CN2938053Y - Silicon pressure sensor - Google Patents
Silicon pressure sensor Download PDFInfo
- Publication number
- CN2938053Y CN2938053Y CN 200620079219 CN200620079219U CN2938053Y CN 2938053 Y CN2938053 Y CN 2938053Y CN 200620079219 CN200620079219 CN 200620079219 CN 200620079219 U CN200620079219 U CN 200620079219U CN 2938053 Y CN2938053 Y CN 2938053Y
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- CN
- China
- Prior art keywords
- silicon
- silicone oil
- oil chamber
- pressure sensor
- silicon oil
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Measuring Fluid Pressure (AREA)
Abstract
Disclosed is a new pressure sensor of silicon, wherein a silicon oil cavity (2) is arranged inside a shell (1); silicon oil is filled in the silicon oil cavity (2); the lower end face of the silicon oil cavity (2) is sealed by a stainless steel diaphragm (3); the upper end face of the silicon oil cavity (2) is fixed with a silicon wafer (4), which is connected with a lead wire (5) and is arranged inside the silicon oil cavity (2).The utility model makes the medium to be measured acts directly on the stainless steel diaphragm and thus the diaphragm will be deformed by the force. And then the acting force will be transferred to the silicon wafer by the silicon oil, which makes the silicon wafer deformed and thus the piezoresistance will be changed and the electric bridge R will lose balance and output the voltage signals, thereby greatly broadening the application filed and range of the pressure sensor of silicon. The utility model can monitor and control the fluid and the gas in various fields with a simple structure and reliable character.
Description
Technical field
The utility model relates to a kind of novel silicon pressure sensor.
Background technology
Silicon pressure sensor is the Primary Component of fluid, gas automatic monitoring and control aspect.The ordinary silicon pressure transducer is because silicon chip directly contacts measured medium.Because silicon does not possess anti-corrosion property, thereby the use field and the scope of ordinary silicon pressure transducer is very limited for acid, alkali.
Summary of the invention
The technical matters that the utility model solves: design a kind of novel silicon pressure sensor, measured medium acts directly on the 316L stainless steel diaphragm, be delivered to silicon chip by silicone oil again, make it that deformation take place, electric bridge out of trim output voltage signal has improved the use field and the scope of silicon pressure sensor greatly.
Technical solution of the present utility model: a kind of novel silicon pressure sensor, be shaped on silicone oil chamber (2) in its housing (1), the silicone oil chamber is filled with silicone oil in (2), the lower surface in silicone oil chamber (2) is by stainless steel diaphragm (3) sealing, the upper surface in silicone oil chamber (2) is fixed with silicon chip (4), be connected with lead-in wire (5) on the silicon chip (4), and silicon chip (4) is arranged in silicone oil chamber (2).
One end of lead-in wire (5) is connected with silicon chip (4) by spun gold (6), the input end of another termination thick film ceramic compensating circuit (7), and the output terminal of thick film ceramic compensating circuit (7) is connected with output line (12).
The upper surface of housing (1) is shaped on groove (8), thick film ceramic compensating circuit (7) is arranged in groove (8), be shaped on through hole (9) between groove (8) and silicone oil chamber (2), lead-in wire (5) passes the input end that through hole (9) connects thick film ceramic compensating circuit (7), and passes through sintering insulated layer (10) insulated enclosure between lead-in wire (5) and the housing (1).
Pressure ring (11) is fixed on the lower surface of housing (1), and stainless steel diaphragm (3) is positioned between the upper surface of the lower surface in silicone oil chamber (2) and pressure ring (11).
The utility model acts directly on the stainless steel diaphragm measured medium, be out of shape by diaphragm applied force, be delivered to silicon chip by silicone oil again, make it that deformation take place, and then pressure drag change electric bridge R out of trim output voltage signal, the use field and the scope of silicon pressure sensor have been improved greatly, can monitor, control each field fluid, gas, and simple in structure, dependable performance.
Description of drawings
Fig. 1 is a structural representation of the present utility model,
Fig. 2 is the circuit theory diagrams of the utility model thick film ceramic compensating circuit.
Embodiment
1,2 a kind of embodiment of the present utility model is described in conjunction with the accompanying drawings.
A kind of novel silicon pressure sensor, be shaped on silicone oil chamber (2) in its housing (1), the silicone oil chamber is filled with silicone oil in (2), pressure ring (11), stainless steel diaphragm (3) and housing (1) three's junction by laser bonding together, pressure ring (11) is fixed on the lower surface of housing (1), stainless steel diaphragm (3) is fixed between the upper surface of the lower surface in silicone oil chamber (2) and pressure ring (11), by the lower surface sealing of stainless steel diaphragm (3) with silicone oil chamber (2); The upper surface in silicone oil chamber (2) is fixed with silicon chip (4), and an end of lead-in wire (5) is connected with silicon chip (4) by spun gold (6), and silicon chip (4) is arranged in silicone oil chamber (2); The upper surface of housing (1) is shaped on groove (8), thick film ceramic compensating circuit (7) is arranged in groove (8), be shaped on through hole (9) between groove (8) and silicone oil chamber (2), the other end of lead-in wire (5) passes the input end that through hole (9) connects thick film ceramic compensating circuit (5), and passes through sintering insulated layer (10) insulated enclosure between lead-in wire (5) and the housing (1); The output terminal of thick film ceramic compensating circuit (7) is connected with output line (12).
Principle of work: measured medium acts directly on the stainless steel diaphragm, by the diaphragm applied force distortion, is delivered to silicon chip by silicone oil again, make it that deformation take place, and then pressure drag changes electric bridge R out of trim output voltage signal.
Claims (4)
1, a kind of novel silicon pressure sensor, comprise housing (1), it is characterized in that: be shaped on silicone oil chamber (2) in the housing (1), the silicone oil chamber is filled with silicone oil in (2), the lower surface in silicone oil chamber (2) is by stainless steel diaphragm (3) sealing, the upper surface in silicone oil chamber (2) is fixed with silicon chip (4), is connected with lead-in wire (5) on the silicon chip (4), and silicon chip (4) is arranged in silicone oil chamber (2).
2, novel silicon pressure sensor according to claim 1, it is characterized in that: an end of lead-in wire (5) is connected with silicon chip (4) by spun gold (6), the input end of another termination thick film ceramic compensating circuit (7), the output terminal of thick film ceramic compensating circuit (7) is connected with output line (12).
3, novel silicon pressure sensor according to claim 2, it is characterized in that: the upper surface of housing (1) is shaped on groove (8), thick film ceramic compensating circuit (7) is arranged in groove (8), be shaped on through hole (9) between groove (8) and silicone oil chamber (2), lead-in wire (5) passes the input end that through hole (9) connects thick film ceramic compensating circuit (7), and passes through sintering insulated layer (10) insulated enclosure between lead-in wire (5) and the housing (1).
4, according to claim 1 or 2 or 3 described novel silicon pressure sensors, it is characterized in that: pressure ring (11) is fixed on the lower surface of housing (1), and stainless steel diaphragm (3) is positioned between the upper surface of the lower surface in silicone oil chamber (2) and pressure ring (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620079219 CN2938053Y (en) | 2006-06-21 | 2006-06-21 | Silicon pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620079219 CN2938053Y (en) | 2006-06-21 | 2006-06-21 | Silicon pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2938053Y true CN2938053Y (en) | 2007-08-22 |
Family
ID=38362082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620079219 Expired - Fee Related CN2938053Y (en) | 2006-06-21 | 2006-06-21 | Silicon pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2938053Y (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435341A (en) * | 2011-10-28 | 2012-05-02 | 山东昌润科技有限公司 | Compound temperature and pressure difference sensor |
| CN103257007A (en) * | 2012-02-17 | 2013-08-21 | 苏州敏芯微电子技术有限公司 | Pressure sensor dielectric medium isolation packaging structure and packaging method of same |
| CN103376181A (en) * | 2012-04-28 | 2013-10-30 | 浙江三花股份有限公司 | Heat exchange device and pressure sensor thereof |
| CN103674098A (en) * | 2012-09-17 | 2014-03-26 | 罗伯特·博世有限公司 | Sensor device and method for producing a sensor device for accommodation in a galvanic cell |
| CN104122026A (en) * | 2013-04-25 | 2014-10-29 | 浙江三花股份有限公司 | Pressure transducer and pressure system |
| CN104330197A (en) * | 2014-10-16 | 2015-02-04 | 宝鸡百事得控制技术有限公司 | High pressure resistant overload pressure transmitter |
| CN104501878A (en) * | 2015-01-26 | 2015-04-08 | 中国电子科技集团公司第四十九研究所 | Filling ceramic structure of complex sensor sensitive core and installation method |
| CN106124116A (en) * | 2016-07-27 | 2016-11-16 | 安费诺(常州)连接***有限公司 | For detecting pressure transducer and the method for opposing liquid freezing and expansion pressure thereof of hydraulic pressure |
| CN106289634A (en) * | 2016-08-23 | 2017-01-04 | 太仓市威士达电子有限公司 | A kind of metal shell for pressure sensor package combines |
| CN109764999A (en) * | 2019-02-14 | 2019-05-17 | 河海大学 | A kind of gas pressure measurement sensor |
| CN109799026A (en) * | 2019-03-19 | 2019-05-24 | 中国电子科技集团公司第十三研究所 | MEMS pressure sensor and preparation method |
-
2006
- 2006-06-21 CN CN 200620079219 patent/CN2938053Y/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435341A (en) * | 2011-10-28 | 2012-05-02 | 山东昌润科技有限公司 | Compound temperature and pressure difference sensor |
| CN103257007A (en) * | 2012-02-17 | 2013-08-21 | 苏州敏芯微电子技术有限公司 | Pressure sensor dielectric medium isolation packaging structure and packaging method of same |
| CN103257007B (en) * | 2012-02-17 | 2015-07-08 | 苏州敏芯微电子技术有限公司 | Pressure sensor dielectric medium isolation packaging structure and packaging method of same |
| CN103376181B (en) * | 2012-04-28 | 2016-12-14 | 浙江三花股份有限公司 | A kind of heat-exchange apparatus and pressure transducer thereof |
| CN103376181A (en) * | 2012-04-28 | 2013-10-30 | 浙江三花股份有限公司 | Heat exchange device and pressure sensor thereof |
| WO2013159583A1 (en) * | 2012-04-28 | 2013-10-31 | 浙江三花股份有限公司 | Heat exchange device and pressure sensor thereof |
| CN103674098A (en) * | 2012-09-17 | 2014-03-26 | 罗伯特·博世有限公司 | Sensor device and method for producing a sensor device for accommodation in a galvanic cell |
| CN104122026A (en) * | 2013-04-25 | 2014-10-29 | 浙江三花股份有限公司 | Pressure transducer and pressure system |
| CN104122026B (en) * | 2013-04-25 | 2017-11-03 | 浙江三花制冷集团有限公司 | A kind of pressure sensor and pressure system |
| CN104330197A (en) * | 2014-10-16 | 2015-02-04 | 宝鸡百事得控制技术有限公司 | High pressure resistant overload pressure transmitter |
| CN104501878A (en) * | 2015-01-26 | 2015-04-08 | 中国电子科技集团公司第四十九研究所 | Filling ceramic structure of complex sensor sensitive core and installation method |
| CN106124116A (en) * | 2016-07-27 | 2016-11-16 | 安费诺(常州)连接***有限公司 | For detecting pressure transducer and the method for opposing liquid freezing and expansion pressure thereof of hydraulic pressure |
| CN106289634A (en) * | 2016-08-23 | 2017-01-04 | 太仓市威士达电子有限公司 | A kind of metal shell for pressure sensor package combines |
| CN109764999A (en) * | 2019-02-14 | 2019-05-17 | 河海大学 | A kind of gas pressure measurement sensor |
| CN109799026A (en) * | 2019-03-19 | 2019-05-24 | 中国电子科技集团公司第十三研究所 | MEMS pressure sensor and preparation method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070822 Termination date: 20140621 |
|
| EXPY | Termination of patent right or utility model |