CN2787870Y - Micro/nano thermoacoustic engine based on thermoacoustic conversion - Google Patents
Micro/nano thermoacoustic engine based on thermoacoustic conversion Download PDFInfo
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- CN2787870Y CN2787870Y CN 200520005148 CN200520005148U CN2787870Y CN 2787870 Y CN2787870 Y CN 2787870Y CN 200520005148 CN200520005148 CN 200520005148 CN 200520005148 U CN200520005148 U CN 200520005148U CN 2787870 Y CN2787870 Y CN 2787870Y
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Abstract
The utility model relates to a micro/nano thermoacoustics engine based on thermoacoustics conversion, which is also a nano thermoacoustics engine. The utility model comprises a nanotube and a heater, wherein the nanotube is filled with a liquid working medium, one end of the nanotube is closed, and the other end is provided with a vibrating membrane; the heater which heats the nanotube is arranged outside the nanotube which can be filled with a perforated plate stacking structure; a metal magnetic nanometer particle layer can also adhere to the nanotube wall; the heater can be a laser, an electrode plate pair or a nanometer electrical heating wire with a self-carrying power supply. The heater heats the nanotube to induce the mutual conversion of thermoacoustics powers, and high-frequency signals of various frequencies and vibration amplitudes are output from the vibrating membrane end. The utility model has the characteristics of compact structure, simple and convenient operation, high response frequency, low cost, etc. The utility model has an important application value in the field of nanometer measurement.
Description
Technical field
The utility model belongs to nanometer oscillator and nano-machines field, be particularly related to a kind of based on the nanotube part is heated, so that the micro-/ nano thermoacoustic engine based on the conversion of heat sound of packaged air-flow generation thermal acoustic oscillation in the pipe, the excitation force of the ultra-high frequency of the exportable GHz-MHz scope of its diaphragm end.
Background technique
In recent years, because the great value of nanometer thermoacoustic engine (nanometer oscillator) technology aspect the perception nanometer world drops into a large amount of strength both at home and abroad in its correlative study, shown a frontier science and technology field that the significant development prospect is arranged.Progressively be clear that, on the oscillator on the nanoscale such as carbon/nanotube or silicon micro-cantilever, adhere to atom or molecule, promptly may cause its vibration frequency to take place obviously to change.If this frequency is monitored, can find out out information such as mechanics, electricity, magnetics and calorifics very abundant in the nanometer world.This type of technology in the micro-/ nano sciemtifec and technical sphere many occasions such as development and ultra-sensitivity sensor that scanning force microscopy, MEMS, mechanical meaurement and biological detection chip etc. combine on important use is all arranged.
At present, nanometer thermoacoustic engine (nanometer oscillator) mainly is to adopt carbon/nanotube to realize as micro-cantilever, and extraneous physical factor is by influencing the stress of beam body inherence, makes it frequency and amplitude changes; And, must give suitable excitation for overhang is vibrated continuously.The typical microstructure exciting technology that is proposed at present mainly comprises: piezoelectric excitation, electromagnetic excitation, electric capacity excitation, thermal excitation etc., wherein, it is more simple efficient that the thermal excitation method seems again, thereby paid close attention to by numerous researchers.But existing thermal excitation mainly is that the solid overhang is implemented local heating, to bring out its vibration, owing to be subjected to the restriction of space heating accuracy, the vibration frequency of Shi Xianing can too high (because of the great temperature gradient of needs) thus, particularly, the vibration frequency of thermoacoustic engine is mainly heated frequency and is determined, therefore will further improve its performance and have very big difficulty on nanoscale.
As everyone knows, the conversion of sound merit is a kind of new power technology.Its principle is, only need a hollow or partially filledly the folded resonantron of porous material such as plate is arranged (no matter whether opening, but have gas working medium in it) an end heat, the sound wave of meeting formation cycle density interphase in then managing, Working medium gas in the pipe moves back and forth in plate is folded under the driving of this pressure wave, promptly forms pressure and the density wave that back and forth changes, thereby drive the other end generation fluid exciting of pipe, produce power.Based on specific calorifics and structural design, can realize the thermoacoustic engine of function admirable.Yet, existing all thermoacoustics devices all are based upon the conceptive of macroscopic view, be that its overall dimensions is at least centimetre more than the magnitude, that is to say do not have the heat sound machinery of overall dimensions below milli/micron to be suggested so far, relevant research work does not just have yet to be carried out, reason also is understood that certainly, from traditional idea, under this size, thermoacoustic engine can not have use value.
For this reason, the utility model is from new technological approaches, a kind of micro-/ nano thermoacoustic engine based on the conversion of heat sound is provided, by means of the thermoacoustic work conversion between the encapsulation air-flow in nanotube, nanometer heating arrangement and the pipe, be implemented in the hot acoustic excitation of the ultra-high frequency of GHz-MHz scope, thereby expanded the notion of existing thermal excitation overhang greatly, simultaneously, this micro-/ nano thermoacoustic engine also is a breakthrough to traditional hot acoustic device form and purposes, and has proposed the notion of nanometer thermoacoustic engine first.
Summary of the invention
The purpose of this utility model is: from being different from the technological approaches of existing nanometer oscillator principle, provide a kind of micro-/ nano thermoacoustic engine based on the conversion of heat sound, can be used as the thermoacoustic engine of surveying nanometer object physical chemistry information.
Here, we are set forth the working principle of micro-/ nano thermoacoustic engine earlier.By means of traditional heat sound transfer principle, can know, heat by a end, can produce bigger temperature gradient within it outward, expand after gas is heated in the pipe nanotube, produce compressive force, cause air motion, the air-flow of fluctuation constantly with tube wall generation heat exchange, owing to moving rapidly and the slip characteristic of the viscosity of conducting heat, speed and temperature etc. of air-flow, can cause pressure to involve phase difference between the temperature wave, thus the vibration of excited gas.And the diameter of gas flow tube is more little or slenderness ratio is big more, and then the thermal acoustic oscillation efficient of air mass is high more, and high specific surface area makes the phase place between air motion and the heat transfer be easier to form.At this moment, may be also inessential as the plate stack structure of required filling in the traditional hot acoustic device, that is to say, end to the nanotube that is packaged with specific gas is implemented heating, can in pipe, form thermal acoustic oscillation, thereby export excitation force, promptly become the nanometer oscillator at the diaphragm end of pipe.
The technical solution of the utility model is as follows:
The micro-/ nano thermoacoustic engine based on the conversion of heat sound that the utility model provides is characterized in that, comprising:
One nanotube 1; The one end sealing of described nanotube 1, the other end is equipped with diaphragm 6, the elastic membrane of diaphragm 6 for being made by Cu, Au, Si or C material; Fluid-filled working medium 4 in the nanotube 1;
One is positioned at outside the nanotube 1, and the heater 5 that nanotube 1 is heated.
Filling porous plate stack structure 3 in the passage within the described nanotube 1 in the close closed end 10nm-300nm scope; Described porous slab stack structure 3 is made of carbon/nano-tube or is made of the nano porous metal particle packing.Described nano-porous gold metal particles is porous Au particle or porous C u particle.
Adhere to layer of metal magnetic nanoparticle layer 7 on the tube wall in also can the close closed end 10nm-300nm scope outside described nanotube 1; Described heater 5 applies the pair of electrodes plate 51 of electromagnetic field to it for being positioned at outside this layer metal magnetic nano-particle layer 7, described electrode plate 51 sizes at 1mm * 1mm * 1mm between 10cm * 10cm * 10cm, voltage is between 1-300V between two electrode plates, frequency at 1Hz between the 1000MHz.
The flow working medium 4 of filling in the described nanotube 1 is air, helium, nitrogen, argon gas, nitrous oxide or their combination; Perhaps be water or alcohol liquid; Perhaps sow mixed working fluid with gas for liquid metal, its gas is air, helium, nitrogen, argon gas, nitrous oxide.
Described heater 5 is a laser; It perhaps is self-powered nanometer electrical heating wire 52.
Serve as reasons gold, copper, carbon or silicon materials of described nanotube 1 are made; Its shape of cross section is square, triangle or circle, and its wall thickness is between 1nm-1mm; The diameter of nanotube 1 and axial length are in the 1nm-1mm scope.
Also can be at described nanotube 1 near connection one circulation bypass on the tube wall of closed end, filling porous plate stack structure 3 in the circulation bypass, described porous slab stack structure 3 is made of carbon, nano-tube or is made of the nano porous metal particle packing; Described heater 5 is for being deposited on the self-powered nanometer electrical heating wire 52 on the circulation bypass channel outer wall.
Crucial part of the present utility model is first heat sound transfer principle to be used to develop the micro-/ nano thermoacoustic engine, it is the hot acoustic excitation device of micro-/ nano that thereby the brand-new micro-/ nano thermoacoustic engine of a conception of species is provided, and this is an expansion to the implementation method of traditional hot sound machinery and application research.At present, existing a large amount of experiments find that nanotube has good mechanical, calorifics, electricity and magnetic performance, are just attempted being used for multiple industrial field.The minimum size of nanotube makes the heat sound conversion in it be easier to take place, thereby facilitates the realization of high-performance micro-/ nano oscillator.Though the principle of this nano-machines system is by means of existing heat sound transfer principle, different from the past fully on notion and intension and even application, so far, the notion of this type of micro-/ nano thermoacoustic engine at home and abroad never was suggested.
At present, the development of nanometer technology is maked rapid progress, but the practicability device is still less.The micro-/ nano thermoacoustic engine that the utility model provides can find a point of penetration for this reason.
The micro-/ nano thermoacoustic engine utensil that the utility model provides has many good qualities, at first since this device by be that solid heating and gas flow are conducted heat, thereby facilitated the fluid generation excited vibration in the nanotube in a simple manner; Because the size of micro-/ nano thermoacoustic engine is quite little, can produce high vibration frequency such as GHz; Based on these composite factors, the utility model than in the past merely to the vibration exciter of solid overhang heating, function more comprehensively, its vibration frequency can change according to being engaged in the relative broad range of structure, working material and heating.Because the specific surface area of micro-/ nano thermoacoustic engine interior conduit is minimum, the heat exchange efficiency of gas and wall is better, thereby the thermal acoustic oscillation characteristic that produces is better.In addition, at low temperatures, many nanometer oscillators are difficult to proper functioning, and the utility model can be worked under this kind environment, research with the physical chemistry problem that is used for detection accuracy is had relatively high expectations, can be chosen as the gas that air, helium, nitrogen, argon gas, nitrous oxide etc. do not undergo phase transition in the specified temp interval with working medium as required this moment.
Description of drawings
Accompanying drawing 1 is the utility model (embodiment's) a structural representation;
Accompanying drawing 2 is the utility model (another embodiment's) a structural representation;
Accompanying drawing 3 is the utility model (another embodiment's) a structural representation;
Accompanying drawing 4 is the utility model (embodiment's again) a structural representation;
Accompanying drawing 5 is the structural representation of the utility model (band circulation bypass is to constitute the embodiment of the hot acoustic excitation device of travelling-wave type);
Wherein: nanotube 1 resonant cavity 2 porous slab stack structures 3
Magnetic nanoparticle layer 7 electrode plate 51 electrical heating wires 52
Circulation bypass 8
Embodiment
Further describe the utility model below in conjunction with the drawings and specific embodiments:
As seen from the figure, the micro-/ nano thermoacoustic engine based on the conversion of heat sound that the utility model provides comprises:
One nanotube 1; The one end sealing of described nanotube 1, the other end is equipped with diaphragm 6, the elastic membrane of diaphragm 6 for being made by Cu, Au, Si or C material; Fluid-filled working medium 4 in the nanotube 1;
One is positioned at outside the nanotube 1, and the heater 5 that nanotube 1 is heated.
Filling porous plate stack structure 3 in the passage within the described nanotube 1 in the close closed end 10nm-300nm scope; Described porous slab stack structure 3 is made of carbon/nano-tube or is made of the nano porous metal particle packing.Described nano-porous gold metal particles is porous Au particle or porous C u particle.
Adhere to layer of metal magnetic nanoparticle layer 7 on the tube wall in also can the close closed end 10nm-300nm scope outside described nanotube 1; Described heater 5 applies the pair of electrodes plate 51 of electromagnetic field to it for being positioned at outside this layer metal magnetic nano-particle layer 7, described electrode plate 51 sizes at 1mm * 1mm * 1mm between 10cm * 10cm * 10cm, voltage is between 1-300V between two electrode plates, frequency at 1Hz between the 1000MHz.
The flow working medium 4 of filling in the described nanotube 1 is air, helium, nitrogen, argon gas, nitrous oxide or their combination; Perhaps be water or alcohol liquid; Perhaps sow mixed working fluid with gas for liquid metal, its gas is air, helium, nitrogen, argon gas, nitrous oxide.
Described heater 5 is a laser; It perhaps is self-powered nanometer electrical heating wire 52.
Serve as reasons gold, copper, carbon or silicon materials of described nanotube 1 are made; Its shape of cross section is square, triangle or circle, and its wall thickness is between 1nm-1mm; The diameter of nanotube 1 and axial length are in the 1nm-1mm scope.
Also can be at described nanotube 1 near connection one circulation bypass on the tube wall of closed end, filling porous plate stack structure 3 in the circulation bypass, described porous slab stack structure 3 is made of carbon, nano-tube or is made of the nano porous metal particle packing; Described heater 5 is for being deposited on the self-powered nanometer electrical heating wire 52 on the circulation bypass channel outer wall.
Embodiment illustrated in fig. 22: near filling porous plate stack structure 3 in the tube wall of closed end, porous slab stack structure 3 is by carbon nano-tube (also can be nano-tube certainly) in the nanotube 1; Porous slab stack structure 3 also nano porous metal particle packing constitutes; Constitute resonant cavity 2 between nanotube 1 closed end and the porous slab stack structure 3; Remaining part is with embodiment 1.
Embodiment illustrated in fig. 33: adhere to layer of metal magnetic nanoparticle layer 7 on the tube wall in the close closed end 10nm-300nm scope outside nanotube 1 (as Fe
3O
4Particle layer); Heater 5 applies the pair of electrodes plate 51 of electromagnetic field to it for being positioned at outside this layer metal magnetic nano-particle layer 7, the size of described electrode plate 51 all can between 10cm * 10cm * 10cm at 1mm * 1mm * 1mm, voltage is between 1-300V between two electrode plates, frequency at 1Hz between the 1000MHz; Near filling porous plate stack structure 3 in the tube wall of closed end, porous slab stack structure 3 is by carbon nano-tube in the nanotube 1; Constitute resonant cavity 2 between nanotube 1 closed end and the porous slab stack structure 3; The electromagnetic field that this electrode plate 51 produces brings out resonant cavity 2 gives birth to heat, reaches the purpose of exciting.
Embodiment illustrated in fig. 44: its heater 5 is for being deposited on the self-powered nanometer electrical heating wire 52 on nanotube 1 tube wall; Belong to contact heating, under the situation of energising, can realize local heating, and bring out the thermal acoustic oscillation of its inner fluid, clocklike vibrate thereby drive diaphragm 6 to nanotube 1.
Embodiment illustrated in fig. 55: near being communicated with a circulation bypass 8 on the tube wall of nanotube 1 closed end, be filled with porous slab stack structure 3 in the circulation bypass 8, described porous slab stack structure 3 is formed by the nano porous metal particle packing; Described heater 5 is the self-powered nanometer electrical heating wire 52 on the channel outer wall that is deposited on circulation bypass 8.
The nanotube 1 that the utility model provides and the material of porous slab stack structure 3 thereof except that adopting modal carbon nano-tube or particle, also can adopt metal (as Au, Cu etc.).At present, can make and assemble out various nanostructured (Zhang Lide as required, Mu Jimei, nanometer material and nanostructured, Beijing: Science Press, 2001), can realize oriented growth such as carbon nano-tube, and reach overlength magnitude (millimeter level), and also can obtain continuing to improve from now on, this makes that the utility model is easy to realize.Flowing medium 4 can adopt the working medium compatible with the nanotube walls material, as inert gas or their combinations such as air, helium, nitrogen, argon gas, nitrous oxides, in addition, also can select for use liquid working substance such as water, alcohol etc. to be filled in the nanotube, to the enforcement local heating realize corresponding heat shock vibration.Even, some liquid metals be filled in the nanotube 1 after portion gas mixes, also can realize the micro-/ nano thermoacoustic engine that function is different by local heating.
When the micro-/ nano thermoacoustic engine based on the conversion of heat sound that the utility model provides is worked, only need an end of nanotube 1 is heated, the flowing medium 4 after being heated carries out complicated heat exchange with nanotube 1 and porous slab stack structure 3; Meanwhile, surrounding atmosphere then plays cooling action to the remaining part of nanotube 1, so, under heating, fluid-induced vibration and the conversion of sound merit of above-mentioned complexity, promptly form the vibration of rule shape at the other end diaphragm 6 places of nanotube 1, at this moment, micro-/ nano thermoacoustic engine of the present utility model promptly becomes a kind of nanometer oscillator.
