CN2787362Y - System for preparing microstructure with multiple periods in photosensitive material by utilizing laser - Google Patents
System for preparing microstructure with multiple periods in photosensitive material by utilizing laser Download PDFInfo
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- CN2787362Y CN2787362Y CN 200420122526 CN200420122526U CN2787362Y CN 2787362 Y CN2787362 Y CN 2787362Y CN 200420122526 CN200420122526 CN 200420122526 CN 200420122526 U CN200420122526 U CN 200420122526U CN 2787362 Y CN2787362 Y CN 2787362Y
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Abstract
The utility model relates to a system for preparing a microstructure with multiple periods in photosensitive material by utilizing laser, which comprises a beam dividing device, a beam collecting device and a specimen stage are orderly arranged on an output light path of a laser device. After generated from the laser device 1 is divided into N coherent light beams through the beam dividing device, the laser reaches the beam collecting device. The coherent light beams are intersected at the back of the beam collecting device by regulating a three-dimensional micro-motion system manipulated by a computer to realize the coherence of time and space and form interference fringes with a multi-period structure, which act on the photosensitive material arranged on the specimen stage. The microstructure with multiple periods is obtained by means that the coherent light beams are exposed to the photosensitive material. The utility model has the advantages of simple system structure and easy realization of industrialization. The method that the microstructure with multiple periods is prepared in the photosensitive material by utilizing the utility model has the advantages of simple manufacturing process, short time and high efficiency. The method can realize the optional regulation of period length and structure types and has good repeatability.
Description
Technical field
The utility model relates to a kind of laser processing and process equipment, particularly relates to a kind of laser that utilizes and prepare the system with multiple periodicity micro-structural in photosensitive material.
Background technology
Periodic micro structure has obtained using widely in areas of information technology such as semiconductor microactuator electronic applications, high density information field of storage, field of optoelectronic devices.Particularly in novel photonic propulsion devices field, the application of periodic micro structure has been subjected to paying close attention to widely.Wherein be with the photonic crystal representative utilize periodic micro structure that light is carried out Research on Modulation and development is carried out widely in countries in the world.
The multiple periodicity micro-structural that with the semiconductor superlattice is representative is widely studied at optoelectronic areas.But utilizing the photonic crystal principle, promptly be basis when carrying out the modulation of light with the multiple scattering of light, the multiple periodicity micro-structural of similar semiconductor superlattice, is that up to the present the report of photonic crystal superlattices only has two examples.In the report of relevant photonic crystal superlattices, the method of the silicon dioxide colloid particle that people such as Rajesh Rengarajan utilize two kinds of different sizes by self assembly obtained colloidal particle and has been multiple periodicity structure arranged (Phys.Rev.B, Rajesh Rengarajan etc., AIP, 2001,64:205103-1～205103-4).Wounjhang Park has reported that with Christopher J.Summers relevant employing electrooptical material forms the theory calculating result of study that refractive index is the 2 D photon crystal superlattice structure of multiple periodicity variation as cast material, utilization to the modulation of electro-optical characteristic.(Appl.Phys.Lett., Wounjhang Park and Christopher J.Summers, American Institute of Physics, 2004,84:2013～2015).The desirable technology of preparing that the preparation work of above-mentioned relevant multiple periodicity micro-structural can not propose good reproducibility comparatively, can control.
In numerous periodic micro structure technologies of preparing, the important method that laser technology has become the manufacturing cycle micro-structural has obtained using widely.Utilize laser to carry out the laser processing technology of periodic micro structure preparation, mainly contain methods such as laser scanning and laser interference.Laser scanner technique utilizes the active position of computer control laser beam and photosensitive material can obtain periodic micro structure by the periodic micro structure pattern data of design in advance, people such as Koshiro Kaneko utilize the Fs laser double photon polymerization to prepare to have the most complicated periodic micro structure---three-dimensional diamond-type photonic crystal (Appl.Phys.Lett., Koshiro Kaneko etc., American Institute of Physics, 2003,83:1426～1428).But, during laser scanning manufacturing cycle micro-structural, exist process velocity slow, be difficult to carry out shortcoming such as large-area preparation, be not suitable for the requirements of a large amount of preparations.Laser interferometry is as the quilt extensive use in the periodic micro structure preparation of photosensitive material of a kind of advanced machining technology.People such as M.Campbell utilize Nd:YAG ps pulsed laser and ns pulsed laser device to produce frequency tripling light beam (wavelength is 355nm) as light source, utilize the angle condition of adjusting four beam interferences, being implemented in the time in focus acts on the photoresist film with dry doubling mutually on the space, obtained face-centred cubic three-D photon crystal periodic micro structure (Nature, M.Campbell etc., mcmillan publishing company, 2000,404:53～56).The wavelength that people such as Hong-Bo Sun utilize titanium jewel femtosecond pulse laser to be produced is 780nm, pulse width is that the near-infrared laser light beam of 80fs passes through four beam interferences, obtained periodically three-dimensional manometer network micro-structural (Adv.Mater., Hong-Bo Sun etc., Germany WILEY-VCH, 2003,15:2011～2014).The wavelength that people such as Toshiaki Kondo utilize titanium jewel femtosecond pulse laser to be produced is 800nm, pulse width is that the near-infrared laser light beam of 80fs passes through four beam interferences, obtained two dimension array type periodic micro structure (Appl.Phys.Lett., Toshiaki Kondo etc., American Institute of Physics, 2003,82:2758～2760).The wavelength that system produced that Jan-Hendrik Klein-Wiele and Peter Simon utilize dye laser and KrF amplifier to form is 248nm, pulse width is that the control of Ultra-Violet Laser light beam by phase place of 500fs has obtained various two-dimensional and periodic micro-structural (Appl.Phys.Lett., Jan-Hendrik Klein-Wiele and Peter Simon, American Institute of Physics, 2003,83:4707～4709).The wavelength that Satoru Shoji and SatoshiKawata utilize helium cadmium laser to produce passes through four beam interferences for the continuous visible laser beam of 432nm, two dimension and three-dimensional periodic micro-structural (Appl.Phys.Lett. have been obtained, Satoru Shoji and Satoshi Kawata, American Institute of Physics, 2000,76:2668～2670).The structure that above-mentioned technology obtained is single periodic structure, and Shang Weiyou successfully prepares the precedent of multiple periodicity micro-structural.
Summary of the invention
Order of the present utility model be to overcome existing in thermo-sensitive material the method for manufacturing cycle micro-structural, can only prepare two dimension and three-dimensional single periodic micro structure, and can not prepare the defective of multiple periodicity micro-structural; Thereby a kind of good reproducibility is provided, and can controls, utilize laser in photosensitive material, to prepare system with multiple periodicity micro-structural to cycle and structure.
The purpose of this utility model is achieved in that
The system that the utility model provides utilizes laser to prepare in photosensitive material to have the multiple periodicity micro-structural as shown in Figure 1, comprise laser instrument 1, divided beams device 2, it is characterized in that, also comprise three-dimensional little mobile system 5 that computer is handled and the converging beam device of in this system, settling 3, photosensitive material 4; Wherein on laser instrument 1 output light path, set gradually divided beams device 2, converging beam device 3 and sample platform 4; The laser that laser instrument 1 produces arrives converging beam device 3 after divided beams device 2 is divided into N bundle coherent light, three-dimensional little mobile system 5 that adjusting is handled by computer makes these coherent beams intersect in the back of converging beam device 3, be implemented in being concerned with on time and the space, the interference fringe that forms the multiple periodicity structure acts on the photosensitive material that is placed on sample platform 4, obtains the multiple periodicity micro-structural by exposure in photosensitive material.
In above-mentioned technical scheme, the light splitting part in the described divided beams device comprises optical diffraction beam splitter and the combination of shielding device or the combination of Amici prism and speculum.
First kind (as shown in Figure 2) of described divided beams device 2, by light splitting part (can be the optical diffraction beam splitter), collimation lens 6, shielding device 7: wherein the laser that sends of laser instrument 1 is through optical diffraction beam splitter 2, be divided into the subparallel 9 bundle laser of 9 bundle backs collimated lens accurate 6 straight one-tenth, eight bundles are the pro rates with 1: 1 around this 9 bundle light, and the energy that middle a branch of light occupies has difference according to the difference of selected optical maser wavelength; This 9 bundle light arrives shielding device 7, and shielding device 7 makes 4 bundle laser wherein pass through, and other then conductively-closed is fallen.
Described shielding device 7 is a spininess hole diaphragm shielding device.
