CN2741681Y - Ultravoilet surface processor - Google Patents
Ultravoilet surface processor Download PDFInfo
- Publication number
- CN2741681Y CN2741681Y CN 200420023569 CN200420023569U CN2741681Y CN 2741681 Y CN2741681 Y CN 2741681Y CN 200420023569 CN200420023569 CN 200420023569 CN 200420023569 U CN200420023569 U CN 200420023569U CN 2741681 Y CN2741681 Y CN 2741681Y
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- CN
- China
- Prior art keywords
- discharge tube
- ultraviolet
- processing device
- main casing
- surface processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Apparatus For Disinfection Or Sterilisation (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model discloses an ultraviolet surface processor which can be applied to sterilization, surface cleaning and surface modification in the fields of foods, electrics, chemical engineering, medicine, health care, beverage, agriculture, etc. The ultraviolet surface processor comprises a main shell body, a discharge tube arranged in the main shell body for emitting ultraviolet rays, and a worktable arranged under the discharge tube and provided with objects needing to be processed, wherein, the main shell body is provided with an air outlet, and the air outlet is connected with a catheter in order to lead cooled air in from an air inlet arranged in the main shell body again. The utility model can kill bacteria, eliminate stinky odor and remove pollution and can provide favorable processing effect.
Description
[technical field]
The utility model is about a kind of ultraviolet surface processing device, refers in particular to a kind of ultraviolet surface processing device with circulating cooling system.
[background technology]
Usually, in the manufacturing of the semiconductor device of needs raising rate of finished products, liquid crystal display cells, optical goods, need clean with the spot of removing surface of the work and then property, the tack of improving its surface its surface.Traditional technology is used wet-cleaned, imposes soup on the surface of work its spot with working surface is reacted, and under such traditional handicraft, needs the soup residue of working surface is cleaned after it reacts.In the process of cleaning, can produce new pollution.Produced the treatment technology of dry method optical surface on this basis.The progress of low pressure UV discharge tube exploitation because high-power superelevation is exerted oneself in recent years, and along with the ultra micro refinement of products such as microelectronics, in the manufacture process of products such as microelectronics, ultraprecise device, by the ozone of short wavelength ultraviolet and generation thereof the surface of its product is carried out that ultraprecise cleans or the then practicability of the dry type optical surface treatment technology of property, tack of improving its surface is made progress very soon.As the substitute technology in fluorine Lyons, the optical surface cleaning technique will replace the cleaning technique of wet method gradually.
Yet, in existing dry method is cleaned, still there is following problem:
The illumination of l, UV is little, can not concentrate a large amount of ultraviolet rays to carry out surface clean.
2, ozone concentration is low, can't give full play to the superpower oxidation of ozone.
3, ozone skewness, inhomogeneous to the effect of surface clean.
4, the heating temp height exerts an influence to process object.
5, the ozone discharge rate is big, will consider adverse effect that personnel's environment is on every side produced after the discharge, sometimes even need eliminate with measures such as activated carbon.
Therefore, need that development is a kind of can to overcome above shortcoming, effectively to article surface clean also can improve simultaneously its surface then cleaning of property, tack be set to current industry and be badly in need of.
[utility model content]
The purpose of this utility model provides a kind of ultraviolet surface processing device, because this device possesses ultraviolet surface treatment fundamental characteristics, so can be used in the ultraviolet widely surface treatment.
For realizing the purpose of this utility model, the utility model adopts following technical scheme: a kind of ultraviolet surface processing device, it includes main casing, exposure cell, be located in the exposure cell in order to launch the workbench that ultraviolet discharge tube, discharge tube below have the article that placement need handle, it is characterized in that: offer gas outlet and air inlet on the main casing, and be connected in series aspiration pump and cooling device by conduit between gas outlet and the air inlet, extract cooling out and import in the main casing again thereby will shine room air.This discharge tube can send the ultraviolet ray that wavelength is lower than 280NM.
Compared with prior art, owing to adopt cooling device, and then make ozone after cooling, to enter the exposure cell again, can reduce the temperature of discharge tube and irradiation room air, make the output variable of discharge tube maximize; Cooperate the settings such as gas outlet, conduit and air inlet on the main casing simultaneously, can make air circulation enter main casing, thereby odor concentration increases, treatment effect is increased, and reduce the amount that discharges ozone.
[description of drawings]
Fig. 1 is the utility model schematic perspective view.
Fig. 2 is the schematic diagram of main casing of the present utility model from another angle.
Fig. 3 is that the utility model A-A shown in Figure 1 is to cutaway view.
Fig. 4 is the utility model reflecting plate schematic diagram.
Fig. 5 is the schematic diagram of another embodiment of the utility model.
Fig. 6 is the utility model schematic flow sheet.
[embodiment]
As shown in Figures 1 and 2, the utility model ultraviolet ray surface processing device includes in main casing 1, the main casing 1 exposure cell 19 is set, 19 tops, exposure cell are provided with a reflecting plate 4, be equipped with on the reflecting plate 4 in order to launch the workbench 3 that ultraviolet a plurality of discharge tube 2, discharge tube 2 belows have the article that placement need handle, offer some air-vents 41 on the reflecting plate 4.Main casing 1 top offers gas outlet 11, the one side has another opening, it is air inlet 13, between gas outlet 11 and air inlet 13, link to each other by a conduit 5, aspiration pump 12 and cooling device 14, the ozone that produces in main casing 1 is after using, 11 extract out from the gas outlet, and deliver to cooling device 14 through aspiration pump 12 and conduit 5 parts, after the cooling again in air inlet 13 reenters exposure cell 19.Described workbench 3 is a conveyer belt that drives by the belt wheel at two ends, and main casing 1 both ends of the surface have opening can make the article that need to handle enter main casing 1.
See also Fig. 2 and shown in Figure 3, the discharge tube 2 in the above-mentioned main casing 1 is closely arranged, and above-mentioned discharge tube 2 can also send the ultraviolet ray that wavelength is lower than 280NM.
See also shown in Figure 3ly, on two end faces of main casing 1, have flexible baffle plate 6.The article of handling when needs are along with workbench 3 (consulting Fig. 1) when entering main casing 1, thereby can automatically baffle plate 6 be pushed open article enters and carries out surface treatment in the main casing 1, and after article entered, flexible baffle 6 blocked the end of main casing 1 automatically, prevented the ozone and the ultraviolet ray leakage that produce.
With reference to Fig. 5, described workbench 3 also can be the conveyer of a drawer type 16, and processed article can pass in and out the exposure cell with drawer.Aspiration pump 12 also is connected to one second exhaust outlet 15, and 19 gases that are drawn out of can be discharged part from the exposure cell.
Claims (6)
1. ultraviolet surface processing device, it includes main casing, exposure cell, be located in the exposure cell in order to launch the workbench that ultraviolet discharge tube, discharge tube below have the article that placement need handle, it is characterized in that: offer gas outlet and air inlet on the main casing, and be connected in series aspiration pump and cooling device by conduit between gas outlet and the air inlet.
2. ultraviolet surface processing device according to claim 1 is characterized in that: described discharge tube can send the ultraviolet ray that wavelength is lower than 280NM.
3. ultraviolet surface processing device according to claim 1 and 2 is characterized in that: described discharge tube top is provided with reflecting plate.
4. ultraviolet surface processing device according to claim 3 is characterized in that: offer some air-vents on the reflecting plate of described discharge tube top.
5. ultraviolet surface processing device according to claim 1 is characterized in that: aspiration pump is connected to one second exhaust outlet.
6. ultraviolet surface processing device according to claim 1 is characterized in that: described main casing two sides have flexible baffle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420023569 CN2741681Y (en) | 2004-06-09 | 2004-06-09 | Ultravoilet surface processor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420023569 CN2741681Y (en) | 2004-06-09 | 2004-06-09 | Ultravoilet surface processor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2741681Y true CN2741681Y (en) | 2005-11-23 |
Family
ID=35477155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420023569 Expired - Fee Related CN2741681Y (en) | 2004-06-09 | 2004-06-09 | Ultravoilet surface processor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2741681Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103234108A (en) * | 2013-05-03 | 2013-08-07 | 苏州金牛精密机械有限公司 | Safety protection type ultraviolet (UV) baffle |
| CN103316867A (en) * | 2013-06-03 | 2013-09-25 | 广州市金钟汽车零件制造有限公司 | Method and device for cleaning coating cover molds through vacuum ultraviolet lights |
| CN108015075A (en) * | 2017-03-02 | 2018-05-11 | 上海继伟制药设备有限公司 | Vessel-cleaning machine |
-
2004
- 2004-06-09 CN CN 200420023569 patent/CN2741681Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103234108A (en) * | 2013-05-03 | 2013-08-07 | 苏州金牛精密机械有限公司 | Safety protection type ultraviolet (UV) baffle |
| CN103316867A (en) * | 2013-06-03 | 2013-09-25 | 广州市金钟汽车零件制造有限公司 | Method and device for cleaning coating cover molds through vacuum ultraviolet lights |
| CN103316867B (en) * | 2013-06-03 | 2016-07-13 | 广州市金钟汽车零件制造有限公司 | A kind of vacuum ultraviolet cleans the device and method of application cover mold |
| CN108015075A (en) * | 2017-03-02 | 2018-05-11 | 上海继伟制药设备有限公司 | Vessel-cleaning machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |