CN85105304B - Large flow-quantity multistep disc-type molecular pump - Google Patents
Large flow-quantity multistep disc-type molecular pump Download PDFInfo
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- CN85105304B CN85105304B CN85105304A CN85105304A CN85105304B CN 85105304 B CN85105304 B CN 85105304B CN 85105304 A CN85105304 A CN 85105304A CN 85105304 A CN85105304 A CN 85105304A CN 85105304 B CN85105304 B CN 85105304B
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- China
- Prior art keywords
- disk
- disc
- molecular pump
- pump
- shaped molecular
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The present invention belongs to a mechanical vacuum pump with a high rotation speed, such as a molecular pump. The present invention provides a novel serial multi-step mode of a multi-stage disk-shaped molecular pump. The spiral flute of the present invention adopts the following logarithm form: R= +<0>e+<ctg alpha. Theta>R-<0>, wherein the R represents the inside radius of a disk, the theta represents a polar angle, and the alpha represents an included angle of the tangential direction of the spiral flute and the radial direction of the disk. Spiral flutes can be arranged on two side surfaces of a fixed disk or a movable disk, or can be alternately arranged on one side surface of the fixed disk or the movable disk to enable two adjacent movable disks to form a secondary disk-shaped pump. A plurality of stages of turbomolecular pump impellers can also be serially connected to the inlet side of the multi-stage disk-shaped molecular pump to form a novel composite molecular pump. The present invention simplifies the structure of a molecular pump, and improves the flow quantity and the operational reliability of the molecular pump.
Description
The invention belongs to high-speed mechanical vacuum pump, for example molecular pump.
Though the general turbomolecular pump that uses has good high vacuum and ultra high vacuum performance, the inlet pressure of working as pump is higher than 10
-2During torr, pumping speed obviously descends.Usually, inlet pressure is 1 * 10
-1During torr, the actual pumping speed of pump only is about 5% of a specified pumping speed.Therefore, the extraction flow of turbomolecular pump is lower, has limited the application area of this pump.
Adopt the cylindrical helical molecule drawing pump of High Voltage better performances or the composite molecular pump of multistage disc helical molecule drawing pump (hereinafter referred is a disc-shaped molecular pump) and turbomolecular pump series operation, improved the pumping speed under the High Voltage to a certain extent.Yet the working clearance of existing this two classes composite molecular pump only is 0.1 millimeter, the inertial force of high speed rotor, and therefore thermal expansion, even external small foreign material all might make pump cause damage, fails to obtain extensive use so far.
Above-mentioned prior art is referring to the 37th page of the 7th international vacuum proceeding in 1977, and US Patent specification US3969039.
At the problems referred to above, the present invention proposes a kind of new tactic pattern of multistage disc-shaped molecular pump, improved the spiral shape on the disc face, to improve the pumping speed of disc-shaped molecular pump, simplify pump structure, improve the operational reliability of pump.This structure also can be used as the gas dynamic seal apparatus.
Usually, when two less coaxial discs (being carved with a helical flute on one of them disc face at least) in gap rotated at a high speed relatively, owing to drag effect, this had just formed a vacuum pump-disc-shaped molecular pump of radially bleeding to disk.Change the helical flute trend on the disc face, perhaps change the direction of radially bleeding that the cutting disc face just can change disc-shaped molecular pump.
The present invention includes a plurality of fixed disks and the coaxial a plurality of moving disk that is installed on the running shaft that are fixed on the pump case, described fixed disk and described moving disk are arranged alternately.Like this, be equivalent to, and utilize above-mentioned principle to make the direction checker of bleeding of adjacent two-stage disc-shaped molecular pump, realize that the series connection of disc-shaped molecular pump is bled some the coaxial installations of single stage disk shaped molecular pump.Be carved with on above-mentioned fixed disk or the moving disc face and be shaped as R=R
oE
Ctg2 θThe logarithmic spiral groove.Wherein R is the helical radius, R
oBe disk inner radius, θ is polar polar angle, α be the tangent line of helical flute and disk diameter between angle, it is worth between 45 ° and 85 °.
The multistage disc-shaped molecular pump structure that the present invention proposes also can only be set up pressure gradient and not relate to the gas dynamic seal apparatus that gas transmits.Note d is the degree of depth of helical flute, and △ d is an axial running clearance between fixed disk and the moving disk.One dish ground when d is big, can obtain higher pumping speed, but compression ratio is lower.The tangent line of helical flute and the angle α between the disc radius are big more, the compression ratio of disc-shaped molecular pump is big more, but pumping speed is more little, when disc-shaped molecular pump adopts above-mentioned logarithmic spiral, when especially selecting less α angle (for example 50 °-60 °) for use, can obtain high pumping speed and higher compression ratio.Simultaneously, the pumping speed at leakage flow between the adjacent helical flute and leakage position, place changes in proportion, and promptly the distribution of Guo Louing is more reasonable.And allow △ d to get bigger numerical value, as long as △ d has satisfied d/ △ d＞2 usually.Because △ d increases, the operational reliability of disc-shaped molecular pump is greatly improved.
In order further to improve the pumping speed of multistage disc-shaped molecular pump, and take into account the value of compression ratio, the inside radius R of the fixed disk of disc-shaped molecular pumps at different levels
1Can select unequal value for use.2-4 level dish type pump R near inlet side
1Can select 0.5R for use
2To 0.8R
2Scope.R wherein
2Outer radius for moving disk.All the other 0.3R that select for use at different levels
2To 0.6R
2Scope.This corrective measure can make the pumping speed of multistage disc-shaped molecular pump be enhanced about more than once, and compression ratio descends not clearly.
The multistage disc-shaped molecular pump that the present invention proposes, its helical flute can be opened on moving disc face, also can open on the fixed disk face, or alternately open on fixed disk face and moving disc face.Fig. 1, Fig. 2, Fig. 3 are respectively the axial cut-away view of these three kinds of basic structures.1 is rotating shaft among the figure, and 2 is pump case, and 3 is fixed disk, and 4 are moving disk (being installed in the rotating shaft 1).First kind of structure as shown in Figure 1, its helical flute is opened on fixed disk 3; Second kind of structure as shown in Figure 2, its helical flute is opened on moving disk 4, in these two kinds of structures, the helical flute of adjacent two-stage disc-shaped molecular pump trend is opposite; The third structure as shown in Figure 3, its helical flute is alternately opened on fixed disk 3 and moving disk 4, at this moment, it is consistent that the helical flute of adjacent two-stage disc-shaped molecular pump moves towards.Dotted line is represented the direction of bleeding among the figure, and d is the degree of depth of helical flute, and △ d is the axial running clearance between fixed disk and the moving disk.Fig. 4 is the front view of fluting fixed disk, and Fig. 5 is its cut-away view.H is the helical flute width among the figure, and △ H is a helical cell wall width, and α is the tangent line of helical flute and the angle between the disc radius.
The cascaded structure of above-mentioned various disc-shaped molecular pumps all can be formed composite molecular pump with turbine molecule pump impeller.Wherein fairly simple a kind of combination as shown in Figure 4.Moving disk 4 is installed on the running shaft 1, and fixed disk 3 is fixed on the pump case 2, and helical flute is opened the both sides at fixed disk.The progression of disc-shaped molecular pump is generally the 7-9 level, and wherein the 1-4 level is got R
1=0.7R
2, all the other R that get at different levels
1=0.5R
2For the external diameter of moving disk is 170 millimeters disc-shaped molecular pump, gets 3 millimeters near the groove depth d of the 2-4 level disc-shaped molecular pump in outlet port, and all the other d at different levels get 5 millimeters.α gets 55 °.The top of pump, i.e. the inlet side 8-12 level turbine molecule pump impeller that is installed in series.Movable vane wheel 5 and decide impeller 6 composition one-levels.The combined pump of Zu Chenging is 1 * 10 at inlet pressure in this manner
-1During torr, actual about 20% of the specified pumping speed of scooter of taking out, and when inlet pressure further raise, pumping speed can obviously not descend yet.Therefore, the combined pump of this novelty has good high flow capacity characteristic.Meanwhile, the axial running clearance △ d between moving disk and the fixed disk reaches the 0.75-1.0 millimeter.
The progression of the progression of disc-shaped molecular pump, turbine molecule pump impeller and other parameter also can be done suitably increase and decrease and adjustment according to concrete needs in the above-mentioned combined pump.
The composite molecular pump of the novelty of the present invention's development has the following characteristics: simplified the molecule pump structure, the total progression of impeller has reduced 1/3-1/2 than turbomolecular pump; The impeller working clearance is big, can reach a millimeter, and it is safe and reliable to turn round; Rate of air sucked in required is big, 1 * 10
-1Work under the inlet pressure of torr, pumping speed still can reach 20% of rating value, and is high more than 3 times with turbomolecular pump; Backing pressuring is up to more than 1 torr, and is higher 100 times than turbomolecular pump, and therefore, the pumping speed of prime mechanical pump can be reduced to below 1/10; Because backing pressuring is higher than 10
-1Torr has been avoided the pressure zone, peak (10 that prime mechanical pump oil and molecular pump lubricant oil steam return oily rate
-1-10
-2Torr), thus can obtain the vacuum environment that more cleans than turbomolecular pump.The present invention can be widely used in the fields such as manufacturing, surface analysis, thin film technique, plasma technique, accelerator and electron microscope of electronic device.
Claims (11)
1, a kind of disc-shaped molecular pump, comprise a plurality of fixed disks and the coaxial a plurality of moving disk that is installed on the running shaft that are fixed on the pump housing shell, described fixed disk and described moving disk are arranged alternately, and it is characterized in that being carved with on above-mentioned fixed disk or the above-mentioned moving disc face being shaped as R=R
oE
Ctg2 θThe logarithmic spiral groove, wherein R is the helical radius, R
oBe disk inner radius, θ is the polar coordinates polar angle, α be the tangential and disk diameter of helical flute between angle, it is worth between 45 ° and 85 °.
2,, it is characterized in that the internal diameter R of each fixed disk according to the said disc-shaped molecular pump of claim 1
1Get different value, get higher value near the 2-4 level of inlet side: 0.5R
2To 0.8R
2Between, all the other smaller values of getting at different levels; 0.3R
2To 0.6R
2Between, R wherein
2Outer radius for moving disk.
3, according to claim 1 or 2 said disc-shaped molecular pumps, it is characterized in that the helical flute of adjacent two single stage disk shaped pumps is opened on the bi-side of fixed disk 3 or moving disk 4, the trend of helical flute is opposite.
4, according to claim 1 or 2 said disc-shaped molecular pumps, it is characterized in that the helical flute of adjacent two single stage disk shaped pumps is alternately opened on fixed disk 3 and moving disk 4, it is consistent that helical flute moves towards.
5, according to the said disc-shaped molecular pump of claim 3, it is characterized in that the tangential and disk diameter of helical flute to angle α between 50 ° to 60 °.
6, according to the said disc-shaped molecular pump of claim 4, it is characterized in that the tangential and disk diameter of helical flute to angle α between 50 ° and 60 °.
7,, it is characterized in that the inlet side some grades of turbine molecule pump impellers that are installed in series according to the said disc-shaped molecular pump of claim 3.
8,, it is characterized in that the inlet side some grades of turbine molecule pump impellers that are installed in series according to the said disc-shaped molecular pump of claim 4.
9, the gas dynamic seal apparatus of making according to the structural principle of claim 1 or 2 or 5 or 6 said disc-shaped molecular pumps.
10, the gas dynamic seal apparatus of making according to the structural principle of the said disc-shaped molecular pump of claim 3.
11, the gas dynamic seal apparatus of making according to the structural principle of the said disc-shaped molecular pump of claim 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85105304A CN85105304B (en) | 1985-07-06 | 1985-07-06 | Large flow-quantity multistep disc-type molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85105304A CN85105304B (en) | 1985-07-06 | 1985-07-06 | Large flow-quantity multistep disc-type molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85105304A CN85105304A (en) | 1986-09-03 |
| CN85105304B true CN85105304B (en) | 1988-09-14 |
Family
ID=4794394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85105304A Expired CN85105304B (en) | 1985-07-06 | 1985-07-06 | Large flow-quantity multistep disc-type molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN85105304B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE525219C2 (en) * | 2003-05-15 | 2004-12-28 | Volvo Lastvagnar Ab | Turbocharger system for an internal combustion engine where both compressor stages are of radial type with compressor wheels fitted with reverse swept blades |
| CN101852199B (en) * | 2009-03-31 | 2011-11-09 | 储继国 | Composite vacuum pump |
| GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
| JP6353195B2 (en) * | 2013-05-09 | 2018-07-04 | エドワーズ株式会社 | Fixed disk and vacuum pump |
| CN105304456A (en) * | 2015-09-24 | 2016-02-03 | 钢研纳克检测技术有限公司 | Mass spectrometer vacuum cavity system applying small compound molecular pump |
| CN109404335B (en) * | 2017-08-18 | 2021-05-28 | 杨建康 | Molecular pump blade disc |
| JP7357564B2 (en) * | 2020-02-07 | 2023-10-06 | エドワーズ株式会社 | Vacuum pumps and vacuum pump components |
-
1985
- 1985-07-06 CN CN85105304A patent/CN85105304B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CN85105304A (en) | 1986-09-03 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C13 | Decision | ||
| GR02 | Examined patent application | ||
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| CE01 | Termination of patent right |