The another kind of described divided beams device 2 (as shown in Figure 3) comprises that light splitting part is 3 Amici prisms; Wherein the laser that sends of laser instrument 1 is divided into two bundles after through 1: 1 first Amici prism 9, and this two-beam is realized laser is divided into 4 bundles through second Amici prism 13 and the 3rd Amici prism 18 respectively again.
In technique scheme, described laser is divided into N bundle coherent light through divided beams device 2, and wherein divided beams device 2 usefulness light diffraction beam splitters carry out beam split, N be 3 bundles to 20 bundles, utilize again spininess hole diaphragm 7 select need the light beam number; The wherein combination of divided beams device 2 usefulness Amici prisms 8 and speculum 9, N is 3 bundles or 4 bundles.
In technique scheme, the device of the described N of converging bundle light also has two kinds: respectively as Fig. 2 and Fig. 3.First kind converge four the bundle light device as shown in Figure 2, it is a condenser lens 8, be arranged on shielding device 7 output light paths, the focal length of this condenser lens 8 is 1mm-500mm, this condenser lens converges with the lens focus place N bundle light and realizes being concerned with on the time and space, and the facula area of coherent area movement is (1um-1cm).
Second kind of device that converges four bundle light as shown in Figure 3, it is 4 speculums 11,12,16,17, by 4 speculums four bundle light is converged on the light-sensitive material, realizes relevant on the time and space, the facula area of coherent area movement is 0.5mm-1cm.
In above-mentioned technical scheme, described laser instrument comprises continuously or pulse laser; Pulse width from nanosecond to the femtosecond scope.
Described laser instrument can use wave-length coverage to arrive near-infrared (1064nm) wave-length coverage as deep ultraviolet (155nm).Wherein, the laser instrument of deep ultraviolet wavelength is the quadruple 266nm of Nd:YAG laser instrument; The laser instrument of ultraviolet wavelength is the frequency tripling 355nm of Nd:YAG laser instrument, the 325nm of He-Cd laser instrument; The laser instrument of described visible wavelength is two frequency multiplication 532nm, the 441.6nm of He-Cd laser instrument, the 700nm of ti sapphire laser of Nd:YAG laser instrument; The laser instrument of described near-infrared wavelength is the 700nm-1000nm of ti sapphire laser, the 1064nm of Nd:YAG laser instrument.
In technique scheme, the production method of described spot light and directional light has two kinds: at the divided beams device is under optical diffraction beam splitter and the spininess hole diaphragm combined situation, and spot light and directional light can be by producing along major axes orientation mobile focusing lens to appropriate location; Can directly obtain source of parallel light when being the combination of Amici prism and speculum, utilize and in this converging device, add condenser lens and can produce spot light at the divided beams device.
In technique scheme, when described coherent source was spot light, when the facula area after the distance of the sample interstation of spot light and placement light-sensitive material focuses on many light can compare, the spot light effect was just obvious.Relevant back can form the multiple periodicity micro-structural by the hyperbola modulation in photosensitive material.
Utilize the multiple periodicity micro-structural of technology preparation described in the utility model can be used as the template use, be used for preparing other and have heterogeneity, as the multiple periodicity micro-structural of the material of, different optical characteristics, different electronics properties, different mechanical characteristics etc.These materials comprise various materials with mechanics, optics, electricity or other characteristic such as high-molecular organic material, inorganic ceramic material, semi-conducting material, metal material.
This prepared class multiple periodicity fine structure material can be modulated light, electromagnetic wave etc. as photonic crystal and photonic crystal superlattices at optoelectronic areas, also can be used as the multiple periodicity micro-structural that template prepares other and uses in other field.
Superiority of the present utility model:
1. system of the present utility model makes multiple laser implementation space and temporal relevant between light beam, can prepare the material that induces the multiple periodicity micro-structural in photosensitive material.
2. utilize system of the present utility model can produce the multiple periodicity micro-structural on several microns to several millimeters microcell, site size can be controlled by changing the incident beam diameter, and its preparation technology is simple, the time is short, efficient is high.
3. can regulate by the focal length of selecting collimation lens 3 and plus lens 5, and the big or small material different with structure of the cycle of preparing, perhaps its cycle size can be regulated by the incidence angle that changes four beam convergence light, its minor cycle scope is 100nm to tens micron, and the large period scope arrives the hundreds of micron for the hundreds of nanometer; Therefore this method has realized that the cycle size is controlled with structure, and good reproducibility.
4. prepared multiple periodicity micro-structural and the inversion structures thereof of the utility model can satisfy the needs in fields such as microelectronics, high density information storage, micro-nano-scale opto-electronic device and micro-optics.
5. system architecture of the present utility model is simple, is easy to realize, is suitable for suitability for industrialized production.
Description of drawings
Fig. 1 is the system schematic of preparation multiple periodicity micro-structural of the present utility model
Fig. 2 is system's a kind of light path embodiment schematic diagram of preparation multiple periodicity micro-structural of the present utility model
Fig. 3 is system's another kind of light path embodiment schematic diagram of preparation multiple periodicity micro-structural of the present utility model
Fig. 4 a is in the system of corresponding diagram 2, the schematic diagram of one of method by regulating condenser lens and sample platform control optical fringe pattern
Fig. 4 b is in the system of corresponding diagram 3, two schematic diagram of the method by regulating condenser lens and sample platform control optical fringe pattern
The drawing explanation:
1, laser instrument; 2, divided beams device; 3, converging beam device;
4, sample platform; 5, by computer-controlled three-dimensional micro-system;
20, diffraction beam splitter; 6, collimation lens 7, shielding device; 8, condenser lens;
9, first Amici prism; 10, first speculum; 11, second speculum;
12, the 3rd speculum; 13, second Amici prism; 14, the 4th speculum;
15, the 5th speculum; 16, the 6th speculum; 17, the 7th speculum;
18, the 3rd Amici prism;
The specific embodiment
With reference to figure 2, Fig. 4 a, on the photoresist of commodity SCR500 by name, prepare the micro-structural that is hyperbolic-type, below in conjunction with drawings and Examples system of the present utility model is described in detail:
This system comprises: laser instrument 1 is selected the Nd:YAG laser instrument for use, the frequency tripling 355nm of this laser instrument 1, and pulse width is 8ns, and pulse recurrence frequency is 10Hz, and beam diameter is 6.4mm; On the light path of laser instrument 1 output light, be provided with one and use SiO
2The optical diffraction beam splitter 2 that material is made is divided into 9 bundles with laser, on the output light path collimation lens 6 that a usefulness BK7 glass is made is being set thereafter, and the focal length of this collimation lens 6 is 100mm, and this 9 bundle light becomes collimated light beam behind collimation lens 6; A spininess hole diaphragm shielding device 7 is set on the parallel laser light path behind the collimation lens 6; Make 4 symmetrical circular holes in this example altogether as spininess hole diaphragm shielding device 7, choosing wherein at spininess hole diaphragm shielding device 7, four bundle light of symmetry pass through, the total mean power of this four bundles light is 1mW, settle a lump coke apart from being condenser lens 8 and sample platform 4 35mm, that use BK7 glass to make in the place ahead of this four bundles directional light; Condenser lens 8 and sample platform are installed on the three-dimensional mobile platform 5 (bought on the three-dimensional mobile platform that the optical laboratory uses or other market can), and handle the motion of three-dimensional mobile platform 5 by computer, by the little mobile focusing lens 8 of parallel main axis direction (shown in Fig. 4 a), through overregulating three-dimensional little mobile system 5 of handling by computer these coherent beams are intersected in the back of condenser lens 8, be implemented in being concerned with on time and the space, form the interference fringe of multiple periodicity structure, it acts on the photosensitive material that is placed on sample platform 4, obtains the multiple periodicity micro-structural by exposure in photosensitive material.
An optical diffraction beam splitter 2 is set on the light path of laser instrument 1 output light laser is divided into 9 bundles, a branch of light at center has occupied most of energy.The energy of all the other 8 bundle light was with 1: 1 pro rate, and the material of optical diffraction beam splitter is SiO
2Become collimated light beam behind the collimation lens 6 that this 9 bundle light is 100mm through focal length, choose wherein four bundle light of symmetry, the total mean power of this four bundles light is 1mW, these four bundles directional light line focus lens, 8 focal lengths, three-dimensional mobile platform 5 controls that condenser lens 8 and sample platform are handled by computer, by the little mobile focusing lens 8 of parallel main axis direction (shown in Fig. 4 a), the angle of four bundle light and main shaft is all 6 °, regulating the focus of each Shu Guang and the spacing of sample platform is 5mm, four bundle light are focused on the film 4 as the light-sensitive material of sample, spot diameter is 2mm, light-sensitive material is that a layer thickness that is coated in above the sheet glass is the SCR500 film of 5um, after 10 seconds time for exposure kind, sheet glass is cleaned with ethanol, clean and can be observed the micro-structural that is hyperbolic-type in the light-sensitive material later, its inner multiple periodicity micro-structural, inner about 4um of minor cycle.
Embodiment 2:
With reference to figure 2, Fig. 4 b, the system of 2 reset cycle micro-structurals is prepared in making one in the SCR500 light-sensitive material, and the concrete steps that are prepared in this system, is described in detail below in conjunction with drawings and Examples:
The system of present embodiment comprises: select He-Cd laser instrument 1 for use, the wavelength of its He-Cd laser instrument 1 is the continuous laser light beam of 1.6mm for the 325nm. beam diameter, through the diffraction light beam splitter light beam is divided into 9 bundles, and a branch of light at center has occupied most of energy.The energy of all the other 8 bundle light becomes collimated light beam with 1: 1 pro rate behind the collimation lens 6 that this 9 bundle light is 100mm through focal length; A shielding device 7 is set on the parallel laser light path behind the collimation lens 6, this shielding device 7 is the corresponding light transmission location place at cardboard, making one allows light pass through with the same big circular hole of hot spot, make 4 symmetrical circular holes in this example altogether as shielding device 7, choose wherein four bundle light of symmetry, the total mean power of this four bundles light is 10mW, a condenser lens 8 is settled in the place ahead at this four bundles directional light, the focal length of this condenser lens 8 is 60mm, the material of collimation lens 6 and condenser lens 8 all is a BK7 glass, condenser lens 8 and sample platform are installed on the three-dimensional mobile platform of being handled by computer, and be subjected to its computer control, by the little mobile lens 5 of vertical major direction (shown in Fig. 4 b), make the angle of four light beams and main shaft be respectively a
1=2.6 °, a
2=3 °, a
3=3.6 °, a
4=3 °, four bundle light are focused on the film as the light-sensitive material of sample, spot diameter is 1.6mm, light-sensitive material is that a layer thickness that is coated in above the sheet glass is the SCR500 photoresist film of 3um, after 30 seconds time for exposure kind, sheet glass is cleaned with ethanol, cleaning can be observed be double-periodic micro-structural in the light-sensitive material later, through its minor cycle of sem observation is about 5um, and large period is about 28um.
Embodiment 3
With reference to figure 3, make a system that in quartz glass, prepares 2 reset cycle micro-structurals, and concrete steps that are prepared in this system are described in detail below in conjunction with embodiment:
The system of present embodiment comprises: selecting pulse width for use is 120fs's, pulse recurrence frequency is 5Hz, pulse energy is 80 μ J, beam diameter is the ultrashort pulse laser 1 of 6.4mm, laser beam light beam behind first Amici prism 9 is divided into 2 bundle directional lights with 1: 1 ratio, this two-beam is respectively through first speculum 10, second speculum 11, the combination of the 3rd speculum 12 and second Amici prism 13 and the 4th speculum 14, the 5th speculum 15, the 6th speculum 16, the combination of the 7th speculum 17 and the 3rd Amici prism 18, these speculums and Amici prism, and the sample platform all is installed on the three-dimensional mobile platform of being handled by computer; The three-dimensional mobile platform that they are handled by computer is controlled, control four light beams at last and converge on the quartz glass 4 from the light that second speculum 11, the 3rd speculum 12, the 6th speculum 16, the 7th speculum 17 come out, the angle of this four light beam and sample platform main shaft is respectively a
1=6 °, a
2=6 °, a
3=4.5 °, a
4=4.5 °, the about 6mm of spot diameter after four bundle light converge can be observed double-periodic micro-structural at quartz surfaces like this, and its minor cycle is about 7.5um, and large period is about 30um.
With reference to figure 2, Fig. 4 b, the system of 2 reset cycle micro-structurals is prepared in making one in containing the light-sensitive material of metal ion.Selecting a wavelength for use is that the beam diameter of He-Cd laser instrument 1. these He-Cd laser instruments 1 of 325nm is the continuous laser light beam of 1.6mm, through diffraction light beam splitter 20 light beam is divided into 9 bundles, and a branch of light at center has occupied most of energy.The energy of all the other 8 bundle light becomes collimated light beam with 1: 1 pro rate behind the collimation lens 6 that this 9 bundle light is 100mm through focal length.A shielding device 7 is set on the parallel laser light path behind the collimation lens 6, this shielding device 7 is the corresponding light transmission location place at cardboard, making one allows light pass through with the same big circular hole of hot spot, make 4 symmetrical circular holes in this example altogether as shielding device 7, choose wherein four bundle light of symmetry, the total mean power of this four bundles light is 10mW, a condenser lens 8 is settled in the place ahead at this four bundles directional light, the focal length of this condenser lens 8 is 60mm, the material of collimation lens 6 and condenser lens 8 all is a BK7 glass, the three-dimensional mobile platform control that condenser lens 8 and sample platform are handled by computer, by the little mobile focusing lens 8 of vertical major direction (shown in Fig. 4 b), make the angle of four light beams and main shaft be respectively a
1=2.6 °, a
2=3 °, a
3=3.6 °, a
4=3 °, four bundle light are focused on the film as the light-sensitive material that contains metal ion of sample, spot diameter is 1.6mm.The light-sensitive material that contains metal ion is that 4 gram polyvinyl alcohol and 0.5 gram silver nitrate are dissolved into the aqueous solution that obtains in 20 ml waters, is the 3um film with this aqueous solution by a layer thickness that is spin-coated on sheet glass and obtains above.After 30 seconds time for exposure kind, can be observed in the high-molecular polyvinyl alcohol film by the double-periodic micro-structural that is formed by the Nano silver grain of photo-reduction, its minor cycle is about 5um, and large period is about 28um.
Claims (5)
1. system that utilizes laser in photosensitive material, to be shaped on the multiple periodicity micro-structural, comprise laser instrument (1), divided beams device (2), it is characterized in that: also comprise three-dimensional little mobile system (5) that computer is handled and at the converging beam device of settling in this system (3) and sample platform (4), wherein on laser instrument (1) output light path, set gradually divided beams device (2), converging beam device (3) and sample platform (4); The laser that laser instrument (1) produces arrives converging beam device (3) after divided beams device (2) is divided into N bundle coherent light, three-dimensional little mobile system (5) that adjusting is handled by computer makes these coherent beams intersect in the back of converging beam device (3), be implemented in being concerned with on time and the space, the interference fringe that forms the multiple periodicity structure acts on the photosensitive material that is placed on sample platform (4).
2. by the described system that utilizes laser to be shaped on the multiple periodicity micro-structural in photosensitive material of claim 1, it is characterized in that: described laser instrument (1) comprises continuous wave laser or pulse laser; Pulse width from nanosecond to the femtosecond scope; Wave-length coverage for deep ultraviolet 155nm to near-infrared 1064nm wave-length coverage.
3. by the described system that utilizes laser to be shaped on the multiple periodicity micro-structural in photosensitive material of claim 1, it is characterized in that: described divided beams device (2) comprises optical diffraction beam splitter (6) and shielding device (7) combination; Or adopt the combination of 3 Amici prisms and speculum.
4. by the described system that utilizes laser to be shaped on the multiple periodicity micro-structural in photosensitive material of claim 1, it is characterized in that: described converging beam device (3) is a condenser lens, and the focal length of lens is 1mm-500mm.
5. by the described system that utilizes laser in photosensitive material, to be shaped on the multiple periodicity micro-structural of claim 1, it is characterized in that: described converging beam device (3) is 4 speculums, by 4 speculums four bundle light are converged on the light-sensitive material, realize being concerned with on the time and space, the facula area of coherent area movement is 0.1mm-1cm.
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| CN 200420122526 CN2787362Y (en) | 2004-12-31 | 2004-12-31 | System for preparing microstructure with multiple periods in photosensitive material by utilizing laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100376354C (en) * | 2004-12-29 | 2008-03-26 | 中国科学院理化技术研究所 | Method and system for fabricating multiple periodic microstructure for photosensitive material by laser |
| CN109890555A (en) * | 2016-11-01 | 2019-06-14 | 东洋制罐集团控股株式会社 | In the method that the surface of diamond forms the slot of fine periodicity structure |
-
2004
- 2004-12-31 CN CN 200420122526 patent/CN2787362Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100376354C (en) * | 2004-12-29 | 2008-03-26 | 中国科学院理化技术研究所 | Method and system for fabricating multiple periodic microstructure for photosensitive material by laser |
| CN109890555A (en) * | 2016-11-01 | 2019-06-14 | 东洋制罐集团控股株式会社 | In the method that the surface of diamond forms the slot of fine periodicity structure |
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