CN2828842Y - Device for improving uniformity of laser beam - Google Patents
Device for improving uniformity of laser beam Download PDFInfo
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- CN2828842Y CN2828842Y CN 200520045939 CN200520045939U CN2828842Y CN 2828842 Y CN2828842 Y CN 2828842Y CN 200520045939 CN200520045939 CN 200520045939 CN 200520045939 U CN200520045939 U CN 200520045939U CN 2828842 Y CN2828842 Y CN 2828842Y
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- optic fibre
- laser beam
- transmission optic
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- light
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- 238000004804 winding Methods 0.000 claims abstract description 6
- 239000000835 fiber Substances 0.000 claims description 30
- 239000013307 optical fiber Substances 0.000 abstract description 14
- 230000005540 biological transmission Effects 0.000 abstract description 11
- 238000005516 engineering process Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Abstract
A device for improving uniformity of laser beam is characterized in that a focusing lens, an energy transmission optical fiber with gradient refractive index distribution and a collimating lens with a certain winding radius are sequentially arranged on an output light path of a laser, the input end of the energy transmission optical fiber is positioned at the focus of the focusing lens, and the output end of the energy transmission optical fiber is positioned at the front focus of the collimating lens. The utility model discloses the simple structure of device uses in a flexible way, can keep light intensity distribution even on the cross-section of the arbitrary position of a longer transmission distance of light.
Description
Technical field
The utility model relates to the homogeneity of laser beam, and particularly 2 dimension light distribution cross sections keep the light distribution uniform method in the certain distance scope, utilizes it quite to obtain uniform light distribution on the segment distance of length in the beam Propagation process.
Background technology
In the device that uniformity of laser beam improves, adopt the light beam complex superposition more, make the light beam light distribution than weak part and the strong part mutual superposition of light distribution, thereby large-scale light intensity difference is filled and led up, it is even to reach the beam cross section light distribution.Formerly technical method has: 1, the even device of two-stage compound eye type (referring to technology: P.E.Rhocles formerly, D.L.Shealy is published in Applied Opitcs1980,19,3545～3553 pages paper) needs high-accuracy process technology, costs an arm and a leg; 2, the even device of rectangular waveguide (referring to technology: Gao Hongyi formerly, Lou Qihong etc. are published in the optics journal, 1996,16No.10 (october): 1379～1382 pages paper) make simply, debug simple and easyly, but optical energy loss is bigger; 3, even device of wedge shape mirror folded light beam formula (referring to technology: M.R.Latta formerly, K.Jain is published in Optics Communications 1984,49 (6), 435～439 pages paper) and the even device of Dove prism are then debug comparatively difficulty.These methods all can be selected for use in the occasion that difference evenly requires, but light distribution uniformly all only is present in a specific particular location, this ad-hoc location can not quite all obtain uniform light distribution on the segment distance of length by the parameter decision of even device itself in the beam Propagation process.
Summary of the invention
The technical problems to be solved in the utility model is to overcome the difficulty of above-mentioned technology formerly, a kind of device that improves uniformity of laser beam is provided, this device should be simple in structure, uses flexibly, can keep light distribution even on the cross section, arbitrary position of long transmission range at light one.
Technical solution of the present utility model is as follows:
A kind of device that improves uniformity of laser beam, it is characterized in that the energy-transmission optic fibre and the collimation lens that on the output light path of laser instrument, set gradually condenser lens, have the graded index profile of certain winding radius, the input end of described energy-transmission optic fibre is positioned at the focus of condenser lens, and output terminal is positioned at the front focus of collimation lens.
The length of described energy-transmission optic fibre 〉=1.5 meter.
The optimum range of the core diameter of described energy-transmission optic fibre is 0.1～10mm.
The span of the winding radius of described energy-transmission optic fibre is 20cm～100cm.
The utility model improves the device of uniformity of laser beam, compares with technology formerly, and is simple in structure, uses flexibly, can keep light distribution even on the cross section, arbitrary position of long transmission range at light one.In the transmission wavelength scope of optical fiber, can be applied on various types of laser instruments, improve the distribution of laser beam light intensity.
Description of drawings
Fig. 1 improves the principle assumption diagram of the device of uniformity of laser beam for the utility model,
Fig. 2 is the transmission principle figure of the utility model energy-transmission optic fibre.
Embodiment
See also Fig. 1, Fig. 1 improves the principle assumption diagram of the device of uniformity of laser beam for the utility model.As seen from the figure, the utility model improves the device of uniformity of laser beam, be energy-transmission optic fibre 2 and the collimation lens 3 that on the output light path of laser instrument 4, sets gradually condenser lens 1, has the graded index profile of certain winding radius, the input end of described energy-transmission optic fibre 2 is positioned at the focus of condenser lens 1, and output terminal is positioned at the front focus of collimation lens 3.
Described condenser lens 1 plays the light beam coupling effect.The laser beam that sends from laser instrument 4, line focus lens 1 focus on, the meeting coalescence is full of the incident end face of energy-transmission optic fibre 2, and wherein angle of incidence of light can repeatedly transmit by this energy-transmission optic fibre 2 in optical fiber reflectingly less than the light of the numerical aperture predetermined angular of energy-transmission optic fibre 2.The focal distance f that can determine condenser lens 1 according to the numerical aperture and the core diameter of energy-transmission optic fibre 2.
