CN85204150U - Angular displacement sensor with long raster film - Google Patents

Angular displacement sensor with long raster film Download PDF

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Publication number
CN85204150U
CN85204150U CN 85204150 CN85204150U CN85204150U CN 85204150 U CN85204150 U CN 85204150U CN 85204150 CN85204150 CN 85204150 CN 85204150 U CN85204150 U CN 85204150U CN 85204150 U CN85204150 U CN 85204150U
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China
Prior art keywords
angular displacement
film
grating
displacement sensing
raster
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Ceased
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CN 85204150
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Chinese (zh)
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欧阳万里
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Chongqing University
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Chongqing University
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Priority to CN 85204150 priority Critical patent/CN85204150U/en
Publication of CN85204150U publication Critical patent/CN85204150U/en
Ceased legal-status Critical Current

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Abstract

The angular displacement sensor with the long raster film is a digitization angular displacement measuring device with photoelectric encoder. Two long raster film bands copied (or photoetchinged) are respectively pasted on the cylindrical surface and arranged in the vicinity. After the raster is completely transmitted by the incident light, cylinder moire fringe is formed, hai flushed with the angular displacement is formed by photoelectric conversion, electronic segmentation, etc., and values of comparable degree, cent and second are displayed. Compared with the traditional circle raster disk, the utility model has the advantages of low cost, easy fabrication, resolution of approximate 10'and convenient application in industrial measure. If the utility model is for the instructional instrument, students can study a series of the technologies and methods of up-to-date measure.

Description

Angular displacement sensor with long raster film
The invention belongs to angular displacement sensing device.
Existing angular displacement sensing device, as justifying grating dish, optical shaft angle encoder (code-disc), rotate synchronous inductor, justifying magnetic grid or the like, can improve the accuracy of angular measure greatly, make measurement result be easy to digitizing, help the robotization of writing down and controlling.But, all have problems such as manufacturing process complexity or material expensive.All need use large-area high-quality glass as circle grating dish and code-disc, thereby cost is very high, so that, is difficult to usually promote the use of except that the occasion of having relatively high expectations (as requiring the reading resolution " below) 5.U.S. Pat 4430-566-A has just reported that this resolution and precision are all very high, but the garden grating dish sensor of cost costliness.
On the other hand, in commercial production and common experiment, what use in a large number is mechanical type circle vernier reading device.The outmoded backwardness of this angle measurement method, reading is slow, and error is very big, if the in a single day stained or corrosion of groove promptly can't reading, its topmost shortcoming is that resolution is very low, generally is lower than 30 ".Desire improves the precision and the resolution of its measurement, must cooperate the optical reading system of senior precision, must raise the cost greatly.In addition, this type systematic also is difficult to realize the digitizing of measurement result.Therefore, develop a kind of relative low price, performance is pressing for of industry measurement than more excellent angle displacement measurement device again.
Develop the purpose of this device, the one, provide a kind of cheap (comparing) in order to give commercial production with scientific research, the metering outfit of excellent performance (comparing) with circle vernier type angle-measuring equipment with grating goniometry device; The 2nd, for a kind of comparatively ideal instruments used for education are provided, make the student therefrom acquire a series of modern surveying technology and method.
This device is made up of rotating disk, film grating, moire signal photo-translating system, electronic sub-circuit and up-down counter, and Fig. 1 is this device synoptic diagram.Rotating disk (1) is the less rosette of coefficient of thermal expansion, and it is supported by the axle system (0) of a precision, rocking when rotating to reduce.The garden cylinder of dish is round reference field, encloses on it and pastes film grating band (2), installs the film indication grating (3) of general circular arc in its vicinity in addition, and makes the dead in line (coaxial) of the two.Behind the grating region (5) of quasi-parallel white light (6) transmission (2) that λ penetrates, (3), suitably adjust the relative position of the two, just can obtain suitable Moire fringe.When turntable rotates, the light and shade variation of corresponding Moire fringe is received by photovalve (4), after amplifying, can get two-way and differ quasi sine signal into pi/2, then through one group of logical combination and direction judgment circuit, just can send into one can display degree, the up-down counter of minute, second to be to illustrate the value of angular displacement.
Moire signal opto-electronic conversion that this device adopts and electronic sub-circuit are similar to general metrological grating circuit.If adopt four close classifications (oscillatron segmentation), except that the grating seam, the corresponding count signal that all has everywhere that turntable rotated in the week is exported, and can reach 15 " resolution; Adopt six sub-circuits, resolution can reach 10 "; If with the double end reading of diameter, and adopt 12 segmentations, then not only can make resolution is 5 ", but also can realize comprising measuring in 360 ° of full weeks of seam crossing.Fig. 2, the 3rd, opto-electronic conversion when realizing six segmentations and electronic fine-grained schematic diagram.
The film grating can duplicate with the also available dynamic or static copy method of photoetching process.Consider that static copy method is simple, cost is lower.So the long grating of film that this device uses adopts this method to duplicate.Master grating chi (glass chi, grating region are about 1 meter) and film when guaranteeing copy (require image resolution at 200 lines/more than the mm, hard contrast) can on total length, all can fit tightly everywhere, should adopt vacuum copying apparatus (the large-scale printer of printing making sheet), exposure light source can make linear light source with 40W fluorescent tube (or making sheet use high-pressure sodium lamp), make it to be parallel to the grating chi, at a distance of being not less than 2.2 meters, reach below 10% to guarantee the even property of uneven illumination on the total length.In order to guarantee the stability of film grating, preferably use the sensitive film of polyester matrix base, as domestic CR type film.If copy the absolute zero position grating on film, then sensor just can have fixing zero point, even when accidental power failure, still can find behind the telegram in reply and definite angle value apart at zero point, gives to control automatically in the production to offer convenience.In order to eliminate loss of significance and the error that replica grating brings, can measure the numerical value of this systematic error in advance and be stored in the computing machine, handle by the computing machine pointwise again during measurement.
The Grating Gaps of this device can reach about 2mm, belongs to bigger in metrological grating, so makes the requirement of rotation axis system etc. can suitably be relaxed, and is convenient to processing and reduction expense.
Light source can use the raw silk rings small electric bulb of 6V3W, uses 4.0V voltage (DC), helps prolonging the serviceable life of small electric bulb.
Because film grating price is extremely cheap, during as if chance damage or pollution, the film grating that more renews is unlikely to cause considerable burden to the user.
This device can constitute a digital spectrometer (angular instrument) if suitably be equipped with parts such as collimating light pipe and autocollimatic telescope.Spectrometer is one of underlying instrument in the Optical-Physics Experiment, be used for laboratory and optical workshop in a large number, the situation that the resolution of homemade round vernier spectrometer generally is no more than 30 "; about 2500 yuan of current price; if constitute digital spectrometer with this device; the consideration resolution is 10 ", complete cost is no more than 2000 yuan, has the very strong power of striving unexpectedly.
It is cheap that the long grating angular displacement sensing device of film has a material, make simple, the resolution advantage of higher, be convenient to produce and teaching in promote the use of,
Has the extremely strong power of striving unexpectedly.This device has the very big potentiality of further exploitation.For example adopt 50 lines/mm and suitable segmentation number, the rotating disk radius is reduced, can make the portable corner displacement transducer, can be used for digital scale, digital transit etc.If further improve the quality and the appropriate design corresponding structure of film grating, this angular displacement sensor can reach higher resolution and precision, and better P/C ratio.
Provide a specific embodiment below.The rotating disk radius of sensor is 137.51mm, film grating strain line density is 25 lines/mm, two-way square wave through exporting after opto-electronic conversion and the shaping (Sin θ and Cos θ) directly is added on oscillographic X-axis and the Y-axis, according to the vertical vibration composition principle, on oscilloscope screen, just can obtain the Li Sha such as the figure of square matrix-shaped (rectangle), this time point whenever moves past a limit of rectangle, just turns over 1/4 pitch corresponding to rotating disk, promptly 15 " angular displacement.Promptly realized four segmentations with oscillatron, the resolution of this sensor is 15 ".
Description of drawings
Fig. 1, the long grating angular displacement sensing device of film.
The long grating 3-of 0-rotating shaft 1-rotating disk 2-film indication grating
The grating region of long grating of 4-photovalve 5-film and indication grating
6-λ penetrates the quasi-parallel white light
Fig. 2, circuit diagram.
G 1, G 2, G 3, G 4-phototriode, YF 1, YF 2-operational amplifier
FX 0, FX 1, FX 2, FX 3-phase inverter, R 1, R 2, R 3-shifting resistance
BJ 1BJ 2, BJ 3-comparer, LAD-logical combination and direction judgment circuit
± CP-forward backward counter pulse
Fig. 3, photoelectricity input synoptic diagram.
G 1, G 3-phototriode, W-potentiometer (G 1, G 3Direct current portion
YF-operational amplifier part reverse direction flow is each other crossed W)

