CN2885490Y - Cutting and barreling machine tool for monocrystal silicon rod - Google Patents
Cutting and barreling machine tool for monocrystal silicon rod Download PDFInfo
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- CN2885490Y CN2885490Y CN 200520110444 CN200520110444U CN2885490Y CN 2885490 Y CN2885490 Y CN 2885490Y CN 200520110444 CN200520110444 CN 200520110444 CN 200520110444 U CN200520110444 U CN 200520110444U CN 2885490 Y CN2885490 Y CN 2885490Y
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- emery wheel
- barreling
- butting
- butt
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Abstract
The utility model provides a monocrystalline silicon rod butt barreling machine comprising a bay, a barreling device kept above the bay, and a butting device kept above the bay, wherein the butt device is composed of a keeping establishment provided on the bay, and a butting establishment which is provided with a butting tool and capable of being kept movably on the keeping establishment, the barreling device is used for processing and barreling of work-piece, the butting establishment is used for butting of work-piece. The utility model has the advantages of realizing the integration of butting, barreling and processing, reducing cost of production facility, improving production efficiency and processing accuracy, avoiding waste of material.
Description
Technical field
The utility model relates to the equipment that the silicon electronic material is carried out machining, and particularly a kind of monocrystal silicon-rod butting barreling lathe is used for silicon single crystal rod is carried out the integrated processing of butt barreling.
Background technology
At present, along with the electron trade develop rapidly, the demand of silicon electronic material is increasing.According to statistics, the output of only Chinese domestic silicon electronic material was from 90 tons of more than 2000 tons of rising to 2004 rapidly in 1993.Therefore, also more and more higher for the requirement of silicon electronic material process equipment, especially efficiency of equipment and machining accuracy.
Yet, at present in the barreling manufacturing procedure of silicon single crystal rod, employed process equipment is the barreling lathe, this barreling lathe is made of frame, workbench, workpiece positioning and clamping device and tumbling apparatus, wherein, above-mentioned workbench is arranged on the frame, and can about move back and forth to realize the feeding of workpiece.Above-mentioned positioning and clamping device is fixed on the workbench, comprises head of a bed device and tailstock, in order to workpiece carried out the clamping location and to make its continuous rotation.Tumbling apparatus comprises: column, and it is arranged on the described frame; Numerical-control motor and leading screw lifting, it is arranged in the described column, carries out lifting with hydraulic transmission mode; Slide plate, it is arranged on the described column, and the lifting by numerical-control motor control; Emery wheel, its rotating shaft is rotatably supported by bearing, in order to workpiece is carried out barreling processing; Motor, it is fixed on the described slide plate, in order to drive described emery wheel rotation.
But this equipment can only carry out barreling processing to silicon single crystal rod.That is to say, use such process equipment large diameter silicon single crystal rod to be processed into minor diameter by barreling processing, so just have such problem, promptly the silicon single crystal rod chip that is produced in the barreling process is difficult to reclaim, thereby causes the waste of material.Before the processing of silicon single crystal rod and the diameter after the processing when differing bigger, the situation of this waste of material is more outstanding.And, if desired the monocrystalline silicon pole being processed into square rod, the silicon single crystal rod after then needing to use an intercept unit with barreling processing in addition is cut into square.In existing butt manufacturing procedure, face of every processing just needs clamping once, therefore need carry out multiple clamping and just can finish butt processing.Because the characteristic of silicon single crystal rod processing, the processing mode of this multiple clamping has had a strong impact on production efficiency and machining accuracy, makes defect rate very high.
The utility model content
In order to overcome the shortcoming of above-mentioned existing processing mode and process equipment, the purpose of this utility model provides a kind of monocrystal silicon-rod butting barreling lathe.This lathe has realized that butt barreling processing is integrated, No. one time clamping just can carry out barreling processing and butt processing to workpiece, and the order of barreling processing and butt processing also can be adjusted as required, both can carry out butt processing carrying out then barreling processing earlier, also can carry out barreling processing earlier and carry out butt processing then, thereby reduced the cost of production equipment, improved machining accuracy, improved production efficiency.Simultaneously, can effectively reclaim the leftover bits and pieces of silicon single crystal rod by first butt processing back barreling processing, thereby avoid the waste of material, improve economic benefit greatly.
To achieve these goals, monocrystal silicon-rod butting barreling lathe of the present utility model comprises: frame; Be installed in the workbench on the described frame, comprise the lower table that is fixed on the described frame and can do the upper table that back and forth moves horizontally with respect to described lower table; The positioning and clamping device is fixed on the described upper table, comprises headstock and tailstock, and described only crystal silicon rod can be clamped between described headstock and the tailstock; Tumbling apparatus is installed on the described frame; With the butt device, be installed on the described frame.
Preferably, above-mentioned butt device comprises: column, and it is arranged on the above-mentioned frame; Fixed head, it is fixed on the described column; Hoist cylinder, it is arranged in the above-mentioned column, carries out lifting with hydraulic way; Slide plate, it remains on the above-mentioned column, and by above-mentioned hoist cylinder control it is moved with respect to fixed head; The pair of bearings support, it is fixed on the above-mentioned slide plate; Pair of rotary shafts; It rotatably remains in the above-mentioned support of bearing by bearing; A pair of circular knife, it is separately fixed at an end of each above-mentioned rotating shaft as above-mentioned butt cutter, and keeps at a certain distance away each other; Motor, it is fixed on the above-mentioned slide plate, and a pair of circular knife is separately fixed at an end of corresponding described rotating shaft, and separates mutually; Motor, it is fixed on the described slide plate, the two ends of its rotor respectively with described rotating shaft one of link to each other, in order to drive corresponding described rotating shaft.
Preferably, the two ends of above-mentioned motor rotor and the other end of each above-mentioned rotating shaft are respectively equipped with belt pulley, and link to each other by belt, and motor drives each above-mentioned rotating shaft in the bel-drivenn mode.
Preferably, the distance between the above-mentioned a pair of circular knife can be adjusted.Can adjust the needed size of user exactly by changing different edge bearings.
Preferably, above-mentioned tumbling apparatus comprises: column is arranged on the described frame; The emery wheel lifter slide liftably is arranged on the described column; The emery wheel main shaft is arranged on the described emery wheel lifter slide; Emery wheel is arranged on the end of described emery wheel main shaft; With the emery wheel motor, it is fixed on the described emery wheel lifter slide, in order to drive described emery wheel rotation.
Preferably, above-mentioned positioning and clamping device can be by numerical control program calibration or rotation continuously.
Preferably, also comprise four control systems according to monocrystal silicon-rod butting barreling lathe of the present utility model, described four axles are for respectively by corresponding motor-driven X, Y, Z and A axle.Wherein, X-axis is used to drive moving back and forth of upper table; Y-axis is used to drive moving up and down of emery wheel lifter slide; The Z axle is used to drive the feeding of emery wheel and moves; The A axle then is used to drive the head of a bed main shaft of positioning and clamping device by predetermined angular rotation (calibration rotation).
According to the utility model, can realize that butt barreling processing is integrated, can reduce the cost of production equipment thus, improve machining accuracy, and enhance productivity.
Brief description of drawings
Fig. 1 is the schematic diagram of an embodiment of the utility model monocrystal silicon-rod butting barreling lathe;
Fig. 2 is that the master of butt device looks schematic diagram;
Fig. 3 is the schematic diagram of positioning and clamping device clamping workpiece;
Fig. 4 is the partial schematic diagram that the utility model butt barreling lathe carries out butt processing;
Fig. 5 is the partial schematic diagram of the first butt processing back barreling processing of the utility model butt barreling lathe;
Fig. 6 is the local schematic top plan view of the barreling processing of the utility model butt barreling lathe;
Fig. 7 is to use the utility model butt barreling lathe to carry out the schematic diagram of silicon single crystal rod plane of structure shape one example after the butt barreling is processed.
The specific embodiment
Below in conjunction with accompanying drawing preferred implementation of the present utility model is described in detail.
In embodiment as shown in Figure 1, monocrystal silicon-rod butting barreling lathe mainly comprises: the frame 100 that is provided with button platform 113; Workbench 200 comprises upper table 201 and lower table 202; The positioning and clamping device comprises headstock 301 and tailstock 302; Butt device 600; Tumbling apparatus 500 and numerical control device 400.Wherein, lower table 202 is fixed on the frame 100, and upper table 201 can move back and forth with respect to lower table about 202; Headstock 301 and tailstock 302 are arranged on the upper table 201.
In addition, also show the part of the maintaining body 700 that is used to support butt device 600 in Fig. 1, wherein, column 701 is arranged on the frame 100, hoist cylinder 702 is arranged in the column 701, and carries out lifting in the mode (hydraulic circuit is not shown) of the hydraulic pressure of routine.And, on column 701, being provided with fixed head 703 and slide plate 704 (with reference to Fig. 2), the butt mechanism with butt cutter is arranged on the slide plate 704 of maintaining body 700, and slide plate 704 is driven by hoist cylinder 702, can move up and down with respect to fixed head 703.The concrete structure of butt device 600 sees Fig. 2 for details.
In addition, in Fig. 1, also schematically shown the maintaining body 508 of the tumbling apparatus 500 that is arranged on the frame 100, and emery wheel and emery wheel shaft portion 507.The concrete structure of tumbling apparatus 500 sees Fig. 6 for details.
In butt barreling lathe of the present utility model, a kind of four control systems have been adopted.These four axles (X, Y, Z and A axle) are driven by corresponding motor (not shown) respectively.Wherein, X-axis is used to drive upper table 201 and moves with respect to lower table 202, Y-axis is used to drive moving up and down of emery wheel lifter slide, and the Z axle is used to drive the feeding of emery wheel 505 and moves, and the A axle then is used to drive head of a bed main shaft 3011 (with reference to Fig. 3 and Fig. 4) and presses predetermined angular rotation (calibration rotation).By above-mentioned four control systems four cooperatively interact and coordination realized of the present utility model butt, barreling being operated in the purpose that a machine tool is finished.
According to an optimal way of the present utility model, the motor in above-mentioned four control systems can adopt conventional numerical-control motor.Correspondingly, as shown in Figure 1, a numerical control device 400 can be set on frame 100.By numerical control device 400 is programmed, export control signal corresponding respectively to each numerical-control motor of above-mentioned four control systems, thereby the processing mode of butt barreling lathe and process etc. are controlled, realize full automatic butt barreling process.
Shown in Figure 2 is the schematic front view of butt device 600.With reference to figure 2 and in conjunction with shown in Figure 1, fixed head 703 is arranged on the column 701, and slide plate 704 remains on the fixed head 703, and is driven by the hoist cylinder 702 that is arranged on the column 701, thereby can rise and descend with respect to fixed head 703.Motor 611 is arranged on the slide plate 704, and the two ends of rotor of motor 611 respectively is provided with left leather belt wheel 609 and right leather belt wheel 610.Pair of bearings support 603,604 is separately fixed on the slide plate 704.Pair of rotary shafts 605,606 rotatably remains on respectively in the support of bearing 603,604 by bearing.The right-hand member of rotating shaft 605 is provided with left blade 601, and the left end of rotating shaft 606 is provided with right blade 602, divides at a certain distance mutually between left blade 601 and the right blade 602.The left end of rotating shaft 605 is provided with left blade belt pulley 607, the right-hand member of rotating shaft 606 is provided with right blade belt pulley 608, and left blade belt pulley 607 and right blade belt pulley 608 link to each other by belt with the left leather belt wheel 609 of its corresponding motor 611 and right leather belt wheel 610 respectively.Because left leather belt wheel 609 and right leather belt wheel 610 are arranged on the two ends, the left and right sides of motor rotor, so motor 611 just drives rotating shaft 605,606 in the bel-drivenn mode and rotates synchronously, thereby left blade 601 and right blade 602 are rotated synchronously.
And, the distance between left blade 601 and the right blade 602 can also according to the size of workpiece butt processing by adjusting rotating shaft 605,606 collapsing length or change different edge bearings and suitably adjust.
With reference to Fig. 3, the positioning and clamping device that is arranged on the workbench 200 comprises headstock 301 and tailstock 302.Headstock 301 is fixed, and have can calibration and the main shaft 3011 of rotation continuously, is provided with the head of a bed at an end of this main shaft and takes over a business 3012.Tailstock 302 comprises: the tailstock that wherein is provided with tailstock body 3021, the telescopic tube 3022 of oil cylinder (not shown) and is arranged on an end of telescopic tube 3022 takes over a business 3023.The other end of telescopic tube 3022 is arranged in the tailstock body 3021, and can extend and shorten by the effect of the described hydraulic jack in the tailstock body 3021.In addition, also can pass through handwheel 3024 manual clamping workpieces.Telescopic tube 3022 is promoted by described hydraulic jack, and make tailstock take over a business 3023 and take over a business 3012 and cooperatively interact with the head of a bed, thus clamping work pieces.When the main shaft 3011 of headstock rotated with calibration mode or continuation mode, the workpiece that is clamped was also correspondingly with calibration mode or continuation mode rotation.
In the schematic diagram of as shown in Figure 6 tumbling apparatus, tumbling apparatus 500 comprises: be fixed on the emery wheel main shaft lower slider 503 on the emery wheel maintaining body 508; Remain on the emery wheel lifter slide 502 on the main shaft lower slider 503, it is by being arranged on numerical-control motor driving the carrying out lifting on the maintaining body 508; And emery wheel main shaft 504, it is supported by the emery wheel spindle carrier 501 that is arranged on the emery wheel lifter slide 502, and drives rotation by emery wheel motor (not shown).
End at emery wheel main shaft 504 is provided with emery wheel 505, by the rotation of emery wheel main shaft 504, through the transmission of emery wheel belt, drives emery wheel 505 and carries out barreling processing.
In addition, though do not illustrate in the accompanying drawing, butt barreling lathe of the present utility model also comprises cooling device, uses cooling water circulating device usually, in order to reduce or to disperse butt processing and barreling adds the heat that produces man-hour.
In embodiment of the present utility model, drive the motor of X, Y, Z axle and the motor 611 and the emery wheel motor of driving cutting knife 601,602 and all can adopt AC servo motor.
Next, the process to the utility model monocrystal silicon-rod butting barreling lathe with above-mentioned constituted mode describes.
At first, as shown in Figure 3 and Figure 4, adopt hydraulic clamp mode clamping between the head of a bed 301 and tailstock 302 of positioning and clamping device silicon single crystal rod base material to be processed 800.Behind the size adjusting blade space according to butt processing, four of X, Y, Z, A that numerical control device 400 is controlled reset.
Then, by hoist cylinder 702 left and right blade 601 and 602 is dropped to processing stations (for example position of tailstock side), actuating motor 611 drives left and right blade and rotates synchronously, opens cooling water simultaneously.The X-axis of workbench 200 moves according to the speed that is suitable for butt processing, makes upper table 201 move right, and at this moment left and right blade 601 and 602 pairs of silicon single crystal rods 800 carry out butt processing.After finishing, upper table 201 rapid repositions.Then, the main shaft 3011 (A axle) by numerical-control motor (not shown) driving headstock 301 carries out 90 ° of rotations.
Then, upper table 201 moves right once more and carries out feeding, thereby carries out the butt processing second time, finish butt after, stop motor 611, and close cooling water.Hoist cylinder 702 is upwards mentioned slide plate 704, makes left and right blade 601 and 602 leave station and resets.
Like this, promptly finished butt work to this silicon single crystal rod 800.
It is tetragonal silicon single crystal rod that above-mentioned processing mode can process cross section.Obviously, if in above-mentioned butt process, if main shaft 3011 (A axle) is carried out 45 ° of transpositions.Can process cross section is hexagonal silicon single crystal rod.In addition,, obviously also can process the silicon single crystal rod of cross section for other shape by the different anglecs of rotation is set,
Next carry out barreling processing, be processed as example explanation to carry out the fillet barreling behind the butt, as shown in Figure 5.
At first, with X, Y, the reposition of Z axle.Then, emery wheel lifter slide 502 is moved downward, emery wheel 505 is descended by the numerical-control motor (not shown) driving of controlling Y-axis.Making emery wheel main shaft 504 do feeding by the numerical-control motor that drives the Z axle moves with close workpiece.
Start emery wheel motor (not shown) emery wheel is rotated, on the other hand, the main shaft 3011 beginnings rotation continuously of headstock 301.Simultaneously, open cooling water.
The numerical-control motor driving upper table 201 of X-axis moves right and carries out feeding.505 pairs of silicon single crystal rods of emery wheel, 800 beginning barreling processing simultaneously.Upper table 201 drives silicon single crystal rod 800 and moves back and forth, till silicon single crystal rod is machined to the outside dimension of setting.
So just finished butt barreling processing to silicon single crystal rod.
Obviously, can realize silicon single crystal rod is carried out the Automatic Control of butt barreling processing by in numerical control device 400, above-mentioned process being compiled into corresponding control programs.Numerical control device 400 can adopt conventional numerical control device (for example, the MCM-600-8 of Beijing space flight numerical control company production).In this case, numerical control device 400 can adopt conventional control mode (as relay control or SCR control etc.) to control each motor.
Specifically, the control signal of numerical control device 400 outputs mainly comprises: to the X-axis reversing switch signal of X-axis drive motors output; Lifter slide magnetic valve signal to the motor output of controlling blade 601 and 602 liftings; To the blade electric rotating machine switching signal that drives blade 601 and 611 outputs of 602 motor rotating; Lifting signal to the emery wheel lifter slide 520 of Y-axis drive motors output; Emery wheel electric rotating machine start-stop signal to the output of Z axis drive motor; Anglec of rotation control signal to the output of A axis drive motor; Limit switch signal to each spindle motor output; And cooling water switch signal.
As mentioned above, the utility model monocrystal silicon-rod butting barreling lathe has not only comprised tumbling apparatus but also comprised the butt device, and tumbling apparatus and butt device can carry out work mutually in phase.Therefore realized that butt barreling processing is integrated, only needing a clamping just can make up arbitrarily with barreling processing to butt processing processes workpiece, thereby reduced the cost of production equipment, production efficiency and machining accuracy have been improved, thereby make the leftover bits and pieces after the processing can effectively reclaim the waste of having avoided material by barreling behind the first butt simultaneously, thereby improved economic benefit greatly.
More than preferred implementation of the present utility model is described in detail; but the utility model is not limited to the foregoing description; to the conspicuous various modifications of those skilled in the art, conversion, still be included in the protection domain that the utility model claims are limited.
Claims (8)
1. a monocrystal silicon-rod butting barreling lathe is characterized in that, comprising:
Frame;
Be installed in the workbench on the described frame, comprise the lower table that is fixed on the described frame and can do the upper table that back and forth moves horizontally with respect to described lower table;
The positioning and clamping device is fixed on the described upper table, comprises headstock and tailstock, and described silicon single crystal rod can be clamped between described headstock and the tailstock;
Tumbling apparatus is installed on the described frame; With
The butt device is installed on the described frame.
2. monocrystal silicon-rod butting barreling lathe according to claim 1 is characterized in that,
Described butt device comprises:
Column is arranged on the described frame;
Fixed head is fixed on the described column;
Hoist cylinder is arranged in the described column;
Slide plate is arranged on the described fixed head, is driven by described hoist cylinder, can move with respect to described fixed head;
The pair of bearings support is fixed on the described slide plate;
Pair of rotary shafts rotatably remains on respectively in the described pair of bearings support by bearing;
A pair of circular knife is separately fixed at an end of corresponding described rotating shaft, and separates mutually;
Motor is fixed on the described slide plate, the two ends of its rotor respectively with described rotating shaft one of link to each other, in order to drive corresponding described rotating shaft.
3. monocrystal silicon-rod butting barreling lathe according to claim 2 is characterized in that, the two ends of described motor rotor and the other end of each described rotating shaft are respectively equipped with belt pulley, are used for driving each described rotating shaft in the bel-drivenn mode.
4. monocrystal silicon-rod butting barreling lathe according to claim 3 is characterized in that described headstock comprises main shaft, but rotation of described main shaft calibration and rotation continuously.
5. according to each described monocrystal silicon-rod butting barreling lathe of claim 1 to 4, it is characterized in that described tumbling apparatus comprises:
Column is arranged on the described frame;
The emery wheel lifter slide liftably is arranged on the described column;
The emery wheel main shaft is arranged on the described emery wheel lifter slide;
Emery wheel is arranged on the end of described emery wheel main shaft; With
The emery wheel motor, it is fixed on the described emery wheel lifter slide, in order to drive described emery wheel rotation.
6. monocrystal silicon-rod butting barreling lathe according to claim 5 is characterized in that, further comprises comprising digital control system:
Central control unit;
The a plurality of motors that are connected respectively with the control signal output of central control unit; And
By the separately-driven a plurality of driving shafts of described motor.
7. monocrystal silicon-rod butting barreling lathe according to claim 6, it is characterized in that, by corresponding described a plurality of motor-driven X, Y, Z and A axle, described X-axis is connected with described upper table described a plurality of driving shaft for respectively, and the level that can drive upper table moves back and forth;
Described Y-axis is connected with described emery wheel lifter slide, can drive moving up and down of emery wheel lifter slide;
Described Z axle is connected with described emery wheel main shaft, and the feeding that can drive described emery wheel is moved;
Described A axle is connected with the described main shaft of the headstock of described positioning and clamping device, can drive described headstock spindle and carry out described calibration rotation or rotation continuously.
8. monocrystal silicon-rod butting barreling lathe according to claim 7 is characterized in that, the control signal output of described central control unit is by relay or the described a plurality of motors of SCR control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520110444 CN2885490Y (en) | 2005-06-23 | 2005-06-23 | Cutting and barreling machine tool for monocrystal silicon rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520110444 CN2885490Y (en) | 2005-06-23 | 2005-06-23 | Cutting and barreling machine tool for monocrystal silicon rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2885490Y true CN2885490Y (en) | 2007-04-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520110444 Expired - Fee Related CN2885490Y (en) | 2005-06-23 | 2005-06-23 | Cutting and barreling machine tool for monocrystal silicon rod |
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| CN (1) | CN2885490Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102862239A (en) * | 2012-09-25 | 2013-01-09 | 刘鸿彬 | Rotary floating cutting numerical control machine tool for silicon rod |
| CN101602232B (en) * | 2009-07-15 | 2013-03-20 | 北京京联发数控科技有限公司 | Wire butting machine tool |
| CN103552166A (en) * | 2013-09-30 | 2014-02-05 | 洛阳鸿泰半导体有限公司 | Device for adjusting crystal-orientation deviation degree of silicon rod |
| CN105058594A (en) * | 2015-08-20 | 2015-11-18 | 无锡中强电碳有限公司 | Multifunctional hole forming and cleaning device for carbon rod |
| CN105058596A (en) * | 2015-08-20 | 2015-11-18 | 无锡中强电碳有限公司 | Carbon rod perforating cleaning machine |
| CN106475878A (en) * | 2016-11-25 | 2017-03-08 | 浙江晶盛机电股份有限公司 | A kind of full-automatic silicon single crystal rod barreling equipment integrating |
| CN110026826A (en) * | 2018-09-30 | 2019-07-19 | 浙江晶盛机电股份有限公司 | A kind of full-automatic silicon single crystal rod cuts Compound Machining integrated equipment and its application method |
-
2005
- 2005-06-23 CN CN 200520110444 patent/CN2885490Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101602232B (en) * | 2009-07-15 | 2013-03-20 | 北京京联发数控科技有限公司 | Wire butting machine tool |
| CN102862239A (en) * | 2012-09-25 | 2013-01-09 | 刘鸿彬 | Rotary floating cutting numerical control machine tool for silicon rod |
| CN102862239B (en) * | 2012-09-25 | 2015-09-09 | 刘鸿彬 | Silicon rod rotates the cutting Digit Control Machine Tool that floats |
| CN103552166A (en) * | 2013-09-30 | 2014-02-05 | 洛阳鸿泰半导体有限公司 | Device for adjusting crystal-orientation deviation degree of silicon rod |
| CN105058594A (en) * | 2015-08-20 | 2015-11-18 | 无锡中强电碳有限公司 | Multifunctional hole forming and cleaning device for carbon rod |
| CN105058596A (en) * | 2015-08-20 | 2015-11-18 | 无锡中强电碳有限公司 | Carbon rod perforating cleaning machine |
| CN106475878A (en) * | 2016-11-25 | 2017-03-08 | 浙江晶盛机电股份有限公司 | A kind of full-automatic silicon single crystal rod barreling equipment integrating |
| CN110026826A (en) * | 2018-09-30 | 2019-07-19 | 浙江晶盛机电股份有限公司 | A kind of full-automatic silicon single crystal rod cuts Compound Machining integrated equipment and its application method |
| CN110026826B (en) * | 2018-09-30 | 2024-04-16 | 浙江晶盛机电股份有限公司 | Full-automatic monocrystalline silicon rod cutting and grinding combined machining integrated equipment and application method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070404 |