CN85107480A - Ceramic moisture-sensitive element - Google Patents
Ceramic moisture-sensitive element Download PDFInfo
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- CN85107480A CN85107480A CN 85107480 CN85107480A CN85107480A CN 85107480 A CN85107480 A CN 85107480A CN 85107480 CN85107480 CN 85107480 CN 85107480 A CN85107480 A CN 85107480A CN 85107480 A CN85107480 A CN 85107480A
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- China
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- mol
- zncr
- liznvo
- sno
- sensitive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The resistive moisture sensor that a kind of resistance changes with relative humidity variations.The wet body of sense is with ZnCr
2O
4---LiZnVO
4(mol%) 40-98.8,10-0.1 are Main Ingredients and Appearance, add Y
2O
3, SnO
2The common sintered body of forming.This element has that volume is little, and ageing resistace is good, need not heat clean, and can use for a long time, and response is fast, and temperature coefficient is little, and resistance value is moderate, characteristics such as certainty of measurement height.Can be used as the moisture measurement and the control element of weaving, meteorology, warehouse, air-conditioning system.
Description
The present invention is the resistive moisture sensor that a kind of resistance changes with relative humidity variations.This element can be used for measuring the relative humidity of physical system, its a kind of electronic sensor.
The wet body of the sense of resistive moisture sensor use at present mainly is: (1) lithium chloride; (2) Fe
3O
4Thick-film type; (3) MgCr
2O
4-TiO
2, TiO
2-V
2O
5, Ca
10(PO
4)
6(OH)
2Deng sintered body.The wet resistance characteristic of lithium chloride dew cell linearly changes, and sensitivity is also higher, but its contamination resistance is poor, and the response time is long, and volume is big, and the life-span is short, can not at high temperature work.MgCr
2O
4-TiO
2Ceramic moisture-sensitive element, it is wide to have measuring range, and the response time is short, and the advantage that can at high temperature work, but aging easily needs regularly heat to clean, therefore can not in closed-loop control system, use for a long time, and the resistance value very high (10 during low humidity
7～10
8Ω), this uses to secondary meter and brings difficulty.In order to solve the problem that above-mentioned dew cell exists, Toshiba Corp has developed H104 type and H104C type dew cell, and the wet body of its sense is respectively: ZnCr
2O
4-LiZnVO
4, ZnCr
2O
4-V-Zn-Li-Cu-O, this ceramic moisture-sensitive element functional, and commercialization occupy advanced international standard.But several important indicators still exist tangible deficiency.
As: the response time is long: 10 → 90%RH, 90 → 10%RH are 2 minutes
Certainty of measurement is poor: ± 5%RH-± 10%RH
Temperature coefficient is bigger: 1%RH/C °
(annotate: documents, the of Toshiba PVC ユ-(No. 1,37 volumes) clear and 57 years and the of Toshiba PVC ユ-(39 roll up No. 8) is clear and 59 years)
And contrasting H104 type ceramic moisture-sensitive element, the present invention is significantly improved at aspect of performance.Element ageing resistace of the present invention is good, need not heat clean, and can use for a long time, and the response time is short, and temperature coefficient is little, the certainty of measurement height.
Its main performance index is:
Response time: 50～90%RH 20 seconds
90～50%RH 40 seconds
Certainty of measurement :≤4%RH
Temperature coefficient: 0.3%RH/C °
Wet-resistance characteristic (negative exponent characteristic):
10%RH-98%RH
3×10
6Ω-3×10
3Ω
The ratio range of dew cell of the present invention is:
ZnCr
2O
440-98.8 mol%
LiZnVO
410-0.1 mol%
Y
2O
310-0.1 mol%
SnO
240-1 mol%
Its process for making is:
1. at first prepare ZnCr respectively by stoicheiometry
2O
4, LiZnVO
4, then according to a certain percentage with LiZnVO
4, Y
2O
3, SnO
2Mix ZnCr
2O
4In.
2. the raw material of getting ready is carried out 24 hours wet ball-millings.
3. the raw material that ball milling is good was 800～900 ℃ of following pre-burnings 1～2 hour.
4. pre-burned raw material is sieved, add suitable amount of adhesive, adopt rolling formation, make 4 * 4 * 0.25mm
3Or 12 * 15 * 0.25mm
3Thin slice, this technology is convenient to produce by batch.
With the slice, thin piece of forming 900～1400 ℃ of following sintering 1～5 hour.
6. be coated with RuO
2Electrode or steam interdigital gold electrode.
7. last top electrode lead-in wire.
So just made dew cell.
From the wet body of above-mentioned sense as can be known is to adopt conventional ceramic material manufacturing process.Because the wet body of sense is the sintered body that forms by high temperature sintering, so hot property is stable, ageing resistace is good, and fabrication yield is also very high.
Below be several formulation examples:
Test portion: component (mol%)
NO. ZnCr
2O
4LiZnVO
4Y
2O
3SnO
2
1 95 3 1 1
2 93 2 1 4
3 87 2 1 10
4 82 2 1 15
5 76 3 1 20
6 68 5 2 25
7 63 5 2 30
8 61 7 2 30
9 51 7 2 40
10 47 10 3 40
Claims (5)
1, a kind of resistance is characterized in that with the resistive moisture sensor that the variation of relative humidity changes element is to be mixed with Y
2O
3, SnO
2ZnCr
2O
4-LiZnVO
4Sintered body.
2, according to the described resistive moisture sensor of claim 1, wherein ZnCr
2O
4-LiZnVO
4Ratio range be:
ZnCr
2O
440-98.8 mol%
LiZnVO
410-0.1 mol%
3, according to claim 1 or 2 described resistive moisture sensors, the metal oxide of being mixed is Y
2O
3, SnO
2, its ratio range is respectively:
Y
2O
310-0.1 mol%
SnO
240-1 mol%
4, according to the substrate of claim 1 or 2 described resistive moisture sensors, adopt film rolling forming process.
5, according to the substrate of the described resistive moisture sensor of claim 3, adopt film rolling forming process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85107480A CN85107480B (en) | 1985-10-05 | 1985-10-05 | Porous ceramics sensitive to humidity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85107480A CN85107480B (en) | 1985-10-05 | 1985-10-05 | Porous ceramics sensitive to humidity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85107480B CN85107480B (en) | 1987-02-25 |
| CN85107480A true CN85107480A (en) | 1987-02-25 |
Family
ID=4795649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85107480A Expired CN85107480B (en) | 1985-10-05 | 1985-10-05 | Porous ceramics sensitive to humidity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN85107480B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100366575C (en) * | 2005-09-08 | 2008-02-06 | 广州大学 | Stannic dioxide- zinc lithium vanadate composite rod-shape crystal granule humidity-sensitive ceramic material and its preparation method |
-
1985
- 1985-10-05 CN CN85107480A patent/CN85107480B/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100366575C (en) * | 2005-09-08 | 2008-02-06 | 广州大学 | Stannic dioxide- zinc lithium vanadate composite rod-shape crystal granule humidity-sensitive ceramic material and its preparation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN85107480B (en) | 1987-02-25 |
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| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| C13 | Decision | ||
| GR02 | Examined patent application | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |