DD64635A1 - Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams - Google Patents

Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams

Info

Publication number
DD64635A1
DD64635A1 DD12749467A DD12749467A DD64635A1 DD 64635 A1 DD64635 A1 DD 64635A1 DD 12749467 A DD12749467 A DD 12749467A DD 12749467 A DD12749467 A DD 12749467A DD 64635 A1 DD64635 A1 DD 64635A1
Authority
DD
German Democratic Republic
Prior art keywords
long
vapor deposition
electron beams
large surfaces
sublimable material
Prior art date
Application number
DD12749467A
Other languages
German (de)
Inventor
Siegfried Schiller
Dieter Effenberger
Harry Foerster
Siegfried Schneider
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD12749467A priority Critical patent/DD64635A1/en
Publication of DD64635A1 publication Critical patent/DD64635A1/en

Links

DD12749467A 1967-10-02 1967-10-02 Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams DD64635A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD12749467A DD64635A1 (en) 1967-10-02 1967-10-02 Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD12749467A DD64635A1 (en) 1967-10-02 1967-10-02 Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams

Publications (1)

Publication Number Publication Date
DD64635A1 true DD64635A1 (en) 1968-11-05

Family

ID=41720521

Family Applications (1)

Application Number Title Priority Date Filing Date
DD12749467A DD64635A1 (en) 1967-10-02 1967-10-02 Method and device for long-term vapor deposition of large surfaces with sublimable material by electron beams

Country Status (1)

Country Link
DD (1) DD64635A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4444538A1 (en) * 1994-12-14 1996-06-20 Ardenne Anlagentech Gmbh Electron beam evapn. appts. esp. for wide strip coating
DE102007008674B4 (en) * 2006-02-20 2010-03-25 Von Ardenne Anlagentechnik Gmbh Method and device for long-term stable coating of flat substrates
DE102009005513A1 (en) 2009-01-20 2010-07-22 Von Ardenne Anlagentechnik Gmbh Method for long-term stable coating of substrate, comprises moving the substrate through a coating chamber and then coating in which evaporation materials arranged in a crucible are evaporated by electron beam
DE102009057486A1 (en) * 2009-12-10 2011-06-16 Ferrotec Gmbh Electron beam deflection device, magnetic deflection unit for such a deflection device and device for vapor deposition of a planar substrate with such a deflection device
DE102018100601B3 (en) 2018-01-12 2019-02-21 VON ARDENNE Asset GmbH & Co. KG Method, processor, storage medium and control device
DE102018100623A1 (en) * 2018-01-12 2019-07-18 VON ARDENNE Asset GmbH & Co. KG Method, control device and electron beam gun

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4444538A1 (en) * 1994-12-14 1996-06-20 Ardenne Anlagentech Gmbh Electron beam evapn. appts. esp. for wide strip coating
DE4444538C2 (en) * 1994-12-14 2001-02-01 Ardenne Anlagentech Gmbh Device for long-term stable evaporation of elements and compounds for the reactive deposition on moving substrates, preferably wide belts
DE102007008674B4 (en) * 2006-02-20 2010-03-25 Von Ardenne Anlagentechnik Gmbh Method and device for long-term stable coating of flat substrates
DE102009005513A1 (en) 2009-01-20 2010-07-22 Von Ardenne Anlagentechnik Gmbh Method for long-term stable coating of substrate, comprises moving the substrate through a coating chamber and then coating in which evaporation materials arranged in a crucible are evaporated by electron beam
DE102009057486A1 (en) * 2009-12-10 2011-06-16 Ferrotec Gmbh Electron beam deflection device, magnetic deflection unit for such a deflection device and device for vapor deposition of a planar substrate with such a deflection device
DE102018100601B3 (en) 2018-01-12 2019-02-21 VON ARDENNE Asset GmbH & Co. KG Method, processor, storage medium and control device
DE102018100623A1 (en) * 2018-01-12 2019-07-18 VON ARDENNE Asset GmbH & Co. KG Method, control device and electron beam gun

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