The high-power energy-transmission optic fibre 2 of described graded index profile plays the beam homogenizer effect, and the optical fiber both ends of the surface are done plane polishing and handled.As shown in Figure 2, total reflection takes place less than the light of energy-transmission optic fibre 2 numerical aperture predetermined angulars in incident angle on the interface of energy-transmission optic fibre 2 interior two kinds of different refractivity materials.The part that the light beam different light intensity distributes through repeatedly reflecting complex superposition, with approximate pointolite outgoing, is sent parallel beam at exit facet behind collimation lens 3.As long as energy-transmission optic fibre 2 long enoughs, output beam light distribution and incident beam light distribution relevance are just very little, even altogether irrelevant, only by energy-transmission optic fibre 2 transport property decisions own.Change length, the core diameter of energy-transmission optic fibre and twine radius R, can change the effect of improving of beam uniformity.Wherein, the length of energy-transmission optic fibre and beam uniformity to improve effect proportional, energy-transmission optic fibre length greater than the 1.5m basis on, optical fiber is long more, the number of times of light complex superposition in optical fiber is just many more, output beam light distribution homogeneity is good more; The size of energy-transmission optic fibre core diameter has influenced the distance of improving effect and keeping light intensity evenly to distribute and transmit of beam uniformity, core diameter increases, be approximately the corresponding increase of beam divergence angle of pointolite outgoing at the outgoing end face, light intensity evenly distribute the transmission distance reduce, if core diameter is too little, then light is understood the coupling between the emergence pattern when the optical fiber internal reflection is transmitted, and influence the light distribution homogeneity of outgoing beam, so there is an optimum range 0.1mm～10mm in core diameter; What the size that optical fiber twines radius R had influenced beam uniformity improves effect and loss, reduces if twine radius, and the light that then can transmit in optical fiber reduces, and corresponding loss increases, and twines radius R and generally is taken in 20cm～100cm scope.
Described collimation lens 3 is approximately the light beam that the exit facet of pointolite sends to high-power energy-transmission optic fibre, is collimated into a branch of approximately parallel light, realizes that the light distribution on the cross section, any position is even in the transmission of long distance and the transmission course.
The parameter of now lifting a specific embodiment is as follows: the optical fiber in the utility model is the ultraviolet energy-transmission optic fibre of graded index profile, and length is 2m, fibre diameter 1mm, and numerical aperture NA=0.1, the optical fiber both ends of the surface are done polishing.Determine that according to Optical Fiber Numerical Aperture condenser lens 1 is the quartz lens of f=100mm, the focal distance f=200mm of collimation lens 3.Be applied to 308nm ultraviolet XeCl quasi-molecule laser, obtained the good homogeneous effect, uniform light spots flat-top factor F=0.856 keeps the equally distributed cross section of light intensity can reach 3m from the collimator lens position scope of changing.
Claims (4)
1, a kind of device that improves uniformity of laser beam, the energy-transmission optic fibre (2) and the collimation lens (3) that it is characterized in that on the output light path of laser instrument (4), setting gradually condenser lens (1), have the graded index profile of certain winding radius, the input end of described energy-transmission optic fibre (2) is positioned at the focus of condenser lens (1), and the output terminal of described energy-transmission optic fibre (2) is positioned at the front focus of collimation lens (3).
2, a kind of device that improves uniformity of laser beam according to claim 1 is characterized in that length 〉=1.5 meter of described energy-transmission optic fibre (2).
3, a kind of device that improves uniformity of laser beam according to claim 1 is characterized in that the optimum range of described energy-transmission optic fibre (2) core diameter is 0.1～10mm.
4, according to claim 1 or 2 or 3 described a kind of devices that improve uniformity of laser beam, be characterised in that the span of the winding radius of described energy-transmission optic fibre (2) is 20cm～100cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520045939 CN2828842Y (en) | 2005-10-27 | 2005-10-27 | Device for improving uniformity of laser beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520045939 CN2828842Y (en) | 2005-10-27 | 2005-10-27 | Device for improving uniformity of laser beam |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2828842Y true CN2828842Y (en) | 2006-10-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200520045939 Expired - Fee Related CN2828842Y (en) | 2005-10-27 | 2005-10-27 | Device for improving uniformity of laser beam |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103246167A (en) * | 2012-02-03 | 2013-08-14 | 汤浩泉 | Lithographic micromachining method |
| CN103268016A (en) * | 2013-05-31 | 2013-08-28 | 西安炬光科技有限公司 | Optical fiber coupling semiconductor laser unit homogenizing method and device |
| CN109642997A (en) * | 2016-08-26 | 2019-04-16 | 株式会社岛津制作所 | Light emitting device |
-
2005
- 2005-10-27 CN CN 200520045939 patent/CN2828842Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103246167A (en) * | 2012-02-03 | 2013-08-14 | 汤浩泉 | Lithographic micromachining method |
| CN103268016A (en) * | 2013-05-31 | 2013-08-28 | 西安炬光科技有限公司 | Optical fiber coupling semiconductor laser unit homogenizing method and device |
| CN103268016B (en) * | 2013-05-31 | 2016-05-04 | 西安炬光科技有限公司 | A kind of fiber coupled laser diode homogenizing method and device |
| CN109642997A (en) * | 2016-08-26 | 2019-04-16 | 株式会社岛津制作所 | Light emitting device |
| CN109642997B (en) * | 2016-08-26 | 2020-12-25 | 株式会社岛津制作所 | Light emitting device |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |