CN2913390Y - Zone-melting monocrystalline silicon furnace - Google Patents

Abstract

The utility model relates to a float-zone crystal silicon furnace. The suction opening of a compound molecular pump is communicated with one side of the middle part of an intermediate furnace cavity, a vacuum flapper valve is disposed between the suction opening of the compound molecular pump and the vacuum pipes, and the compound molecular pump is fixedly connected on a bracket via a molecular pump. The utility model can improve the vacuum degree inside the furnace cavity with simple structure, so as to improve the quality of silicon crystal to achieve ideal application effect.

Description

The study on floating zone silicon stove

Technical field

The utility model belongs to a kind of study on floating zone silicon stove.

Background technology

Traditional monocrystaline silicon stove is mainly used in the production silicon semiconductor material, and monocrystaline silicon stove comprises silicon semiconductor material growth synthetic upper, middle and lower burner hearth, and the rotation silicon seed yarn automatically controlled automatic yarn system of unifying.The silicon seed quality depends on the vacuum tightness of upper, middle and lower burner hearth to a great extent, but it is unreasonable that traditional monocrystaline silicon stove vacuumizes structure design, make the interior vacuum tightness of upper, middle and lower burner hearth only be 3Pa, make the silicon seed poor quality of producing, cause the product percentage of A-class goods low, vacuumize structure use cost height, the maintenance trouble.

Summary of the invention

The purpose of this utility model is a kind of study on floating zone silicon stove of design, makes it improve the interior vacuum tightness of burner hearth with simple structure, to improve the silicon seed quality, reaches the ideal result of use.For this reason, burner hearth middle part one side was provided with the vacuum barrier valve by the communicate bleeding point of composite molecular pump of vacuum pipe during the utility model adopted between the bleeding point of composite molecular pump and the vacuum pipe, and composite molecular pump is fixed on the support by the molecular pump gim peg.Said structure has reached the purpose of this utility model.

The utility model has the advantages that and can improve the interior vacuum tightness of burner hearth with simple structure, vacuum tightness can reach 5 * 10 ^-4More than, significantly improved the silicon seed quality, reach the ideal result of use, increased substantially the percentage of A-class goods of product, and simple in structure, the making use cost is low, maintenance and easy to use effective.

Description of drawings

Fig. 1 is a structural representation of the present utility model

Fig. 2 is the plan structure synoptic diagram of Fig. 1

Specific embodiments

To shown in Figure 2, a kind of study on floating zone silicon stove is made up of support 1, lower margin 14, transmission bracket 2, upper furnace 3, lower hearth 5 and middle burner hearth 4 as Fig. 1.In burner hearth middle part one side by the communicate bleeding point of composite molecular pump 11 of vacuum pipe 6,7.Be provided with vacuum barrier valve 10 between the bleeding point of composite molecular pump and the vacuum pipe, composite molecular pump is fixed on the support by molecular pump gim peg 12.

Described upper furnace is affixed by burner hearth support 8 and support.Middle burner hearth lower end is a lower hearth, and middle burner hearth upper end is a upper furnace, and middle burner hearth upper and lower ends and last lower hearth interpenetrate.The upper and lower ends of last lower hearth is established transmission bracket, establishes on the transmission bracket to drive the transmission shaft rotation of stretching in the burner hearth.The support lower end is provided with lower margin, is used for supporting bracket and adjusts its height.The bleeding point of composite molecular pump communicates with middle burner hearth middle part one side by vacuum pipe 6, corrugated tube 9, vacuum barrier valve and vacuum pipe 7.The effect of corrugated tube is the vibrations that are used to reduce composite molecular pump.The air outlet of composite molecular pump can connect an off-gas pump again by escape pipe 13 bleeding point is with the increase effect of bleeding.

During use, the bleeding point of composite molecular pump vacuumizes the upper, middle and lower burner hearth by vacuum pipe, corrugated tube, vacuum barrier valve and vacuum pipe.The vacuum barrier valve can effectively prevent gas backstreaming, to guarantee the improving silicon seed quality, reaches the ideal result of use.

In a word, the utility model can be with improving the interior vacuum tightness of burner hearth with simple structure, and vacuum tightness can reach 5 * 10 ^-4More than, significantly improved the silicon seed quality, reach the ideal result of use, increased substantially the percentage of A-class goods of product, and simple in structure, the making use cost is low, maintenance and easy to use effective.

Claims (2)

1, a kind of study on floating zone silicon stove, formed by support, lower margin, transmission bracket, upper furnace, lower hearth and middle burner hearth, it is characterized in that: middle burner hearth middle part one side is by the communicate bleeding point of composite molecular pump of vacuum pipe, be provided with the vacuum barrier valve between the bleeding point of composite molecular pump and the vacuum pipe, composite molecular pump is fixed on the support by the molecular pump gim peg.

2, by the described study on floating zone silicon stove of claim 1, it is characterized in that: described upper furnace is affixed by burner hearth support and support.