Claims (4)

1, the long grating angular displacement sensing device of a kind of film of digital angle displacement measurement.During the measured angular displacement, the cyclical variation of the Moire fringe that grating produces through opto-electronic conversion, electronic sub-circuit, again through shaping and logical combination with declare backward, is shown with degree, minute, second by up-down counter.Feature of the present invention is to form grating on sensitive film, and this film grating band is enclosed on the face of cylinder that is attached to rotary body, and what another section film grating was coaxial places near it, thereby transmission produces the cylinder Morie fringe.
2, angular displacement sensing device according to claim 1 is characterized in that making sensor have fixing zero point in copy the absolute zero position grating on film.
3,, it is characterized in that used film is the sensitive film of polyester matrix base according to claim 1,2 described angular displacement sensing devices.
4,, can constitute digital spectrometer after it is characterized in that it and parts such as collimating light pipe and autocollimatic telescope cooperating according to claim 1,2 described angular displacement sensing devices.
CN 85204150 1985-07-25 1985-07-25 Angular displacement sensor with long raster film Ceased CN85204150U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 85204150 CN85204150U (en) 1985-07-25 1985-07-25 Angular displacement sensor with long raster film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 85204150 CN85204150U (en) 1985-07-25 1985-07-25 Angular displacement sensor with long raster film

Publications (1)

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CN85204150U true CN85204150U (en) 1986-05-21

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CN 85204150 Ceased CN85204150U (en) 1985-07-25 1985-07-25 Angular displacement sensor with long raster film

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100580384C (en) * 2005-08-29 2010-01-13 佳能株式会社 Optical encoder and apparatus using optical encoder
CN102364556A (en) * 2011-10-21 2012-02-29 华北电力大学(保定) Spectrometer experimental device
CN102661725A (en) * 2012-05-31 2012-09-12 吴江迈为技术有限公司 Device of using linear grating scale for positioning angles
CN106705893A (en) * 2017-01-17 2017-05-24 中国科学院光电研究院 Angle measuring sensor device with stereoscopic optical gratings

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100580384C (en) * 2005-08-29 2010-01-13 佳能株式会社 Optical encoder and apparatus using optical encoder
CN102364556A (en) * 2011-10-21 2012-02-29 华北电力大学(保定) Spectrometer experimental device
CN102661725A (en) * 2012-05-31 2012-09-12 吴江迈为技术有限公司 Device of using linear grating scale for positioning angles
CN106705893A (en) * 2017-01-17 2017-05-24 中国科学院光电研究院 Angle measuring sensor device with stereoscopic optical gratings

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