The concrete production method of a kind of nanometer thermoacoustic engine provided by the utility model is as follows:
1. the processing of nanotube 1: require made nanotube size as far as possible little (as the internal diameter of pipeline 1 below hundreds of nanometers), then need adopt nanofabrication technique to make the nanotube or the duct of certain slenderness ratio, as shown in Figure 1.This duct also can directly be produced in the substrate.
2. the making of porous slab stack structure 3 and pipeline encapsulation: (it makes existing ready-made method to get a certain amount of carbon nano-tube, can be referring to [Zhang Lide, Mu Jimei, nanometer material and nanostructured, Beijing: Science Press, 2001], it is filled on the inwall of nanotube 1 vertically, and the employing adhesive makes it, and (this is mature technologies at various chemical fields with the fusion of nanotube 1 pipeline, be not difficult to realize), promptly form the plate stack structure 3 (plate stack structure 3 is positioned at nanotube 1 near closed end 10-300nm position) in the nanotube.
The above-mentioned making method of carbon nano-tube that also can adopt is realized by means of chemical reaction, such as directly generating nanostructured in the cage structure in carbon nano-tube 1, also can realize the plate stack structure in the nanotube thus.Present technology can guarantee the realization of above-mentioned target.Certainly, the micro-/ nano thermoacoustic engine also can not filled this type of plate stack structure, and this moment, it served as a kind of heat sound crossover connection of hollow, also can reach the purpose of hot acoustic excitation.Even nanotube can be hatch frame, and just the working medium that adopts this moment is naturally occurring air in the environment.
3. the filling of fluid working substance: above-mentioned semi-closed structure is placed in the vacuum chamber, vacuumize, removing the air in the nanotube 1, thereby fill the working medium of specific function.Afterwards, flowing medium to be filled 4 is joined in this vacuum chamber, and it is heated, through behind the certain hour, along with the rising of pressure, the flowing medium 4 in the vacuum chamber promptly enters in the duct and plate laminate materials 3 of nanotube 1, optionally, adjust temperature and pressure in the vacuum chamber, then can change and enter micro-/ nano heat sound and swash in-engine working medium quantity.At this moment, need the opening end of nanotube is encapsulated, as forming diaphragm 6 behind the plated film.Afterwards, nanotube 1 is taken out in vacuum chamber, at room temperature cool off certain hour after, promptly produce the micro-/ nano thermoacoustic engine based on heat sound conversion of the present utility model.
4. the driving force that fluid flows in the pipe that provides of the utility model is from the outer local heating of nanotube, because this nanotube has high specific surface area, thereby the external heat that is provided is easy to driving fluid medium 4 and vibrates in pipe, thereby as Figure 1-3 the hot acoustic excitation device of a few class micro-/ nanos structure of employing all can.Except that above-mentioned standing wave shape structure, this micro-/ nano thermoacoustic engine also can adopt heat sound transformational structures such as travelling-wave type, only needs that runner is made respective design and gets final product.In a word, the utility model provides the most basic hot acoustic excitation modular construction, and the notion micro-/ nano that can amplify out other types is started a machine thus, and is numerous herein.
5. the micro-/ nano thermoacoustic engine device that provides of the utility model can be assembled into various ways.Whole micro-/ nano thermoacoustic engine both can be as a whole; Also can be made into array combination, even adopt the conversion of multistage heat sound to realize.And, also can introduce local refrigeration at nanotube outer wall privileged site, cooperate the above heating approach of setting forth, can realize best hot acoustic excitation mode.
Should be noted that, generally should satisfy following requirement as fluid working substance 4 of the present utility model: do not burn, nontoxic, should be compatible with structural material, and can not cause nanotube is produced the unfavorable factor that corrosion and rustization etc. influence working life, not decompose under the high temperature, not undergo phase transition under the low temperature; Be easy to obtain; Has certain thermostability.In addition, working medium also should have suitable coefficient of viscosity.
