DE102005047413B8 - Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest - Google Patents

Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest Download PDF

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Publication number
DE102005047413B8
DE102005047413B8 DE102005047413A DE102005047413A DE102005047413B8 DE 102005047413 B8 DE102005047413 B8 DE 102005047413B8 DE 102005047413 A DE102005047413 A DE 102005047413A DE 102005047413 A DE102005047413 A DE 102005047413A DE 102005047413 B8 DE102005047413 B8 DE 102005047413B8
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Prior art keywords
magnetic field
field sensor
methods
function test
sensor elements
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Expired - Fee Related
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DE102005047413A
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DE102005047413A1 (de
DE102005047413B4 (de
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David Tatschl
Dirk Hammerschmidt
Jürgen Zimmer
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Infineon Technologies AG
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Infineon Technologies AG
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Priority to US11/360,315 priority patent/US7323870B2/en
Publication of DE102005047413A1 publication Critical patent/DE102005047413A1/de
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Publication of DE102005047413B4 publication Critical patent/DE102005047413B4/de
Publication of DE102005047413B8 publication Critical patent/DE102005047413B8/de
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G01L25/003—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency for measuring torque
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/315—Contactless testing by inductive methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2829—Testing of circuits in sensor or actuator systems

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
DE102005047413A 2005-02-23 2005-10-04 Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest Expired - Fee Related DE102005047413B8 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102005047413A DE102005047413B8 (de) 2005-02-23 2005-10-04 Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest
US11/360,315 US7323870B2 (en) 2005-02-23 2006-02-23 Magnetoresistive sensor element and method of assembling magnetic field sensor elements with on-wafer functional test

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005008368.4 2005-02-23
DE102005008368 2005-02-23
DE102005047413A DE102005047413B8 (de) 2005-02-23 2005-10-04 Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest

Publications (3)

Publication Number Publication Date
DE102005047413A1 DE102005047413A1 (de) 2006-09-14
DE102005047413B4 DE102005047413B4 (de) 2012-01-05
DE102005047413B8 true DE102005047413B8 (de) 2012-06-06

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DE (1) DE102005047413B8 (de)

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US7323870B2 (en) 2008-01-29
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