE FOR THE TRANSPORT OF SUBSTRATES | |
DE202012102431U1 (en) | Device for gas separation in a plant for vacuum treatment | |
DE102009037684A1 (en) | Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness | |
DE102010002839A1 (en) | Coating semiconductor wafer in coating system, comprises coating the wafers within functional area, and placing individual wafers in two rows next to each other and in two rows one behind other directly on conveyor belt of transport device | |
EP3517461B1 (en) | Magnetic conveying device | |
DE102008026294A1 (en) | Loading and unloading unit for plate support, has lifting device movable through receiving opening of plate support, plate transport device arranged on head of lifting device, which is provided for positioning plate | |
EP0930252A1 (en) | Conveyor for articles | |
DE102009042912B4 (en) | transport device | |
DE202011000071U1 (en) | Transport system for particular plate-shaped workpieces such as wafers / solar cells and the like | |
DE102018110392A1 (en) | Vacuum flow system with high throughput | |
EP1715515A1 (en) | Gripper for handling of thin disk shaped objects | |
DE102008030678B3 (en) | Conveying e.g. sheets of architectural glass or photovoltaic cells through vacuum coating plant, periodically corrects their relative positions | |
DE102015116738A1 (en) | Substrate carrier, transport system assembly and substrate treatment system | |
DE102015102475A1 (en) | Substrate carrier for flat substrates | |
EP0862985A2 (en) | Guide rail for tentering clips in a stenter device, especially for film stretching | |
DE19926065C1 (en) | Transporting device for moving flat glass in vacuum deposition plants has a number of cold-hammered steel bristles with a sleeve that rotates about the axis of the device | |
AT226592B (en) | Magnetic belt conveyor | |
WO2019057573A1 (en) | Furnace roller, transport device comprising such a furnace roller, and method for the operation thereof | |
DE29924022U1 (en) | Roller conveyor for conveying and positioning goods to be transported | |
DE102009017305B4 (en) | Device for transporting substrates by vacuum systems | |
DE878631C (en) | Disc roller grate | |
DE102016119712A1 (en) | Substrate carrier and processing arrangement |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8196 | Reprint of faulty title page (publication) german patentblatt: part 1a6 | ||
OP8 | Request for examination as to paragraph 44 patent law | ||
R081 | Change of applicant/patentee |
Owner name: VON ARDENNE GMBH, DE Free format text: FORMER OWNER: VON ARDENNE ANLAGENTECHNIK GMBH, 01324 DRESDEN, DE Effective date: 20140303 |
|
R016 | Response to examination communication | ||
R002 | Refusal decision in examination/registration proceedings | ||
R003 | Refusal decision now final | ||
R003 | Refusal decision now final |
Effective date: 20150331 |