The micro-/ nano thermoacoustic engine that the utility model provides has lot of advantages, at first since this device by be that solid heating and gas flow are conducted heat, thereby facilitated the fluid generation excited vibration in the nanotube in a simple manner; Because the size of the hot acoustic excitation device of nanometer is quite little, can produce high vibration frequency such as GHz; Based on these composite factors, the utility model than in the past merely to the vibration exciter of solid overhang heating, function more comprehensively, its vibration frequency can change according to being engaged in the relative broad range of structure, working material and heating.Because the specific surface area of micro-/ nano thermoacoustic engine interior conduit is minimum, the heat exchange efficiency of gas and wall is better, thereby the thermal acoustic oscillation characteristic that produces is better.In addition, at low temperatures, many nanometer oscillators are difficult to proper functioning, and the utility model can be worked under this kind environment, research with the physical chemistry problem that is used for detection accuracy is had relatively high expectations, can be chosen as the gas that air, helium, nitrogen, argon gas, nitrous oxide etc. do not undergo phase transition in the specified temp interval with working medium as required this moment.
Also micro-/ nano thermoacoustic engine of the present utility model can be close in the specific substrate, according to required vibration frequency that reaches and amplitude, select the laser of certain power and size, an end of aiming at the hot acoustic excitation device of nanometer under microscopical guiding heats, can induce hot sound vibration at its other end diaphragm 6 places, finish further test job thus.
Claims (10)
1, a kind of micro-/ nano thermoacoustic engine based on the conversion of heat sound is characterized in that, comprising:
One nanotube (1); The one end sealing of described nanotube (1), the other end is equipped with diaphragm (6), fluid-filled working medium (4) in it;
One is positioned at outside the nanotube (1), and the heater (5) that nanotube (1) is heated.
2, by the described micro-/ nano thermoacoustic engine of claim 1, it is characterized in that filling porous plate stack structure (3) in the passage within the described nanotube (1) in the close closed end 10nm-300nm scope based on the conversion of heat sound; Described porous slab stack structure (3) is made of carbon/nano-tube or nano porous metal particle packing.
3, by the described micro-/ nano thermoacoustic engine of claim 2, it is characterized in that described nano-porous gold metal particles is porous Au particle or porous C u particle based on the conversion of heat sound.
4, by claim 1 or 2 described micro-/ nano thermoacoustic engines, it is characterized in that, adhere to layer of metal magnetic nanoparticle layer (7) on the tube wall in the close closed end 10nm-300nm scope outside the described nanotube (1) based on the conversion of heat sound; Described heater (5) applies the pair of electrodes plate (51) of electromagnetic field to it for being positioned at outside this layer metal magnetic nano-particle layer (7), described electrode plate (51) size at 1mm * 1mm * 1mm between 10cm * 10cm * 10cm, voltage is between 1-300V between two electrode plates, frequency at 1Hz between the 1000MHz.
5, by the described micro-/ nano thermoacoustic engine of claim 1, it is characterized in that the flow working medium (4) of filling in the described nanotube (1) is air, helium, nitrogen, argon gas, nitrous oxide or their combination based on the conversion of heat sound; Perhaps be water or alcohol liquid; Perhaps sow mixed working fluid with gas for liquid metal, its gas is air, helium, nitrogen, argon gas, nitrous oxide.
6, by the described micro-/ nano thermoacoustic engine of claim 1, it is characterized in that described heater (5) is a laser based on the conversion of heat sound; It perhaps is self-powered nanometer electrical heating wire (52).
By the described micro-/ nano thermoacoustic engine of claim 1, it is characterized in that 7, serve as reasons gold, copper, carbon or silicon materials of described nanotube (1) are made based on heat sound conversion.
8. by the described micro-/ nano thermoacoustic engine of claim 1, it is characterized in that the shape of cross section of described nanotube (1) is square, triangle or circle based on the conversion of heat sound; Its wall thickness is at 1nm-1mm; The diameter of nanotube (1) and axial length are in the 1nm-1mm scope.
9. by the described micro-/ nano thermoacoustic engine of claim 1 based on the conversion of heat sound, it is characterized in that, described nanotube (1) is near being communicated with a circulation bypass on the tube wall of closed end, filling porous plate stack structure (3) in the circulation bypass, described porous slab stack structure (3) is made of carbon/nano-tube or nano porous metal particle packing; Described heater (5) is for being deposited on the self-powered nanometer electrical heating wire (52) on the circulation bypass channel outer wall.
10, by the described micro-/ nano thermoacoustic engine of claim 1, it is characterized in that the elastic membrane of described diaphragm (6) for making by Cu, Au, Si or C material based on the conversion of heat sound.
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