DD128165A1 - DEVICE FOR COVERING MASKS AND SUBSTRATE DISCS - Google Patents
DEVICE FOR COVERING MASKS AND SUBSTRATE DISCSInfo
- Publication number
- DD128165A1 DD128165A1 DD19567476A DD19567476A DD128165A1 DD 128165 A1 DD128165 A1 DD 128165A1 DD 19567476 A DD19567476 A DD 19567476A DD 19567476 A DD19567476 A DD 19567476A DD 128165 A1 DD128165 A1 DD 128165A1
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- substrate discs
- covering masks
- masks
- covering
- discs
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD19567476A DD128165B1 (en) | 1976-11-09 | 1976-11-09 | DEVICE FOR COVERING MASKS AND SUBSTRATE DISCS |
DE19772747439 DE2747439A1 (en) | 1976-11-09 | 1977-10-21 | DEVICE FOR COVERING MASKS AND SUBSTRATE DISCS |
SU777770029A SU911439A1 (en) | 1976-11-09 | 1977-11-02 | Device for aligning masks and substrates of microcircuits |
FR7733802A FR2375631A1 (en) | 1976-11-09 | 1977-11-09 | Aligning device for semiconductor and mask - is mounted on support on table for rapid alignment with successive independent steps in photolithography prodn. unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD19567476A DD128165B1 (en) | 1976-11-09 | 1976-11-09 | DEVICE FOR COVERING MASKS AND SUBSTRATE DISCS |
Publications (2)
Publication Number | Publication Date |
---|---|
DD128165A1 true DD128165A1 (en) | 1977-11-02 |
DD128165B1 DD128165B1 (en) | 1979-12-27 |
Family
ID=5506232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD19567476A DD128165B1 (en) | 1976-11-09 | 1976-11-09 | DEVICE FOR COVERING MASKS AND SUBSTRATE DISCS |
Country Status (4)
Country | Link |
---|---|
DD (1) | DD128165B1 (en) |
DE (1) | DE2747439A1 (en) |
FR (1) | FR2375631A1 (en) |
SU (1) | SU911439A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0111661A3 (en) * | 1979-04-03 | 1984-09-26 | Eaton-Optimetrix Inc. | Photometric printing apparatus |
US4473293A (en) * | 1979-04-03 | 1984-09-25 | Optimetrix Corporation | Step-and-repeat projection alignment and exposure system |
US4573791A (en) * | 1979-04-03 | 1986-03-04 | Optimetrix Corporation | Step-and-repeat projection alignment and exposure system |
US4452526A (en) * | 1980-02-29 | 1984-06-05 | Optimetrix Corporation | Step-and-repeat projection alignment and exposure system with auxiliary optical unit |
RU191704U1 (en) * | 2019-06-03 | 2019-08-19 | Открытое Акционерное Общество "Научно-Исследовательский Институт Полупроводникового Машиностроения (Оао "Ниипм") | Block for centering semiconductor wafers on a vacuum stage in a photolithography cluster line before carrying out technological operations |
-
1976
- 1976-11-09 DD DD19567476A patent/DD128165B1/en unknown
-
1977
- 1977-10-21 DE DE19772747439 patent/DE2747439A1/en active Pending
- 1977-11-02 SU SU777770029A patent/SU911439A1/en active
- 1977-11-09 FR FR7733802A patent/FR2375631A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE2747439A1 (en) | 1978-06-01 |
SU911439A1 (en) | 1982-03-07 |
DD128165B1 (en) | 1979-12-27 |
FR2375631A1 (en) | 1978-07-21 |
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