DD250248A - - Google Patents

Info

Publication number
DD250248A
DD250248A DD250248DA DD250248A DD 250248 A DD250248 A DD 250248A DD 250248D A DD250248D A DD 250248DA DD 250248 A DD250248 A DD 250248A
Authority
DD
German Democratic Republic
Application number
Publication of DD250248A publication Critical patent/DD250248A/xx

Links

DD250248D DD250248A (de)

Publications (1)

Publication Number Publication Date
DD250248A true DD250248A (de)

Family

ID=279052

Family Applications (1)

Application Number Title Priority Date Filing Date
DD250248D DD250248A (de)

Country Status (1)

Country Link
DD (1) DD250248A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1179611A2 (de) * 1992-10-06 2002-02-13 Unaxis Balzers Aktiengesellschaft Kammer für den Transport von Werkstücken

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1179611A2 (de) * 1992-10-06 2002-02-13 Unaxis Balzers Aktiengesellschaft Kammer für den Transport von Werkstücken
EP1179611A3 (de) * 1992-10-06 2002-04-17 Unaxis Balzers Aktiengesellschaft Kammer für den Transport von Werkstücken

Similar Documents

Publication Publication Date Title
JP4130675B2 (ja) 工作物の移送装置及び処理方法
TWI773387B (zh) 轉移裝置及使用此之成膜裝置
US8740537B2 (en) Transport device having a deflectable sealing frame
EP1668166B1 (de) System und verfahren zur behandlung von substraten
DD250248A (de)

Legal Events

Date Code Title Description
ENJ Ceased due to non-payment of renewal fee